CN220228035U - Initial pressure detection device of vacuum pressure control valve of semiconductor equipment - Google Patents
Initial pressure detection device of vacuum pressure control valve of semiconductor equipment Download PDFInfo
- Publication number
- CN220228035U CN220228035U CN202322071832.XU CN202322071832U CN220228035U CN 220228035 U CN220228035 U CN 220228035U CN 202322071832 U CN202322071832 U CN 202322071832U CN 220228035 U CN220228035 U CN 220228035U
- Authority
- CN
- China
- Prior art keywords
- controller
- control valve
- baffle
- rack
- pressure control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 18
- 238000001514 detection method Methods 0.000 title claims abstract description 13
- 238000007789 sealing Methods 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 2
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 230000035939 shock Effects 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002633 protecting effect Effects 0.000 description 1
Landscapes
- Details Of Valves (AREA)
Abstract
The utility model relates to the technical field of vacuum pressure control valve detection devices, in particular to an initial pressure detection device of a vacuum pressure control valve of semiconductor equipment, which comprises a device body, wherein the device body comprises a controller and a base, the upper end of the controller is provided with a pointer meter, one side of the controller is connected with a dry pump, the upper end of the dry pump is connected with a valve element, one side of the valve element is connected with a pressure meter, a display is arranged on the front surface of the controller, a first baffle plate and a second baffle plate are respectively arranged on two sides of the display, a first rack is arranged at the upper end of the first baffle plate, a second rack is arranged at the upper end of the second baffle plate, and gears are meshed between the first rack and the second rack, so that the opposite movement control of the two side baffles can be realized, the display is convenient to carry out sealing protection, the shock absorption and protection effects on the whole bottom of the device can be realized, and the influence of severe vibration and noise in the using process of the device on the device and a user can be reduced.
Description
Technical Field
The utility model relates to the technical field of vacuum pressure control valve detection devices, in particular to an initial pressure detection device of a vacuum pressure control valve of semiconductor equipment.
Background
A vacuum pump pressure valve is one of the key components in a vacuum system for regulating and controlling the pressure and gas flow of a pressure valve in the vacuum system, and is usually installed in vacuum pipelines of a vacuum pump and a vacuum chamber, and gas can be controlled to enter and exit the vacuum system by regulating the opening degree of the valve;
the pressure in the cavity of the semiconductor device is controlled by a vacuum pressure control valve, the initial pressure of the vacuum pressure control valve needs to be adjusted, the pressure in the cavity of the device cannot be influenced at a certain pressure value, and the pressure is in a certain stable range during production;
in the prior art, professional pressure detection devices are generally adopted for detecting the vacuum pressure control valve, but the existing detection devices have the problems of vibration and larger noise during operation, resonance and noise generated during the use process not only affect the service life of equipment, but also enable operators to use the device not to feel comfortable enough, the using experience and safety of the device are reduced, meanwhile, the existing detection devices mostly do not have the protection capability for a display in a controller, the display of the device is directly exposed outside during the non-use period, and is easy to be polluted by stains or damaged by external force, so that the safety of the device and the service life of the display are affected, and therefore, the device needs to be upgraded and modified on the basis of the prior art to overcome the problems and the defects.
Disclosure of Invention
The utility model aims to provide an initial pressure detection device of a vacuum pressure control valve of a semiconductor device, so as to solve the problems in the background art.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides an initial pressure detection device of semiconductor equipment vacuum pressure control valve, includes the device body, the device body contains controller and base, the controller upper end is equipped with the pointer table, controller one side is connected with dry pump and dry pump upper end is connected with the valve member, valve member one side is connected with the manometer, the controller openly is provided with display and display both sides and is provided with first baffle and second baffle respectively, first baffle upper end is equipped with first rack, second baffle upper end is equipped with the second rack, the meshing has the gear between first rack and the second rack, controller and dry pump bottom are equipped with the mounting panel, the base upper end is equipped with gas receiver and gas receiver top cover and is equipped with the rubber sleeve, the rubber sleeve center is provided with connector and fixes in the mounting panel bottom.
Further, a sealing strip is arranged on the inner side of the first baffle, a sealing groove is arranged on the inner side of the second baffle, and the sealing strip is correspondingly inserted into the sealing groove.
Further, the outer end of the gear is fixedly connected with a worm wheel, the worm wheel is positioned at the outer side of the controller, one side of the worm wheel is meshed with a worm, and the top of the worm is fixedly provided with a knob.
Further, a rubber pad is arranged at the bottom of the base.
Furthermore, a valve core is arranged on one side of the air cylinder in a conducting way.
Further, the gas receiver is internally provided with a center column, and the center column is positioned at the lower end of the rubber sleeve.
Compared with the prior art, the utility model has the beneficial effects that:
1. according to the utility model, the first baffle, the second baffle, the sealing strip, the sealing groove, the first rack, the second rack, the gear, the worm wheel and the worm are arranged in the device, so that the opposite movement control of the first baffle and the second baffle can be realized, the sealing protection of the display is facilitated, the problem that the display is damaged or polluted during the non-use period is avoided, and the safety of equipment is improved.
2. The base, the rubber pad, the air cylinder, the valve core, the rubber sleeve, the connector and the center column are arranged in the device, so that the damping and protecting effects on the whole bottom of the device can be realized, the influence of severe vibration and noise in the using process of the device on the device and a user can be reduced, and the practicability and the stability of the device can be improved.
Specific embodiments of the utility model are disclosed in detail below with reference to the following description and drawings, indicating the manner in which the principles of the utility model may be employed. It should be understood that the embodiments of the utility model are not limited in scope thereby. The embodiments of the utility model include many variations, modifications and equivalents within the spirit and scope of the appended claims.
Drawings
The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model. In the drawings:
fig. 1 is a schematic view showing an overall structure of an initial pressure detecting device of a vacuum pressure control valve of a semiconductor device according to the present utility model;
FIG. 2 is a cross-sectional view of a controller structure of an initial pressure detecting device of a vacuum pressure control valve of a semiconductor device according to the present utility model;
FIG. 3 is an exploded view of a baffle plate structure of an initial pressure detecting device of a vacuum pressure control valve of a semiconductor device according to the present utility model;
fig. 4 is an exploded view of a base structure of an initial pressure detecting device of a vacuum pressure control valve of a semiconductor device according to the present utility model.
In the figure: 1. a device body; 2. a controller; 3. a pointer table; 4. a dry pump; 5. a valve member; 6. a pressure gauge; 7. a display; 8. a first baffle; 9. a second baffle; 10. a sealing strip; 11. sealing grooves; 12. a first rack; 13. a second rack; 14. a gear; 15. a worm wheel; 16. a worm; 17. a knob; 18. a mounting plate; 19. a base; 20. a rubber pad; 21. an air cylinder; 22. a valve core; 23. a rubber sleeve; 24. a connector; 25. and a center column.
Detailed Description
The utility model is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.
As shown in fig. 1-4, the initial pressure detection device for designing a vacuum pressure control valve of a semiconductor device provided by the embodiment comprises a device body 1, wherein the device body 1 comprises a controller 2 and a base 19, the upper end of the controller 2 is provided with a pointer table 3, one side of the controller 2 is connected with a dry pump 4, the upper end of the dry pump 4 is connected with a valve element 5, one side of the valve element 5 is connected with a pressure gauge 6, a display 7 is arranged on the front surface of the controller 2, a first baffle 8 and a second baffle 9 are respectively arranged on two sides of the display 7, a first rack 12 is arranged on the upper end of the first baffle 8, a second rack 13 is arranged on the upper end of the second baffle 9, a gear 14 is meshed between the first rack 12 and the second rack 13, a mounting plate 18 is arranged at the bottoms of the controller 2 and the dry pump 4, a gas storage cylinder 21 is arranged on the upper end of the base 19, a rubber sleeve 23 is sleeved at the top of the gas storage cylinder 21, a connector 24 is arranged at the center of the rubber sleeve 23, and the connector 24 is fixed at the bottom of the mounting plate 18.
Preferably, the inside sealing strip 10 that is equipped with of first baffle 8, the second baffle 9 inboard is provided with seal groove 11, sealing strip 10 and seal groove 11 correspond pegging graft, gear 14 outer end fixedly connected with worm wheel 15, worm wheel 15 is located the controller 2 outside and one side meshing has worm 16, worm 16 top is fixed to be provided with knob 17, be convenient for increase the leakproofness between first baffle 8 and the second baffle 9 through sealing strip 10 and seal groove 11, be convenient for carry out rotary control and locking to gear 14 through worm wheel 15 and worm 16 cooperation, avoid it to appear reversing.
Preferably, the bottom of the base 19 is provided with a rubber pad 20, one side of the air cylinder 21 is communicated and provided with a valve core 22, a central column 25 is arranged inside the air cylinder 21, the central column 25 is positioned at the lower end of the rubber sleeve 23, the base 19 is convenient to install through the rubber pad 20, the air in the air cylinder 21 is convenient to increase or decrease through the valve core 22, and the rubber sleeve 23 is convenient to support through the central column 25.
The application principle and the application flow of the utility model are as follows: when the device is used, the valve element 5 is connected with the dry pump 4, the pressure gauge 6 is arranged on the dry pump 4, the dry pump 4 is opened to vacuumize the valve element 5, the valve element 5 is fully closed by the controller 2, when the pressure gauge 6 reaches the required pressure, the valve element 5 reaches a certain step number, the pressure gauge 6 can be observed to change to the required set value, the knob 17 can be rotated during the trial period to control the worm 16 and the worm wheel 15 to rotate, the worm wheel 15 drives the gear 14 to rotate, the gear 14 respectively pushes the first rack 12 and the second rack 13 to move oppositely, the two groups of racks respectively drive the first baffle 8 and the second baffle 9 to move oppositely, at the moment, the first baffle 8 and the second baffle 9 are respectively contracted to two sides of the controller 2 and display 7 is displayed, the knob 17 is reversed during the non-use period to reset the two groups of baffles, at the moment, the display 7 can be effectively protected, the display 7 is prevented from being damaged by external force damage or dust entering, the whole running process of the device is prevented from occurring, the vibration is transmitted to the rubber sleeve 23 through the 18, the rubber sleeve 21 is arranged on the air storage cylinder 21, the air cylinder 21 and the mounting plate 19 is effectively buffered by the air cylinder and the mounting plate 19.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "provided," "connected," and the like are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to specific circumstances.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.
Claims (6)
1. An initial pressure detection device of a vacuum pressure control valve of a semiconductor device is characterized in that: including device body (1), device body (1) contains controller (2) and base (19), controller (2) upper end is equipped with pointer table (3), controller (2) one side is connected with dry pump (4) and dry pump (4) upper end is connected with valve member (5), valve member (5) one side is connected with manometer (6), controller (2) openly is provided with display (7) and display (7) both sides are provided with first baffle (8) and second baffle (9) respectively, first baffle (8) upper end is equipped with first rack (12), second baffle (9) upper end is equipped with second rack (13), the meshing has gear (14) between first rack (12) and second rack (13), controller (2) and dry pump (4) bottom are equipped with mounting panel (18), base (19) upper end is equipped with gas receiver (21) and gas receiver (21) top cover is equipped with rubber sleeve (23), rubber sleeve (23) center is provided with connector (24) and is fixed in mounting panel (18) bottom.
2. An initial pressure detecting apparatus of a vacuum pressure control valve for a semiconductor device according to claim 1, wherein: the inner side of the first baffle (8) is provided with a sealing strip (10), the inner side of the second baffle (9) is provided with a sealing groove (11), and the sealing strip (10) is correspondingly inserted into the sealing groove (11).
3. An initial pressure detecting apparatus of a vacuum pressure control valve for a semiconductor device according to claim 1, wherein: the gear (14) outer end fixedly connected with worm wheel (15), worm wheel (15) are located the outside of controller (2) and one side meshing has worm (16), worm (16) top is fixed to be provided with knob (17).
4. An initial pressure detecting apparatus of a vacuum pressure control valve for a semiconductor device according to claim 1, wherein: a rubber pad (20) is arranged at the bottom of the base (19).
5. An initial pressure detecting apparatus of a vacuum pressure control valve for a semiconductor device according to claim 1, wherein: one side of the air cylinder (21) is communicated with a valve core (22).
6. An initial pressure detecting apparatus of a vacuum pressure control valve for a semiconductor device according to claim 1, wherein: the inside of gas receiver (21) is provided with center post (25), center post (25) are located rubber sleeve (23) lower extreme.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322071832.XU CN220228035U (en) | 2023-08-03 | 2023-08-03 | Initial pressure detection device of vacuum pressure control valve of semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322071832.XU CN220228035U (en) | 2023-08-03 | 2023-08-03 | Initial pressure detection device of vacuum pressure control valve of semiconductor equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220228035U true CN220228035U (en) | 2023-12-22 |
Family
ID=89175913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322071832.XU Active CN220228035U (en) | 2023-08-03 | 2023-08-03 | Initial pressure detection device of vacuum pressure control valve of semiconductor equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220228035U (en) |
-
2023
- 2023-08-03 CN CN202322071832.XU patent/CN220228035U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN220228035U (en) | Initial pressure detection device of vacuum pressure control valve of semiconductor equipment | |
| CN113267294A (en) | Sealing device for detecting air tightness of automobile parts | |
| CN116212298A (en) | Fire hydrant water pressure detection device | |
| CN215952850U (en) | TPMS information acquisition hardware monitoring devices | |
| CN114486233A (en) | Breather valve checking table | |
| CN114235303A (en) | Electric pile air tightness detection control device | |
| CN209430657U (en) | A kind of damping device of Architectural Equipment | |
| CN112460480A (en) | Liquid oxygen storage tank valve monitoring safety device | |
| CN114295342B (en) | Intelligent detection device and detection method for valve positioner | |
| CN220932300U (en) | Ice making box cover pipeline detection device | |
| CN220662929U (en) | Time pressure filling system | |
| CN220909950U (en) | Inflator pump mounting box | |
| CN112304494A (en) | Gas circuit assembly and gas pressure calibrator | |
| CN219139938U (en) | Leakless ventilating and exhausting check valve | |
| CN213301667U (en) | Breather valve moving test bench | |
| CN213364120U (en) | Oil-immersed transformer body pressure monitoring device | |
| CN221006655U (en) | Portable pressure transmitter correcting unit | |
| CN220623544U (en) | Airtight leak detector of medical instrument | |
| CN218524290U (en) | Pressure gauge mounting valve assembly | |
| CN217738631U (en) | Detection device for fire sprinkler head | |
| CN214299288U (en) | Energy-saving type pressure-variable adsorption air separation nitrogen and oxygen production load adaptation and regulation system | |
| CN219296126U (en) | Constant temperature and humidity showcase with sealing structure | |
| CN219248263U (en) | High precision dew point instrument | |
| CN220872009U (en) | Battery pack air tightness detection device | |
| CN117387725B (en) | High-precision ultrasonic liquid level meter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |