CN220160740U

CN220160740U - Automatic ultrasonic cleaning tank

Info

Publication number: CN220160740U
Application number: CN202321269538.3U
Authority: CN
Inventors: 朱仁德; 冯培良
Original assignee: Wuxi Rongneng Semiconductor Material Co ltd
Current assignee: Wuxi Rongneng Semiconductor Material Co ltd
Priority date: 2023-05-24
Filing date: 2023-05-24
Publication date: 2023-12-12
Anticipated expiration: 2033-05-24

Abstract

The utility model relates to an automatic ultrasonic cleaning tank, which comprises a tank body, wherein a hollow structure is arranged in the tank body, at least three ultrasonic vibration plates are arranged at the bottom of the hollow structure, a liquid level sensor is arranged on the side wall of the hollow structure, a bracket is arranged at the far end of each ultrasonic vibration plate and used for bearing a flower basket, the automatic ultrasonic cleaning tank also comprises a controller and a relay connected with the controller, the relay is connected in a control circuit of each ultrasonic vibration plate, and the controller is used for receiving signals detected by the liquid level sensor and controlling the on-off of the relay so as to control the connection or disconnection of each ultrasonic vibration plate and a power supply, so that the starting and stopping of each ultrasonic vibration plate are realized, the structure is simple, the service life of each ultrasonic vibration plate is prolonged, and the cleaning quality of silicon wafers is ensured.

Description

Automatic ultrasonic cleaning tank

Technical Field

The utility model relates to the technical field of ultrasonic cleaning equipment, in particular to an automatic ultrasonic cleaning tank.

Background

Photovoltaic is a short term of solar photovoltaic power generation system, and is a novel power generation system for directly converting solar radiation energy into electric energy by utilizing the photovoltaic effect of a solar cell semiconductor material, wherein silicon wafers in the production of a used semiconductor device are required to be strictly cleaned.

At present, an ultrasonic cleaning tank is generally adopted to clean a silicon wafer, the existing cleaning tank is started and stopped only through an electric box switch and a manual button, the ultrasonic vibration plate still works when the cleaning tank is in liquid exchange or lack of liquid, the service life of the ultrasonic vibration plate is easy to reduce, the equipment cost is increased, and the cleaning quality of the silicon wafer is reduced.

Disclosure of Invention

In view of the foregoing shortcomings of the prior art, it is an object of the present utility model to provide an automated ultrasonic cleaning tank that solves one or more of the problems of the prior art.

In order to achieve the above purpose, the technical scheme of the utility model is as follows:

an automatic ultrasonic cleaning tank comprises a tank body, a hollow structure is arranged in the tank body, at least three ultrasonic vibration plates are arranged at the bottom of the hollow structure, a liquid level sensor is arranged on the side wall of the hollow structure, a support is arranged at the far end of each ultrasonic vibration plate and used for bearing a flower basket, the automatic ultrasonic cleaning tank further comprises a controller and a relay connected with the controller, the relay is connected in a control circuit of each ultrasonic vibration plate, and the controller is used for receiving signals detected by the liquid level sensor and controlling the on-off of the relay so as to control the start and stop of each ultrasonic vibration plate.

Further, a float is arranged at the proximal end of the liquid level sensor.

Furthermore, a power line is arranged on the side face of the ultrasonic vibration plate and penetrates out of the groove body, and the power line is connected in the control circuit.

Further, the distal end of the bracket is provided with at least two symmetrically arranged frame parts.

Further, the bracket has at least two hollow portions.

Further, a water outlet is formed in the proximal end of the groove body.

Further, four supporting feet are arranged at the proximal end of the groove body.

Further, the automatic ultrasonic cleaning tank further comprises a dosing device, the dosing device comprises a medicine storage box, the medicine storage box is connected into the tank body through a pipeline, and an electromagnetic valve is arranged on the pipeline.

Further, the flower basket comprises two fixing plates and a plurality of toothed bars arranged between the fixing plates, and the toothed bars and the fixing plates enclose a space for placing silicon wafers.

Further, the automatic ultrasonic cleaning tank further comprises a display screen, and the display screen is connected with the controller.

Compared with the prior art, the utility model has the following beneficial technical effects:

according to the automatic ultrasonic cleaning tank disclosed by the utility model, whether the liquid level is normal is detected through the lifting of the floater of the liquid level sensor, the signal detected by the liquid level sensor is received through the controller, and the high-level or low-level signal is output to control the on-off of the relay, so that the ultrasonic vibration plate is controlled to be connected or disconnected with a power supply, the start and stop of the ultrasonic vibration plate are realized, the structure is simple, the service life of the ultrasonic vibration plate is prolonged, and the cleaning quality of a silicon wafer is ensured.

And (II) the support at the far end of the ultrasonic vibration plate is provided with at least two hollow parts, the frame parts are used for bearing the flower basket, and the hollow parts can fully transmit the vibration of the ultrasonic vibration plate to the cleaning liquid, so that the ultrasonic cleaning effect is improved.

Drawings

Fig. 1 is a schematic front view of an automated ultrasonic cleaning tank according to a first embodiment of the present utility model.

Fig. 2 shows a schematic top view of an automated ultrasonic cleaning tank according to a first embodiment of the present utility model.

Fig. 3 is a schematic top view of an automated ultrasonic cleaning tank according to an embodiment of the present utility model when loading a basket.

Fig. 4 shows a connection diagram of an automated ultrasonic cleaning tank according to an embodiment of the present utility model.

The reference numerals in the drawings:

1. a tank body; 11. a water outlet; 12. supporting feet; 13. an ultrasonic vibration plate; 131. a power line; 14. a bracket; 141. a frame portion; 142. a hollow portion; 2. a liquid level sensor; 21. a float; 3. a dosing device; 31. a medicine storage box; 32. a pipe; 33. an electromagnetic valve; 4. a controller; 5. a display screen; 6. a relay; 7. flower basket; 71. a fixing plate; 72. a toothed bar; 73. lifting lugs.

Detailed Description

For a better understanding of the utility model with objects, features and advantages, refer to the drawings. It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the utility model to the extent that any modifications, changes in the proportions, or adjustments of the sizes of structures, proportions, or otherwise, used in the practice of the utility model, are included in the spirit and scope of the utility model which is otherwise, without departing from the spirit or essential characteristics thereof.

In the description of the present utility model, the positional or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

To more clearly describe the structure of an automatic ultrasonic cleaning tank, the present utility model defines terms "distal end" and "proximal end", specifically, "distal end" means an end far from the ground, and "proximal end" means an end close to the ground, taking fig. 1 as an example, the lower end of the tank body 1 in fig. 1 is a proximal end, and the upper end of the tank body 1 in fig. 1 is a distal end.

Example 1

Please refer to fig. 1, fig. 2, fig. 3 and fig. 4, an automatic ultrasonic cleaning tank, the automatic ultrasonic cleaning tank includes a tank body 1, a hollow structure is arranged in the tank body 1, three ultrasonic vibration plates 13 are arranged at the bottom of the hollow structure, a liquid level sensor 2 is arranged on the side wall of the hollow structure, a bracket 14 is arranged at the far end of the ultrasonic vibration plate 13, the bracket 14 is used for bearing a flower basket 7, the automatic ultrasonic cleaning tank further includes a controller 4, a relay 6 connected with the controller 4, the relay 6 is connected in a control circuit of the ultrasonic vibration plate 13, and the controller 4 is used for receiving signals detected by the liquid level sensor 2 and controlling the on-off of the relay 6 so as to realize the control of the start and stop of the ultrasonic vibration plate 13.

Referring to fig. 1, 2 and 3, further, the liquid level sensor 2 is provided with a float 21 at a proximal end thereof, the float 21 is flush with a proximal end of the basket 7 for detecting whether the cleaning tank is changing liquid, and the position of the float 21 can be adjusted to facilitate detecting different states of the cleaning tank, for example, the float 21 is disposed on a surface of the cleaning liquid, so as to detect whether the cleaning liquid is sufficient.

Referring to fig. 1, 2 and 3, further, a power line 131 is disposed on a side surface of the ultrasonic vibration plate 13 and penetrates out of the tank body 1, the power line 131 is connected to a control circuit, and a joint between the power line 131 and the tank body 1 is sealed by waterproof sealant. Specifically, the control circuit comprises a power supply, a relay 6 and a switch, and the relay 6 receives high-level and low-level signals sent by the controller 4 to realize the on-off of the control circuit.

Referring to fig. 1, 2 and 3, further, at least two symmetrically arranged frame portions 141 are disposed at the distal end of the support 14, the support 14 has at least two hollow portions 142, the frame portions 141 are used for carrying the basket 7, and the hollow portions 142 can fully transmit the vibration of the ultrasonic vibration plate 13 to the cleaning solution.

Referring to fig. 1, 2 and 3, further, a drain opening 11 is formed at the proximal end of the tank body 1 for draining the cleaning solution.

Referring to fig. 1, further, four supporting feet 12 are disposed at the proximal end of the slot body 1.

Referring to fig. 1, 2 and 3, further, the automatic ultrasonic cleaning tank further includes a dosing device 3, the dosing device 3 includes a medicine storage tank 31, the medicine storage tank 31 is connected to the inside of the tank body 1 through a pipeline 32, an electromagnetic valve 33 is disposed on the pipeline 32, and cleaning liquid is added into the tank body 1 by controlling on-off of the electromagnetic valve 33.

Referring to fig. 1, 2 and 3, further, the basket 7 includes two fixing plates 71 and a plurality of toothed bars 72 disposed between the fixing plates 71, the toothed bars 72 and the fixing plates 71 enclose a space for placing silicon wafers, and the side surface of the fixing plate 71 is provided with a lifting lug 73 for lifting the basket 7.

Referring to fig. 2 and 3, further, the automatic ultrasonic cleaning tank further includes a display screen 5, and the display screen 5 is connected to the controller 4. The controller 4 is electrically connected with the electromagnetic valve 33, the display screen 5, the relay 6 and the liquid level sensor 2, the controller 4 is a commercially available PLC controller 4 and is controlled by software and a control program in the prior art, and the controller 4 is used for controlling the opening and closing of the electromagnetic valve 33, inputting cleaning parameters through the display screen 5, receiving detection signals of the liquid level sensor 2 and outputting high-level and low-level signals according to detection results to control the on-off of the relay 6.

The specific working procedure of the utility model is as follows:

when the cleaning tank is in a liquid change state, the liquid level of the cleaning liquid is reduced to enable the floater 21 to descend, the liquid level sensor 2 sends a detection result to the controller 4, and the controller 4 receives a detection signal of the liquid level sensor 2 and outputs a high-level signal to control the relay 6 to be disconnected, so that the ultrasonic vibration plate 13 is disconnected from a power supply and stops working. When the liquid level of the cleaning liquid returns to normal, the float 21 rises, the liquid level sensor 2 sends the detection result to the controller 4, and the controller 4 receives the detection signal of the liquid level sensor 2 and outputs a low-level signal to control the relay 6 to be attracted, so that the ultrasonic vibration plate 13 is connected with a power supply to start working.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims

1. An automatic ultrasonic cleaning tank is characterized in that: the automatic ultrasonic cleaning tank comprises a tank body, a hollow structure is arranged in the tank body, at least three ultrasonic vibration plates are arranged at the bottom of the hollow structure, a liquid level sensor is arranged on the side wall of the hollow structure, a support is arranged at the far end of each ultrasonic vibration plate and used for bearing a flower basket, the automatic ultrasonic cleaning tank further comprises a controller and a relay connected with the controller, the relay is connected in a control circuit of each ultrasonic vibration plate, and the controller is used for receiving signals detected by the liquid level sensor and controlling on-off of the relay so as to control the start and stop of each ultrasonic vibration plate.

2. An automated ultrasonic cleaning tank as defined in claim 1, wherein: the proximal end of the liquid level sensor is provided with a floater.

3. An automated ultrasonic cleaning tank as defined in claim 1, wherein: the side face of the ultrasonic vibration plate is provided with a power line which penetrates out of the groove body, and the power line is connected in the control circuit.

4. An automated ultrasonic cleaning tank as defined in claim 1, wherein: the far end of the bracket is provided with at least two symmetrically arranged frame parts.

5. An automated ultrasonic cleaning tank as defined in claim 4, wherein: the bracket has at least two hollow portions.

6. An automated ultrasonic cleaning tank as defined in claim 1, wherein: the proximal end of the tank body is provided with a water outlet.

7. An automated ultrasonic cleaning tank as defined in claim 1, wherein: four supporting feet are arranged at the proximal end of the groove body.

8. An automated ultrasonic cleaning tank as defined in claim 1, wherein: the automatic ultrasonic cleaning tank further comprises a dosing device, the dosing device comprises a medicine storage box, the medicine storage box is connected into the tank body through a pipeline, and an electromagnetic valve is arranged on the pipeline.

9. An automated ultrasonic cleaning tank as defined in claim 1, wherein: the flower basket comprises two fixing plates and a plurality of toothed bars arranged between the fixing plates, and the toothed bars and the fixing plates enclose a space for placing silicon chips.

10. An automated ultrasonic cleaning tank as defined in claim 1, wherein: the automatic ultrasonic cleaning tank further comprises a display screen, and the display screen is connected with the controller.