CN220151781U - Ultralow frequency vibration isolation device based on three-wire inverted pendulum damping structure - Google Patents
Ultralow frequency vibration isolation device based on three-wire inverted pendulum damping structure Download PDFInfo
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- CN220151781U CN220151781U CN202321089428.9U CN202321089428U CN220151781U CN 220151781 U CN220151781 U CN 220151781U CN 202321089428 U CN202321089428 U CN 202321089428U CN 220151781 U CN220151781 U CN 220151781U
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- inverted pendulum
- vibration isolation
- air chamber
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- damping
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Abstract
The utility model provides an ultralow frequency vibration isolation device based on a three-wire inverted pendulum damping structure, which comprises an air spring vibration isolation mechanism, a three-wire inverted pendulum damping mechanism, an adjusting supporting mechanism and a supporting base, wherein the air spring vibration isolation mechanism comprises a main air chamber, an auxiliary air chamber and an annular elastic diaphragm, the three-wire inverted pendulum damping mechanism comprises a cylindrical mounting seat, an inverted pendulum wire rope and an inverted pendulum base, the outer side wall of the cylindrical mounting seat forms the inner side wall of the main air chamber, the three inverted pendulum wire ropes are arranged in the cylindrical mounting seat at equal intervals along the circumferential direction of the cylindrical mounting seat, and the adjusting supporting mechanism is arranged on the inverted pendulum base. The vibration isolation device can effectively isolate the environment micro-vibration interference of each frequency band of high, medium and low, improve the vibration isolation level of a micro-vibration prevention test chamber, ensure that various ultra-precise instruments and equipment work in an optimal environment, and simultaneously, utilize the three-wire inverted pendulum damping mechanism to help to accelerate the horizontal vibration energy attenuation and reduce the resonance peak value.
Description
Technical Field
The utility model relates to the technical field of vibration isolation of precision instruments, in particular to an ultralow frequency vibration isolation device based on a three-wire inverted pendulum damping structure.
Background
Along with the continuous improvement of precision and measurement precision requirements of scientific research environments, low-frequency vibration interference in the environments becomes one of important factors for restricting the improvement of precision and research effects of ultra-precision optics, atomic molecular experiments, quantum experiments, semiconductor experiments and measuring instruments. The air spring vibration isolation device is configured for the precise scientific research experiment, so that the air spring vibration isolation device becomes the primary means for restraining the environmental vibration in the scientific research environment, but the air spring vibration isolation device in the current market still has the following problems:
at present, the vertical natural frequency of the air spring vibration isolation device on the market is high, the interference of low-frequency vibration in the environment cannot be restrained, the conventional air spring vibration isolation device can achieve the suppression effect of medium-high frequency (more than 5 Hz), but vibration isolation foundations are additionally built on the original basis for achieving the suppression of low-frequency (1 Hz) vibration, so that the cost of scientific research is increased, the limitation is too strong, the practicability is not high, and therefore, in actual use, the air spring vibration isolator is generally difficult to isolate the vibration of vertical 1 Hz.
At present, the air spring vibration isolator is a non-contact spring which is supported by a spring by using the compressibility of gas and has small system horizontal damping, long stability time under impact interference and high resonance peak value, and the air spring vibration isolator is a non-contact spring which is supported by the spring by using the compressibility of gas, and has no horizontal mechanical friction, and the structural damping of the flexible membrane is used as a vertical damping source of the air spring vibration isolator, so that the vibration energy is attenuated slowly under impact disturbance excitation, the system stability adjustment time is long, and the resonance peak value is high.
Disclosure of Invention
The utility model aims to provide an ultralow frequency vibration isolation device based on a three-wire inverted pendulum damping structure, which can effectively isolate the environment micro-vibration interference of each frequency band of high, medium and low, improve the vibration isolation level of a micro-vibration prevention experiment chamber, ensure that various ultra-precise instruments and equipment work in an optimal environment, and simultaneously, the three-wire inverted pendulum damping mechanism is used for helping to accelerate the horizontal vibration energy attenuation and reduce the resonance peak value.
The technical scheme adopted for solving the technical problems is as follows: the utility model provides an ultralow frequency vibration isolation device based on three-wire inverted pendulum damping structure, includes air spring vibration isolation mechanism, three-wire inverted pendulum damping mechanism, adjusts supporting mechanism, supporting seat, air spring vibration isolation mechanism includes main air chamber, vice air chamber, annular elastic membrane, main air chamber and vice air chamber distribute from top to bottom, and the bottom of main air chamber realize with link up of vice air chamber set up one with the pneumatic joint that the external world link up on the lateral wall of vice air chamber, annular elastic membrane is used for realizing the seal of the upper portion of main air chamber, three-wire inverted pendulum damping mechanism includes tube-shape mount pad, inverted pendulum wire rope, inverted pendulum base, the lateral wall of tube-shape mount pad constitutes main air chamber confined inside wall, three inverted pendulum wire rope is followed the circumferencial direction equidistant setting of tube-shape mount pad is in the tube-shape mount pad, inverted pendulum wire rope's upper portion with the upper portion fixed connection of tube-shape mount pad, inverted pendulum wire rope's lower part with the base card is connected, the supporting mechanism sets up and is used for realizing the vibration isolation pad is arranged to the supporting mechanism is in the base is arranged to the inverted pendulum.
Preferably, the adjusting and supporting mechanism comprises a supporting tube, an adjusting threaded rod and a supporting disc, wherein the bottom of the supporting tube is fixedly connected with the inverted pendulum base, threads at the lower part of the adjusting threaded rod are sleeved in the upper part of the supporting tube, and the supporting disc is fixedly arranged at the upper part of the adjusting threaded rod by adopting screws.
Further, damping grease is filled in the cylindrical mounting seat.
Further, the number of the laminar flow damping pieces is N, and N is more than or equal to 2 and less than or equal to 10.
Further, the laminar flow damping piece comprises an annular rubber ring, an air flow damping plate is arranged in the annular rubber ring, and a plurality of damping holes are formed in the air flow damping plate.
Further, the damping hole comprises an upper vertical section, a middle horizontal section and a lower vertical section, and the upper vertical section, the middle horizontal section and the lower vertical section are sequentially connected in a penetrating manner.
Preferably, the volume of the auxiliary air chamber is S times that of the main air chamber, and S is more than or equal to 1 and less than or equal to 3.
Preferably, the annular elastic membrane is formed by vulcanizing a rubber material and nylon cords or polyester cords.
The beneficial effects of the utility model are as follows: in the utility model, the main air chamber and the auxiliary air chamber realize up-and-down air flow through a plurality of laminar flow damping pieces, so that the rigidity value and the natural frequency of the air spring vibration isolation mechanism can be reduced, and on the other hand, a vertical small damping effect is realized by adopting a laminar flow damping piece mode, and the micro-vibration interference of the whole frequency band in the environment where the ultra-precise instrument equipment is positioned is effectively isolated; by utilizing the zigzag distribution of the airflow damping holes, vibration energy attenuation can be effectively accelerated when airflow passes through, and the system stability time is shortened; according to the utility model, the limit mode of the nested coaxial three-wire inverted pendulum damping structure is adopted to improve the influence of the floating height of the air spring vibration isolation mechanism on the negative stiffness value, and meanwhile, the three-wire inverted pendulum damping structure realizes the vibration isolation effect in the horizontal direction, quickly attenuates vibration energy and shortens the system stability time; the high-frequency rubber vibration isolator arranged at the bottom of the supporting base is used as a high-frequency attenuation measure, so that the phenomenon of influence on experimental environment under high-frequency impact disturbance excitation can be effectively avoided.
Drawings
In order to more clearly illustrate the embodiments of the utility model or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are some preferred embodiments of the utility model and that other drawings can be obtained from these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a cross-sectional view of the overall structure of the present utility model;
FIG. 2 is a schematic diagram of the overall structure of the present utility model;
FIG. 3 is a schematic view of the overall structure of an annular elastic membrane;
FIG. 4 is a longitudinal cross-sectional view of a laminar flow damper;
FIG. 5 is an enlarged view of FIG. 1 at A;
FIG. 6 is an enlarged view of FIG. 4 at B;
in the figure: the device comprises a main air chamber 11, an auxiliary air chamber 12, an annular elastic diaphragm 13, an upper casing 14, a lower casing 15, a pneumatic connector 151, an annular limiting ring 16, an annular pressing plate 17, a laminar flow damping piece 18, an annular rubber ring 181, an airflow damping plate 182, an upper vertical section 1821, a middle horizontal section 1822, a lower vertical section 1823, a cylindrical mounting seat 21, a reverse swing steel wire rope 22, a reverse swing base 23, a supporting tube 31, an adjusting threaded rod 32, a supporting disc 33, an upper annular limiting ring 34, a lower annular limiting ring 35, a supporting base 4, an annular plate 41 and high-frequency vibration isolation rubber 5.
Detailed Description
The technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to specific embodiments and fig. 1 to 6, and it is obvious that the described embodiments are only some of the preferred embodiments of the present utility model, but not all embodiments. Similar modifications can be made by those skilled in the art without departing from the spirit of the utility model, and therefore the utility model is not to be limited by the specific embodiments disclosed below.
The utility model provides an ultralow frequency vibration isolation device (shown in figure 1) based on a three-wire inverted pendulum damping structure, which comprises an air spring vibration isolation mechanism, a three-wire inverted pendulum damping mechanism, an adjusting supporting mechanism and a supporting base 4, wherein the air spring vibration isolation mechanism comprises a main air chamber 11, an auxiliary air chamber 12 and an annular elastic membrane 13, the main air chamber 11 and the auxiliary air chamber 12 are distributed up and down, the bottom of the main air chamber 11 is communicated with the auxiliary air chamber 12 through a plurality of laminar damping pieces 18, in practical application, the main air chamber 11 and the auxiliary air chamber 12 mainly consist of two shells, specifically comprises an upper shell 14 and a lower shell 15, the upper shell 14 and the lower shell 15 can be both processed by non-magnetic conductive or aluminum alloy, titanium alloy or austenitic stainless steel materials, in the specific embodiment, the upper shell 14 and the lower shell 15 are both processed by aluminum alloy materials, after the upper shell 14 and the lower shell 15 are connected up and down in a sealing way, a finished auxiliary air chamber 12 is formed, the inside of the main air chamber 11 is in a cylindrical structure, the bottom of the cylindrical structure realizes the isolation of the main air chamber 11 and the auxiliary air chamber 12, a plurality of laminar flow damping pieces 18 are distributed at the bottom of the cylindrical structure, in practical application, four laminar flow holes are formed at the bottom of the cylindrical structure of the main air chamber 11 and are distributed at equal intervals along a circumferential line with the diameter of 40mm, the numerical value of the number N (N is less than or equal to 2 and less than or equal to 10) of the laminar flow damping pieces is set to 4, when the air flow between the main air chamber 11 and the auxiliary air chamber 12 runs through from top to bottom, the damping effect of the laminar flow damping pieces 18 can be improved, so that the damping effect of the air flow can be accelerated, the vibration energy can be attenuated, and the system stabilizing time can be shortened, the side wall of the auxiliary air chamber 12 is provided with a pneumatic connector 151 communicated with the outside, in practical application, high-pressure air is injected into the main air chamber 11 and the auxiliary air chamber 12 by utilizing the pneumatic connector 151, the annular elastic membrane 13 is used for realizing the sealing of the upper part of the main air chamber 11, after the high-pressure air is injected into the main air chamber 11, the annular elastic membrane 13 realizes floating lifting under the pushing action of the high-pressure air, the three-wire inverted pendulum damping mechanism comprises a cylindrical mounting seat 21, an inverted pendulum steel wire rope 22 and an inverted pendulum base 23, the processing material of the cylindrical mounting seat 21 can be non-magnetic or aluminum alloy, titanium alloy or austenitic stainless steel, and in the embodiment, the processing and manufacturing of the cylindrical mounting seat 21 are realized by utilizing the aluminum alloy material; the outer side wall of the cylindrical mounting seat 21 forms the sealed inner side wall of the main air chamber 11, namely, the cylindrical mounting seat 21 is arranged in a cylindrical structure in the upper shell 14, compaction sealing between the outer end of the annular elastic membrane 13 and the upper plane of the upper shell 14 is realized by using an annular limiting plate 16 arranged on the upper shell 14, the annular limiting plate 16 plays a floating limiting role in the expansion process of the annular elastic membrane 13 under the action of compaction sealing, the floating of the annular elastic membrane 13 is limited, so that the vibration isolation safety is improved, and further, the use safety of the annular elastic membrane 13 is improved, and the annular elastic membrane 13 is vulcanized by rubber materials and nylon cords or polyester cords; the compaction sealing of the inner end of the annular elastic membrane 13 and the upper plane of the cylindrical mounting seat 21 is realized by using an annular pressing plate 17 arranged at the upper part of the cylindrical mounting seat 21, so that the inner side wall of the cylindrical structure of the upper shell 14, the inner side wall of the annular elastic membrane and the corresponding part of the outer side wall of the cylindrical mounting seat 21 form a main air chamber 14, simultaneously, the annular elastic membrane 13 realizes the sealing of the upper part of the main air chamber 11, when high-pressure air is injected into the main air chamber 11, the annular elastic membrane 13 is jacked up, then the cylindrical mounting seat 21 is driven to move upwards, three inverted pendulum steel wire ropes 22 are arranged in the cylindrical mounting seat 21 at equal intervals along the circumferential direction of the cylindrical mounting seat 21, the three inverted pendulum steel wire ropes 22 are distributed in an inverted cone shape, the upper part of the inverted pendulum steel wire ropes 22 is fixedly connected with the upper part of the cylindrical mounting seat 21, the lower part of the inverted pendulum wire rope 22 is clamped and connected with the inverted pendulum base 23, the adjusting and supporting mechanism is arranged on the inverted pendulum base 23 and is used for supporting a vibration isolation component, when the supporting mechanism is adjusted to load, the pressure is transmitted to the cylindrical mounting seat 21 through the inverted pendulum wire rope 22, the cylindrical mounting seat 21 is supported through the annular elastic membrane 13 which is pressurized and floated, then the load is finally supported through the annular elastic membrane 13, the annular elastic membrane 13 is supported by high-pressure air, then the air supporting of the load is realized, then the effective vibration isolation is realized in the vertical direction, and in practical application, the working pressure of the annular elastic membrane 13 is 0.4MPa, and the floating height is 10mm; the three inverted pendulum steel wire ropes 22 form an inverted pendulum structure, so that a good horizontal vibration isolation effect is achieved, the horizontal effective vibration isolation of a load is achieved, and in order to improve the horizontal vibration isolation effect of the three inverted pendulum steel wire ropes 22, a proper amount of damping grease is filled in the cylindrical mounting seat 21, and the damping grease has a damping effect on the swing of the inverted pendulum steel wire ropes 22, so that the vibration isolation effect is improved; the support base 4 is used for realizing the support of the auxiliary air chamber 12, in this embodiment, the support base 4 is in a tubular structure, an annular plate 41 is arranged on the upper side of the interior of the support base 4, the bottom of the lower shell 15 is fixedly connected with the annular plate 41 in a screw connection mode, a high-frequency vibration isolation rubber pad 5 is arranged on the lower portion of the support base 4, the vibration isolation performance of the high-frequency vibration isolation rubber pad 5 is utilized, the phenomenon that the influence on experimental environment is caused by high-frequency impact disturbance excitation can be effectively avoided, and in this embodiment, the thickness of the high-frequency vibration isolation rubber pad 5 can be set to be 16mm.
Based on the above embodiment, the specific implementation manner of the adjusting and supporting mechanism is as follows: the adjusting and supporting mechanism comprises a supporting tube 31, an adjusting threaded rod 32 and a supporting disc 33, wherein the bottom of the supporting tube 31 is fixedly connected with the inverted pendulum base 23, threads on the lower portion of the adjusting threaded rod 32 are sleeved in the upper portion of the supporting tube 31, and the supporting disc 33 is fixedly arranged on the upper portion of the adjusting threaded rod 32 by adopting screws. In practical application, the experiment table support panel is placed on the support plate 33, the load on the support plate 33 is finally acted on the annular elastic mold piece 13 through the sequential transmission of the adjusting threaded rod 32, the inverted pendulum base 23, the inverted pendulum steel wire rope 22 and the cylindrical mounting seat 21, in order to improve the use safety of the adjusting support mechanism, an upper annular limiting ring 34 is arranged on the upper portion of the support tube 31, the upper annular limiting ring 34 is positioned above the annular limiting plate 16, a lower annular limiting ring 35 is arranged on the lower portion of the support tube 31, the lower annular limiting ring 35 is positioned below the annular pressing plate 17, and the upper and lower free movement of the support tube 31 in a certain range is realized by the blocking action of the upper annular limiting ring 34 and the lower annular limiting ring 35.
Based on the above embodiment, the specific implementation manner of the laminar flow damper 18 is as follows: the laminar flow damping member 18 includes an annular rubber ring 181 an air flow damping plate 182 is provided in the annular rubber ring 181 an air flow damping plate 182 is provided with a plurality of damping holes, the damping holes mainly increase the damping of the air flow when the air flows in the damping holes, and then accelerate the accelerated elimination of vibration, in this specific embodiment, the damping holes include damping holes including an upper vertical section 1821, a middle horizontal section 1822 and a lower vertical section 1823, the upper vertical section 1821, the middle horizontal section 1822 and the lower vertical section 1823 are sequentially connected in a penetrating manner, that is, the air flow in the auxiliary air chamber 12 can enter the main air chamber 11 through the damping holes, and in the same way, the air flow in the main air chamber 11 can enter the auxiliary air chamber 12 through the damping holes, when the air flows in the damping holes, the air flow needs to undergo two flow direction conversion, thereby increasing the damping effect of the damping holes on the air flow.
In practical application, the volume of the auxiliary air chamber 12 is S times that of the main air chamber 11, S is 1-3, in this embodiment, the value of S may be set to 3, so that the volume of the auxiliary air chamber 12 is 3 times that of the main air chamber 11, and the volume of the auxiliary air chamber 12 is larger than that of the main air chamber 11, which is beneficial to integrally reducing the rigidity of the air spring vibration isolation mechanism, so as to improve the vibration isolation effect.
In the present utility model, the terms "upper" and "lower" are relative positions used for convenience in describing the positional relationship, and thus cannot be construed as absolute positions to limit the scope of protection.
Other than the technical features described in the specification, all are known to those skilled in the art.
While the preferred embodiments and examples of the present utility model have been described in detail with reference to the accompanying drawings, the present utility model is not limited to the embodiments and examples, and it will be apparent to those skilled in the art that various modifications and variations can be made without departing from the spirit of the present utility model, and the scope of the utility model is also defined by the appended claims.
Claims (8)
1. The utility model provides an ultralow frequency vibration isolation device based on three-wire inverted pendulum damping structure, its characterized in that, including air spring vibration isolation mechanism, three-wire inverted pendulum damping mechanism, regulation supporting mechanism, supporting base, air spring vibration isolation mechanism includes main air chamber, vice air chamber, annular elastic membrane distributes from top to bottom, and the bottom of main air chamber realize through a plurality of laminar flow damping piece with link up of vice air chamber set up one with the pneumatic joint that the external world link up on the lateral wall of vice air chamber, annular elastic membrane is used for realizing the seal of the upper portion of main air chamber, three-wire inverted pendulum damping mechanism includes tubular mount pad, inverted pendulum wire rope, inverted pendulum base, the lateral wall of tubular mount pad constitutes main air chamber confined inside wall, three inverted pendulum wire rope is followed the circumferencial direction equidistant setting of tubular mount pad is in the tubular mount pad, and three inverted pendulum wire rope be inverted cone-shaped and distribute, inverted pendulum wire rope's upper portion with the upper portion fixed connection of tubular mount pad, inverted pendulum wire rope's lower part with the supporting mechanism sets up and is used for realizing the support base is in the setting up of an air chamber is used for the vibration isolation pad.
2. The ultralow frequency vibration isolation device based on the three-wire inverted pendulum damping structure is characterized in that the adjusting and supporting mechanism comprises a supporting tube, an adjusting threaded rod and a supporting disc, the bottom of the supporting tube is fixedly connected with the inverted pendulum base, threads on the lower portion of the adjusting threaded rod are sleeved in the upper portion of the supporting tube, and the supporting disc is fixedly arranged on the upper portion of the adjusting threaded rod through screws.
3. The ultralow frequency vibration isolation device based on the three-wire inverted pendulum damping structure is characterized in that damping grease is filled in the cylindrical mounting seat.
4. The ultralow frequency vibration isolation device based on the three-wire inverted pendulum damping structure according to claim 2 or 3, wherein the number of the laminar flow damping pieces is N, and N is more than or equal to 2 and less than or equal to 10.
5. The ultralow frequency vibration isolation device based on the three-wire inverted pendulum damping structure according to claim 4, wherein the laminar flow damping piece comprises an annular rubber ring, an air flow damping plate is arranged in the annular rubber ring, and a plurality of damping holes are formed in the air flow damping plate.
6. The ultralow frequency vibration isolation device based on the three-wire inverted pendulum damping structure, according to claim 5, is characterized in that the damping hole comprises an upper vertical section, a middle horizontal section and a lower vertical section, and the upper vertical section, the middle horizontal section and the lower vertical section are sequentially connected in a penetrating manner.
7. The ultralow frequency vibration isolation device based on the three-line inverted pendulum damping structure according to claim 1, wherein the volume of the auxiliary air chamber is S times that of the main air chamber, and S is more than or equal to 1 and less than or equal to 3.
8. The ultralow frequency vibration isolation device based on the three-wire inverted pendulum damping structure according to claim 1, wherein the annular elastic membrane is formed by vulcanizing a rubber material and a nylon cord or a polyester cord.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321089428.9U CN220151781U (en) | 2023-05-09 | 2023-05-09 | Ultralow frequency vibration isolation device based on three-wire inverted pendulum damping structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321089428.9U CN220151781U (en) | 2023-05-09 | 2023-05-09 | Ultralow frequency vibration isolation device based on three-wire inverted pendulum damping structure |
Publications (1)
| Publication Number | Publication Date |
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| CN220151781U true CN220151781U (en) | 2023-12-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321089428.9U Active CN220151781U (en) | 2023-05-09 | 2023-05-09 | Ultralow frequency vibration isolation device based on three-wire inverted pendulum damping structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220151781U (en) |
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2023
- 2023-05-09 CN CN202321089428.9U patent/CN220151781U/en active Active
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