CN220169983U - Furnace tube of hot furnace and hot furnace - Google Patents
Furnace tube of hot furnace and hot furnace Download PDFInfo
- Publication number
- CN220169983U CN220169983U CN202321557445.0U CN202321557445U CN220169983U CN 220169983 U CN220169983 U CN 220169983U CN 202321557445 U CN202321557445 U CN 202321557445U CN 220169983 U CN220169983 U CN 220169983U
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- furnace
- furnace tube
- tube
- hot
- support
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 5
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 5
- 238000009413 insulation Methods 0.000 description 7
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000009434 installation Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Furnace Details (AREA)
Abstract
The utility model discloses a hot furnace tube and a hot furnace, wherein the hot furnace tube comprises a furnace tube body and furnace tube supporting pieces arranged on the outer side wall of the furnace tube body, the furnace tube supporting pieces comprise at least two furnace tube supporting pieces, the at least two furnace tube supporting pieces are distributed at intervals along the circumferential direction of the furnace tube body, and one side of the furnace tube supporting piece, which is far away from the outer side wall of the furnace tube body, is abutted against the inner side wall of the furnace body. Because furnace tube support piece is set up on the furnace tube body, need not to set up the cushion at the furnace body inner wall, simplified the structure of furnace body, and because two at least furnace tube support pieces are along the circumference interval distribution of furnace tube body, increased the area of contact of hot stove boiler tube and furnace body, ensured on the one hand that hot stove boiler tube can stably support in the furnace body, avoid hot stove boiler tube to appear warping even cracked phenomenon, on the other hand can make the inside heat insulating part atress of furnace body more even, slows down the problem that the concentrated atress of the inside heat insulating part in the stove caused the subsidence.
Description
Technical Field
The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a furnace tube of a hot furnace and the hot furnace.
Background
The existing quartz furnace tube directly falls on a cushion block placed on a thermal field, or is installed in the thermal field in a head-tail support flange mode, the processing difficulty of the cushion block placed in the thermal field is high, and after the quartz tube is placed on the cushion block, the inner wall of the thermal field is collapsed due to overlarge local stress of the thermal field after a certain process time is passed; the quartz tube can deform for a long time in the hot furnace by adopting the head-tail support flange installation, and even the stress at the two ends is overlarge to cause cracking.
Disclosure of Invention
A first object of the present utility model is to provide a hot furnace tube which can be stably installed in a furnace body of a hot furnace, is convenient to install, can prevent the hot furnace tube from being deformed, and can prevent a heat insulation layer of the furnace body from collapsing.
A second object of the present utility model is to propose a hot oven which is easy to assemble and has a long working life.
In order to achieve the technical effects, the technical scheme of the utility model is as follows:
the utility model discloses a hot furnace tube, which comprises a furnace tube body and furnace tube supporting pieces arranged on the outer side wall of the furnace tube body, wherein the furnace tube supporting pieces comprise at least two furnace tube supporting pieces, the at least two furnace tube supporting pieces are distributed at intervals along the circumferential direction of the furnace tube body, and one side of the furnace tube supporting piece, which is far away from the outer side wall of the furnace tube body, is abutted against the inner side wall of a furnace body.
In some embodiments, each of the furnace tube supports forms a strip-like structure extending along an axial direction of the furnace tube body.
In some embodiments, each furnace tube support comprises a plurality of support parts which are arranged at intervals along the axial direction of the furnace tube body, and each support part is arranged in an extending way along the axial direction of the furnace tube body.
In some specific embodiments, the support portions of two adjacent furnace tube supports are staggered along the axial direction of the furnace tube body.
In some embodiments, each of the furnace tube supports is hollow, and each of the furnace tube supports and the outer sidewall of the furnace tube body define a channel.
In some embodiments, the side of the furnace tube support away from the outer side wall of the furnace tube body is provided with a stopping plane which is stopped on the inner side wall of the furnace body.
In some embodiments, the furnace tube supports are symmetrically distributed along a vertical plane passing through the center of the furnace tube body.
In some embodiments, the furnace tube support is an integral piece with the furnace tube body.
In some specific embodiments, the furnace tube support is a silicon carbide member.
The utility model also discloses a hot furnace, which comprises the hot furnace tube and a furnace body, wherein the hot furnace tube is arranged in the furnace body, and a furnace tube support piece of the hot furnace tube is abutted against the inner side wall of the furnace body.
The furnace tube of the hot furnace has the beneficial effects that: in the actual working process, the hot furnace tube is directly arranged in the furnace body, one side of the furnace tube support piece far away from the outer side wall of the furnace tube body is stopped against the inner side wall of the furnace body, and the installation of the hot furnace tube can be completed.
The heat furnace has the beneficial effects that: due to the fact that the heat furnace tube is arranged, the heat furnace tube is ensured to be stably supported in the furnace body, deformation and even fragmentation of the heat furnace tube are avoided, the heat insulation piece in the furnace body is ensured to be stressed more uniformly, the problem of collapse caused by concentrated stress of the heat insulation piece in the furnace is solved, and therefore the service life of the heat furnace is prolonged.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
FIG. 1 is a schematic view of a furnace tube of a hot furnace according to an embodiment of the present utility model;
FIG. 2 is a schematic view illustrating another direction of a furnace tube of a thermal furnace according to an embodiment of the present utility model;
FIG. 3 is a schematic view of a furnace tube of a thermal furnace according to a second embodiment of the present utility model;
fig. 4 is a schematic structural view of a heat furnace according to an embodiment of the present utility model.
Reference numerals:
100. a furnace tube body; 200. a furnace tube support; 210. a support part; 300. a furnace body.
Detailed Description
In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.
In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.
Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly, for distinguishing between the descriptive features, and not sequentially, and not lightly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
The specific structure of the furnace tube of the hot furnace according to the embodiment of the present utility model is described below with reference to FIGS. 1 to 3.
The utility model discloses a hot furnace tube, as shown in fig. 2 and 3, the hot furnace tube comprises a furnace tube body 100 and furnace tube supporting pieces 200 arranged on the outer side wall of the furnace tube body 100, the furnace tube supporting pieces 200 comprise at least two, the at least two furnace tube supporting pieces 200 are distributed at intervals along the circumferential direction of the furnace tube body 100, and one side of the furnace tube supporting piece 200, which is far away from the outer side wall of the furnace tube body 100, is propped against the inner side wall of a furnace body 300. It can be appreciated that in the actual working process, the hot furnace tube is directly arranged in the furnace body 300, so that one side of the furnace tube support piece 200, which is far away from the outer side wall of the furnace tube body 100, is abutted against the inner side wall of the furnace body 300, and the installation of the hot furnace tube can be completed.
In some embodiments, as shown in FIG. 3, each furnace tube support 200 forms a strip structure extending along the axis of the furnace tube body 100. It is appreciated that the integral strip structure of the furnace tube support 200 can reduce the stress of the furnace tube support 200 and prolong the service life thereof.
In some embodiments, each furnace tube support 200 includes a plurality of support portions 210 disposed at intervals along the axial direction of the furnace tube body 100, and each support portion 210 extends along the axial direction of the furnace tube body 100. It can be appreciated that the furnace tube support 200 is formed in a multi-stage structure, so that one stage of the furnace tube support 200 can be prevented from falling off during installation, and the rest of the support portions 210 can be prevented from supporting, so that the furnace tube support 200 can always support the furnace tube body 100.
In some embodiments, the plurality of support portions 210 of two adjacent furnace tube supports 200 are staggered along the axial direction of the furnace tube body 100. Therefore, the plurality of supporting parts 210 of the furnace tube supporting piece 200 can uniformly support the furnace tube body 100 along the axial direction of the furnace tube body 100, so that the phenomenon that the hot furnace tube deforms or even breaks is better avoided, and the problem that the collapse is caused by the concentrated stress of the internal heat insulating piece in the furnace is better relieved.
In some embodiments, each furnace support 200 is hollow, and each furnace support 200 and the outer sidewall of the furnace body 100 define a channel. It will be appreciated that the hollow structure of the tube support 200 reduces the weight of the entire furnace tube, thereby facilitating transportation and use.
In some embodiments, the side of the furnace tube support 200 remote from the outer sidewall of the furnace tube body 100 has a stop plane that stops against the inner sidewall of the furnace body 300. It can be appreciated that the contact area between the furnace tube support 200 and the inner side wall of the furnace body 300 can be increased by the additionally arranged abutting plane, so that on one hand, the furnace tube of the hot furnace can be better ensured to be stably supported in the furnace body 300, and the phenomenon that the furnace tube of the hot furnace is deformed or even cracked is avoided, and on the other hand, the stress of the heat insulation piece in the furnace body 300 is more uniform, and the problem that collapse is caused by the concentrated stress of the heat insulation piece in the furnace is alleviated.
In some embodiments, as shown in FIG. 2, the plurality of furnace tube supports 200 are symmetrically distributed along a vertical plane passing through the center of the furnace tube body 100. It can be understood that, in the actual installation process, the furnace tube body 100 is generally coaxially arranged with the furnace body 300, and the plurality of furnace tube supports 200 are symmetrically distributed along the vertical plane passing through the center of the furnace tube body 100, so that the furnace tube body 100 and the furnace body 300 can be well ensured to be coaxially arranged, and the furnace tube body 100 can be stably supported, so that the furnace tube body 100 is ensured to be stably maintained in the furnace body 300.
In some embodiments, the furnace tube support 200 is an integral piece with the furnace tube body 100. It can be understood that the furnace tube support 200 and the furnace tube body 100 are integrally formed, so that on one hand, the furnace tube support 200 and the furnace tube body 100 can be conveniently connected, and the furnace tube is conveniently manufactured, and on the other hand, the connection stability of the furnace tube support 200 and the furnace tube body 100 can be improved, and the furnace tube support 200 is prevented from falling off from the furnace tube body 100.
In some embodiments, the furnace tube support 200 and the furnace tube body 100 are joined as an integral piece by welding or bonding. Thereby, the connection of the furnace tube support 200 and the furnace tube body 100 is further facilitated.
In some other embodiments, the furnace tube support 200 is connected to the furnace tube body 100 by a screw, a pin, or the like, or the furnace tube support 200 is clamped to the furnace tube body 100. In the embodiment of the present utility model, the connection manner of the furnace tube supporter 200 and the furnace tube body 100 may be selected according to the needs.
In some embodiments, the furnace tube support 200 is a silicon carbide member. It can be appreciated that, in the actual working process, the temperature in the furnace body 300 is higher, and the furnace tube support member 200 is a silicon carbide member, so that the furnace tube support member 200 can be ensured not to be melted in the furnace body 300 with high temperature, thereby ensuring stable support of the furnace tube body 100.
In some embodiments, the furnace support 200 is a quartz piece, and it is understood that the furnace body 100 is typically a quartz tube, and the furnace support 200 is a quartz piece to conveniently fix the furnace support 200 to the furnace body 100. Of course, it should be noted that in other embodiments of the present utility model, the furnace support 200 may be made of other materials according to actual needs, and is not limited to silicon carbide and quartz.
The specific structure of the furnace tubes of two specific embodiments is described below with reference to FIGS. 1-3.
Embodiment one:
as shown in fig. 1-2, the hot furnace tube comprises a furnace tube body 100 and two furnace tube supports 200 arranged on the outer side wall of the furnace tube body 100, wherein the two furnace tube supports 200 are distributed at intervals along the circumferential direction of the furnace tube body 100, and one side of the furnace tube support 200 away from the outer side wall of the furnace tube body 100 is abutted against the inner side wall of the furnace body 300. Each furnace tube support 200 comprises six support portions 210 arranged at intervals along the axial direction of the furnace tube body 100, and each support portion 210 extends along the axial direction of the furnace tube body 100. Each support portion 210 has a hollow structure, and each support portion 210 and the outer sidewall of the furnace tube body 100 define a channel.
Embodiment two:
as shown in FIG. 3, the furnace tube comprises a furnace tube body 100 and two furnace tube supports 200 arranged on the outer side wall of the furnace tube body 100, wherein the two furnace tube supports 200 are distributed at intervals along the circumferential direction of the furnace tube body 100, and one side of the furnace tube support 200 away from the outer side wall of the furnace tube body 100 is abutted against the inner side wall of the furnace body 300. Each furnace tube support 200 forms a semicircular tube extending in the axial direction of the furnace tube body 100.
The utility model also discloses a hot furnace, as shown in fig. 4, which comprises the hot furnace tube and a furnace body 300, wherein the hot furnace tube is arranged in the furnace body 300, and a furnace tube support piece 200 of the hot furnace tube is abutted against the inner side wall of the furnace body 300.
The heat furnace provided by the utility model has the advantages that the heat furnace tube is ensured to be stably supported in the furnace body 300, the phenomenon that the heat furnace tube is deformed or even broken is avoided, the heat insulation part in the furnace body 300 is ensured to be stressed more uniformly, the problem of collapse caused by concentrated stress of the heat insulation part in the furnace is relieved, and the service life of the heat furnace is prolonged.
Optionally, the furnace tube support 200 is adjusted at an angle during welding or bonding such that the furnace tube is coaxially disposed with the furnace body 300. Therefore, the furnace tube of the hot furnace can be heated uniformly, and damage or other faults caused by the eccentricity of the furnace tube of the hot furnace can be avoided.
In the description of the present specification, reference to the term "some embodiments," "other embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is merely exemplary of the present utility model, and those skilled in the art should not be considered as limiting the utility model, since modifications may be made in the specific embodiments and application scope of the utility model in light of the teachings of the present utility model.
Claims (10)
1. The hot furnace tube is characterized by comprising a furnace tube body (100) and furnace tube supporting pieces (200) arranged on the outer side wall of the furnace tube body (100), wherein the furnace tube supporting pieces (200) comprise at least two, at least two furnace tube supporting pieces (200) are distributed at intervals along the circumferential direction of the furnace tube body (100), and one side, away from the outer side wall of the furnace tube body (100), of the furnace tube supporting pieces (200) is abutted against the inner side wall of the furnace body (300).
2. The hot furnace tube according to claim 1, wherein each of the tube supports (200) forms a strip-like structure extending in an axial direction of the tube body (100).
3. The hot furnace tube according to claim 1, wherein each furnace tube support (200) comprises a plurality of support portions (210) arranged at intervals along the axial direction of the furnace tube body (100), each support portion (210) being arranged extending along the axial direction of the furnace tube body (100).
4. A hot furnace tube according to claim 3, wherein a plurality of the support portions (210) of adjacent two of the tube supports (200) are distributed offset in the axial direction of the tube body (100).
5. The hot furnace tube according to any one of claims 1-4, wherein each furnace tube support (200) is hollow, each furnace tube support (200) defining a channel with an outer sidewall of the furnace tube body (100).
6. The hot furnace tube according to any one of claims 1-4, characterized in that the side of the tube support (200) facing away from the outer side wall of the furnace tube body (100) has a abutment plane which abuts against the inner side wall of the furnace body (300).
7. The hot furnace tube according to any one of claims 1 to 4, characterized in that a plurality of the tube supports (200) are symmetrically distributed along a vertical plane passing through the center of the tube body (100).
8. The hot furnace tube according to any one of claims 1 to 4, characterized in that the tube support (200) is an integral piece with the furnace tube body (100).
9. The hot furnace tube according to any one of claims 1 to 4, wherein the tube support (200) is a silicon carbide piece.
10. A thermal furnace comprising a thermal furnace tube according to any one of claims 1-9 and a furnace body (300), said thermal furnace tube being arranged within said furnace body (300), a furnace tube support (200) of said thermal furnace tube being stopped against an inner side wall of said furnace body (300).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321557445.0U CN220169983U (en) | 2023-06-19 | 2023-06-19 | Furnace tube of hot furnace and hot furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321557445.0U CN220169983U (en) | 2023-06-19 | 2023-06-19 | Furnace tube of hot furnace and hot furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220169983U true CN220169983U (en) | 2023-12-12 |
Family
ID=89066705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321557445.0U Active CN220169983U (en) | 2023-06-19 | 2023-06-19 | Furnace tube of hot furnace and hot furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220169983U (en) |
-
2023
- 2023-06-19 CN CN202321557445.0U patent/CN220169983U/en active Active
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