CN220224305U - Quick cooling device of vacuum ion coating equipment - Google Patents
Quick cooling device of vacuum ion coating equipment Download PDFInfo
- Publication number
- CN220224305U CN220224305U CN202321828093.8U CN202321828093U CN220224305U CN 220224305 U CN220224305 U CN 220224305U CN 202321828093 U CN202321828093 U CN 202321828093U CN 220224305 U CN220224305 U CN 220224305U
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- ion plating
- fixed mounting
- plating equipment
- vacuum
- pipe
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- 238000001816 cooling Methods 0.000 title claims abstract description 62
- 239000011248 coating agent Substances 0.000 title claims description 17
- 238000000576 coating method Methods 0.000 title claims description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 87
- 238000007733 ion plating Methods 0.000 claims abstract description 57
- 239000007789 gas Substances 0.000 claims abstract description 24
- 238000003860 storage Methods 0.000 claims abstract description 23
- 230000007246 mechanism Effects 0.000 claims abstract description 18
- 230000001502 supplementing effect Effects 0.000 claims abstract description 4
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 29
- 239000013589 supplement Substances 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 29
- 238000001914 filtration Methods 0.000 abstract description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 3
- 239000012535 impurity Substances 0.000 abstract description 3
- 239000001301 oxygen Substances 0.000 abstract description 3
- 229910052760 oxygen Inorganic materials 0.000 abstract description 3
- 150000002500 ions Chemical class 0.000 description 17
- 238000000034 method Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 6
- 238000007789 sealing Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000153 supplemental effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
The utility model relates to the technical field of quick cooling of vacuum ion plating equipment, and discloses a quick cooling device of the vacuum ion plating equipment, which comprises a placing rack and a placing plate, wherein the top of the placing rack is provided with the ion plating equipment, the top of the placing plate is provided with a cooling mechanism, the top of the placing plate is provided with a gas collecting mechanism, nitrogen is added into a nitrogen storage tank through a nitrogen supplementing port, a vacuum pump is started to form a cooling circulation system in the ion plating equipment, redundant oxygen and impurities in the ion plating equipment are filtered under the cooperation of a filtering tank, the nitrogen heated in the ion plating equipment is subjected to quick cooling under the cooperation of a first quick cooling tank and a second quick cooling tank, and redundant nitrogen is conveniently discharged into a nitrogen collecting box to be collected when the internal air pressure of the ion plating equipment is too high through an air inlet, a valve body and an air outlet, so that the influence on the subsequent quick cooling is avoided.
Description
Technical Field
The utility model relates to the technical field of quick cooling of vacuum ion coating equipment, in particular to a quick cooling device of vacuum ion coating equipment.
Background
Ion plating is a method of partially ionizing a gas or vaporized substance by a gas discharge under vacuum conditions and depositing the vaporized substance or a reactant thereof on a substrate under bombardment of the gas ions or vaporized substance ions.
The utility model belongs to a vacuum ion coating equipment quick cooling device described in a patent net publication No. CN 218812039U, and the vacuum ion coating equipment quick cooling device comprises a furnace body (1), and is characterized in that one end of an upper quick cooling pipe (2) is fixed to the top of the furnace body (1) by bolts, then the upper quick cooling pipe (2), an upper quick cooling tank (3) and a transition pipe (4) are sequentially connected to a filtering tank (5) by clamps, the filtering tank (5) and the transition pipe (4) are sequentially connected to the transition pipe (4), the other end of the transition pipe (4) is connected to a lower quick cooling tank (8), the other end of the lower quick cooling tank (8) is connected to the bottom of the furnace body by a lower quick cooling pipe (7), a certain amount of nitrogen is introduced into the furnace, and the vacuum pump (6) is started to form a gas cooling circulation system. The utility model has simple structure, convenient installation and high cooling speed, can effectively reduce the production cost and improve the production efficiency. "
With respect to the above description, the applicant believes that the following problems exist:
in the using process, a certain amount of nitrogen is required to be introduced into the furnace, the vacuum pump is started to form a gas cooling circulation system, but in the actual operation process, the nitrogen is not convenient to be added into the furnace body due to the lack of a storage device for the nitrogen, so that the subsequent rapid cooling work is inconvenient, and when the air pressure in the furnace body is too high, the redundant nitrogen cannot be discharged and collected, so that the rapid cooling work of the furnace body is influenced, the practicability of the device is reduced, and the rapid cooling device of the vacuum ion plating equipment is required to be improved to solve the problems.
Disclosure of Invention
The utility model aims to provide a quick cooling device of vacuum ion coating equipment, which aims to solve the problems in the background technology.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the quick cooling device of the vacuum ion plating equipment comprises a placing rack and a placing plate, wherein the ion plating equipment is arranged at the top of the placing rack, a cooling mechanism is arranged at the top of the placing plate, and a gas collecting mechanism is arranged at the top of the placing plate;
the cooling mechanism comprises a supplementary component and a vacuum component, wherein the supplementary component is arranged at the top of the placing plate, and the vacuum component is arranged at the top of the placing plate.
Preferably, the supplementary subassembly includes first intake pipe, first intake pipe fixed mounting is at ion plating equipment's top, the one end fixed mounting that ion plating equipment was kept away from to first intake pipe has first quick cooling tank, the one end fixed mounting that first intake pipe was kept away from to first quick cooling tank has first outlet duct, the one end fixed mounting that first quick cooling tank was kept away from to first outlet duct has the nitrogen gas storage tank, the outside of nitrogen gas storage tank is provided with nitrogen gas replenishment mouth, the top fixed mounting of placing the board has the supporting shoe, is convenient for to the replenishment work of nitrogen gas.
Preferably, the top of supporting shoe is seted up flutedly, just nitrogen gas storage tank fixed mounting is in the recess, the support of the nitrogen gas storage tank of being convenient for.
Preferably, the vacuum assembly comprises a first filter pipe, first filter pipe fixed mounting is in the outside of nitrogen gas storage tank, the one end fixed mounting that nitrogen gas storage tank was kept away from to first filter pipe has the filter tank, the outside fixed mounting that filters the tank has the second filter pipe, the one end fixed mounting that filters the tank is kept away from to the second filter pipe has the vacuum pump, vacuum pump fixed mounting is at the top of placing the board, the outside fixed mounting of vacuum pump has the second intake pipe, the one end fixed mounting that the vacuum pump was kept away from to the second intake pipe has the second cold jar, the one end fixed mounting that the second intake pipe was kept away from to the second cold jar has the second outlet duct, the one end and the bottom fixed mounting of ion plating equipment of the second cold jar are kept away from to the second outlet duct, the rapid cooling work to ion plating equipment of being convenient for.
Preferably, the top of rack has seted up logical groove, just the second outlet duct passes logical groove, the work of being convenient for second outlet duct and ion plating equipment's connection.
Preferably, the gas collecting mechanism comprises a mounting plate, the mounting plate is fixedly arranged outside the ion plating equipment, a sealing gasket is arranged inside the mounting plate, a connecting pipe is fixedly arranged outside the ion plating equipment, one end of the connecting pipe, which is far away from the ion plating equipment, is fixedly provided with a gas inlet, the outer part of the gas inlet is fixedly provided with a valve body, the bottom of the valve body is fixedly provided with a gas outlet, and the bottom of the gas outlet is fixedly provided with a nitrogen collecting box, so that redundant nitrogen in the ion plating equipment is conveniently discharged and collected.
Preferably, the through hole is formed in the mounting plate, and the connecting pipe penetrates through the through hole, so that the connecting pipe and the ion plating equipment can be connected conveniently.
Compared with the prior art, the utility model provides a quick cooling device of vacuum ion coating equipment, which has the following beneficial effects:
1. this quick cold device of vacuum ion coating equipment, in the use, through the cooling body who sets up, through the nitrogen gas replenishment mouth that sets up, inside adding nitrogen gas storage tank with nitrogen gas, through opening the vacuum pump to form the inside cooling circulation system of ion coating equipment, under the cooperation of filter tank, filter the inside unnecessary oxygen of ion coating equipment and impurity, under the cooperation of first quick cold tank and second cold tank, carry out quick cold work to the nitrogen gas after the inside heating of ion coating equipment, thereby increased the practicality of device.
2. This quick cold device of vacuum ion coating equipment, in the use, through the gas collecting mechanism that sets up, through the mounting panel that sets up, be convenient for be connected connecting pipe and ion coating equipment, under sealed cooperation of filling up, avoid revealing of nitrogen gas, through air inlet, valve body and the gas outlet that set up, be convenient for when the inside atmospheric pressure of ion coating equipment is too high, collect unnecessary nitrogen gas to nitrogen gas collecting box is inside to avoid causing the influence to the quick cold work of follow-up vacuum ion coating equipment.
Drawings
For a clearer description of the technical solutions of the embodiments of the present utility model, the drawings that are needed in the description of the embodiments will be briefly described below, it will be apparent that the drawings in the description below are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art:
FIG. 1 is a schematic diagram of the front structure of the present utility model;
FIG. 2 is a schematic structural view of the rear view of the present utility model;
FIG. 3 is a schematic illustration of the structure of the supplemental assembly of the present utility model;
FIG. 4 is a schematic view of a vacuum assembly according to the present utility model;
FIG. 5 is a schematic diagram of the structure of the gas collecting mechanism of the present utility model.
In the figure: 1. a placing rack; 2. placing a plate; 3. ion plating equipment; 4. a cooling mechanism; 41. a supplemental component; 411. a first air inlet pipe; 412. a first rapid cooling tank; 413. a first air outlet pipe; 414. a nitrogen storage tank; 415. a nitrogen supplementing port; 416. a support block; 42. a vacuum assembly; 421. a first filter tube; 422. a filter tank; 423. a second filter tube; 424. a vacuum pump; 425. a second air inlet pipe; 426. a second cooling tank; 427. a second air outlet pipe; 5. a gas collecting mechanism; 501. a mounting plate; 502. a sealing gasket; 503. a connecting pipe; 504. an air inlet; 505. a valve body; 506. an air outlet; 507. and a nitrogen collection box.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
Embodiment one:
referring to fig. 1-4, the present utility model provides a technical solution: the quick cooling device of the vacuum ion plating equipment comprises a placing rack 1 and a placing plate 2, wherein the ion plating equipment 3 is arranged at the top of the placing rack 1, a cooling mechanism 4 is arranged at the top of the placing plate 2, and a gas collecting mechanism 5 is arranged at the top of the placing plate 2;
the cooling mechanism 4 includes a supplementary assembly 41 and a vacuum assembly 42, the supplementary assembly 41 being disposed on top of the placement plate 2, and the vacuum assembly 42 being disposed on top of the placement plate 2.
Further, the supplementary subassembly 41 includes first intake pipe 411, first intake pipe 411 fixed mounting is at the top of ion plating equipment 3, the one end fixed mounting that ion plating equipment 3 was kept away from to first intake pipe 411 has first quick cooling tank 412, the one end fixed mounting that first intake pipe 411 was kept away from to first quick cooling tank 412 has first outlet duct 413, the one end fixed mounting that first outlet duct 413 kept away from first quick cooling tank 412 has nitrogen gas storage tank 414, the outside of nitrogen gas storage tank 414 is provided with nitrogen gas and supplements mouthful 415, the top fixed mounting of placing plate 2 has supporting shoe 416, be convenient for to the replenishment work of nitrogen gas.
Further, a groove is formed in the top of the supporting block 416, and the nitrogen storage tank 414 is fixedly installed in the groove, so that the nitrogen storage tank 414 is supported conveniently.
Further, the vacuum assembly 42 includes a first filter tube 421, the first filter tube 421 is fixedly installed outside the nitrogen storage tank 414, a filter tank 422 is fixedly installed at one end of the first filter tube 421 away from the nitrogen storage tank 414, a second filter tube 423 is fixedly installed at the outer portion of the filter tank 422, a vacuum pump 424 is fixedly installed at one end of the second filter tube 423 away from the filter tank 422, a second air inlet pipe 425 is fixedly installed at the top of the placing plate 2, a second air inlet pipe 425 is fixedly installed at the outer portion of the vacuum pump 424, a second air outlet pipe 427 is fixedly installed at one end of the second air inlet pipe 425 away from the vacuum pump 424, a second air outlet pipe 427 is fixedly installed at one end of the second air outlet pipe 426 away from the second air inlet pipe 425, and one end of the second air outlet pipe 427 away from the second air outlet pipe 426 is fixedly installed at the bottom of the ion plating equipment 3, so that rapid cooling operation of the ion plating equipment 3 is facilitated.
Further, a through groove is formed in the top of the placement frame 1, and the second air outlet pipe 427 penetrates through the through groove, so that the connection work of the second air outlet pipe 427 and the ion plating equipment 3 is facilitated.
Embodiment two:
referring to fig. 5, and further obtaining with reference to the first embodiment, the gas collecting mechanism 5 includes a mounting plate 501, the mounting plate 501 is fixedly mounted on the outside of the ion plating device 3, a sealing pad 502 is disposed in the mounting plate 501, a connecting pipe 503 is fixedly mounted on the outside of the ion plating device 3, an air inlet 504 is fixedly mounted on one end of the connecting pipe 503 away from the ion plating device 3, a valve body 505 is fixedly mounted on the outside of the air inlet 504, a gas outlet 506 is fixedly mounted on the bottom of the valve body 505, and a nitrogen collecting box 507 is fixedly mounted on the bottom of the gas outlet 506, so that redundant nitrogen in the ion plating device 3 is conveniently discharged and collected.
Further, a through hole is formed in the mounting plate 501, and the connecting pipe 503 passes through the through hole, so that the connecting pipe 503 and the ion plating device 3 can be connected conveniently.
In the actual operation process, when the device is used, nitrogen is added into the nitrogen storage tank 414 through the nitrogen supplementing port 415, the vacuum pump 424 is started, so that a cooling circulation system inside the ion plating equipment 3 is formed, redundant oxygen and impurities inside the ion plating equipment 3 are filtered under the cooperation of the filtering tank 422, the nitrogen after being heated inside the ion plating equipment 3 is rapidly cooled under the cooperation of the first-speed cooling tank 412 and the second-speed cooling tank 426, the practicability of the device is improved, the connecting pipe 503 is conveniently connected with the ion plating equipment 3 through the mounting plate 501, the leakage of the nitrogen is avoided under the cooperation of the sealing gasket 502, the redundant nitrogen is conveniently discharged into the nitrogen collecting box 507 to be collected when the internal air pressure of the ion plating equipment 3 is too high, and the influence on the rapid cooling operation of the subsequent vacuum ion plating equipment is avoided.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
Claims (7)
1. The utility model provides a quick cold charge of vacuum ion coating equipment is put, includes rack (1) and places board (2), its characterized in that: the top of the placing rack (1) is provided with ion plating equipment (3), the top of the placing plate (2) is provided with a cooling mechanism (4), and the top of the placing plate (2) is provided with a gas collecting mechanism (5);
the cooling mechanism (4) comprises a supplementary component (41) and a vacuum component (42), wherein the supplementary component (41) is arranged on the top of the placing plate (2), and the vacuum component (42) is arranged on the top of the placing plate (2).
2. The rapid cooling device for a vacuum ion plating apparatus according to claim 1, wherein: supplementary subassembly (41) are including first intake pipe (411), first intake pipe (411) fixed mounting is at the top of ion plating equipment (3), the one end fixed mounting that ion plating equipment (3) was kept away from to first intake pipe (411) has first quick cooling tank (412), the one end fixed mounting that first intake pipe (411) was kept away from to first quick cooling tank (412) has first outlet duct (413), the one end fixed mounting that first quick cooling tank (412) was kept away from to first outlet duct (413) has nitrogen gas storage tank (414), the outside of nitrogen gas storage tank (414) is provided with nitrogen gas and supplements mouth (415), the top fixed mounting of placing board (2) has supporting shoe (416), is convenient for to the work of supplementing of nitrogen gas.
3. The rapid cooling device for a vacuum ion plating apparatus according to claim 2, wherein: the top of supporting shoe (416) is seted up flutedly, just nitrogen gas storage tank (414) fixed mounting is in the recess, the support of nitrogen gas storage tank (414) of being convenient for.
4. The rapid cooling device for a vacuum ion plating apparatus according to claim 2, wherein: the vacuum assembly (42) comprises a first filter pipe (421), the outside at nitrogen gas storage tank (414) of first filter pipe (421) fixed mounting, one end fixed mounting that nitrogen gas storage tank (414) was kept away from to first filter pipe (421) has filter tank (422), the outside fixed mounting that filter tank (422) has second filter pipe (423), one end fixed mounting that filter tank (422) was kept away from to second filter pipe (423) has vacuum pump (424), vacuum pump (424) fixed mounting is at the top of placing board (2), the outside fixed mounting of vacuum pump (424) has second intake pipe (425), one end fixed mounting that vacuum pump (424) was kept away from to second intake pipe (425) has second air outlet pipe (427), one end fixed mounting that second intake pipe (425) was kept away from to second air outlet pipe (426), one end that second air outlet pipe (427) kept away from second air outlet pipe (426) and the bottom fixed mounting of ion plating equipment (3) are convenient for to the cold work of ion plating equipment (3).
5. The rapid cooling device for vacuum ion plating equipment according to claim 4, wherein: the top of the placing frame (1) is provided with a through groove, and the second air outlet pipe (427) penetrates through the through groove, so that the second air outlet pipe (427) and the ion plating equipment (3) can be connected conveniently.
6. The rapid cooling device for vacuum ion plating equipment according to claim 4, wherein: the utility model provides a gas collection mechanism (5) includes mounting panel (501), mounting panel (501) fixed mounting is in the outside of ion plating equipment (3), the inside of mounting panel (501) is provided with sealed pad (502), the outside fixed mounting of ion plating equipment (3) has connecting pipe (503), the one end fixed mounting that ion plating equipment (3) was kept away from to connecting pipe (503) has air inlet (504), the outside fixed mounting of air inlet (504) has valve body (505), the bottom fixed mounting of valve body (505) has gas outlet (506), the bottom fixed mounting of gas outlet (506) has nitrogen gas collecting box (507), is convenient for discharge and collect the unnecessary nitrogen gas of ion plating equipment (3) inside.
7. The rapid cooling device for vacuum ion plating equipment according to claim 6, wherein: through holes are formed in the mounting plate (501), and the connecting pipe (503) penetrates through the through holes, so that the connecting pipe (503) and the ion plating equipment (3) can be connected conveniently.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321828093.8U CN220224305U (en) | 2023-07-12 | 2023-07-12 | Quick cooling device of vacuum ion coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321828093.8U CN220224305U (en) | 2023-07-12 | 2023-07-12 | Quick cooling device of vacuum ion coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220224305U true CN220224305U (en) | 2023-12-22 |
Family
ID=89197419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321828093.8U Active CN220224305U (en) | 2023-07-12 | 2023-07-12 | Quick cooling device of vacuum ion coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220224305U (en) |
-
2023
- 2023-07-12 CN CN202321828093.8U patent/CN220224305U/en active Active
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