CN220169172U - Laser heating device for gas storage steel cylinder - Google Patents
Laser heating device for gas storage steel cylinder Download PDFInfo
- Publication number
- CN220169172U CN220169172U CN202321616977.7U CN202321616977U CN220169172U CN 220169172 U CN220169172 U CN 220169172U CN 202321616977 U CN202321616977 U CN 202321616977U CN 220169172 U CN220169172 U CN 220169172U
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- China
- Prior art keywords
- temperature
- silicon carbide
- gas
- heating plate
- steel cylinder
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- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 29
- 239000010959 steel Substances 0.000 title claims abstract description 29
- 238000003860 storage Methods 0.000 title claims abstract description 14
- 238000004093 laser heating Methods 0.000 title claims abstract description 11
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 29
- 239000000835 fiber Substances 0.000 claims description 11
- 238000009413 insulation Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 abstract description 38
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract description 21
- 230000008020 evaporation Effects 0.000 abstract description 8
- 238000001704 evaporation Methods 0.000 abstract description 8
- 239000013307 optical fiber Substances 0.000 abstract description 4
- 230000033228 biological regulation Effects 0.000 abstract description 3
- 230000008859 change Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 2
- 238000005260 corrosion Methods 0.000 abstract description 2
- 230000002500 effect on skin Effects 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 abstract description 2
- 238000013021 overheating Methods 0.000 abstract description 2
- 230000004044 response Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 37
- 238000000034 method Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- 238000005485 electric heating Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The utility model relates to a laser heating device for a gas storage steel cylinder, which comprises a circular arc-shaped silicon carbide heating plate, wherein a gas steel cylinder is placed on the silicon carbide heating plate, the side surface of the silicon carbide heating plate is connected with an optical fiber laser generator, a temperature measuring sensor is also arranged on the silicon carbide heating plate, and the optical fiber laser generator and the temperature measuring sensor are connected with a temperature control system through signals. The silicon carbide heating plate is heated by laser, and the silicon carbide heating plate converts light energy into heat energy with a certain absorptivity, so that the temperature is raised to generate a heating effect, any pressure and temperature change of liquefied gas in the gas storage steel cylinder can be rapidly compensated, and meanwhile, the problem of gas cylinder corrosion caused by overheating can be prevented. The skin effect of the laser heater can enable the surface of the silicon carbide heating plate to be heated rapidly, the temperature is increased to the set temperature within a few seconds, the evaporation pressure and the evaporation flow of liquid gas in the steel cylinder are improved to be stable, and the laser heater has the advantages of rapid temperature rise, uniform heating, sensitive temperature regulation response, high heating efficiency and reliability and the like.
Description
Technical Field
The utility model relates to a laser heating device of a gas storage steel cylinder, in particular to a laser heating device of a gas storage steel cylinder of gas for semiconductor production.
Background
A large amount of high purity specialty gases are required in the semiconductor fabrication process films, chemical vapor deposition, etching, doping processes. In practical specialty gas supply systems, high purity specialty gases are typically stored in gas cylinders or gas tanks, where large horizontal tee/Y bottles are stored in rooms specially designed for gas storage.
Most gases such as NH 3 、SF 6 、CO 2 、PH 3 、N 2 O、Cl 2 And the like, in the gas decompression process, the high-purity special gases are in a liquefied state in a room temperature environment, so that the conditions of low pressure and insufficient evaporation flow are easily generated in the supply process, the production and manufacturing process end is influenced, the gas use efficiency is reduced, and the production cost is increased.
In the prior art, for heating a gas cylinder, the surface of the gas cylinder is usually heated by an electric heating wire heating belt (such as an automatic heating regulation and control liquefied gas cylinder disclosed in CN 214535662U), so that the heat conduction efficiency is low, the temperature control is unstable, and the problem that the pressure and the flow rate in actual gas supply do not meet the process requirements exists.
Disclosure of Invention
The utility model provides a laser heating device for a gas storage steel cylinder, which aims to overcome the defects in the prior art and effectively heat the gas steel cylinder.
The technical solution of the utility model is as follows: the silicon carbide heating plate is heated by laser, and the silicon carbide heating plate converts light energy into heat energy with a certain absorptivity, so that the temperature is raised to generate a heating effect, any pressure and temperature change of liquefied gas in the gas storage steel cylinder can be rapidly compensated, and meanwhile, the problem of gas cylinder corrosion caused by overheating can be prevented.
The skin effect of the laser heater can enable the surface of the silicon carbide heating plate to be heated rapidly, the temperature is increased to the set temperature within a few seconds, the evaporation pressure and the evaporation flow of liquid gas in the steel cylinder are improved to be stable, and compared with the electric heating wire heater in the prior art, the electric heating wire heater has the advantages of rapid temperature rise, uniform heating, sensitive temperature regulation response, high heating efficiency and reliability and the like. Can completely meet the requirements of the production and manufacturing process on the gas conveying pressure and flow.
Specifically, provide a gas storage steel bottle laser heating device, its structure includes convex carborundum hot plate, and the gas steel bottle is placed on the carborundum hot plate, and the fiber laser generator is connected to carborundum hot plate side, still is equipped with temperature sensor on the carborundum hot plate, and fiber laser generator and temperature sensor all are connected with temperature control system signal.
Preferably, in order to insulate the steel cylinder and reduce thermal attenuation, the outer side of the gas steel cylinder is sleeved with an insulation sleeve and reinforced by a fixing belt.
The utility model has the advantages that: 1) The high temperature is generated by irradiating the silicon carbide heating plate with a light beam of a high-power fiber laser. The method comprises the steps that laser beams are conducted through optical fibers to intensively irradiate a silicon carbide heating plate, after uniform induction current is formed on the surface of the heating plate, high temperature is generated and can be conducted to the surface of the whole silicon carbide heating plate, and therefore the method of uniform heating of the heating plate is achieved;
2) The temperature control system can accurately and rapidly measure the evaporation temperature and the evaporation pressure of the liquefied gas, and the temperature of a specific measuring point is acquired in real time by using a temperature measuring sensor for the heating plate core temperature control system and is fed back to the temperature control system. The temperature control system can adjust the power of the laser transmitter and the corresponding heating area according to the real-time temperature so as to reach the temperature set by the gas steel cylinder, thereby being beneficial to the instant monitoring and effective heating of the temperature instantaneous change of the steel cylinder in the liquefied gas evaporation using process.
Drawings
FIG. 1 is a schematic diagram of a laser heating device for a gas storage steel cylinder according to the present utility model.
Fig. 2 is a partial structural bottom view of fig. 1.
In the figure, a fiber laser generator 1, a silicon carbide heating plate 2, a temperature control system 3, a gas steel cylinder 4, a thermal insulation sleeve 5, a temperature measuring sensor 6 and a fixing belt 7 are arranged.
Detailed Description
The present utility model will be described in further detail with reference to examples and embodiments.
Examples
As shown in fig. 1 and 2, the laser heating device for the gas storage steel cylinders structurally comprises a circular arc-shaped silicon carbide heating plate 2, a gas steel cylinder 4 sleeved with a heat preservation sleeve 5 and reinforced by a fixing belt 7 is placed on the silicon carbide heating plate 2, the side surface of the silicon carbide heating plate 2 is connected with a fiber laser generator 1, a temperature measuring sensor 6 is further arranged on the silicon carbide heating plate 2, and the fiber laser generator 1 and the temperature measuring sensor 6 are in signal connection with a temperature control system 3.
The temperature control system 3 can adjust the high-frequency beam for heating emitted by the fiber laser generator 1 in real time according to the temperature of the silicon carbide heating plate 2 measured by the temperature sensor 6. The control does not involve any improvement in the control method and can be realized according to the prior art, for example, the following models can be selected respectively.
The model 3 temperature control system is OHR-A300.
The model number of the temperature measuring sensor 6 is MIA-AL-20 MEACON.
The model of the fiber laser generator 1 is RFL-C3000S Ruike laser.
The fiber laser generator 1 emits high-frequency light beams, the high-frequency light beams are transmitted to the surface of the silicon carbide heating plate 2 through the internal optical fibers, after induced current is formed on the surface of the silicon carbide heating plate 2, heat is generated by temperature rise, the heat is transmitted to the surface of the gas steel cylinder 4 through contact heat conduction and heat radiation, the temperature of the gas steel cylinder 4 rises to generate a heating effect, and finally, the steel cylinder heat insulation sleeve 5 is used for heat insulation, so that heat attenuation is reduced.
The above components are all of the prior art, and any model and existing design that can achieve their corresponding functions can be used by those skilled in the art.
The foregoing is merely a preferred embodiment of the present utility model, and it should be noted that modifications and improvements could be made by those skilled in the art without departing from the inventive concept, which falls within the scope of the present utility model.
Claims (2)
1. The utility model provides a gas storage steel bottle laser heating device, its characterized in that includes convex carborundum hot plate (2), and gas steel bottle (4) are placed on carborundum hot plate (2), and carborundum hot plate (2) side connection fiber laser generator (1), still are equipped with temperature sensor (6) on carborundum hot plate (2), and fiber laser generator (1) and temperature sensor (6) all are connected with temperature control system (3) signal.
2. The laser heating device of the gas storage steel cylinder as claimed in claim 1, wherein the outer side of the gas steel cylinder (4) is sleeved with a thermal insulation sleeve (5) and is reinforced by a fixing belt (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321616977.7U CN220169172U (en) | 2023-06-25 | 2023-06-25 | Laser heating device for gas storage steel cylinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321616977.7U CN220169172U (en) | 2023-06-25 | 2023-06-25 | Laser heating device for gas storage steel cylinder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220169172U true CN220169172U (en) | 2023-12-12 |
Family
ID=89052717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321616977.7U Active CN220169172U (en) | 2023-06-25 | 2023-06-25 | Laser heating device for gas storage steel cylinder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220169172U (en) |
-
2023
- 2023-06-25 CN CN202321616977.7U patent/CN220169172U/en active Active
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