CN2201528Y - High vacuum angle valve - Google Patents

High vacuum angle valve Download PDF

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Publication number
CN2201528Y
CN2201528Y CN 94230405 CN94230405U CN2201528Y CN 2201528 Y CN2201528 Y CN 2201528Y CN 94230405 CN94230405 CN 94230405 CN 94230405 U CN94230405 U CN 94230405U CN 2201528 Y CN2201528 Y CN 2201528Y
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CN
China
Prior art keywords
valve
high vacuum
valve rod
connecting tube
vacuum angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 94230405
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Chinese (zh)
Inventor
王毅敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN 94230405 priority Critical patent/CN2201528Y/en
Application granted granted Critical
Publication of CN2201528Y publication Critical patent/CN2201528Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a high vacuum angle valve which comprises a valve body, a valve cover, and a port for air charging and discharging, characterized in that the upper part of a valve rod is matched with the axle hole of the valve cover, a press cap is adpressed on an O-shaped rubber sealing ring which is sheathed on the valve rod through a cushion ring, the middle part of the valve rod is threaded and coupled with the valve cover, and the lower end of the valve rod is provided with a end enclosure used for cutting off or communicating a gas circuit. The utility model whose leakage rate is less than 2.7*10<-10 >Pam< 3 >/S confirmed by the helium mass spectrometer leak detector has the advantages of good sealing performance, agile switching-on of the end enclosure, enhancement of lead of 2-3 times, detachable joint, easy production, reliable performance and high durability.

Description

High vacuum angle valve
The utility model relates to a kind of critical elements of high vacuum system, cuts off or connect the high vacuum angle valve of gas circuit, and it is applicable to and is lower than a barometric pressure to 10 -8The holder vacuum ranges.
The high vacuum angle valve helical pitch of present domestic use part generally adopts the bellows of sealing, its complex structure, it is short to open and close stroke, pump-down time is long, bellows is fragile, the manufacture cost height, working life weak point, the profile heaviness is processed coarsely, easily deposits trace gas.
The purpose of this utility model is to overcome deficiency in the prior art, and the high vacuum angle valve that a kind of screw thread transmission is provided and seals with the RUBBER O RunddichtringO.
The purpose of this utility model can reach by following technical proposals.
This high vacuum angle valve constitutes port in valve body bottom and side by connecting tube and flange, and valve gap connects with valve seal by rubber seal by pressure cap, it is characterized in that:
Valve stem tip is equipped with handwheel, valve rod top cooperates with the valve gap axis hole, pressure cap by pressure pad press be enclosed within on the valve rod and be the O type rubber seal of supporting surface with the valve gap upper surface, valve rod middle part and valve gap scyewed joint, the valve rod lower end is equipped with the end socket that cuts off or connect gas circuit.
Valve body, valve gap, connecting tube be the seamless tubular goods processing and fabricating of available densification all.
Valve body and connecting tube, connecting tube all can argon arc welding connect moulding with flange, and end socket links with back-up ring and valve rod lower end by springhole, inlays O type rubber seal in the dovetail groove of end socket bottom surface.
This high vacuum angle valve compared with prior art, good seal performance confirms that through helium mass spectrometer leak detector leak detection leak rate is less than 2.7 * 10 -10Pam 3/ S.End socket is opened flexibly, and helical pitch improves 2~3 times, novel structure, and removable connection, easy to maintenance, be easy to make, with low cost, reliable performance, lightly attractive in appearance, durable in use, real is the optimal valve element of high vacuum system.
Fig. 1 is this high vacuum angle valve structural representation, now in conjunction with the accompanying drawings, the utility model is further described.
With reference to Fig. 1, be welded with connecting tube 2,16 respectively in the bottom and the side of valve body 12, connecting tube 2,16 the other ends are welded with flange 1,17 respectively, have constituted port.Be inlaid with rubber ring 9 in the groove of valve gap 4 and valve body 12 fitting surfaces, pressure cap 3 compresses the sealed attachment of valve gap 4 formations and valve body 12.The top of valve rod 11 is equipped with handwheel 6, valve rod 11 tops cooperate with valve gap 4 axis holes, O type rubber ring 8 is enclosed within on the valve rod 11, pressure cap 5 compresses O type rubber seal 8 by packing ring 7, valve rod 11 middle parts connect with valve gap helical thread portion 10, valve rod 11 lower ends connect with end socket 14 with back-up ring 13 by the hole, inlay O type rubber seal in the dovetail groove of end socket bottom surface.Valve body 12, valve gap 4, connecting tube 2, the 16 all seamless tubular goods of available densification are manufactured.The helical thread portion 10 of valve gap 4 uses brass to manufacture and constitutes integral body with silver soldering mode and valve gap 4.

Claims (4)

1, a kind of high vacuum angle valve constitutes port in valve body bottom and side by connecting tube and flange, and valve gap connects with valve seal by rubber seal by pressure cap, it is characterized in that:
Valve stem tip is equipped with handwheel, valve rod top cooperates with the valve gap axis hole, pressure cap by pressure pad press be enclosed within on the valve rod and be the O type rubber seal of supporting surface with the valve gap upper surface, valve rod middle part and valve gap scyewed joint, the valve rod lower end is equipped with the end socket that cuts off or connect gas circuit.
2, high vacuum angle valve according to claim 1 is characterized in that:
Valve body, valve gap, connecting tube be the seamless tubular goods processing and fabricating of available densification all.
3, high vacuum angle valve according to claim 1 and 2 is characterized in that valve body all can connect with flange with connecting tube, connecting tube in argon arc welding.
4, according to claim 1,2 or 3 described high vacuum angle valves, it is characterized in that:
End socket links with back-up ring and valve rod lower end by springhole, inlays O type rubber seal in the dovetail groove of end socket bottom surface.
CN 94230405 1994-10-12 1994-10-12 High vacuum angle valve Expired - Fee Related CN2201528Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 94230405 CN2201528Y (en) 1994-10-12 1994-10-12 High vacuum angle valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 94230405 CN2201528Y (en) 1994-10-12 1994-10-12 High vacuum angle valve

Publications (1)

Publication Number Publication Date
CN2201528Y true CN2201528Y (en) 1995-06-21

Family

ID=33842515

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 94230405 Expired - Fee Related CN2201528Y (en) 1994-10-12 1994-10-12 High vacuum angle valve

Country Status (1)

Country Link
CN (1) CN2201528Y (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102220994A (en) * 2011-06-20 2011-10-19 昆山振昆纳米科技有限公司 Angle valve of vacuum chamber
CN102600937A (en) * 2012-03-28 2012-07-25 中国石油天然气股份有限公司 Ball milling tank and method for preparing rare gas in rock inclusion
CN104896783A (en) * 2014-12-09 2015-09-09 中国科学院上海技术物理研究所 Hollow discharger used for Stirling refrigerator and vacuum air extraction device of hollow discharger
CN108496035A (en) * 2016-01-25 2018-09-04 卢森堡专利公司 High pressure valve with telescopic piston

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102220994A (en) * 2011-06-20 2011-10-19 昆山振昆纳米科技有限公司 Angle valve of vacuum chamber
CN102600937A (en) * 2012-03-28 2012-07-25 中国石油天然气股份有限公司 Ball milling tank and method for preparing rare gas in rock inclusion
CN104896783A (en) * 2014-12-09 2015-09-09 中国科学院上海技术物理研究所 Hollow discharger used for Stirling refrigerator and vacuum air extraction device of hollow discharger
CN104896783B (en) * 2014-12-09 2017-05-03 中国科学院上海技术物理研究所 Hollow discharger used for Stirling refrigerator and vacuum air extraction device of hollow discharger
CN108496035A (en) * 2016-01-25 2018-09-04 卢森堡专利公司 High pressure valve with telescopic piston
CN108496035B (en) * 2016-01-25 2020-05-22 卢森堡专利公司 High pressure valve with telescopic piston

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C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee