CN220168107U

CN220168107U - Thermal management system

Info

Publication number: CN220168107U
Application number: CN202190000842.0U
Authority: CN
Inventors: 袁承均; 尹成友; 柳煐贤
Original assignee: Edwards Korea Ltd
Current assignee: Edwards Korea Ltd
Priority date: 2020-11-02
Filing date: 2021-11-01
Publication date: 2023-12-12
Anticipated expiration: 2031-11-01
Also published as: GB202017326D0; DE212021000495U1; KR20230001352U; TWM645939U; JP3244251U; WO2022091054A1; GB2600476A; TW202231997A; GB2600476B

Abstract

A thermal management system (100), comprising: a plurality of conduits fluidly connected together and configured to allow a cooling fluid to flow therethrough, the plurality of conduits including a cooling fluid inlet (102) configured to receive a supply of the cooling fluid; one or more valves (106 a-c) positioned along one or more of the plurality of conduits and configured to control a flow of the cooling fluid through the one or more of the plurality of conduits; and a restrictor (104) positioned along one or more of the plurality of conduits, the restrictor (104) being located between the cooling fluid inlet (102) and the one or more valves (106 a-c), and the restrictor (104) being configured to reduce the pressure of the cooling fluid such that the pressure of the cooling fluid at the one or more valves (106 a-c) is less than a supply pressure of the cooling fluid at the cooling fluid inlet (102).

Description

Thermal management system

Technical Field

The present utility model relates to a thermal management system for use with a vacuum pumping system.

Background

Thermal management systems are implemented in a variety of different applications to control the temperature of a device. The thermal management system may, for example, provide cooling to devices that generate excessive heat during operation, thereby improving reliability and preventing failure.

As an example, a thermal management system may be used to control the temperature of a pumping system including a dry vacuum pump. A dry vacuum pump or dry pump is a pump that does not use any liquid in the main pumping stage to create a vacuum or to provide cooling within the pump to maintain a particular desired operating temperature. Dry vacuum pumps are used in a variety of different industries (e.g., semiconductor manufacturing).

Disclosure of Invention

The thermal management system may include valves, such as solenoid valves, for controlling the flow of cooling liquid (such as water) through various conduits (i.e., pipes). The inventors have recognized that valves in conventional thermal management systems tend to be vulnerable to damage from a variety of factors including, but not limited to, hydraulic shock (i.e., water hammer). The inventors have also recognized that hydraulic shock in a thermal management system may be caused by a number of factors including, but not limited to, high supply pressure of the cooling fluid, and forced stopping or changing of the flow direction of the cooling fluid through the thermal management system.

Aspects of the present utility model tend to reduce the severity of hydraulic shock.

In one aspect, there is provided a thermal management system comprising: a plurality of conduits fluidly connected together and configured to allow a cooling fluid to flow therethrough, the plurality of conduits including a cooling fluid inlet configured to receive a supply of the cooling fluid; one or more valves positioned along one or more of the plurality of conduits and configured to control a flow of the cooling fluid through the one or more of the plurality of conduits; and a restrictor positioned along one or more of the plurality of conduits, the restrictor positioned between the cooling fluid inlet and the one or more valves, and the restrictor configured to reduce the pressure of the cooling fluid such that the pressure of the cooling fluid at the one or more valves is less than the supply pressure of the cooling fluid at the cooling fluid inlet.

In some aspects, no valve may be positioned between the cooling fluid inlet and the restrictor. In other words, in some aspects, the valve is located only downstream of the restrictor (in terms of cooling fluid flow).

The restrictor may be located at the cooling fluid inlet. The length of the conduit between the cooling fluid inlet and the inlet of the restrictor may be less than or equal to about 15cm.

The limiter may include: a first conduit including a first end and a second end opposite the first end; a second conduit including a first end and a second end opposite the first end; and a third conduit including a first end and a second end opposite the first end. The second end of the first conduit may be fluidly connected to the first end of the second conduit. The second end of the second conduit may be fluidly connected to the first end of the third conduit. The first conduit may have a first diameter. The second conduit may have a second diameter. The third conduit may have a third diameter. The second diameter may be smaller than the first diameter and the third diameter. The first diameter may be about 6mm. The second diameter may be about 3mm. The third diameter may be about 6mm.

For each of the one or more valves, the length of the conduit between the outlet of the restrictor and the inlet of the valve may be less than or equal to about 50cm.

The plurality of conduits may include a plurality of permanent cooling lines (constant cooling lines, invariable cooling lines, permanent cooling line), each permanent cooling line being a conduit between a cooling fluid inlet and a cooling fluid outlet of the thermal management system, wherein the one or more valves are not positioned along any of the plurality of permanent cooling lines.

The one or more valves may be solenoid valves.

In another aspect, a system is provided, comprising: one or more components that generate excessive heat during operation; and a thermal management system of any of the preceding aspects. The thermal management system is configured to provide cooling to one or more components.

The system may be a vacuum pumping system. The one or more components may include one or more vacuum pumps. The one or more vacuum pumps may include a dry vacuum pump and/or a mechanical booster pump. The mechanical booster pump may be mechanically coupled to the dry vacuum pump such that, in operation, the mechanical booster pump increases the pressure of fluid entering the dry vacuum pump. The plurality of conduits may include: a first regulated cooling line along which a first valve is positioned; a second regulated cooling line along which a second valve is positioned; a third regulated cooling line along which a third valve is positioned; a first permanent cooling line along which no valve is located; and a second permanent cooling line along which no valve is positioned. The dry pump may include: a dry pump driver; a dry pump end cap; a dry pump stator; a dry pump motor. The mechanical booster pump may include: a mechanical booster pump driver; a mechanical booster pump motor; and a mechanical booster pump end cover. The first conditioned cooling line may pass through or near the dry pump driver and the mechanical booster pump driver. The second conditioned cooling line may pass through or near the dry pump end cap. The third conditioned cooling line may pass through or near the dry pump stator. The first permanent cooling line may pass through or near the dry pump motor. The second permanent cooling line may pass through or near the mechanical booster pump motor and mechanical booster pump end cap.

In another aspect, there is provided a thermal management system comprising: a plurality of conduits fluidly connected together and configured to allow a cooling fluid to flow therethrough, the plurality of conduits including a cooling fluid inlet configured to receive a supply of the cooling fluid; and one or more valves positioned along one or more of the plurality of conduits and configured to control a flow of cooling fluid through one or more of the plurality of conduits. For each of the one or more valves, a length of the conduit between the cooling fluid inlet and the inlet of that valve is less than or equal to about 60cm.

In another aspect, there is provided a thermal management system comprising: a plurality of conduits fluidly connected together and configured to allow a cooling fluid to flow therethrough, the plurality of conduits including a cooling fluid inlet configured to receive a supply of the cooling fluid and a cooling fluid outlet from which the cooling fluid exits the plurality of conduits; and one or more valves positioned along one or more of the plurality of conduits and configured to control a flow of cooling fluid through one or more of the plurality of conduits. The plurality of conduits includes a plurality of permanent cooling lines, each permanent cooling line being a conduit between a cooling fluid inlet and a cooling fluid outlet, wherein the one or more valves are not positioned along any of the plurality of permanent cooling lines.

The system may be a vacuum pumping system. The one or more components may include a dry vacuum pump and/or a mechanical booster pump. The mechanical booster pump may be mechanically coupled to the dry vacuum pump such that, in operation, the mechanical booster pump increases the pressure of fluid entering the dry vacuum pump.

Drawings

FIG. 1 is a schematic diagram (not to scale) of a thermal management system;

FIG. 2 is a schematic diagram (not to scale) of a side view of a thermal management system;

FIG. 3 is a schematic diagram (not to scale) showing three perspective views of a portion of a thermal management system; and

FIG. 4 is a schematic diagram (not to scale) showing further details of a fluid flow restrictor of a thermal management system.

Detailed Description

In the drawings, like reference numerals refer to like elements.

FIG. 1 is a block diagram of an embodiment of a Thermal Management System (TMS) 100. In this embodiment, TMS 100 is used to control the temperature of the various elements of the vacuum pumping system.

Fig. 2 is a schematic diagram (not to scale) of a side view of TMS 100.

Fig. 3 is a schematic diagram (not to scale) showing three perspective views of a portion of TMS 100.

TMS 100 includes a cooling liquid input 102, a restrictor 104, a solenoid valve 106 (which itself includes a first valve 106a, a second valve 106b, and a third valve 106 c), a dry pump driver 108, a mechanical booster pump driver 110, a dry pump end cap 112, a dry pump stator 114, a dry pump motor 116, a mechanical booster pump motor 118, a mechanical booster pump end cap 120, and a cooling liquid output 122.

In this embodiment, the dry pump driver 108, dry pump end cap 112, dry pump stator 114, and dry pump motor 116 are components of a conventional dry vacuum pump. Also, the mechanical booster pump driver 110, the mechanical booster pump motor 118, and the mechanical booster pump end cap 120 are components of a conventional mechanical booster pump. The mechanical booster pump and the dry vacuum pump may be arranged to pump process gases from a facility (not shown) such as a semiconductor manufacturing facility. The mechanical booster pump may be mechanically coupled to the dry vacuum pump such that, in operation, the mechanical booster pump increases the pressure of the process gas entering the dry vacuum pump. Operation of the mechanical booster pump tends to increase the pumping efficiency of the dry vacuum pump.

In this embodiment, the dry pump driver 108 is a driver or inverter for controlling the dry pump motor 116. The dry pump driver 108 may include one or more circuit boards.

In this embodiment, the mechanical booster pump driver 110 is a driver or inverter for controlling the mechanical booster pump motor 118. The mechanical booster pump driver 110 may include one or more circuit boards.

In this embodiment, dry pump end cap 112 may contain bearings, gears, and/or a lubrication system including lubricating oil. The dry pump end cap 112 may support rotation of the rotor and shaft of the dry pump. In operation, dry pump end cap 112 may generate excessive heat.

In this embodiment, the dry pump stator 114 is a stator of a dry pump. In operation, the dry pump stator 114 may generate excessive heat or be heated by other components of the dry pump.

In this embodiment, the dry pump motor 116 is a motor of a dry pump and is configured to be driven or controlled by the dry pump driver 108. The dry pump motor 116 may be a conventional motor. In operation, the dry pump motor 116 may generate excessive heat.

In this embodiment, the mechanical booster pump motor 118 is a motor of a mechanical booster pump and is configured to be driven or controlled by the mechanical booster pump driver 110. The mechanical booster pump motor 118 may be a conventional motor. In operation, the mechanical booster pump motor 118 may generate excessive heat.

In this embodiment, the mechanical booster pump end cap 120 may contain bearings, gears, and/or a lubrication system including lubrication oil. The mechanical booster pump end cap 120 may support rotation of the rotor and shaft of the mechanical booster pump. In operation, the mechanical booster pump end cap 120 may generate excessive heat.

For brevity, further details of conventional mechanical booster pumps and dry vacuum pumps are not provided herein.

The cooling liquid inlet 102 includes a conduit configured to receive cooling fluid from a cooling fluid source (not shown). The cooling fluid may be water. The cooling fluid supply may be a tap water supply. The cooling liquid input 102 is fluidly connected to the restrictor 104 such that cooling fluid received at the cooling liquid input 102 flows (e.g., directly) to the restrictor 104.

In this embodiment, restrictor 104 is located at cooling liquid inlet 102, substantially at or near the point where the cooling fluid enters TMS 100. For example, the restrictor 104 may be located within about 15cm of the point where the cooling fluid enters the TMS 100. More preferably, the restrictor 104 may be located within less than or equal to about 10cm (e.g., about 5cm-6 cm) of the point at which the cooling fluid enters the TMS 100. The cooling fluid flowing into the TMS 100 may first flow through the limiter 104, i.e. the limiter 104 may be arranged such that it is the first TMS component through which the cooling fluid flows. Restrictor 104 is a device configured to reduce the pressure of the supplied cooling liquid. Thus, the pressure of the cooling liquid entering the TMS 100 is reduced before the cooling liquid flows through the TMS 100 to the other elements 106-122 of the TMS 100. Restrictor 104 restricts the flow rate of cooling fluid flowing through it.

Fig. 4 is a schematic diagram (not to scale) showing further details of limiter 104. After the limiter 104 and fig. 4 are described, the remaining elements of fig. 1-3 will be described in more detail later below.

In this embodiment, the restrictor 104 comprises a first conduit or duct 401, a second conduit or duct 402 and a third conduit or duct 403. The first, second and third conduits 401, 402, 403 may be integrally formed.

The first conduit 401 includes a first end and a second end opposite the first end. A first end of the first conduit 401 is fluidly connected to the cooling liquid inlet 102. The second end of the first conduit 401 is in fluid connection with a second conduit 402. The first conduit 401 has a first diameter. The first diameter may be any suitable diameter, for example between 5mm and 10mm, for example about 6mm.

The second conduit 402 includes a first end and a second end opposite the first end. A first end of the second conduit 402 is fluidly connected to a second end of the first conduit 401. A second end of the second conduit 402 is fluidly connected to a third conduit 403. The second conduit 402 has a second diameter. The second diameter is smaller than the first diameter. The second diameter may be between 2mm and 5mm, for example about 3mm.

The third conduit 403 includes a first end and a second end opposite the first end. A first end of the third conduit 403 is fluidly connected to a second end of the second conduit 402. A second end of the third conduit 403 is the outlet of the restrictor 104. The third conduit 403 has a third diameter. The third diameter is greater than the second diameter. The third diameter may be approximately equal to the first diameter. The third diameter may be between 5mm and 10mm, for example about 6mm.

Preferably, the restrictor 104 is located at or near the cooling liquid inlet 102 such that the distance D between the point at which the cooling fluid enters the TMS 100 and the second conduit 402 is less than or equal to about 15cm, or more preferably less than or equal to about 10cm, or more preferably about 5cm-6cm.

In this embodiment, the cooling fluid received at the inlet flows through the restrictor 104, and in turn through the first, second and third conduits 401, 402, 403. The second conduit 402 having a reduced diameter compared to the first conduit 401 and the third conduit 403 (e.g., about 3mm compared to about 6 mm) causes the cooling fluid in the third conduit 403 to have a reduced pressure compared to the pressure of the cooling fluid in the first conduit 401. For example, a cooling fluid supplied at the cooling liquid input 102 having a supply pressure of about 5.57bar (g) (557 kPa) may be reduced in pressure to about 2.44bar (g) (244 kPa) by the restrictor 104 having a minimum diameter of 3mm.

Advantageously, such a decrease in cooling fluid pressure at or near the cooling fluid input 102 caused by the restrictor 104 tends to reduce peak pressures experienced by those elements 106-122, such as during a hydraulic shock event, before the cooling fluid impinges on the other elements 106-122 (particularly the valves 106 a-c) of the TMS 100.

Returning now to the description of fig. 1-3, the outlet of the restrictor 104 (i.e., the second end of the third conduit 403) is fluidly connected to each of the first valve 106a, the second valve 106b, the third valve 106c, the dry pump motor 116, and the mechanical booster pump motor 118. In operation, cooling fluid flows from the limiter 104 to each of the first valve 106a, the second valve 106b, the third valve 106c, the dry pump motor 116, and the mechanical booster pump motor 118. The conduit or tubing connecting the limiter 104 to each of these elements 106a-c, 116, 118 may be a branched conduit, i.e. a conduit that is split into multiple branches, each branch being connected to a respective one of the elements 106a-c, 116, 118.

In this embodiment, the first valve 106a is a solenoid valve. The inlet of the first valve 106a is fluidly connected to the outlet of the restrictor 104. The outlet of the first valve 106a is coupled to a conduit that passes through or near the dry pump driver 108, the mechanical booster pump driver 110, and then to the cooling fluid outlet 122. The first valve 106a is configured to control the flow of cooling fluid therethrough, thereby controlling the flow of cooling fluid to the dry pump driver 108 and the mechanical booster pump driver 110. The first valve 106a may be controlled by a controller (not shown). The conduit through the first valve 106a, through or near the dry pump driver 108, and through or near the mechanical booster pump driver 110 may be considered a "regulated" cooling fluid line because the flow of cooling fluid through the line is regulated by the first valve 106 a. This conduit is hereinafter referred to as the "first regulated cooling line" and is denoted by reference numeral 131 in fig. 1.

In some embodiments, the first valve 106a may be closed to prevent the flow of cooling fluid therethrough, or open to allow the flow of cooling fluid therethrough. In operation, with the first valve 106a open, cooling fluid flows from the restrictor 104 through the first valve 106a, then through or near the dry pump driver 108, then through or near the mechanical booster pump driver 110, and then out of the TMS 100 via the cooling fluid outlet 122. The cooling fluid passing through or near the dry pump driver 108 and the mechanical booster pump driver 110 provides cooling to these elements 108, 110, thereby improving reliability and preventing failure.

In this embodiment, the second valve 106b is a solenoid valve. The inlet of the second valve 106b is fluidly connected to the outlet of the restrictor 104. The outlet of the second valve 106b is coupled to a conduit through or near the dry pump end cap 112 and then to the cooling fluid outlet 122. The cooling fluid flowing through the dry pump end cap 112 may cool the components of the dry pump end cap 112, including the lubrication oil contained therein. The second valve 106b is configured to control the flow of cooling fluid therethrough, thereby controlling the flow of cooling fluid to the dry pump end cap 112. The second valve 106b may be controlled by a controller (not shown). The conduit passing through the second valve 106b and through or near the dry pump end cap 112 may be considered a "regulated" cooling fluid line because the flow of cooling fluid through the line is regulated by the second valve 106 b. This conduit is hereinafter referred to as the "second regulated cooling line" and is denoted by reference numeral 132 in fig. 1.

In some embodiments, the second valve 106b may be closed to prevent the flow of cooling fluid therethrough, or open to allow the flow of cooling fluid therethrough. In operation, with the second valve 106b open, cooling fluid flows from the restrictor 104 through the second valve 106b, then through or near the dry pump end cap 112, and then out of the TMS 100 via the cooling fluid outlet 122. The cooling fluid passing through or near the dry pump end cap 112 provides cooling to the dry pump end cap 112, thereby improving reliability and preventing failure.

In this embodiment, the third valve 106c is a solenoid valve. The inlet of the third valve 106c is fluidly connected to the outlet of the restrictor 104. The outlet of the third valve 106c is coupled to a conduit passing through or near the dry pump stator 114 and then to the cooling fluid outlet 122. The third valve 106c is configured to control the flow of cooling fluid therethrough, thereby controlling the flow of cooling fluid to the dry pump stator 114. The third valve 106c may be controlled by a controller (not shown). The conduit passing through the third valve 106c and through or near the dry pump stator 114 may be considered a "regulated" cooling fluid line because the flow of cooling fluid through that line is regulated by the third valve 106 c. This conduit is hereinafter referred to as the "third regulated cooling line" and is denoted by reference numeral 133 in fig. 1.

In some embodiments, the third valve 106c may be closed to prevent the flow of cooling fluid therethrough, or open to thereby allow the flow of cooling fluid therethrough. In operation, with the third valve 106c open, cooling fluid flows from the restrictor 104 through the third valve 106c, then through or near the dry pump stator 114, and then out of the TMS 100 via the cooling fluid outlet 122. The cooling fluid passing through or near the dry pump stator 114 provides cooling to the dry pump stator 114, thereby improving reliability and preventing failure.

In this embodiment, each of the valves 106a-c is located physically near the outlet of the restrictor 104, i.e., physically near the supply of cooling fluid. For example, the outlet of the restrictor 104 is connected to the inlet of each of the valves 106a-c by relatively short lengths of tubing. Preferably, the length of the piping or tubing connecting the outlet of the restrictor 104 to each of the valve inlets is minimized. The length of such piping or tubing may be application dependent.

In this embodiment, the length of the tubing or conduit connecting the outlet of the restrictor 104 to the first valve 106a is less than or equal to about 50cm. More preferably, the length is less than or equal to about 40cm, such as about 35cm to 40cm, such as about 37cm. Preferably, the length of the piping or conduit connecting the cooling liquid input 102 to the first valve 106a is less than or equal to about 60cm, or more preferably less than or equal to about 50cm, or more preferably less than or equal to about 45cm, such as about 43-44cm.

In this embodiment, the length of the tubing or conduit connecting the outlet of the restrictor 104 to the second valve 106b is less than or equal to about 50cm. More preferably, the length is less than or equal to about 40cm, such as about 35cm to 40cm, such as about 38cm. Preferably, the length of the piping or conduit connecting the cooling liquid input 102 to the second valve 106b is less than or equal to about 60cm, or more preferably less than or equal to about 50cm, or more preferably less than or equal to about 45cm, such as about 44-45cm.

In this embodiment, the length of the tubing or conduit connecting the outlet of restrictor 104 to third valve 106c is less than or equal to about 50cm. More preferably, the length is less than or equal to about 40cm, such as about 35cm to 40cm, such as about 33cm to 34cm. Preferably, the length of the piping or conduit connecting the cooling liquid input 102 to the third valve 106c is less than or equal to about 60cm, or more preferably less than or equal to about 50cm, or more preferably less than or equal to about 45cm, such as about 39-40cm.

The piping or conduits connecting the outlet of restrictor 104 to valves 106a-c are shown in more detail in fig. 3.

Advantageously, the reduced (e.g., minimized) distance or conduit length between the valves 106a-c and the restrictor 104 tends to reduce the peak pressure experienced by the valves 106a-c during a hydraulic shock event. For example, the relatively short length of tubing or conduit between the valves 106a-c and the restrictor 104 tends to mean that a reduced volume of cooling liquid is located between the valves 106a-c and the restrictor 104. In the event of a hydraulic shock/water hammer, for example, due to valve closure, the reduced volume of cooling liquid tends to result in a reduction in peak pressure and a reduction in energy experienced by the valves 106 a-c.

The outlet of restrictor 104 is coupled to a conduit passing through or near dry pump motor 116 and then to cooling fluid outlet 122. Thus, in operation, cooling fluid flows from the restrictor 104 through or near the dry pump motor 116 and then out of the TMS 100 via the cooling fluid outlet 122. The cooling fluid passing through or near the dry pump motor 116 provides cooling to the dry pump motor 116, thereby improving reliability and preventing failure.

In this embodiment, the conduit connecting the outlet of restrictor 104 to cooling fluid outlet 122 and passing through or near dry pump motor 116 is a valveless conduit. In other words, no valve is located on the cooling fluid line that runs from the restrictor 104 through or near the dry pump motor 116 to the cooling fluid outlet 122. As such, the conduit may be considered a "permanent" cooling fluid line because the flow of cooling fluid through the line is not regulated by the valves 106a-c, although in some embodiments it may be regulated by the restrictor 104 or another valve. This conduit is hereinafter referred to as the "first permanent cooling line" and is denoted by reference numeral 141 in fig. 1. In this embodiment, the dry pump motor 116 is continuously cooled by coolant in the first permanent cooling line 141.

The outlet of the restrictor 104 is coupled to a conduit that in turn flows through or near the mechanical booster pump motor 118, through or near the mechanical booster pump end cap 120, and then to the cooling fluid outlet 122. Thus, in operation, cooling fluid flows from the restrictor 104 through or near the mechanical booster pump motor 118, through or near the mechanical booster pump end cap 120, and then out of the TMS 100 via the cooling fluid outlet 122. The cooling fluid passing through or near the mechanical booster pump motor 118 and mechanical booster pump end cap 120 provides cooling for these elements 118, 120, thereby improving reliability and preventing failure.

In this embodiment, the conduit connecting the outlet of the restrictor 104 to the cooling fluid outlet 122 and through or near the mechanical booster pump motor 118 and mechanical booster pump end cap 120 is a valveless conduit. In other words, no valve is located on the cooling fluid line from the restrictor 104 that runs through or near the mechanical booster pump motor 118 and then through or near the mechanical booster pump end cap 120 to the cooling fluid outlet 122. As such, the conduit may be considered a "permanent" cooling fluid line because the flow of cooling fluid through the line is not regulated by the valves 106a-c, although in some embodiments it may be regulated by the restrictor 104 or another valve. This conduit is hereinafter referred to as the "second permanent cooling line" and is denoted by reference numeral 142 in fig. 1. In this embodiment, the mechanical booster pump motor 118 and mechanical booster pump end cap 120 are continuously cooled by coolant in the second permanent cooling line 142.

Advantageously, with all valves 106a-c closed to prevent the flow of cooling fluid through the regulated cooling lines 131-133, the flow of cooling fluid is split between the two permanent cooling lines 141-142. This advantageously tends to provide improved pressure relief compared to systems comprising only a single permanent cooling line. The pressure of the cooling fluid within the two permanent cooling lines 141-142 tends to decrease compared to the case where only a single permanent cooling line is present or available. Such improved pressure relief and reduction of fluid pressure tends to reduce the severity of the hydraulic shock and may provide reduced peak pressures and lower energy experienced by, for example, valves 106 a-c.

Advantageously, the above TMS tends to reduce the hydraulic shock to which its components are subjected. The reduction of hydraulic shock may be achieved by the above-described reduction of the supply pressure of the cooling fluid into the TMS. By the above-described reduction of the physical distance of the valve from the cooling fluid inlet, a reduced hydraulic impact on the valve may be achieved. Reduced hydraulic shock may be achieved by the above-described plurality of permanent cooling lines, which tends to provide improved pressure spike relief.

Advantageously, the above-described TMS tends to reduce damage to and failure of the solenoid valve. Thus, repair and maintenance costs, and downtime of the TMS and thus the vacuum pumping system, tend to be reduced.

In the above embodiments, the TMS is that of a vacuum pumping system comprising two pumps coupled together, namely a mechanical booster pump and a dry vacuum pump. However, in other embodiments, TMS is used to control the temperature of different types of systems (such as engines) or different vacuum pumping systems. For example, in other embodiments, the vacuum pumping system includes a different number of pumps. For example, in some embodiments, only a single pump (e.g., only a mechanical booster pump, or only a dry vacuum pump) is implemented. In systems comprising multiple pumps, the pumps may be coupled together such that fluid is pumped from one pump to another, or the pumps may operate independently of one another. In some embodiments, the vacuum pumping system comprises a different type of pump than one or both of a mechanical booster pump and a dry vacuum pump. In some embodiments, the pump system includes one or more pumps, wherein oil is used to provide lubrication (e.g., to dynamic components) within the main pumping chamber/stage. The TMS described above may be used to control the temperature of the oil within the main pumping chamber/stage.

In the above embodiment, the cooling fluid is water. However, in other embodiments, a different type of cooling fluid, such as oil, is used.

In the above embodiment, the TMS includes three regulated cooling lines, each with a corresponding solenoid valve. However, in other embodiments, the TMS includes a different number of regulated cooling lines, such as one, two, four, five, six, seven, eight, nine, ten, or more than ten regulated cooling lines. Each regulated cooling line may include a respective solenoid valve or other fluid regulating device configured to control fluid flow.

In the above embodiments, the TMS includes two permanent cooling lines. However, in other embodiments, the TMS includes a different number of permanent cooling lines, such as one, three, four, five, six, seven, eight, nine, ten, or more than ten permanent cooling lines. Preferably, a plurality of permanent cooling lines are used.

Reference character legend

100-thermal management system

102-Cooling liquid inlet

104-limiter

106-electromagnetic valve

106 a-first valve

106 b-second valve

106 c-third valve

108-dry pump driver

110-mechanical booster pump driver

112-dry pump end cap

114-dry pump stator

116-dry pump motor

118-mechanical booster pump motor

120-mechanical booster pump end cover

122-Cooling liquid output

131-first conditioned cooling line

132-second regulated cooling line

133-third modulated cooling line

141-first permanent cooling line

142-second permanent cooling line

401-first conduit

402-second catheter

403-third catheter

Claims

1. A thermal management system, the thermal management system comprising:

a plurality of conduits fluidly connected together and configured to allow a cooling fluid to flow therethrough, the plurality of conduits including a cooling fluid inlet configured to receive a supply of the cooling fluid;

one or more valves positioned along one or more of the plurality of conduits and configured to control a flow of the cooling fluid through the one or more of the plurality of conduits; and

a restrictor positioned along one or more of the plurality of conduits, the restrictor positioned between the cooling fluid inlet and the one or more valves, and the restrictor configured to reduce the pressure of the cooling fluid such that the pressure of the cooling fluid at the one or more valves is less than a supply pressure of the cooling fluid at the cooling fluid inlet.

2. The thermal management system of claim 1, wherein the restrictor is located at the cooling fluid inlet or a length of conduit between the cooling fluid inlet and an inlet of the restrictor is less than or equal to about 15cm.

3. The thermal management system of claim 1 or 2, wherein,

the limiter comprises:

a first conduit including a first end and a second end opposite the first end;

a second conduit including a first end and a second end opposite the first end; and

a third conduit including a first end and a second end opposite the first end;

the second end of the first conduit is fluidly connected to the first end of the second conduit;

the second end of the second conduit is fluidly connected to the first end of the third conduit;

the first conduit has a first diameter;

the second conduit having a second diameter;

the third conduit having a third diameter; and

the second diameter is smaller than the first diameter and the third diameter.

4. The thermal management system of claim 3, wherein the first diameter is about 6mm, the second diameter is about 3mm, and the third diameter is about 6mm.

5. The thermal management system of claim 1 or 2, wherein, for each of the one or more valves, a length of conduit between an outlet of the restrictor and an inlet of the valve is less than or equal to about 50cm.

6. The thermal management system of claim 1 or 2, wherein the plurality of conduits comprises a plurality of permanent cooling lines, each permanent cooling line being a conduit between the cooling fluid inlet and cooling fluid outlet of the thermal management system, wherein the one or more valves are not positioned along any of the plurality of permanent cooling lines.

7. The thermal management system of claim 1 or 2, wherein the one or more valves are solenoid valves.

8. A system, the system comprising:

one or more components that generate excessive heat during operation; and

the thermal management system of any one of claims 1-7, wherein the thermal management system is configured to provide cooling to the one or more components.

9. The system of claim 8, wherein the system is a vacuum pumping system and the one or more components comprise one or more vacuum pumps.

10. The system of claim 9, wherein the one or more vacuum pumps comprise a dry vacuum pump and a mechanical booster pump mechanically coupled to the dry vacuum pump such that, in operation, the mechanical booster pump increases the pressure of fluid entering the dry vacuum pump.

11. The system of claim 10, wherein:

the plurality of conduits includes:

a first regulated cooling line along which a first valve is positioned;

a second regulated cooling line along which a second valve is positioned;

a third regulated cooling line along which a third valve is positioned;

a first permanent cooling line, no valve being located along the first permanent cooling line; and

a second permanent cooling line, no valve being located along the second permanent cooling line; the dry pump includes:

a dry pump driver;

a dry pump end cap;

a dry pump stator; and

a dry pump motor;

the mechanical booster pump includes:

a mechanical booster pump driver;

a mechanical booster pump motor; and

a mechanical booster pump end cover;

the first conditioned cooling line passes through or near the dry pump driver and the mechanical booster pump driver;

the second conditioned cooling line passes through or near the dry pump end cap;

the third conditioned cooling line passes through or near the dry pump stator;

the first permanent cooling line passes through or near the dry pump motor; and

the second permanent cooling line passes through or near the mechanical booster pump motor and the mechanical booster pump end cap.

12. A thermal management system, the thermal management system comprising:

a plurality of conduits fluidly connected together and configured to allow a cooling fluid to flow therethrough, the plurality of conduits including a cooling fluid inlet configured to receive a supply of the cooling fluid; and

one or more valves positioned along one or more of the plurality of conduits and configured to control a flow of the cooling fluid through the one or more of the plurality of conduits; wherein the method comprises the steps of

For each of the one or more valves, a length of the conduit between the cooling fluid inlet and the inlet of that valve is less than or equal to about 60cm.

13. A thermal management system, the thermal management system comprising:

a plurality of conduits fluidly connected together and configured to allow a cooling fluid to flow therethrough, the plurality of conduits comprising: a cooling fluid inlet configured to receive a supply of the cooling fluid; and a cooling fluid outlet from which the cooling fluid exits the plurality of conduits; and

The plurality of conduits includes a plurality of permanent cooling lines, each permanent cooling line being a conduit between the cooling fluid inlet and the cooling fluid outlet, wherein the one or more valves are not positioned along any of the plurality of permanent cooling lines.

14. A system, the system comprising:

one or more components that generate excessive heat during operation; and

the thermal management system of any of claims 12 or 13, wherein the thermal management system is configured to provide cooling to the one or more components.

15. The system of claim 14, wherein the system is a vacuum pumping system and the one or more components include a dry vacuum pump and a mechanical booster pump mechanically coupled to the dry vacuum pump such that, in operation, the mechanical booster pump increases the pressure of fluid entering the dry vacuum pump.