CN220161510U - Dustproof and anti-fragmentation device for laser scribing - Google Patents
Dustproof and anti-fragmentation device for laser scribing Download PDFInfo
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- CN220161510U CN220161510U CN202321642125.5U CN202321642125U CN220161510U CN 220161510 U CN220161510 U CN 220161510U CN 202321642125 U CN202321642125 U CN 202321642125U CN 220161510 U CN220161510 U CN 220161510U
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- Prior art keywords
- block
- lifting
- laser scribing
- lifting mechanism
- objective table
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- 238000013467 fragmentation Methods 0.000 title claims description 5
- 238000006062 fragmentation reaction Methods 0.000 title claims description 5
- 238000009434 installation Methods 0.000 claims description 16
- 239000000428 dust Substances 0.000 claims description 11
- 230000002265 prevention Effects 0.000 claims description 8
- 239000012634 fragment Substances 0.000 abstract description 13
- 235000012431 wafers Nutrition 0.000 description 9
- 238000005520 cutting process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model relates to the technical field of wafer processing equipment, in particular to a dustproof and anti-fragment device for laser scribing, which comprises a base, wherein a vertical supporting arm is fixedly arranged on the base, one side of the supporting arm is provided with a lifting mechanism moving along the vertical direction, the lifting end of the lifting mechanism is connected with a horizontal supporting frame, the supporting frame is positioned on one side surface close to an objective table, and one end of the supporting frame far away from the lifting mechanism is provided with a hairbrush; when the lifting mechanism drives the supporting frame to move along the vertical direction, the hairbrush can be close to or far away from the objective table. During operation, when the objective table rotates, the fragments on the objective table are cleaned through the hairbrush, so that the objective table can be kept clean, the objective table is automatically cleaned, and the processing cost is reduced.
Description
Technical Field
The utility model relates to the technical field of wafer processing equipment, in particular to a dustproof and anti-fragmentation device for laser scribing.
Background
A laser dicing saw is an apparatus for dicing wafers. The laser scribing machine in the prior art comprises a workbench, a rotatable objective table is arranged on the upper side of the workbench, a cutting disc is arranged in the middle of the objective table, and a laser generator is arranged on one side of the workbench. When the wafer is cut, the wafer to be processed is placed on the objective table, negative pressure is generated on the inner side of the cutting disc, and the wafer to be processed is adsorbed to be fixed on the upper side of the objective table. In the cutting process, fragments can be generated on the upper side of the objective table, and when continuous processing is carried out, the fragments can influence the positioning of the wafer to be processed, and in the prior art, the objective table is generally cleaned by manpower, so that the labor cost is relatively high.
Disclosure of Invention
(one) solving the technical problems
Aiming at the defects of the prior art, the utility model provides the dustproof and anti-fragment device for laser scribing, which is used for cleaning fragments on the objective table through the hairbrush when the objective table rotates in working, so that the objective table can be kept clean, the objective table is automatically cleaned, and the processing cost is reduced.
(II) technical scheme
In order to achieve the above purpose, the embodiment of the utility model provides a device for preventing dust and fragments of laser scribing, which comprises a base, wherein a vertical supporting arm is fixedly arranged on the base, a lifting mechanism which moves along the vertical direction is arranged on one side of the supporting arm, a horizontal supporting frame is connected to the lifting end of the lifting mechanism, the supporting frame is positioned on one side surface close to an objective table, and a hairbrush is arranged at one end of the supporting frame far away from the lifting mechanism; when the lifting mechanism drives the supporting frame to move along the vertical direction, the hairbrush can be close to or far away from the objective table.
Preferably, the lifting mechanism comprises a lifting block, the lifting block is connected with the supporting frame, a vertical guide plate is arranged on one side of the supporting arm, a first installation block and a second installation block are respectively fixed at the upper end and the lower end of the guide plate, and the first installation block is positioned above the second installation block; the first mounting block and the second mounting block are fixedly connected with the supporting arm respectively; the lifting block is provided with a vertical chute, and the guide plate penetrates through the chute; the upper side of the supporting arm is provided with a driving piece for driving the lifting block to lift.
Preferably, the driving piece comprises a cylinder or an oil cylinder, and a piston rod of the cylinder or the oil cylinder penetrates through the first mounting block and is connected with the lifting block; and a piston rod of the air cylinder or the oil cylinder is in sliding connection with the first mounting block.
Preferably, the driving piece comprises a driving motor fixed on the top of the supporting arm, a screw rod is rotatably arranged between the first mounting block and the second mounting block, and an output shaft of the driving motor is connected with the screw rod and drives the screw rod to rotate; the lifting block is provided with a vertical threaded hole, and the screw rod penetrates through the threaded hole and is in threaded connection with the threaded hole.
Preferably, the support frame is of a telescopic frame structure.
Preferably, the support frame comprises a fixing frame fixed on one side of the lifting block, the fixing frame is U-shaped, one side of the opening of the fixing frame is positioned at one end far away from the lifting block, a telescopic groove is formed in the inner side of the fixing frame, a sliding plate is connected in the telescopic groove in a sliding mode, and one end, far away from the lifting block, of the sliding plate is fixedly connected with the hairbrush; the outside threaded connection of mount has the locking screw, the locking screw passes the one end of mount is located in the expansion tank, when the locking screw is screwed tight the sliding plate.
Preferably, a plurality of locking screws are arranged at intervals.
(III) beneficial effects
The utility model provides a dustproof and anti-fragment device for laser scribing, which is characterized in that when a wafer is required to be placed on an objective table during feeding, a lifting mechanism is controlled to drive a supporting frame to ascend, when the device works, the lifting mechanism is controlled to drive the supporting frame to descend so that a hairbrush is close to the objective table, and when the objective table rotates, fragments on the objective table are cleaned through the hairbrush, so that the objective table can be kept clean, the objective table is automatically cleaned, and the processing cost is reduced. Meanwhile, the horizontal position of the hairbrush can be adjusted through the supporting frame, so that the hairbrush position can be adjusted conveniently, and the hairbrush is suitable for objective tables with different sizes.
Drawings
FIG. 1 is a schematic view of a laser scribing dust and debris prevention device;
FIG. 2 is a schematic view of a protruding driver in a laser scribing dust and debris prevention device according to the present utility model;
fig. 3 is a cross-sectional view of a protruding support frame in a laser scribing dust and debris prevention device according to the present utility model.
The reference numerals in the drawings:
100. a base; 200. a support arm; 300. a lifting mechanism; 310. a lifting block; 311. a chute; 312. a threaded hole; 320. a guide plate; 330. a first mounting block; 340. a second mounting block; 350. a driving member; 351. a cylinder or an oil cylinder; 352. a driving motor; 353. a screw rod; 400. a support frame; 410. a fixing frame; 411. a telescopic slot; 420. a sliding plate; 430. locking the screw; 500. a brush; 600. and a stage.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1
The utility model provides a device for preventing dust and fragments of laser scribing, which is shown in fig. 1-2, and comprises a base 100, wherein a vertical supporting arm 200 is fixedly arranged on the base 100, a lifting mechanism 300 which moves along the vertical direction is arranged on one side of the supporting arm 200, a horizontal supporting frame 400 is connected to the lifting end of the lifting mechanism 300, the supporting frame 400 is positioned on one side surface close to an objective table 600, and a hairbrush 500 is arranged at one end, far away from the lifting mechanism 300, of the supporting frame 400; when the lifting mechanism 300 drives the support 400 to move in the vertical direction, the brush 500 can approach or separate from the stage 600. During loading, when a wafer needs to be placed on the objective table 600, the lifting mechanism 300 is controlled to drive the support 400 to ascend, and when the machine works, the lifting mechanism 300 is controlled to drive the support 400 to descend, so that the hairbrush 500 is close to the objective table 600, and when the objective table 600 rotates, fragments on the objective table 600 are cleaned through the hairbrush 500.
Wherein a motor for controlling rotation of the stage 600 is provided at the lower side of the stage 600.
The lifting mechanism 300 comprises a lifting block 310, the lifting block 310 is connected with a supporting frame 400, a vertical guide plate 320 is arranged on one side of the supporting arm 200, a first installation block 330 and a second installation block 340 are respectively fixed at the upper end and the lower end of the guide plate 320, the first installation block 330 is located above the second installation block 340, and the first installation block 330 and the second installation block 340 are respectively fixedly connected with the supporting arm 200.
The lifting block 310 is provided with a vertical chute 311, and the guide plate 320 passes through the chute 311; the upper side of the support arm 200 is provided with a driving member 350 for driving the lifting block 310 to lift.
In one embodiment, the driving member 350 includes a cylinder or oil cylinder 351, a piston rod of the cylinder or oil cylinder 351 passes through the first mounting block 330 and is connected to the lifting block 310; the piston rod of the cylinder or ram 351 is slidably coupled to the first mounting block 330.
In another embodiment, the driving member 350 includes a driving motor 352 fixed to the top of the supporting arm 200, a screw 353 is rotatably provided between the first mounting block 330 and the second mounting block 340, and an output shaft of the driving motor 352 is connected to the screw 353 and drives the screw 353 to rotate. The lifting block 310 is provided with a vertical threaded hole 312, and the screw 353 penetrates through the threaded hole 312 and is in threaded connection with the threaded hole 312.
Example 2
The present embodiment provides a laser scribing dustproof and anti-fragmentation device, and is different from embodiment 1 in that, referring to fig. 1 and 3: the support 400 is a telescopic frame structure, and the position of the brush 500 can be adjusted when in use by being arranged as the telescopic frame structure.
The support 400 includes a fixing frame 410 fixed on one side of the lifting block 310, the fixing frame 410 is in a U shape, one side of the opening of the fixing frame 410 is located at one end far away from the lifting block 310, a telescopic slot 411 is formed in the inner side of the fixing frame 410, a sliding plate 420 is slidably connected in the telescopic slot 411, and one end of the sliding plate 420 far away from the lifting block 310 is fixedly connected with a hairbrush 500.
The locking screw 430 is screwed to the outside of the fixing frame 410, one end of the locking screw 430 passing through the fixing frame 410 is positioned in the telescopic slot 411, and the sliding plate 420 is abutted when the locking screw 430 is screwed. The locking screw 430 is provided in plurality at intervals.
The utility model provides a device for preventing dust and fragments of laser scribing, which is characterized in that when a wafer is required to be placed on an objective table 600 during feeding, a lifting mechanism 300 is controlled to drive a support frame 400 to ascend, when the device works, the lifting mechanism 300 is controlled to drive the support frame 400 to descend, so that a hairbrush 500 is close to the objective table 600, when the objective table 600 rotates, fragments on the objective table 600 are cleaned through the hairbrush 500, and the horizontal position of the hairbrush can be adjusted through the arranged support frame.
In the description of the present utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "front," "rear," and the like indicate an azimuth or a positional relationship based on that shown in the drawings, and are merely for convenience of description and to simplify the description, but do not indicate or imply that the apparatus or elements to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected through an intermediary, or communicating between the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art. Embodiments of the utility model and features of the embodiments may be combined with each other without conflict.
The foregoing examples merely illustrate embodiments of the utility model and are described in more detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.
Claims (7)
1. The utility model provides a dustproof device of preventing piece of laser scribing which characterized in that: the lifting mechanism comprises a base (100), wherein a vertical supporting arm (200) is fixedly arranged on the base (100), one side of the supporting arm (200) is provided with a lifting mechanism (300) moving along the vertical direction, the lifting end of the lifting mechanism (300) is connected with a horizontal supporting frame (400), the supporting frame (400) is positioned on one side surface close to an objective table (600), and one end, far away from the lifting mechanism (300), of the supporting frame (400) is provided with a hairbrush (500); when the lifting mechanism (300) drives the supporting frame (400) to move along the vertical direction, the hairbrush (500) can be close to or far away from the objective table (600).
2. The laser scribing dust and debris prevention device according to claim 1, wherein: the lifting mechanism (300) comprises a lifting block (310), the lifting block (310) is connected with the supporting frame (400), a vertical guide plate (320) is arranged on one side of the supporting arm (200), a first installation block (330) and a second installation block (340) are respectively fixed at the upper end and the lower end of the guide plate (320), the first installation block (330) is positioned above the second installation block (340), and the first installation block (330) and the second installation block (340) are respectively fixedly connected with the supporting arm (200);
a vertical chute (311) is formed in the lifting block (310), and the guide plate (320) penetrates through the chute (311);
a driving piece (350) for driving the lifting block (310) to lift is arranged on the upper side of the supporting arm (200).
3. The device for laser scribing, dust and debris prevention according to claim 2, wherein: the driving piece (350) comprises a cylinder or an oil cylinder (351), and a piston rod of the cylinder or the oil cylinder (351) penetrates through the first mounting block (330) and is connected with the lifting block (310); a piston rod of the air cylinder or oil cylinder (351) is in sliding connection with the first mounting block (330).
4. The device for laser scribing, dust and debris prevention according to claim 2, wherein: the driving piece (350) comprises a driving motor (352) fixed on the top of the supporting arm (200), a screw rod (353) is rotatably arranged between the first mounting block (330) and the second mounting block (340), an output shaft of the driving motor (352) is connected with the screw rod (353), and the screw rod (353) is driven to rotate;
the lifting block (310) is provided with a vertical threaded hole (312), and the screw rod (353) penetrates through the threaded hole (312) and is in threaded connection with the threaded hole (312).
5. The laser scribing dust and debris prevention device according to claim 1, wherein: the support frame (400) is of a telescopic frame structure.
6. The device for laser scribing, dust and debris prevention according to claim 2, wherein: the support frame (400) comprises a fixing frame (410) fixed on one side of the lifting block (310), the fixing frame (410) is U-shaped, one side of an opening of the fixing frame (410) is located at one end far away from the lifting block (310), a telescopic slot (411) is formed in the inner side of the fixing frame (410), a sliding plate (420) is connected in a sliding mode in the telescopic slot (411), and one end, far away from the lifting block (310), of the sliding plate (420) is fixedly connected with the hairbrush (500);
the outside threaded connection of mount (410) has locking screw (430), locking screw (430) pass one end of mount (410) is located in expansion groove (411), when locking screw (430) screw tightly support sliding plate (420).
7. The laser scribing dustproof and anti-fragmentation device according to claim 6, wherein: the locking screw (430) is provided with a plurality of locking screws at intervals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321642125.5U CN220161510U (en) | 2023-06-27 | 2023-06-27 | Dustproof and anti-fragmentation device for laser scribing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321642125.5U CN220161510U (en) | 2023-06-27 | 2023-06-27 | Dustproof and anti-fragmentation device for laser scribing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220161510U true CN220161510U (en) | 2023-12-12 |
Family
ID=89052984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321642125.5U Active CN220161510U (en) | 2023-06-27 | 2023-06-27 | Dustproof and anti-fragmentation device for laser scribing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220161510U (en) |
-
2023
- 2023-06-27 CN CN202321642125.5U patent/CN220161510U/en active Active
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