CN220221775U - Dust-free storage device for silicon carbide wafers - Google Patents
Dust-free storage device for silicon carbide wafers Download PDFInfo
- Publication number
- CN220221775U CN220221775U CN202321978823.2U CN202321978823U CN220221775U CN 220221775 U CN220221775 U CN 220221775U CN 202321978823 U CN202321978823 U CN 202321978823U CN 220221775 U CN220221775 U CN 220221775U
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- China
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- fixedly connected
- dust
- silicon carbide
- placing case
- storage device
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- 235000012431 wafers Nutrition 0.000 title claims abstract description 41
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 37
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 28
- 238000003860 storage Methods 0.000 title claims abstract description 25
- 244000309464 bull Species 0.000 claims description 5
- 239000000428 dust Substances 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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- Cleaning In General (AREA)
Abstract
The utility model relates to the field of wafer production equipment and discloses a dust-free storage device for silicon carbide wafers, which comprises a placement box, wherein a conveyor belt is arranged in the middle of the placement box, the front side and the rear side of the placement box are fixedly connected with shells, the bottoms of the inner walls of the shells are fixedly connected with servo motors, the output ends of the servo motors are fixedly connected with threaded rods, the periphery of each threaded rod is in threaded connection with a threaded block, the rear side of each threaded block is fixedly connected with a movable plate, the other end of each movable plate is fixedly connected with another threaded block, the middle of one threaded block is in sliding connection with a sliding rod, and the left side of the placement box is fixedly connected with an electric push rod. According to the utility model, the brush hair can be attached to the surface of the filter screen through the cooperation of the structures such as the fan, the brush hair, the filter screen and the double-headed motor, so that the filter screen is cleaned, and the filter screen is prevented from being blocked by dust after being used for a long time, and the working efficiency of the fan is prevented from being influenced.
Description
Technical Field
The utility model relates to the field of wafer production equipment, in particular to a dust-free storage device for silicon carbide wafers.
Background
Silicon carbide wafers, also called silicon carbide single crystal wafers, are cut, ground and polished along a specific crystallization direction to obtain a sheet-like single crystal material, and in the production process of the wafers, the wafers inevitably need to be stored.
According to the dust-free strorage device of carborundum wafer disclosed in chinese patent publication No. CN213010074U, including first conveyer belt and apotheca, the top of first conveyer belt is equipped with brush roller and blowpipe, is equipped with first lift conveyor and storage rack in the apotheca, and the apotheca is equipped with the inlet port, first conveyer belt pass through the inlet port with the one end of first lift conveyor is connected, and first lift conveyor's the other end is connected with the one end of storage rack, and the apotheca has a plurality of to deposit the chamber, and lift conveyor liftable is connected with the chamber of depositing, although makes carborundum wafer can not fall on the dust, but back filter equipment can be blockked up by dust impurity for a long time, influences the fan work, need clear up and just can use, and is more loaded down with trivial details, proposes a carborundum wafer dust-free strorage device for this reason and solves above-mentioned problem.
Disclosure of Invention
In order to overcome the defects, the utility model provides a dust-free storage device for silicon carbide wafers, and aims to solve the problem that a filtering device is easy to be blocked by dust impurities after being used for a long time.
In order to achieve the above purpose, the present utility model adopts the following technical scheme: the utility model provides a dustless strorage device of carborundum wafer, includes places the case, place the case middle part and be provided with the conveyer belt, the equal fixedly connected with shell of front and back both sides of placing the case, the inner wall bottom fixedly connected with servo motor of shell, servo motor's output fixedly connected with threaded rod, the periphery threaded connection of threaded rod has a screw thread piece, the rear side fixedly connected with fly leaf of screw thread piece, the other end fixedly connected with of fly leaf another screw thread piece, one of them the middle part sliding connection of screw thread piece has the slide bar, the left side fixedly connected with electric putter of placing the case, electric putter's the other end fixedly connected with push pedal, the inner wall front side fixedly connected with connecting block of placing the case, the other end fixedly connected with frame of connecting block, the middle part fixedly connected with stud motor of frame, an output fixedly connected with fan blade of stud motor, the other output fixedly connected with connecting rod of stud motor, the other end fixedly connected with bull stick, the rear side fixedly connected with brush hair of bull stick, the front side fixedly connected with filter screen of placing the case.
As a further description of the above technical solution:
the middle part fixedly connected with supporting seat of placing the case, the middle part of supporting seat rotates and is connected with the movable block, the other end of movable block rotates and is connected with the dwang, the right side of placing the case rotates and is connected with the commentaries on classics board, another supporting seat of bottom fixedly connected with of commentaries on classics board, the other end of dwang rotates and is connected at one of them supporting seat middle part, the middle part of dwang is provided with the spacing groove, the middle part fixedly connected with base of placing the case, the middle part of base rotates and is connected with the bracing piece, the other end sliding connection of bracing piece is at the spacing groove middle part.
As a further description of the above technical solution:
the middle part fixedly connected with brush of placing the case, the brush contacts with the conveyer belt.
As a further description of the above technical solution:
the inner wall top fixedly connected with fixed plate of placing the case, the fixed plate is connected with electric putter.
As a further description of the above technical solution:
the middle part of placing the case is provided with the spout, screw thread piece sliding connection is in the spout middle part.
As a further description of the above technical solution:
the top of the rotating plate is fixedly connected with a pull rod.
As a further description of the above technical solution:
the rear side of the placement box is provided with an exhaust hole.
The utility model has the following beneficial effects:
1. according to the utility model, the brush hair can be attached to the surface of the filter screen through the cooperation of the structures such as the fan, the brush hair, the filter screen and the double-headed motor, so that the filter screen is cleaned, and the filter screen is prevented from being blocked by dust after being used for a long time, and the working efficiency of the fan is prevented from being influenced.
2. According to the utility model, the supporting rod supports the rotating block through the cooperation of the structures such as the supporting seat, the rotating plate, the supporting rod and the movable block, so that the rotating plate is conveniently opened by a worker, the rotating plate is fixed, and the silicon carbide wafer is taken in and out.
Drawings
FIG. 1 is a schematic perspective view of a dust-free storage device for silicon carbide wafers according to the present utility model;
fig. 2 is a schematic structural diagram of an electric push rod of a dust-free silicon carbide wafer storage device according to the present utility model;
FIG. 3 is a schematic view of a movable plate of a dust-free storage device for silicon carbide wafers according to the present utility model;
fig. 4 is a schematic structural view of a double-headed motor of a dust-free storage device for silicon carbide wafers according to the present utility model;
FIG. 5 is a schematic view of a rotating block of a dust-free storage device for silicon carbide wafers according to the present utility model;
fig. 6 is a schematic structural diagram of an exhaust hole of a dust-free storage device for silicon carbide wafers according to the present utility model.
Legend description:
1. placing a box; 2. a conveyor belt; 3. a rotating plate; 4. a brush; 5. a filter screen; 6. a rotating rod; 7. a housing; 8. a servo motor; 9. a screw block; 10. a movable plate; 11. a threaded rod; 12. an electric push rod; 13. a fixing plate; 14. a support rod; 15. a base; 16. a support base; 17. a rotating block; 18. a slide bar; 19. a fan blade; 20. a frame; 21. a double-ended motor; 22. a movable block; 23. a connecting block; 24. a connecting rod; 25. brushing; 26. a push plate.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-6, one embodiment provided by the present utility model is: a dust-free storage device for silicon carbide wafers comprises a storage box 1, wherein a conveyor belt 2 is arranged in the middle of the storage box 1, a shell 7 is fixedly connected to the front side and the rear side of the storage box 1, a servo motor 8 is fixedly connected to the bottom of the inner wall of the shell 7, a threaded rod 11 is fixedly connected to the output end of the servo motor 8, a threaded block 9 is fixedly connected to the periphery of the threaded rod 11, a movable plate 10 is fixedly connected to the rear side of the threaded block 9, the other end of the movable plate 10 is fixedly connected to the other threaded block 9, a slide bar 18 is slidingly connected to the middle of one threaded block 9, an electric push rod 12 is fixedly connected to the left side of the storage box 1, a push plate 26 is fixedly connected to the other end of the electric push rod 12, a connecting block 23 is fixedly connected to the front side of the inner wall of the storage box 1, a frame 20 is fixedly connected to the other end of the connecting block 23, a double-headed motor 21 is fixedly connected to the middle of the frame 20, one output end of the double-headed motor 21 is fixedly connected with a fan blade 19, the other output end of the double-headed motor 21 is fixedly connected with a connecting rod 24, the other end of the connecting rod 24 is fixedly connected with a rotating rod 6, the rear side of the rotating rod 6 is fixedly connected with bristles 25, the front side of the placement box 1 is fixedly connected with a filter screen 5, firstly, a silicon carbide wafer is sent into the placement box 1 through a conveying belt 2 and falls on the top of a movable plate 10, the threaded rod 11 is driven to rotate by the servo motor 8, the threaded rod 11 drives a threaded block 9 to move, the movable plate 10 is driven to move by the threaded block 9, so that the silicon carbide wafer is lifted, then a push plate 26 is pushed by an electric push rod 12, the silicon carbide wafer on the movable plate 10 is pushed into the placement position in the placement box 1 by the push plate 26, a frame 20 is fixed by a connecting block 23, the double-headed motor 21 is driven to rotate by the double-headed motor 21, the pressure in the placing box 1 is higher than the external pressure to form a positive pressure chamber, so that a dust-free environment is realized, the other end of the double-headed motor 21 drives the connecting rod 24 to rotate, the connecting rod 24 drives the rotating rod 6 to rotate, the rotating rod 6 drives the brush hair 25 to rotate, and the brush hair 25 can be attached to the surface of the filter screen 5, so that the filter screen 5 is cleaned, the filter screen 5 is prevented from being blocked by dust after being used for a long time, and the working efficiency of a fan is influenced.
The middle part fixedly connected with supporting seat 16 of placing case 1, the middle part rotation of supporting seat 16 is connected with movable block 22, the other end rotation of movable block 22 is connected with dwang 17, the right side rotation of placing case 1 is connected with revolving plate 3, the bottom fixedly connected with another supporting seat 16 of revolving plate 3, the other end rotation of dwang 17 is connected at one of them supporting seat 16 middle part, the middle part of dwang 17 is provided with the spacing groove, the middle part fixedly connected with base 15 of placing case 1, the middle part rotation of base 15 is connected with bracing piece 14, the other end sliding connection of bracing piece 14 is at the spacing groove middle part, rotate revolving plate 3, drive supporting seat 16 through revolving plate 3, drive the revolving block 17 through supporting seat 16 and rotate, drive movable block 22 through revolving block 17, rethread revolving block 17 drives bracing piece 14, connect bracing piece 14 through base 15, make bracing piece 14 support revolving block 17, thereby realize being convenient for the staff to open revolving plate 3, fix revolving plate 3, take out silicon carbide wafer.
Place the middle part fixedly connected with brush 4 of case 1, brush 4 contacts with conveyer belt 2, conveys the carborundum wafer through conveyer belt 2, contacts with the carborundum wafer through brush 4 for brush 4 clear up the carborundum wafer, clear up the dust of carborundum wafer limit face.
The fixed plate 13 is fixedly connected to the top of the inner wall of the placement box 1, the fixed plate 13 is connected with the electric push rod 12, and the electric push rod 12 is fixed through the fixed plate 13, so that the electric push rod 12 cannot be bent due to the push plate 26.
The middle part of placing case 1 is provided with the spout, and screw thread piece 9 sliding connection makes screw thread piece 9 can drive fly leaf 10 and is placing the inside removal of case 1 at the spout middle part through the spout.
The top of the rotating plate 3 is fixedly connected with a pull rod, and the rotating plate 3 is pulled by the pull rod, so that the rotating plate 3 is convenient to open.
The rear side of the placement case 1 is provided with an exhaust hole through which the air inside the placement case 1 is convenient to be discharged.
Working principle: firstly, send into the silicon carbide wafer through conveyer belt 2 and place the inside of case 1 and fall at the top of fly leaf 10, drive threaded rod 11 through servo motor 8 and rotate, drive threaded block 9 through threaded rod 11 and remove, drive fly leaf 10 through threaded block 9 and remove, thereby lift up the silicon carbide wafer, rethread electric putter 12 promotes push pedal 26, push pedal 26 pushes into the department of placing in the case 1 with the silicon carbide wafer on the fly leaf 10, rethread connecting block 23 fixed frame 20, fixed double-end motor 21 through frame 20, drive fan blade 19 rotation through double-end motor 21, make the pressure in placing case 1 be greater than external pressure, form the malleation room, thereby realize dustless environment, drive connecting rod 24 through the other end of double-end motor 21 and rotate, drive bull stick 6 through connecting rod 24 and rotate, drive brush hair 25 through bull stick 6, make brush hair 25 can laminate the surface of filter screen 5, thereby realize clearing up filter screen 5 after long-time use, by the dust is stopped, influence the work efficiency of fan, rethread rotating plate 3 drives supporting seat 16 through rotating seat 16, drive rotating seat 17 through supporting seat 17, drive rotating seat 17 through rotating seat 17, drive rotating seat 17 through the moving seat 17, drive rotating seat 17 through rotating seat 17, and make the supporting seat 17 rotate through the supporting seat 17, realize that the support rod is rotated, and is rotated through the realization of rotating seat 17, and is rotated, thereby, the realization is rotated through the supporting seat 17, and is rotated, and is convenient, and is rotated, and is realized.
Finally, it should be noted that: the foregoing description of the preferred embodiments of the present utility model is not intended to be limiting, but rather, although the present utility model has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present utility model.
Claims (7)
1. The utility model provides a dustless strorage device of carborundum wafer, includes places case (1), its characterized in that: the utility model discloses a fan blade type electric motor, including placing case (1), including motor, connecting rod (21), connecting rod (24) and fan blade, placing case (1), conveyer belt (2) are arranged in the middle part of placing case (1), both sides all fixedly connected with shell (7) around placing case (1), inner wall bottom fixedly connected with servo motor (8) of shell (7), output fixedly connected with threaded rod (11) of servo motor (8), the periphery threaded connection of threaded rod (11) has a screw thread piece (9), the rear side fixedly connected with fly leaf (10) of screw thread piece (9), the other end fixedly connected with another screw thread piece (9) of fly leaf (10), one of them screw thread piece (9)'s middle part sliding connection slide bar (18), the left side fixedly connected with electric putter (12) of placing case (1), the other end fixedly connected with push pedal (26) of electric putter (12), the inner wall front side fixedly connected with connecting block (23) of placing case (1), the other end fixedly connected with frame (20) of connecting block (23), middle part fixedly connected with motor (21) of frame (20), one end fixedly connected with fan blade (24) of motor (21) output fixedly connected with fan blade (24), the back side of bull stick (6) fixedly connected with brush hair (25), the front side of placing case (1) fixedly connected with filter screen (5).
2. The dust-free storage device for silicon carbide wafers as set forth in claim 1, wherein: the middle part fixedly connected with supporting seat (16) of placing case (1), the middle part of supporting seat (16) rotates and is connected with movable block (22), the other end of movable block (22) rotates and is connected with rotating block (17), the right side of placing case (1) rotates and is connected with revolving plate (3), the bottom fixedly connected with another supporting seat (16) of revolving plate (3), the other end of rotating block (17) rotates and is connected at one of them supporting seat (16) middle part, the middle part of rotating block (17) is provided with the spacing groove, the middle part fixedly connected with base (15) of placing case (1), the middle part of base (15) rotates and is connected with bracing piece (14), the other end sliding connection of bracing piece (14) is at the spacing groove middle part.
3. The dust-free storage device for silicon carbide wafers as set forth in claim 1, wherein: the middle part of placing case (1) fixedly connected with brush (4), brush (4) contact with conveyer belt (2).
4. The dust-free storage device for silicon carbide wafers as set forth in claim 1, wherein: the top of the inner wall of the placement box (1) is fixedly connected with a fixing plate (13), and the fixing plate (13) is connected with an electric push rod (12).
5. The dust-free storage device for silicon carbide wafers as set forth in claim 1, wherein: the middle part of placing case (1) is provided with the spout, screw thread piece (9) sliding connection is in the spout middle part.
6. A dust-free storage device for silicon carbide wafers as claimed in claim 2, wherein: the top of the rotating plate (3) is fixedly connected with a pull rod.
7. The dust-free storage device for silicon carbide wafers as set forth in claim 1, wherein: the rear side of the placement box (1) is provided with an exhaust hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321978823.2U CN220221775U (en) | 2023-07-26 | 2023-07-26 | Dust-free storage device for silicon carbide wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321978823.2U CN220221775U (en) | 2023-07-26 | 2023-07-26 | Dust-free storage device for silicon carbide wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220221775U true CN220221775U (en) | 2023-12-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321978823.2U Active CN220221775U (en) | 2023-07-26 | 2023-07-26 | Dust-free storage device for silicon carbide wafers |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117775512A (en) * | 2024-02-26 | 2024-03-29 | 苏州尊恒半导体科技有限公司 | Workshop storage equipment for wafers |
-
2023
- 2023-07-26 CN CN202321978823.2U patent/CN220221775U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117775512A (en) * | 2024-02-26 | 2024-03-29 | 苏州尊恒半导体科技有限公司 | Workshop storage equipment for wafers |
| CN117775512B (en) * | 2024-02-26 | 2024-04-26 | 苏州尊恒半导体科技有限公司 | Workshop storage equipment for wafers |
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