CN220147680U - Feedback type inhibition extraction device for external pumping type vacuum packaging machine - Google Patents
Feedback type inhibition extraction device for external pumping type vacuum packaging machine Download PDFInfo
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- CN220147680U CN220147680U CN202321155863.7U CN202321155863U CN220147680U CN 220147680 U CN220147680 U CN 220147680U CN 202321155863 U CN202321155863 U CN 202321155863U CN 220147680 U CN220147680 U CN 220147680U
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- extraction
- extraction device
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- 238000000605 extraction Methods 0.000 title claims abstract description 70
- 238000009461 vacuum packaging Methods 0.000 title claims abstract description 29
- 230000005764 inhibitory process Effects 0.000 title claims abstract description 15
- 238000005086 pumping Methods 0.000 title description 4
- 230000007246 mechanism Effects 0.000 claims abstract description 38
- 238000007789 sealing Methods 0.000 claims abstract description 25
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 238000003825 pressing Methods 0.000 claims description 10
- 230000003014 reinforcing effect Effects 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000004806 packaging method and process Methods 0.000 description 24
- 235000012431 wafers Nutrition 0.000 description 10
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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- Vacuum Packaging (AREA)
Abstract
The feedback type inhibition extraction device for the external extraction type vacuum packaging machine comprises an extraction pipeline and an extraction nozzle connected with the extraction pipeline, wherein the extraction nozzle comprises a fixed supporting mechanism, and the fixed supporting mechanism is fixed at one end of the extraction pipeline; and the movable sealing mechanism deforms towards the fixed supporting mechanism under air pressure and is in close contact with the fixed supporting mechanism. The utility model can prevent the wafer from being broken due to further vacuum extraction, can be applied to the semiconductor chip industry to realize convenient and efficient production operation, and has no risk of wafer breakage.
Description
Technical Field
The utility model relates to the technical field of semiconductor production equipment, in particular to a feedback type extraction inhibition device for an external pumping type vacuum packaging machine.
Background
The outer vacuum packaging machine is a common vacuum packaging device in the semiconductor chip manufacturing industry, and is different from the inner vacuum packaging machine in structure, the outer vacuum packaging machine utilizes an air suction nozzle placed in the packaging bag to suck air in the packaging bag to realize vacuum, and then the air suction nozzle is pumped away to finish sealing. The semiconductor chip manufacturing industry mainly utilizes a high-efficiency and convenient vacuum extraction form to pack wafers, but if the vacuum is unstable or extraction parameters are not matched due to external factors, the air extraction degree in the packaging bag can be influenced, so that the wafer in the packaging bag is loose and easy to shake due to insufficient vacuum extraction completion degree; or the wafer is broken due to excessive vacuum extraction and abrupt change of internal and external pressure differences. The traditional outward vacuum packaging equipment needs to carefully check an equipment vacuum meter and a vacuum electromagnetic valve to ensure vacuum stability during operation, and also adjusts equipment parameters according to actual packaged products, so that the operation is complicated, meanwhile, the risk of wafer fragmentation is also born, time and money are consumed, and the operation efficiency of the outward vacuum packaging equipment cannot be well reflected.
Disclosure of Invention
The utility model aims to provide a feedback type extraction inhibition device for an external-pumping type vacuum packaging machine, which is used for solving the problems in the background technology.
The technical scheme of the utility model is as follows: the feedback type inhibition extraction device for the external extraction type vacuum packaging machine comprises an extraction pipeline and an extraction nozzle connected with the extraction pipeline, wherein the extraction nozzle comprises a fixed supporting mechanism, and the fixed supporting mechanism is fixed at one end of the extraction pipeline; and
the movable sealing mechanism deforms towards the fixed supporting mechanism under air pressure and is in close contact with the fixed supporting mechanism.
Further, the fixed supporting mechanism comprises a bottom supporting plate and inclined reinforcing plates oppositely supported at two ends of the bottom supporting plate.
Further, one end of the bottom support plate, which is far away from the air exhaust pipeline, is provided with a first bulge.
Further, the first protrusion and the bottom support plate have a first included angle a, wherein 120 DEG is formed between the first protrusion and the bottom support plate
Further, the movable sealing mechanism comprises a top pressing plate and inclined movable plates symmetrically arranged at two ends of the top pressing plate.
Further, one end of the top pressing plate, which is far away from the air exhaust pipeline, is provided with a second bulge.
Further, the second protrusion and the top platen have a second included angle b of 120 degrees
<b<150°。
Further, the first protrusion is in sealing fit with the second protrusion, and the inclined reinforcing plate is in sealing fit with the inclined movable plate.
Further, the first protrusion and the second protrusion are arc-shaped.
Further, the movable sealing mechanism is made of elastic metal.
The utility model has the beneficial effects that:
compared with the prior art, the utility model can ensure that the air in the packaging bag can be completely extracted, the equipment parameters can be increased, the packaging bag of various products can be ensured to extract clean air, the utility model is used for extracting the air in the packaging bag, along with the discharge of the air in the packaging bag and the reduction of the volume of the packaging bag, the compression of the air extraction nozzle is increased, the caliber of the air extraction nozzle is gradually reduced, the air extraction rate is also increased, and proper elastic metal is selected as the air extraction nozzle, so that the vacuum extraction degree in the packaging bag reaches the specification of semiconductor wafer packaging, the air extraction nozzle can be closed to prevent the wafer from being broken due to the further extraction of the vacuum, and the external-extraction type vacuum packaging machine can realize convenient and efficient production operation when being applied to the semiconductor chip industry and has no risk of wafer breakage.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic view of a suction nozzle;
Detailed Description
The utility model is further illustrated by way of example with reference to the accompanying drawings.
The present embodiment is only for explanation of the present utility model and is not to be construed as limiting the present utility model, and modifications to the present embodiment, which may not creatively contribute to the present utility model as required by those skilled in the art after reading the present specification, are all protected by patent laws within the scope of claims of the present utility model.
1-2, a feedback type extraction suppressing device for an external vacuum packaging machine comprises an extraction pipeline 1 connected with an external vacuum packaging machine 5 and an extraction nozzle 2 connected with the extraction pipeline 1, wherein the extraction nozzle 2 comprises a fixed supporting mechanism 3, and the fixed supporting mechanism 3 is fixed at one end of the extraction pipeline 1; and
the movable sealing mechanism 4, the movable sealing mechanism 4 deforms towards the fixed supporting mechanism 3 under air pressure and is in close contact with the fixed supporting mechanism 3, preferably, the movable sealing mechanism 4 and one end of the air extraction pipeline 1 in the embodiment are fixedly connected, in the process of vacuum air extraction, the volume of the packaging bag is gradually reduced and the air extraction nozzle 2 is pressed, and after the fixed supporting mechanism 3 and the movable sealing mechanism 4 are in close contact, the air extraction nozzle 2 is completely closed and vacuum extraction is stopped.
In order to ensure that the air in the packaging bag can be completely extracted, the equipment parameters can be increased, the packaging bag of various products can be ensured to extract clean air, the air in the packaging bag is extracted by using the utility model, the compression of the air extraction nozzle 2 is increased along with the discharge of the air in the packaging bag and the reduction of the volume of the packaging bag, the caliber of the air extraction nozzle 2 is gradually reduced, the air extraction rate is also increased, proper elastic metal is selected as the air extraction nozzle 2, the vacuum extraction degree in the packaging bag reaches the specification of semiconductor wafer packaging, the air extraction nozzle 2 can be closed, the wafer is prevented from being broken due to the further extraction of vacuum, and the external-extraction type vacuum packaging machine can realize convenient and efficient production operation when being applied to the semiconductor chip industry and has no risk of wafer breakage.
In an alternative embodiment of the present utility model, the fixed support mechanism 3 comprises a bottom support plate 301 and inclined reinforcing plates 302 oppositely supported at two ends of the bottom support plate 301, the bottom support plate 301 has a first protrusion 303 at one end far away from the air extraction pipeline 1, the first protrusion 303 and the bottom support plate 301 have a first included angle a, wherein 120 ° < a <150 °, the movable sealing mechanism 4 comprises a top pressing plate 401 and inclined movable plates 402 symmetrically arranged at two ends of the top pressing plate 401, the top pressing plate 401 has a second protrusion 403 at one end far away from the air extraction pipeline 1, the second protrusion 403 and the top pressing plate 401 have a second included angle b, wherein the applicant has tested that after setting the length of the bottom support plate 301 and the top pressing plate 401 to 7mm, the width to 18mm, and the thickness to 0.5mm, the air extraction effect is optimal; when the external vacuum packaging machine draws vacuum of a certain air pressure, the first protrusion 303 and the second protrusion 403 are close to each other, the inclined reinforcing plate 302 and the inclined movable plate 402 are close to each other, and the vacuum drawing is stopped after the air suction nozzle 2 is completely closed.
In an alternative embodiment of the present utility model, the first protrusion 303 and the second protrusion 403 are in sealing engagement, the inclined reinforcing plate 302 and the inclined movable plate 402 are in sealing engagement, and the first protrusion 303 and the second protrusion 403 are arc-shaped; the air suction nozzle 2 made of elastic metal is a main part of improvement of the utility model, the elastic metal has the property of being capable of generating certain deformation under external force, and recovering the state before deformation after no external force, so that the air suction force can be restrained by reducing the caliber of the air suction nozzle 2 when the external suction type vacuum packaging machine draws vacuum with certain air pressure, and the feedback type restrained drawing can be realized by gradually reducing the caliber of the air suction nozzle 2 to the sealing fit of the first bulge 303 and the second bulge 403, the inclined reinforcing plate 302 and the inclined movable plate 402 along with continuous drawing of air in the bag, and stopping vacuum drawing after the air suction nozzle 2 is completely closed.
In an alternative embodiment of the utility model, the movable sealing mechanism 4 is made of an elastic metal, which in this example can be implemented using beryllium copper; the movable sealing mechanism 4 made of elastic metal is in a fully opened state before the suction nozzle of the external suction type vacuum packaging machine stretches into the packaging bag to extract air, after the vacuum extraction is started, the packaging bag is continuously pumped away along with the internal air, the volume is gradually reduced, the inner wall of the packaging bag is also slowly attached to the suction pipeline 1 and the movable sealing mechanism 4 made of elastic metal, the suction pipeline 1 is made of metal with higher hardness, obvious deformation is not generated along with the attachment and compression of the inner wall of the packaging bag, and the vacuum extraction is basically not influenced; the movable sealing mechanism 4 made of elastic metal gradually moves towards the fixed supporting mechanism 3 due to the compression of the inner wall of the packaging bag, and the air extraction rate of the air extraction nozzle pipeline is reduced accordingly, so that the effect of inhibiting vacuum extraction is achieved.
Claims (10)
1. The utility model provides a feedback type suppresses extraction device for outer extraction type vacuum packaging machine, includes bleed pipeline (1) and with bleed nozzle (2) that bleed pipeline (1) are connected, its characterized in that: the air suction nozzle (2) comprises a fixed supporting mechanism (3), and the fixed supporting mechanism (3) is fixed at one end of the air suction pipeline (1); and a movable sealing mechanism (4), wherein the movable sealing mechanism (4) deforms towards the fixed supporting mechanism (3) under air pressure and is in close contact with the fixed supporting mechanism (3).
2. A feedback inhibition extraction device for an external vacuum packaging machine, according to claim 1, characterized in that: the fixed supporting mechanism (3) comprises a bottom supporting plate (301) and inclined reinforcing plates (302) which are oppositely supported at two ends of the bottom supporting plate (301).
3. A feedback inhibition extraction device for an external vacuum packaging machine, according to claim 2, characterized in that: the end of the bottom support plate (301) far away from the air suction pipeline (1) is provided with a first bulge (303).
4. A feedback inhibition extraction device for an external vacuum packaging machine as defined in claim 3, wherein: the first protrusion (303) and the bottom bracket (301) have a first included angle a, wherein 120 ° < a <150 °.
5. A feedback inhibition extraction device for an external vacuum packaging machine as defined in claim 3, wherein: the movable sealing mechanism (4) comprises a top pressing plate (401) and inclined movable plates (402) symmetrically arranged at two ends of the top pressing plate (401).
6. The feedback inhibition extraction device for an external vacuum packaging machine as defined in claim 5, wherein: the top platen (401) has a second protrusion (403) at an end remote from the suction duct (1).
7. The feedback inhibition extraction device for an external vacuum packaging machine as defined in claim 6, wherein: the second projection (403) and the top platen (401) have a second included angle b, wherein 120 ° < b <150 °.
8. The feedback inhibition extraction device for an external vacuum packaging machine as defined in claim 7, wherein: the first protrusion (303) and the second protrusion (403) are in sealing engagement, and the inclined reinforcing plate (302) and the inclined movable plate (402) are in sealing engagement.
9. The feedback inhibition extraction device for an external vacuum packaging machine as defined in claim 7, wherein: the first protrusion (303) and the second protrusion (403) are arc-shaped.
10. A feedback inhibition extraction device for an external vacuum packaging machine, according to claim 1, characterized in that: the movable sealing mechanism (4) is made of elastic metal.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223113889 | 2022-11-22 | ||
| CN2022231138893 | 2022-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220147680U true CN220147680U (en) | 2023-12-08 |
Family
ID=89012791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321155863.7U Active CN220147680U (en) | 2022-11-22 | 2023-05-15 | Feedback type inhibition extraction device for external pumping type vacuum packaging machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220147680U (en) |
-
2023
- 2023-05-15 CN CN202321155863.7U patent/CN220147680U/en active Active
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