CN220187212U - Cooling mechanism for silicon material production - Google Patents
Cooling mechanism for silicon material production Download PDFInfo
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- CN220187212U CN220187212U CN202321490262.1U CN202321490262U CN220187212U CN 220187212 U CN220187212 U CN 220187212U CN 202321490262 U CN202321490262 U CN 202321490262U CN 220187212 U CN220187212 U CN 220187212U
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- Prior art keywords
- cooling
- fixedly connected
- silicon material
- material production
- tank
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- 238000001816 cooling Methods 0.000 title claims abstract description 90
- 239000002210 silicon-based material Substances 0.000 title claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 230000007246 mechanism Effects 0.000 title claims abstract description 13
- 230000005540 biological transmission Effects 0.000 claims abstract description 11
- 238000009434 installation Methods 0.000 claims description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 239000000498 cooling water Substances 0.000 abstract description 21
- 238000003756 stirring Methods 0.000 abstract description 10
- 238000001914 filtration Methods 0.000 abstract description 3
- 239000012535 impurity Substances 0.000 abstract description 3
- 238000004064 recycling Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 241000220317 Rosa Species 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 5
- 241000883990 Flabellum Species 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 230000003139 buffering effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Silicon Compounds (AREA)
Abstract
The utility model relates to a cooling mechanism for silicon material production, which comprises a cooling shell, wherein the bottom of the cooling shell is fixedly connected with two supporting plates, and the inner walls of the left side and the right side of the cooling shell are fixedly connected with guide groove plates. When a wafer is required to be cooled after production, the wafer is placed in the cooling box, the upper cover plate is covered and clamped with the fixed block, two hydraulic cylinders are started to drive the top plate to move downwards, the cooling box and the bearing plate are immersed into the cooling shell to be contacted with cooling water, and the motor is started to drive the transmission shaft to rotate and stir in the cooling shell, so that the cooling water is fully stirred, and the cooling efficiency of the wafer is improved; when the cooling water is used for a period of time, the drain pipe can be used for conveying the cooling water to the top of the filter screen plate for filtering, the filtered impurities are remained at the top of the filter screen plate, and the clean cooling water is pumped for recycling.
Description
Technical Field
The utility model relates to the technical field of semiconductor silicon material production, in particular to a cooling mechanism for silicon material production.
Background
There are many kinds of semiconductor materials, which are grouped by different properties and different forms, and silicon is one of them, and some kinds of silicon forms can be directly used as semiconductor devices due to the excellent material properties of silicon, and a cooling process is required when the semiconductor silicon material is manufactured.
The wafer after being heated at high temperature is usually required to be annealed and cooled in the process of producing the wafer semiconductor, but the existing cooling device is generally operated in a water cooling mode, and the semiconductor is required to be contacted with cold water to conduct the heat of the semiconductor body into water when the semiconductor is cooled, so that the heat of the semiconductor body is reduced, the condition that the wafer is easy to float on the surface of cooling water when the existing silicon material is cooled, the cooling effect of the wafer is poor, and the subsequent processing is affected by poor heat dissipation effect, so that the silicon material production cooling mechanism is provided to solve the problems.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model provides a silicon material production cooling mechanism which has the advantages of good cooling effect and capability of avoiding the wafer floating on the cooling water surface as much as possible when radiating, and solves the problems that the semiconductor silicon material is poor in cooling effect and easily floats on the water surface when being put into cooling water so as to influence the radiating effect when being produced and processed.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a silicon material production cooling body, includes the cooling casing, the bottom fixedly connected with quantity of cooling casing is two backup pads, the equal fixedly connected with direction frid of the left and right sides inner wall of cooling casing, two the inside sliding connection of direction frid has same loading board, the top fixedly connected with cooling tank of loading board, the inside articulated of cooling tank has the apron, the right side inner wall fixedly connected with fixed block of cooling tank, the bottom fixedly connected with joint post of apron, the equal fixedly connected with pneumatic cylinder in left and right sides of cooling casing, two the expansion end fixedly connected with same roof of pneumatic cylinder, the bottom of roof and the top fixedly connected with of cooling tank, the right side fixedly connected with motor of cooling casing, the one end fixedly connected with transmission shaft of motor output shaft, the surface fixedly connected with a plurality of stirring flabellum of transmission shaft, the bottom fixedly connected with rose box of cooling casing, the inside fixedly connected with quantity of rose box is two installation pieces, two the same filter screen board of detachable connection in top of installation piece.
Further, two the shape of backup pad is rectangular shaped plate, and the guide way has all been seted up to the inside of two guide groove plates, the left and right sides of loading board is all through guide way and two guide groove plate sliding connection, the mesh of permeating water has been seted up to the inside of loading board.
Further, the bottom fixedly connected with rubber pad of apron, the top fixedly connected with handle of apron, the joint post groove has been seted up to the inside of fixed block, the joint post is located the inside of fixed block through the joint post groove.
Further, the bottom fixedly connected with of roof is two connecting rods, the roof passes through two connecting rods and the top fixed connection of cooling box.
Further, the right side fixedly connected with installation shell of cooling casing, the motor passes through installation shell and cooling casing's right side surface fixed connection.
Further, the bottom fixedly connected with drain pipe of cooling shell, the surface fixedly connected with solenoid valve of drain pipe, two the constant head tank has all been seted up to the inside of installation piece, the filter screen board is located the top of two installation pieces through the constant head tank.
Compared with the prior art, the technical scheme of the utility model has the following beneficial effects:
1. when a wafer is required to be cooled after production, the wafer is placed in the cooling box, the upper cover plate is covered and clamped with the fixed block, two hydraulic cylinders are started to drive the top plate to move downwards, the cooling box and the bearing plate are immersed into the cooling shell to be contacted with cooling water, and the motor is started to drive the transmission shaft to rotate and stir in the cooling shell, so that the cooling water is fully stirred, and the cooling efficiency of the wafer is improved; when the cooling water is used for a period of time, the drain pipe can be used for conveying the cooling water to the top of the filter screen plate for filtering, the filtered impurities are remained at the top of the filter screen plate, and the clean cooling water is pumped for recycling.
2. This silicon material production cooling body sets up the rubber pad through the bottom at the apron for the wafer is placing the inside of cooling box and is cooling down, and the rubber pad can play the effect of buffering, avoids wafer and cooling box to take place to collide with and cause the condition of damage as far as possible. Through set up a plurality of stirring flabellum at the surface of transmission shaft for the wafer can constantly stir the cooling water when the cooling, improves this device refrigerated efficiency.
Drawings
FIG. 1 is a front cross-sectional view of the structure of the present utility model;
fig. 2 is a front view of the filter box of the structure of the utility model.
In the figure: 1 supporting plate, 2 cooling shell, 3 guide groove plate, 4 loading plate, 5 cooling box, 6 apron, 7 fixed block, 8 joint post, 9 pneumatic cylinder, 10 roof, 11 motor, 12 transmission shaft, 13 stirring flabellum, 14 rose box, 15 installation piece, 16 filter screen plate.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-2, a cooling mechanism for producing silicon materials in this embodiment includes a cooling housing 2, a drain pipe fixedly connected to the bottom of the cooling housing 2, an electromagnetic valve fixedly connected to the outer surface of the drain pipe, and two support plates 1 fixedly connected to the bottom of the cooling housing 2, wherein the two support plates 1 are rectangular plates.
The equal fixedly connected with guide groove plate 3 of the left and right sides inner wall of cooling body 2, the inside sliding connection of two guide groove plates 3 has same loading board 4, and the guide groove has all been seted up to the inside of two guide groove plates 3, and the left and right sides of loading board 4 is all through guide groove and two guide groove plate 3 sliding connection, and the mesh of permeating water has been seted up to the inside of loading board 4.
The top fixedly connected with cooler bin 5 of loading board 4, the inside of cooler bin 5 articulates there is apron 6, the bottom fixedly connected with rubber pad of apron 6, the top fixedly connected with handle of apron 6.
The right side inner wall fixedly connected with fixed block 7 of cooling tank 5, the bottom fixedly connected with joint post 8 of apron 6, joint post groove has been seted up to the inside of fixed block 7, and joint post 8 is located the inside of fixed block 7 through joint post groove.
The left and right sides of cooling shell 2 all fixedly connected with pneumatic cylinder 9, the same roof 10 of expansion end fixedly connected with of two pneumatic cylinders 9, the bottom of roof 10 and the top fixed connection of cooling tank 5, the bottom fixedly connected with quantity of roof 10 is two connecting rods, roof 10 passes through two connecting rods and the top fixed connection of cooling tank 5.
The right side fixedly connected with motor 11 of cooling casing 2, the right side fixedly connected with installation shell of cooling casing 2, motor 11 passes through installation shell and the right side surface fixed connection of cooling casing 2.
One end fixedly connected with transmission shaft 12 of motor 11 output shaft, the surface fixedly connected with of transmission shaft 12 is a plurality of stirring flabellum 13, the bottom fixedly connected with rose box 14 of cooling body 2, the inside fixedly connected with of rose box 14 is two installation pieces 15, the same filter screen plate 16 of top detachable connection of two installation pieces 15, the constant head tank has all been seted up to the inside of two installation pieces 15, the filter screen plate 16 is located the top of two installation pieces 15 through the constant head tank.
In this embodiment, the rubber pad is disposed at the bottom of the cover plate 6, so that the rubber pad can play a role in buffering when the wafer is placed in the cooling box 5 for cooling, and damage caused by collision between the wafer and the cooling box 5 is avoided as much as possible.
In this embodiment, the plurality of stirring blades 13 are disposed on the outer surface of the transmission shaft 12, so that the wafer can continuously stir the cooling water during cooling, and the cooling efficiency of the device is improved.
In this embodiment, the back fixedly connected with cooling water of cooling casing 2 is to, and the back fixedly connected with suction pump body of rose box 14, and the sliding tray has been seted up to the front of rose box 14, and filter screen plate 16 can be taken out after using a period and change for follow-up filter effect is better.
It should be noted that, the two hydraulic cylinders 9 and the motor 12 are all existing devices, and are all controlled to be started by the existing technical scheme.
The working principle of the embodiment is as follows:
when a wafer needs to be cooled after production, the wafer is placed in the cooling box 5, the cover plate 6 is covered with the fixed block 8 to be clamped, two hydraulic cylinders 9 are started to drive the top plate 10 to move downwards, the cooling box 5 and the bearing plate 4 are immersed into the cooling shell 2 to be contacted with cooling water, and the motor 11 is started to drive the transmission shaft 12 to rotate and stir in the cooling shell 2, so that the cooling water is fully stirred, and the cooling efficiency of the wafer is improved; when the cooling water is used for a period of time, the drain pipe can be reached to convey the cooling water to the top of the filter screen plate 16 for filtering, the filtered impurities are remained at the top of the filter screen plate 16, and the clean cooling water is pumped for recycling.
It should be noted that standard parts used in the application can be purchased from the market, special-shaped parts can be customized according to the description of the specification and the drawing, the specific connection modes of the parts adopt mature bolts, rivets, welding and the like in the prior art, and the machinery, the parts and the equipment adopt the conventional models in the prior art; in addition, the circuit connection is in a conventional connection manner in the prior art, and details not described in detail in this specification belong to the prior art known to those skilled in the art.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. A cooling mechanism for silicon material production, comprising a cooling housing (2), characterized in that: the bottom fixedly connected with number of cooling casing (2) is backup pad (1) for two, the equal fixedly connected with direction frid (3) of left and right sides inner wall of cooling casing (2), two the inside sliding connection of direction frid (3) has same loading board (4), the top fixedly connected with cooling tank (5) of loading board (4), the inside articulated of cooling tank (5) has apron (6), the right side inner wall fixedly connected with fixed block (7) of cooling tank (5), the bottom fixedly connected with joint post (8) of apron (6), the equal fixedly connected with pneumatic cylinder (9) of left and right sides of cooling casing (2), two the expansion end fixedly connected with same roof (10) of pneumatic cylinder (9), the bottom of roof (10) and the top fixedly connected with of cooling tank (5), the right side fixedly connected with motor (11) of cooling casing (2), the one end fixedly connected with transmission shaft (12) of motor (11) output shaft, the bottom fixedly connected with filter block (14) of fan blade (14) are the inside filter tank (14) of a plurality of filter tanks (14), the top of the two mounting blocks (15) is detachably connected with the same filter screen plate (16).
2. A silicon material production cooling mechanism according to claim 1, wherein: the shape of two backup pad (1) is rectangular shaped plate, and the guide way has all been seted up to the inside of two guide groove plates (3), the left and right sides of loading board (4) is all through guide way and two guide groove plates (3) sliding connection, the mesh of permeating water has been seted up to the inside of loading board (4).
3. A silicon material production cooling mechanism according to claim 1, wherein: the bottom fixedly connected with rubber pad of apron (6), the top fixedly connected with handle of apron (6), joint post groove has been seted up to the inside of fixed block (7), joint post (8) are located the inside of fixed block (7) through joint post groove.
4. A silicon material production cooling mechanism according to claim 1, wherein: the bottom of roof (10) fixedly connected with is two connecting rods, roof (10) are through two connecting rods and the top fixed connection of cooling tank (5).
5. A silicon material production cooling mechanism according to claim 1, wherein: the right side fixedly connected with installation shell of cooling casing (2), motor (11) are through the right side surface fixed connection of installation shell and cooling casing (2).
6. A silicon material production cooling mechanism according to claim 1, wherein: the bottom fixedly connected with drain pipe of cooling body (2), the surface fixedly connected with solenoid valve of drain pipe, two the constant head tank has all been seted up to the inside of installation piece (15), filter screen plate (16) are located the top of two installation pieces (15) through the constant head tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321490262.1U CN220187212U (en) | 2023-06-13 | 2023-06-13 | Cooling mechanism for silicon material production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321490262.1U CN220187212U (en) | 2023-06-13 | 2023-06-13 | Cooling mechanism for silicon material production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220187212U true CN220187212U (en) | 2023-12-15 |
Family
ID=89100294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321490262.1U Active CN220187212U (en) | 2023-06-13 | 2023-06-13 | Cooling mechanism for silicon material production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220187212U (en) |
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2023
- 2023-06-13 CN CN202321490262.1U patent/CN220187212U/en active Active
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