CN220154791U

CN220154791U - Exposure device

Info

Publication number: CN220154791U
Application number: CN202321083097.8U
Authority: CN
Inventors: 杨星豪; 赵存根; 余志辉; 钟素文; 袁发根; 于雷铜
Original assignee: Wuhu Token Sciences Co Ltd
Current assignee: Wuhu Token Sciences Co Ltd
Priority date: 2023-05-08
Filing date: 2023-05-08
Publication date: 2023-12-08
Anticipated expiration: 2033-05-08

Abstract

The utility model belongs to an exposure device in the technical field of semiconductor product production. The front of the light source (1) is provided with a small lens (2), the front of the small lens (2) is provided with a first big lens (3), the front of the first big lens (3) is provided with a second big lens (4), the front of the second big lens (4) is provided with a first compound eye (5), the front of the first compound eye (5) is provided with a second compound eye (6), and the light source (1) is an LED lamp. The exposure device has a simple structure, can effectively achieve the effect of filtering bad light, ensures the concentration force of the light source to ensure that the light intensity reaches the production requirement, and reduces the manufacturing cost.

Description

Exposure device

Technical Field

The utility model belongs to the technical field of semiconductor product production, and particularly relates to an exposure device.

Background

The utility model relates to the improvement of the original exposure lamp, the exposure lamp in the prior art is a mercury lamp, so that the parallelism of light rays cannot reach the standard, and the light with the wavelength of 365 mu m irradiated by the mercury lamp is not pure and can be doped with light with different wavelengths, so that the effect of 5 mu m of line width and line spacing cannot be achieved, and the structure in the prior art cannot meet the use requirement.

In the prior art, there are known an "exposure apparatus, a method of controlling the exposure apparatus, and an alignment method for exposure", a technique of publication No. 103869631a, the technique exposure apparatus including: a main stage configured to adjust a position of a substrate; a light beam irradiation unit for irradiating a light beam onto the mask; and a beam monitoring unit having a fixed position with respect to the main stage and for identifying a beam emitted from the beam irradiation unit and passing through an opening in the mask to form a specific pattern.

However, this technique does not relate to the technical problem and technical solution of the present utility model.

Disclosure of Invention

The technical problems to be solved by the utility model are as follows: aiming at the defects of the prior art, the exposure device is simple in structure, can effectively achieve the effect of filtering bad light, ensures that the concentration force of a light source ensures that the light intensity reaches the production requirement, and reduces the manufacturing cost.

The technical scheme adopted by the utility model is as follows:

the utility model relates to an exposure device, wherein a small lens is arranged in front of a light source, a first large lens is arranged in front of the small lens, a second large lens is arranged in front of the first large lens, a first compound eye is arranged in front of the second large lens, a second compound eye is arranged in front of the first compound eye, and the light source is an LED lamp.

The first large lens and the second large lens are convex lenses, and the convex lenses comprise convex parts and concave parts.

The convex part of the first large lens faces the small lens, and the concave part of the first large lens faces the second large lens.

The concave part of the second large lens faces the concave part of the first large lens, and the convex part of the second large lens faces the first fly eye.

And a cooling water pipe is arranged at the rear of the light source and close to the light source.

The first large lens and the second large lens are made of high silica glass.

The first compound eye and the second compound eye are made of high silica glass.

The light source and the small lens are arranged in parallel.

The first compound eyes and the second compound eyes are arranged in parallel.

The front surface of the small lens is provided with a plurality of luminous lamp beads which are of convex hemispherical structures.

By adopting the technical scheme of the utility model, the working principle and the beneficial effects are as follows:

the exposure device designs an optical path of an LED lamp source, and comprises the lamp source, a small lens, a first large lens, a second large lens, a first compound eye and a second compound eye. After being gathered by the small lens, the light emitted from the LED lamp source is uniformly transmitted by the first large lens and the second large lens of the convex lens structure, and then the light is emitted through the first compound eye and the second compound eye. The schematic diagram is shown in fig. 1). The used lamp source is an LED lamp, is a solid cold light source and does not generate high heat when emitting light. Meanwhile, the LED lamp adopts single-phase nonlinear conductive characteristic. The low-voltage driving is easy to adjust light, the response speed is high, and the lighting can be stable after 1 millisecond after the lighting signal is sent out. Meanwhile, a cooling water pipe is arranged behind the lamp source, and the temperature of the cooling water is set to be 20-25 ℃ and is used for controlling the temperature of the lamp source. A small lens is arranged in front of the light source to focus, and the gathering strength of the light source ensures that the light intensity reaches the production requirement. The principle of the light source which is parallelly emitted by the first big lens and the second big lens which are provided with two convex lenses is as follows: the light source directly emitted from the small lens has poor parallelism, and the light rays can be emitted to the position of the first fly eye in parallel through the parallel calibration of the two large lenses. When light passes through the first large lens, light with large angle cannot enter, and the effect of filtering bad light is achieved. Two compound eyes are arranged behind the two large lenses to filter light rays with overlarge angles and to uniformly light rays. The light homogenizing principle is as follows: when the light beam irradiates the first compound eye, the light beam is focused to the center of the second compound eye lens, at the moment, the whole light beam is evenly distributed into n light paths of the number of small eyes on the compound eye, then the light beam is imaged at the center position of each small eye in the second compound eye, and then the light beam is emitted to the illumination surface. Each beam is irradiated to reach the required product position, so that the light intensity on the product is obtained by adding the light intensities of a plurality of small eyes. When the structure is arranged, a light source, a small lens, a first large lens, a second large lens, a first compound eye and a second compound eye form a group of exposure devices, and a plurality of groups of exposure devices can be arranged according to the requirement.

Drawings

The following is a brief description of what is expressed in the drawings of this specification and the references in the drawings:

FIG. 1 is a schematic view of an exposure apparatus according to the present utility model;

the reference numerals in the figures are respectively: 1. a light source; 2. a lenslet; 3. a first large lens; 4. a second large lens; 5. a first compound eye; 6. a second compound eye; 7. a light emitting lamp bead; 8. a convex portion; 9. a concave portion; 10. and a cooling water pipe.

Detailed Description

The following describes the shape, structure, mutual position and connection relation between parts, action of parts and working principle of the specific embodiment of the present utility model by describing examples in further detail:

as shown in fig. 1, the utility model is an exposure device, a small lens 2 is arranged in front of a light source 1, a first large lens 3 is arranged in front of the small lens 2, a second large lens 4 is arranged in front of the first large lens 3, a first compound eye 5 is arranged in front of the second large lens 4, a second compound eye 6 is arranged in front of the first compound eye 5, and the light source 1 is an LED lamp. The structure provides an improved technical scheme aiming at the defects in the prior art. The light path of the LED lamp source is designed, and the LED lamp source comprises a lamp source 1, a small lens 2, a first large lens 3, a second large lens 4, a first compound eye 5 and a second compound eye 6. After being gathered by the small lenses, the light emitted from the LED lamp source enters the first large lens 3 and the second large lens 4 of the convex lens structure to be uniform, and then the light is emitted through the compound eyes of the first compound eye 5 and the second compound eye 6. The schematic diagram is shown in fig. 1). The used lamp source 1 is an LED lamp and is a solid cold light source, and high heat is not generated when the lamp emits light. Meanwhile, the LED lamp adopts single-phase nonlinear conductive characteristic. The low-voltage driving is easy to adjust light, the response speed is high, and the lighting can be stable after 1 millisecond after the lighting signal is sent out. Meanwhile, a cooling water pipe 10 is arranged behind the light source 1, and the cooling temperature is set to 20-25 ℃ for controlling the temperature of the light source 1. The small lens 2 is arranged in front of the light source 1 to focus, and the gathering strength of the light source 1 ensures that the light intensity reaches the production requirement. The principle of the light source which is parallelly emitted by the first large lens 3 and the second large lens 4 of the two convex lenses is that: the light source directly emitted from the small lens has poor parallelism, and the light rays can be emitted to the position of the first fly eye in parallel through the parallel calibration of the two large lenses. When light passes through the first large lens 3, light with a large angle cannot enter, and the effect of filtering bad light is achieved. Two compound eyes are arranged behind the two large lenses to filter light rays with overlarge angles and to uniformly light rays. The light homogenizing principle is as follows: when the light beam irradiates the first compound eye 5, the light beam is focused to the center of the second compound eye 5 lens, at this time, the whole light beam is homogenized into n optical paths of the number of small eyes on the compound eye (for example, the compound eye in the embodiment can use the number of small eyes of 7X9, that is, each compound eye has 63 optical path channels, that is, the light source 1 is divided into 63 light beams by the 63 small eyes on the compound eye), then imaged at the center position of each small eye in the second compound eye 6, and then emitted to reach the illumination surface. Each beam is irradiated to reach the required product position, so that the light intensity on the product is obtained by adding the light intensities of a plurality of small eyes. When the structure is arranged, a light source 1, a small lens 2, a first large lens 3, a second large lens 4, a first compound eye 5 and a second compound eye 6 form a group of exposure devices, and a plurality of groups of exposure devices can be arranged according to the requirement. The exposure device has a simple structure, can effectively achieve the effect of filtering bad light, ensures the concentration force of the light source to ensure that the light intensity reaches the production requirement, and reduces the manufacturing cost.

The first large lens 3 and the second large lens 4 are convex lenses, and the convex lenses comprise convex portions 8 and concave portions 9. The convex part of the first large lens 3 faces the small lens 2, and the concave part of the first large lens 3 faces the second large lens 4. The concave part 9 of the second large lens 4 faces the concave part 9 of the first large lens 3, and the convex part 8 of the second large lens 4 faces the first compound eye 5. With the above structure, the first large lens 3 and the second large lens 4 are positioned opposite to each other. In terms of structural arrangement, the first large lens 3 and the second large lens 4 of two convex lenses are installed to emit light sources in parallel, and the working principle is as follows: the light source directly emitted from the small lens has poor parallelism, and the light rays can be emitted to the position of the first fly eye in parallel through the parallel calibration of the two large lenses. When light passes through the first large lens 3, light with a large angle cannot enter, and the effect of filtering bad light is achieved.

The rear of the lamp source 1 is provided with a cooling water pipe 10 close to the position of the lamp source 1. In the structure, the cooling water pipe 10 is arranged behind the lamp source 1, circulated cooling water is supplied, the temperature of the cooling water is set to 20-25 ℃, and the cooling water is used for controlling the temperature of the lamp source 1, so that the excessive temperature of the lamp source is avoided.

The materials of the first large lens 3 and the second large lens 4 are high silica glass. The first compound eye 5 and the second compound eye 6 are made of high silica glass. The material of the lenslet is high silica glass. In order to achieve better effects, the materials of the lens and the compound eye are compared and selected, and most quartz glass is used in the industry at present, but different quartz glasses have different light transmittance. Optical quartz glass, which is formed by melting a plurality of synthetic raw materials in industry through electrofusion or hydrogen-free flame, has a continuous spectrum from far ultraviolet to near infrared. However, unlike mercury lamps, the LED lamp source is improved by using high silica glass under the condition that only light with the wavelength of 365nm-405nm is needed and no other light with special wavelength exists. The SiO2 content of the quartz glass is 99.99 percent, but the content of the high silica glass is 96 percent, and the melting temperature is lower than that of the quartz glass, so that the cost is cheaper than that of the quartz glass, and the cost is reduced.

The lamp source 1 and the small lens 2 are arranged in parallel. The first compound eye 5 and the second compound eye 6 are arranged in parallel. The front surface of the small lens 2 is provided with a plurality of luminous lamp beads 7, and the luminous lamp beads 7 are of a convex hemispherical structure. When the lamp source 1, the small lens 2, the first large lens 3, the second large lens 4, the first compound eye 5 and the second compound eye 6 are arranged, the lamp source is positioned at the same height, and gaps are arranged between adjacent parts, so that the treatment of light rays emitted by the lamp source can be reliably realized.

The exposure device can solve the problems in the prior art and realize corresponding technical effects. In the specific embodiment: 1. the mercury lamp of the prior art volatilizes a certain amount of gaseous mercury when exposed to light, and simultaneously generates electromagnetic radiation with a wavelength of less than 240nm, which causes damage to human bodies. 2. In the prior art, the mercury lamp is of a dot light source structure, and an LED light source is changed to be of a planar light source structure. The LED light source makes the light source more efficient. 3. The mercury lamp can only be normally on, the LED lamp source can be turned on immediately, the use quantity of electricity of the exposure lamp is effectively reduced by using the UV-LED, meanwhile, the heat effect of the lamp source is reduced, and the energy utilization rate is improved. 4. The mercury lamp can be turned on for 3000 hours only, and the led mercury lamp can be kept in a lighting time of tens of thousands of hours basically.

The exposure device designs an optical path of an LED lamp source, and comprises the lamp source 1, a small lens 2, a first large lens 3, a second large lens 4, a first compound eye 5 and a second compound eye 6. After being gathered by the small lenses, the light emitted from the LED lamp source enters the first large lens 3 and the second large lens 4 of the convex lens structure to be uniform, and then the light is emitted through the compound eyes of the first compound eye 5 and the second compound eye 6. The schematic diagram is shown in fig. 1). The used lamp source 1 is an LED lamp and is a solid cold light source, and high heat is not generated when the lamp emits light. Meanwhile, the LED lamp adopts single-phase nonlinear conductive characteristic. The low-voltage driving is easy to adjust light, the response speed is high, and the lighting can be stable after 1 millisecond after the lighting signal is sent out. Meanwhile, a cooling water pipe 10 is arranged behind the light source 1, and the cooling temperature is set to 20-25 ℃ for controlling the temperature of the light source 1. The small lens 2 is arranged in front of the light source 1 to focus, and the gathering strength of the light source 1 ensures that the light intensity reaches the production requirement. The principle of the light source which is parallelly emitted by the first large lens 3 and the second large lens 4 of the two convex lenses is that: the light source directly emitted from the small lens has poor parallelism, and the light rays can be emitted to the position of the first fly eye in parallel through the parallel calibration of the two large lenses. When light passes through the first large lens 3, light with a large angle cannot enter, and the effect of filtering bad light is achieved. Two compound eyes are arranged behind the two large lenses to filter light rays with overlarge angles and to uniformly light rays. The light homogenizing principle is as follows: when the light beam irradiates the first compound eye 5, the light beam is focused to the center of the second compound eye 5 lens, at this time, the whole light beam is homogenized into n optical paths of the number of small eyes on the compound eye (for example, the compound eye in the embodiment can use the number of small eyes of 7X9, that is, each compound eye has 63 optical path channels, that is, the light source 1 is divided into 63 light beams by the 63 small eyes on the compound eye), then imaged at the center position of each small eye in the second compound eye 6, and then emitted to reach the illumination surface. Each beam is irradiated to reach the required product position, so that the light intensity on the product is obtained by adding the light intensities of a plurality of small eyes. When the structure is arranged, a light source 1, a small lens 2, a first large lens 3, a second large lens 4, a first compound eye 5 and a second compound eye 6 form a group of exposure devices, and a plurality of groups of exposure devices can be arranged according to the needs, so that the requirements can be reliably met.

While the utility model has been described above with reference to the accompanying drawings, it will be apparent that the specific implementation of the utility model is not limited by the foregoing, but rather is within the scope of the utility model as long as various modifications are made by the method concept and technical scheme of the utility model, or the concept and technical scheme of the utility model are directly applied to other occasions without modification.

Claims

1. An exposure apparatus, characterized in that: the front of the light source (1) is provided with a small lens (2), the front of the small lens (2) is provided with a first big lens (3), the front of the first big lens (3) is provided with a second big lens (4), the front of the second big lens (4) is provided with a first compound eye (5), the front of the first compound eye (5) is provided with a second compound eye (6), and the light source (1) is an LED lamp.

2. The exposure apparatus according to claim 1, wherein: the first large lens (3) and the second large lens (4) are convex lenses, and the convex lenses comprise convex portions (8) and concave portions (9).

3. The exposure apparatus according to claim 1 or 2, characterized in that: the convex part of the first large lens (3) faces the small lens (2), and the concave part of the first large lens (3) faces the second large lens (4).

4. The exposure apparatus according to claim 2, wherein: the concave part (9) of the second large lens (4) faces the concave part (9) of the first large lens (3), and the convex part (8) of the second large lens (4) faces the first compound eye (5).

5. The exposure apparatus according to claim 1 or 2, characterized in that: the rear of the lamp source (1) is provided with a cooling water pipe (10) close to the position of the lamp source (1).

6. The exposure apparatus according to claim 1 or 2, characterized in that: the first large lens (3) and the second large lens (4) are made of high silica glass.

7. The exposure apparatus according to claim 6, wherein: the first compound eye (5) and the second compound eye (6) are made of high silica glass.

8. The exposure apparatus according to claim 1 or 2, characterized in that: the light source (1) and the small lens (2) are arranged in parallel.

9. The exposure apparatus according to claim 8, wherein: the first compound eye (5) and the second compound eye (6) are arranged in parallel.

10. The exposure apparatus according to claim 1 or 2, characterized in that: the front surface of the small lens (2) is provided with a plurality of luminous lamp beads (7), and the luminous lamp beads (7) are of a convex hemispherical structure.