CN220169939U - Sectional roller way sintering furnace for device sintering - Google Patents
Sectional roller way sintering furnace for device sintering Download PDFInfo
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- CN220169939U CN220169939U CN202321683481.1U CN202321683481U CN220169939U CN 220169939 U CN220169939 U CN 220169939U CN 202321683481 U CN202321683481 U CN 202321683481U CN 220169939 U CN220169939 U CN 220169939U
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- 238000005245 sintering Methods 0.000 title claims abstract description 85
- 238000001816 cooling Methods 0.000 claims abstract description 48
- 230000007246 mechanism Effects 0.000 claims abstract description 48
- 238000000034 method Methods 0.000 claims abstract description 43
- 230000008569 process Effects 0.000 claims abstract description 43
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000002912 waste gas Substances 0.000 claims description 5
- 230000009467 reduction Effects 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims description 3
- 239000003638 chemical reducing agent Substances 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 description 24
- 239000000463 material Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Abstract
The utility model relates to the technical field of equipment for sintering semiconductor devices, in particular to a sectional roller way sintering furnace for sintering devices, which is characterized in that a preheating conveying mechanism, a sintering conveying mechanism and a cooling conveying mechanism which correspond to a preheating process section, a sintering process section and a cooling process section are arranged on a frame, and the preheating conveying mechanism, the sintering conveying mechanism and the cooling conveying mechanism all comprise driving roller supports, roller shafts, driving rollers and power components, wherein the driving roller supports are arranged on two sides of the frame, roller shaft holes are formed in the driving roller supports, bearings are arranged at the roller shaft holes, the driving rollers are fixed on the roller shafts, the roller shafts are arranged on the frame through the bearing frames, and the power components comprise motors, reducers, chain wheels, driving chains and driving chain wheels.
Description
Technical field:
the utility model relates to the technical field of equipment for sintering semiconductor devices, in particular to a sectional roller sintering furnace for device sintering, which has a reasonable structure and is convenient for the differential adjustment of different sintering processes.
The background technology is as follows:
the material conveying mechanism in the existing sintering furnace adopts a conveyor belt type, a complete annular metal conveyor belt is arranged in the sintering furnace and paved between the inner and outer transmission mechanisms of the furnace hearth of the sintering furnace, the driving roller drives the conveyor belt to circularly move by means of the friction force between the outlet driving roller and the conveyor belt, the objects to be sintered are placed on the metal conveyor belt, and the objects to be sintered respectively pass through a preheating zone, a high-temperature sintering zone and a cooling zone of the sintering furnace along with the conveyor belt, so that the production process flows of preheating, high-temperature sintering and cooling of the objects to be sintered are sequentially completed.
However, different ceramic or glass materials are sintered at different process temperature curves corresponding to the preheating, high-temperature and cooling sections, for example, certain materials need to be rapidly cooled after being sintered at high temperature, certain materials need to be preheated at high temperature, the preheating time is long, and the like, but the running speeds of the conveying mechanisms in the conventional conveyor belt type sintering furnace at the preheating process section, the high-temperature sintering process section and the cooling process section are the same, so that the different requirements of different process sections cannot be met at the same time, and the product performance is not as good as expected or the production efficiency is low.
The utility model comprises the following steps:
aiming at the defects and shortcomings in the prior art, the utility model provides a sectional roller way sintering furnace for device sintering, which has a reasonable structure and is convenient for the differential adjustment of different sintering processes.
The utility model is achieved by the following measures:
the utility model provides a sectional type roll table fritting furnace for device sintering, is equipped with the frame, corresponds preheating process section, sintering process section, cooling process section on the frame and is equipped with preheating section furnace body, sintering section furnace body, cooling section furnace body that is linked together in proper order, its characterized in that is equipped with preheating conveying mechanism, sintering conveying mechanism, the cooling conveying mechanism that correspond preheating process section, sintering process section, cooling process section respectively on the frame, preheating conveying mechanism, sintering conveying mechanism, cooling conveying mechanism all include driving roller support, roller, driving roller and power pack, wherein the driving roller support sets up in the frame both sides, sets up the roller shaft hole on the driving roller support to be equipped with the bearing in roller shaft hole department, the driving roller is fixed on the roller, and the roller is established in the frame via the bearing frame, power pack includes motor, reduction gear, sprocket, drive chain, drive sprocket, the output shaft of motor links to each other with the reduction gear output shaft sprocket, is equipped with the drive sprocket on the roller, and the drive chain meshes with sprocket, drive sprocket respectively.
The preheating section furnace body and the sintering section furnace body are respectively provided with an air inlet pipeline, an air outlet pipeline and a heating device, the heating devices are electric heaters and are fixed on the inner sides of the top and the bottom of the furnace body, the air inlet pipelines are all used for supplying air along the side surfaces of the furnace body, the air outlet pipeline is arranged on the top of the furnace body and is used for discharging waste gas in the manufacturing process, and further, in order to change the air flow atmosphere of each corner in the furnace body, more than two air inlet pipelines, preferably 4 air inlet pipelines, are distributed on the side surfaces of the preheating section furnace body and the sintering section furnace body at equal intervals.
The top of the inner side of the cooling section furnace body is also provided with a heater which is used for realizing the temperature control cooling of the sinter on the cooling conveying mechanism in a matching way.
More than two driving rollers which are arranged in parallel along the width direction of the frame are arranged in the preheating conveying mechanism, the sintering conveying mechanism and the cooling conveying mechanism, the diameter range of the driving rollers is 35-40mm, and the distance range between adjacent roller shafts is 30-100mm.
According to the utility model, the preheating section furnace body, the sintering section furnace body and the cooling section furnace body on the frame are respectively provided with the furnace body heat insulation layer, the driving roller supports are arranged on the frame outside the furnace body and the furnace body heat insulation layer so as to be convenient for maintenance, and the corresponding roller shaft holes opposite to the driving roller supports are formed on the preheating section furnace body, the sintering section furnace body, the cooling section furnace body and the furnace body heat insulation layer, so that the two ends of a roller shaft of the driving roller penetrate through the furnace body and are erected on the driving roller supports.
The utility model has the advantages of reasonable structure, flexible adjustment, simple maintenance and the like compared with the prior art, and effectively improves the sintering quality of the materials on the premise of not increasing the whole length of the equipment.
Description of the drawings:
fig. 1 is a schematic diagram of the structure of the present utility model.
Fig. 2 is a schematic view of the installation of the driving roller in the present utility model.
Reference numerals: preheating process section 1, sintering process section 2, cooling process section 3, frame 4, roll shaft 5, driving roll 6, motor 7, chain wheel 8, driving chain 9, driving chain wheel 10, preheating section furnace body 11, sintering section furnace body 12, cooling section furnace body 13 、 An air inlet pipeline 14, an air outlet pipeline 15, a heating device 16 and a sinter 17.
The specific embodiment is as follows:
the utility model is further described below with reference to the drawings and examples.
As shown in figure 1, the utility model provides a sectional type roller way sintering furnace for device sintering, which is provided with a frame 4, wherein a preheating section furnace body 11, a sintering section furnace body 12 and a cooling section furnace body 13 which are communicated are sequentially arranged on the frame 4 corresponding to a preheating process section 1, a sintering process section 2 and a cooling process section 3, a preheating transmission mechanism which is respectively arranged in the preheating section furnace body, a sintering transmission mechanism which is arranged in the sintering section furnace body and a cooling transmission mechanism which is arranged in the cooling section furnace body are arranged on the frame 4, the preheating transmission mechanism, the sintering transmission mechanism and the cooling transmission mechanism respectively comprise a transmission roller bracket, a roller shaft 5, a transmission roller 6 and a power assembly, the transmission roller bracket is arranged on two sides of the frame 4, the transmission roller bracket 6 is provided with a roller shaft hole, a bearing is arranged at the roller shaft hole, the transmission roller 6 is fixed on the roller shaft 5, the roller shaft 5 is arranged on the frame 4 through the bearing, the power assembly comprises a motor 7, a speed reducer, a chain wheel 8, a transmission chain 9 and a transmission chain 10, wherein an output shaft of the motor 7 is connected with the speed reducer, the transmission mechanism 8 is arranged on the output shaft of the speed reducer, and the chain 10 is respectively meshed with the chain 10.
According to the utility model, an air inlet pipeline 14, an air outlet pipeline 15 and a heating device 16 are respectively arranged on a preheating-section furnace body 11 and a sintering-section furnace body 12, the heating device 16 is an electric heater and is fixed on the inner sides of the top and the bottom of the furnace body, the air inlet pipelines 14 are all used for feeding air along the side surfaces of the furnace body, the air outlet pipeline 15 is arranged on the top of the furnace body and is used for discharging waste gas in the manufacturing process, and further, in order to change the air flow atmosphere in each corner in the furnace body, more than two air inlet pipelines 14, preferably 4 air inlet pipelines 14, are distributed on the side surfaces of the preheating-section furnace body 11 and the sintering-section furnace body 12 at equal intervals.
Heaters are also arranged at the top and the bottom of the inner side of the cooling section furnace body 13 and are used for realizing the temperature control cooling of the sinter 17 on the cooling conveying mechanism in a matching way.
More than two driving rollers 6 which are arranged in parallel along the width direction of the frame are arranged in the preheating conveying mechanism, the sintering conveying mechanism and the cooling conveying mechanism, the diameter range of the driving rollers 6 is 35-40mm, and the distance range between adjacent roller shafts is 30-100mm.
According to the utility model, the preheating section furnace body 11, the sintering section furnace body 12 and the cooling section furnace body 13 on the frame 4 are respectively provided with a furnace body heat-insulating layer, the driving roller supports are arranged on the frame outside the furnace body and the furnace body heat-insulating layer so as to be convenient for maintenance, and correspondingly, roller shaft holes opposite to the driving roller supports are formed on the preheating section furnace body 11, the sintering section furnace body 12, the cooling section furnace body 13 and the furnace body heat-insulating layer, so that the two ends of a roller shaft of the driving roller 6 penetrate through the furnace body and are erected on the driving roller supports.
Examples:
the embodiment provides a roller way sintering furnace with an adjustable furnace body partition speed, wherein the furnace body comprises a preheating process section 1, a high-temperature sintering process section 2 and a cooling process section 3, a preheating conveying mechanism, a sintering conveying mechanism and a cooling conveying mechanism are sequentially arranged along the material conveying direction, and a motor 7 in the three groups of conveying mechanisms is utilized to sequentially drive a driving roller 6 in the conveying mechanisms in the preheating process section 1, the high-temperature sintering process section 2 and the cooling process section 3 to rotate so as to drive materials to move;
the diameter range of the driving roller 6 is 35-40mm, a plurality of groups of roller holes are formed in two side surfaces of the furnace body, each group of roller holes comprises two roller holes which are opposite to each other, each roller hole penetrates through a furnace chamber of the furnace body, the heat insulation layer and the supporting side components, the roller shaft of each driving roller 6 correspondingly penetrates through one group of roller holes, the height deviation among the driving rollers is +/-1 mm, the distance range among the driving rollers is 30-100mm, and the conveying of sintered objects 17 with various sizes is facilitated;
one end of a driving roller 6 related to a preheating process section 1 of the furnace body is provided with a driving chain wheel 10, the driving chain wheel 10 is meshed with a driving chain 9 longitudinally arranged along the furnace body, the driving chain 9 is meshed with a chain wheel 8 on an output shaft of a speed reducer of a motor 7 arranged on a sintering furnace frame, so that a driving roller rod of the functional area synchronously rotates, and the driving speed is adjusted through the rotating speed of the motor 7;
the transmission mechanisms of the high-temperature sintering process section 2 and the cooling process section 3 are the same as those of the preheating process section 1, the transmission speed of the transmission mechanism of the preheating section is regulated by a first motor, the transmission speed of the transmission mechanism of the high-temperature sintering section is regulated by a second motor, the transmission speeds of the corresponding transmission mechanisms of the cooling section are regulated by a third motor, the transmission speeds of the three process sections are respectively and independently regulated, and the transmission speeds of the process sections can be increased or decreased according to the actual sintering process, so that the purposes of controlling the preheating effect, the sintering effect and the cooling effect are achieved;
in the embodiment, the preheating process section 1 is provided with the heating device 16, so that the sinter 17 in the preheating section can be heated, the temperature of the sinter is controlled to be between 200 and 600 ℃, and therefore, organic matters on the sinter 17 are heated, volatilized and decomposed, the air inlet pipe of the preheating section is arranged, the air flow atmosphere of each corner in the preheating section can be changed, the preheating effect of the sinter 17 is improved, and meanwhile, the waste gas in the preheating section can be timely discharged through the waste gas discharge pipeline, and the preheating effect of the sinter 17 is improved;
the sintering process section 2 is also provided with a heating device 16 to heat the sinter 17 in the high-temperature sintering section, so that the temperature is controlled between 600 ℃ and 900 ℃, residual organic matters on the sinter 17 are further removed, the sinter material on the sinter 17 is fully sintered, and an air inlet pipeline for high-temperature sintering is arranged to change the air flow atmosphere of each corner in the high-temperature sintering section, so that the sintering quality of the sinter 17 is improved;
the heating device 16 is also arranged on the cooling section in the embodiment, so that the temperature of the sinter 17 can be controlled, and the temperature control cooling of the sinter 17 is realized.
The utility model has the advantages of reasonable structure, flexible adjustment, simple maintenance and the like compared with the prior art, and effectively improves the sintering quality of the materials on the premise of not increasing the whole length of the equipment.
Claims (6)
1. The utility model provides a sectional type roll table fritting furnace for device sintering, is equipped with the frame, corresponds preheating process section, sintering process section, cooling process section on the frame and is equipped with preheating section furnace body, sintering section furnace body, cooling section furnace body that is linked together in proper order, its characterized in that is equipped with preheating conveying mechanism, sintering conveying mechanism, the cooling conveying mechanism that correspond preheating process section, sintering process section, cooling process section respectively on the frame, preheating conveying mechanism, sintering conveying mechanism, cooling conveying mechanism all include driving roller support, roller, driving roller and power pack, wherein the driving roller support sets up in the frame both sides, sets up the roller shaft hole on the driving roller support to be equipped with the bearing in roller shaft hole department, the driving roller is fixed on the roller, and the roller is established in the frame via the bearing frame, power pack includes motor, reduction gear, sprocket, drive chain, drive sprocket, the output shaft of motor links to each other with the reduction gear output shaft sprocket, is equipped with the drive sprocket on the roller, and the drive chain meshes with sprocket, drive sprocket respectively.
2. The sectional type roller way sintering furnace for device sintering according to claim 1, wherein the preheating section furnace body and the sintering section furnace body are respectively provided with an air inlet pipeline, an air outlet pipeline and a heating device, the heating devices are electric heaters and are fixed on the inner sides of the top and the bottom of the furnace body, the air inlet pipelines are all used for feeding air along the side face of the furnace body, and the air outlet pipeline is arranged at the top of the furnace body and is used for discharging waste gas in the manufacturing process.
3. The sectional roll table sintering furnace for device sintering according to claim 2, wherein the preheating section furnace body and the sintering section furnace body are provided with more than two air inlet pipelines at equal intervals on the side surfaces.
4. The sectional roll table sintering furnace for device sintering according to claim 1, wherein heaters are also arranged at the top and bottom of the inner side of the cooling section furnace body.
5. The sectional type roller way sintering furnace for device sintering according to claim 1, wherein more than two driving rollers which are arranged in parallel along the width direction of the frame are arranged in the preheating conveying mechanism, the sintering conveying mechanism and the cooling conveying mechanism, the diameter range of the driving rollers is 35-40mm, and the distance range between adjacent roller shafts is 30-100mm.
6. The sectional roller sintering furnace for device sintering according to claim 1, wherein the preheating section furnace body, the sintering section furnace body and the cooling section furnace body on the frame are respectively provided with a furnace body heat-insulating layer, the driving roller support is arranged on the frame outside the furnace body and the furnace body heat-insulating layer, and correspondingly, roller shaft holes opposite to the driving roller support are formed on the preheating section furnace body, the sintering section furnace body, the cooling section furnace body and the furnace body heat-insulating layer, so that two ends of a roller shaft of the driving roller penetrate through the furnace body and are erected on the driving roller support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321683481.1U CN220169939U (en) | 2023-06-29 | 2023-06-29 | Sectional roller way sintering furnace for device sintering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321683481.1U CN220169939U (en) | 2023-06-29 | 2023-06-29 | Sectional roller way sintering furnace for device sintering |
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| Publication Number | Publication Date |
|---|---|
| CN220169939U true CN220169939U (en) | 2023-12-12 |
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ID=89054306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321683481.1U Active CN220169939U (en) | 2023-06-29 | 2023-06-29 | Sectional roller way sintering furnace for device sintering |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220169939U (en) |
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2023
- 2023-06-29 CN CN202321683481.1U patent/CN220169939U/en active Active
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