CN220136996U - Fast modulation NDIR gas sensor - Google Patents
Fast modulation NDIR gas sensor Download PDFInfo
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- CN220136996U CN220136996U CN202321353958.XU CN202321353958U CN220136996U CN 220136996 U CN220136996 U CN 220136996U CN 202321353958 U CN202321353958 U CN 202321353958U CN 220136996 U CN220136996 U CN 220136996U
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- 239000006096 absorbing agent Substances 0.000 claims description 34
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Abstract
The utility model discloses a fast modulation NDIR gas sensor, which comprises an infrared luminous absorption sensing component, a light filtering component, a supporting component and an infrared reflecting component; the infrared luminous absorption sensing component is connected with the infrared reflection component through the supporting component and forms an optical cavity of the NDIR gas sensor; the filter assembly is positioned in the optical cavity; the infrared radiation emitted by the infrared luminous absorption sensing component irradiates the infrared reflection component through the optical cavity, and the infrared reflection component reflects the infrared radiation and transmits the optical filtering component, so that the infrared with specific wavelength irradiates the infrared luminous absorption sensing component. By using the gas sensor provided by the utility model, the problem of low radiation intensity of a light source emitted by the NDIR gas sensor due to the modulation problem is effectively solved, and meanwhile, the resolution and response speed of the NDIR gas sensor are also effectively improved, so that a solid foundation is laid for developing the high-performance NDIR gas sensor.
Description
Technical Field
The utility model belongs to the technical field of NDIR gas sensors, and particularly relates to a fast-modulation NDIR gas sensor.
Background
Along with the improvement of living standard, the intellectualization of equipment becomes a development trend, more and more sensing nodes are arranged, and the requirement of a sensor is also increased, wherein a non-dispersive infrared gas sensor (hereinafter referred to as an NDIR gas sensor) is widely paid attention to the market by virtue of the characteristics of high precision, long service life, good selection, difficult poisoning and the like.
The existing NDIR gas sensor generally converts constant infrared radiation into alternating infrared radiation by modulating the power supply of an infrared light source or using a chopper, so as to improve the high signal-to-noise ratio extraction of the infrared detector signal or meet the requirements of alternating infrared detectors such as pyroelectric and the like on infrared signals. However, the chopper is difficult to integrate in a miniaturized way, the power supply modulation of the infrared light source is relatively simple, but the service life of the light source is easily influenced by the flicker of the light source; in addition, the thermal type light source represented by tungsten filament lamp and MEMS light source has the problem of modulation depth under high frequency, the intensity of the emitted infrared radiation can be greatly reduced along with the increase of frequency, and the performances of NDIR gas sensor such as resolution, response speed and the like are limited; thus, research into a new NDIR gas sensor is one of the main subjects of current research and development personnel.
Disclosure of Invention
Therefore, the main purpose of the present utility model is to provide a fast modulating NDIR gas sensor, which solves the problems of low radiation intensity, low resolution and poor response speed of the infrared light source in the conventional NDIR gas sensor caused by the modulating problem.
In order to achieve the above purpose, the technical scheme of the utility model is realized as follows: a fast modulation NDIR gas sensor comprises an infrared luminous absorption sensing component, a light filtering component, a supporting component and an infrared reflecting component; the infrared luminous absorption sensing component is connected with the infrared reflection component through the supporting component and forms an optical cavity of the NDIR gas sensor; the filter assembly is positioned in the optical cavity; the infrared radiation emitted by the infrared luminous absorption sensing component irradiates the infrared reflection component through the optical cavity, and the infrared reflection component reflects the infrared radiation and transmits the optical filtering component, so that the infrared with specific wavelength irradiates the infrared luminous absorption sensing component.
Preferably, the infrared light emitting and absorbing sensing assembly includes an infrared light source, an infrared absorber, a light source driving circuit, and a signal processing circuit for processing a voltage value measured by the infrared absorber and calculating the voltage value as a gas concentration value; the infrared light source is connected with the light source driving circuit; the infrared absorber is connected with the signal processing circuit.
Preferably, the infrared luminous absorption sensing assembly further comprises an ambient temperature sensor for detecting the working condition of the infrared absorber, and the ambient temperature sensor is connected with the signal processing circuit.
Preferably, the infrared reflection assembly comprises an infrared reflection micromirror and a micromirror driving circuit, wherein the micromirror driving circuit is connected with the infrared reflection micromirror, and the infrared reflection assembly is provided with an air hole.
Preferably, the NDIR gas sensor further comprises a bonding pad, an interconnection bonding pad and an interconnection through hole, wherein the bonding pad is arranged on the infrared luminescence absorption sensing component, and the bonding pad is connected with the light source driving circuit, the signal processing circuit and the micro mirror driving circuit through the interconnection bonding pad and the interconnection through hole.
Preferably, the interconnection via is located within the support assembly.
Preferably, the temperature sensor is disposed proximate to the infrared absorber.
Preferably, the filter assembly is disposed above the infrared absorber, and the infrared absorber is one of a thermopile sensor or a pyroelectric sensor.
Compared with the prior art, the infrared luminous absorption sensing component, the supporting component and the infrared reflection component are connected in a matched mode to form the optical cavity of the NDIR gas sensor, and the optical filtering component is arranged in the optical cavity, so that when infrared radiation emitted by the infrared luminous absorption sensing component irradiates the infrared reflection component through the optical cavity, the infrared reflection component reflects the infrared radiation and transmits the optical filtering component, the infrared radiation with specific wavelength irradiates the infrared luminous absorption sensing component, the infrared radiation can be continuously and stably radiated outwards through the infrared source, the infrared radiation can be reflected through the infrared reflection component and periodically irradiates the infrared luminous absorption sensing component through the optical filtering component, the problem that the light source radiation intensity emitted by the NDIR gas sensor is low due to the modulation problem is effectively solved, meanwhile, the resolution and the response speed of the NDIR gas sensor are effectively improved, and a solid foundation for researching and developing the NDIR gas sensor is laid.
Drawings
FIG. 1 is a schematic diagram of a fast modulating NDIR gas sensor according to an embodiment of the present utility model;
FIG. 2 is an exploded view of a fast modulating NDIR gas sensor according to an embodiment of the present utility model;
FIG. 3 is a schematic diagram illustrating a first operating state of a fast modulating NDIR gas sensor according to an embodiment of the present utility model;
fig. 4 is a schematic diagram of a second working state of the fast modulating NDIR gas sensor according to an embodiment of the present utility model.
In the figure, 1, an infrared luminescence absorption sensing assembly, 11, an infrared light source, 12, an infrared absorber, 13, a light source driving circuit, 14, a signal processing circuit, 15, an ambient temperature sensor, 2, a light filtering assembly, 3, a supporting assembly, 4, an infrared reflection assembly, 41, an air vent, 42, an infrared reflection micro mirror, 43, a micro mirror driving circuit, 5, an optical cavity, 6, a bonding pad, 7, an interconnection bonding pad and 8, an interconnection through hole.
Detailed Description
The present utility model will be described in further detail with reference to specific embodiments in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
In the description of the present utility model, it should be clearly understood that terms such as "vertical", "horizontal", "longitudinal", "front", "rear", "left", "right", "upper", "lower", "horizontal", and the like indicate an orientation or a positional relationship based on that shown in the drawings, and are merely for convenience of describing the present utility model, and do not mean that the apparatus or element referred to must have a specific orientation or position, and thus should not be construed as limiting the present utility model. In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
The fast modulation NDIR gas sensor provided by the embodiment of the utility model, as shown in fig. 1 and 2, comprises an infrared luminous absorption sensing component 1, a light filtering component 2, a supporting component 3 and an infrared reflecting component 4; the infrared luminous absorption sensing component 1 is connected with the infrared reflection component 4 through the supporting component 3 and forms an optical cavity 5 of the NDIR gas sensor; the filter assembly 2 is positioned in the optical chamber 5; the infrared radiation emitted by the infrared luminous absorption sensing component 1 irradiates onto the infrared reflection component 4 through the optical cavity 5, and the infrared reflection component 4 reflects the infrared radiation and transmits the optical filtering component 2, so that the infrared with specific wavelength irradiates onto the infrared luminous absorption sensing component 1.
After the scheme is adopted, the infrared luminous absorption sensing component 1, the supporting component 3 and the infrared reflection component 4 are connected in a matched mode to form the optical cavity 5 of the NDIR gas sensor, and the optical filtering component 2 is arranged in the optical cavity 5, so that when the infrared radiation emitted by the infrared luminous absorption sensing component 1 irradiates onto the infrared reflection component 4 through the optical cavity 5, the infrared reflection component 4 reflects the infrared radiation and transmits the optical filtering component 2, the purpose that infrared radiation with specific wavelength irradiates onto the infrared luminous absorption sensing component 1 is achieved, the infrared radiation source can continuously and stably radiate the infrared radiation, the infrared radiation can periodically irradiate onto the infrared luminous absorption sensing component 1 through the reflection of the infrared reflection component 4 through the optical filtering component 2, the problem that the light source radiation intensity emitted by the NDIR gas sensor is low due to the modulation problem is effectively solved, meanwhile, the NDIR gas sensor is effectively improved, and the high-speed and the high-performance NDIR gas sensor is developed.
In a specific implementation process of this embodiment, as shown in fig. 1 and 2, the infrared luminescence absorption sensing assembly 1 includes an infrared light source 11, an infrared absorber 12, a light source driving circuit 13, and a signal processing circuit 14 for processing a voltage value measured by the infrared absorber 12 and calculating the voltage value as a gas concentration value; the infrared light source 11 is connected with the light source driving circuit 13; the infrared absorber 12 is connected to the signal processing circuit 14.
By adopting the infrared luminous absorption sensing assembly 1 composed of the infrared luminous light source 11, the infrared absorber 12 and the light source driving circuit 13, not only is the aim that the light source driving circuit 13 drives the infrared light source 11 to emit the infrared radiation light source effectively realized, but also the aim that the infrared absorber 12 is driven to absorb the measurement voltage and the signal processing circuit 14 calculates the voltage value measured by the infrared absorber 12 as the gas concentration value is realized, and meanwhile, the accuracy of calculating the gas concentration value by the NDIR gas sensor is also improved.
In a specific implementation of this embodiment, the infrared light emitting and absorbing sensor assembly 1 further includes an ambient temperature sensor 15 for detecting the operation of the infrared absorber 12, where the ambient temperature sensor 15 is connected to the signal processing circuit 14.
By further arranging the temperature sensor 15, not only is the purpose of detecting and monitoring the ambient temperature of the infrared absorber 12 during operation realized, but also a foundation is laid for prolonging the service life of the NDIR gas sensor.
In the specific implementation process of this embodiment, the infrared reflection assembly 4 includes an infrared reflection micromirror 42 and a micromirror driving circuit 43, the micromirror driving circuit 43 is connected to the infrared reflection micromirror 42, and the infrared reflection assembly 4 is provided with an air vent 41.
By adopting the infrared reflection assembly 4 composed of the ventilation holes 41, the infrared reflection micro-mirror 42 and the micro-mirror driving circuit 43, not only the diffusion of gas molecules to the optical cavity through the ventilation holes 41 is realized, but also the purposes of driving the infrared reflection micro-mirror 42 and reflecting by the micro-mirror driving circuit 43 are effectively realized.
In the specific implementation process of this embodiment, the infrared reflecting micro mirror 42 is opposite to the infrared light emitting source 11, so that the infrared radiation generated by the infrared light emitting source 11 can completely reach the infrared reflecting micro mirror 42, thereby laying a foundation for improving the detection accuracy of the NDIR gas sensor.
In a specific implementation process of this embodiment, the NDIR gas sensor further includes a bonding pad 6, an interconnection bonding pad 7, and an interconnection through hole 8, where the bonding pad 6 is disposed on the infrared luminescence absorption sensing assembly 1, and the bonding pad 6 is connected to the light source driving circuit 13, the signal processing circuit 14, and the micromirror driving circuit 43 through the interconnection bonding pad 7 and the interconnection through hole 8.
Through further setting up pad 6, interconnection pad 7 and interconnection through-hole 8, not only realized carrying out the purpose of power supply for the inside components and parts of this NDIR gas sensor, but also realized the purpose of transmission data.
In the specific implementation of this embodiment, the interconnection through hole 8 is located in the support assembly 3.
In the specific implementation of this embodiment, the bonding pad 6 is connected to the light source driving circuit 13, the signal processing circuit 14, and the micromirror driving circuit 43 through the interconnection via 8.
In a specific implementation of this embodiment, the temperature sensor 15 is disposed proximate to the infrared absorber 12.
By arranging the temperature sensor 15 close to the infrared absorber 12, the purpose of detecting the temperature around the infrared absorber 12 is effectively achieved.
In a specific implementation process of this embodiment, the filter assembly 2 is disposed above the infrared absorber 12, and the infrared absorber 12 is one of a thermopile sensor or a pyroelectric sensor.
By disposing the filter assembly 2 above the infrared absorber 12, infrared radiation of a specific wavelength is allowed to pass through and impinge on the infrared absorber 12. The workflow of the fast modulation NDIR gas sensor provided by the embodiment of the utility model is as follows:
1) The external signal provides power to the infrared reflecting micromirror 42 (preferably a MEMS micromirror), the infrared light source 11 (preferably a MEMS infrared light source), and provides a reference voltage to the infrared absorber 12 (preferably a thermopile sensor) through the bonding pad 6;
2) The infrared light source 11 (preferably a MEMS infrared light source) emits constant broad-wave infrared radiation, which passes through the optical cavity 5 and impinges on the infrared reflecting micro-mirror 42 (preferably a MEMS micro-mirror);
3) The infrared reflecting micromirror 42 (preferably a MEMS micromirror) rotates or bends, and the infrared radiation reflected by the infrared reflecting micromirror 42 (preferably a MEMS micromirror) passes through the filter assembly 2 (preferably an infrared filter) to irradiate infrared radiation with a specific wavelength onto the infrared absorber 12 (preferably a thermopile sensor);
4) An infrared absorber 12 (preferably a thermopile sensor) absorbs infrared radiation and generates a voltage signal based on the intensity of the infrared radiation and the ambient temperature;
5) The signal processing circuit 14 processes the voltage signal generated by the infrared absorber 12 (preferably a thermopile sensor) and the electric signal generated by the ambient temperature sensor 15 based on an external signal to calculate a gas concentration value;
6) The calculated gas concentration value is transmitted to the outside in the form of an electrical signal through the bonding pad 6.
Additionally, in other embodiments:
1) The same infrared filter can be used to cover the infrared light source and the infrared light sensitive device;
2) The ventilation holes can be arranged on the supporting structure;
3) The infrared light sensitive device, the infrared light filter, the infrared emission light source and the infrared light filter can be respectively prepared into a single device, and are electrically connected and positioned on the same circuit substrate by the driving circuit and the signal processing circuit, and meanwhile, the substrate can be simultaneously used as a supporting structure.
In summary, in the sensor of the present utility model, the infrared light-emitting and absorbing sensing component, the supporting component and the infrared reflecting component are cooperatively connected to form the optical cavity of the NDIR gas sensor, and the optical filtering component is disposed in the optical cavity, so that when the infrared radiation emitted by the infrared light-emitting and absorbing sensing component irradiates onto the infrared reflecting component through the optical cavity, the infrared reflecting component reflects the infrared radiation and transmits the optical filtering component, so that the infrared radiation with a specific wavelength irradiates onto the infrared light-emitting and absorbing sensing component, the infrared light source can continuously and stably radiate infrared radiation, and the infrared radiation can reflect through the infrared reflecting component and periodically irradiate onto the infrared light-emitting and absorbing sensing component through the optical filtering component, and further the problem that the light source radiation intensity emitted by the NDIR gas sensor is low due to the modulation problem is effectively solved, and meanwhile, the resolution and response speed of the NDIR gas sensor are effectively improved, thereby laying a solid foundation for developing and developing the gas sensor.
The present utility model is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present utility model are intended to be included in the scope of the present utility model. Therefore, the protection scope of the present utility model should be subject to the protection scope of the claims.
Claims (8)
1. The fast modulation NDIR gas sensor is characterized by comprising an infrared luminous absorption sensing component (1), a light filtering component (2), a supporting component (3) and an infrared reflecting component (4); the infrared luminescence absorption sensing component (1) is connected with the infrared reflection component (4) through the supporting component (3) and forms an optical cavity (5) of the NDIR gas sensor; -the filter assembly (2) is located within the optical chamber (5); the infrared radiation emitted by the infrared luminous absorption sensing component (1) irradiates onto the infrared reflection component (4) through the optical cavity (5), and the infrared reflection component (4) reflects the infrared radiation and transmits the infrared radiation through the filtering component (2), so that the infrared radiation with specific wavelength irradiates onto the infrared luminous absorption sensing component (1).
2. The fast modulating NDIR gas sensor according to claim 1, wherein said infrared luminescence absorption sensing assembly (1) comprises an infrared light source (11), an infrared absorber (12), a light source driving circuit (13), and a signal processing circuit (14) for processing a voltage value measured by said infrared absorber (12) and calculating said voltage value as a gas concentration value; the infrared light source (11) is connected with the light source driving circuit (13); the infrared absorber (12) is connected to the signal processing circuit (14).
3. The fast modulating NDIR gas sensor according to claim 2, wherein said infrared luminescence absorption sensing assembly (1) further comprises an ambient temperature sensor (15) for detecting when said infrared absorber (12) is in operation, said ambient temperature sensor (15) being connected to said signal processing circuit (14).
4. A fast modulating NDIR gas sensor according to claim 3, wherein said infrared reflecting component (4) comprises an infrared reflecting micromirror (42), a micromirror driving circuit (43), said micromirror driving circuit (43) is connected with said infrared reflecting micromirror (42), and said infrared reflecting component (4) is provided with a vent hole (41).
5. The fast modulating NDIR gas sensor according to claim 4, further comprising a bonding pad (6), an interconnection bonding pad (7), an interconnection via (8), wherein the bonding pad (6) is disposed on the infrared luminescence absorption sensing assembly (1), and the bonding pad (6) is connected to the light source driving circuit (13), the signal processing circuit (14) and the micromirror driving circuit (43) through the interconnection bonding pad (7), the interconnection via (8).
6. The fast modulating NDIR gas sensor according to claim 5, wherein said interconnect through hole (8) is located within said support assembly (3).
7. The fast modulating NDIR gas sensor according to any of claims 3-6, wherein said temperature sensor (15) is disposed close to said infrared absorber (12).
8. The fast modulating NDIR gas sensor according to any of claims 2-6, wherein said filter assembly (2) is positioned above said infrared absorber (12), and said infrared absorber (12) is one of a thermopile sensor or a pyroelectric sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321353958.XU CN220136996U (en) | 2023-05-31 | 2023-05-31 | Fast modulation NDIR gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321353958.XU CN220136996U (en) | 2023-05-31 | 2023-05-31 | Fast modulation NDIR gas sensor |
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| Publication Number | Publication Date |
|---|---|
| CN220136996U true CN220136996U (en) | 2023-12-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202321353958.XU Active CN220136996U (en) | 2023-05-31 | 2023-05-31 | Fast modulation NDIR gas sensor |
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- 2023-05-31 CN CN202321353958.XU patent/CN220136996U/en active Active
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