CN220134262U

CN220134262U - Mounting structure of molecular pump end of giving vent to anger

Info

Publication number: CN220134262U
Application number: CN202321449627.6U
Authority: CN
Inventors: 玉基赫; 朴俊哲
Original assignee: Shanghai Tanqi Electronic Technology Co ltd
Current assignee: Shanghai Tanqi Electronic Technology Co ltd
Priority date: 2023-06-08
Filing date: 2023-06-08
Publication date: 2023-12-05
Anticipated expiration: 2033-06-08

Abstract

The utility model discloses a mounting structure of a molecular pump air outlet end, which comprises a molecular pump main body, wherein an air outlet pipe is arranged on the side wall of the molecular pump main body and is connected with one end of a connecting pipe through a threaded sleeve; the screw sleeve is in threaded connection with the side wall of the connecting pipe; a sealing groove is formed in the side wall of the air outlet pipe, and a sealing ring is correspondingly arranged in the sealing groove; an annular baffle is arranged at one end of the connecting pipe; the air outlet pipe is connected with the threaded sleeve through a fixing component, the fixing component comprises a fixing plate, the fixing plate is in a U-shaped arrangement, one end of the fixing plate is connected with the threaded sleeve through a bolt arranged on the threaded sleeve, a top plate is arranged at the other end of the fixing plate, and the top plate abuts against the end face of the air outlet pipe. Compared with the prior art, the utility model has the beneficial effects that the adopted sealing mode can provide double sealing effects from the transverse direction and the axial direction, the assembly is simple, the screw sleeve is only required to be screwed or unscrewed, the quick scheme is disassembled, and the sealing performance is good.

Description

Mounting structure of molecular pump end of giving vent to anger

Technical Field

The utility model relates to the field of molecular pumps, in particular to a mounting structure of an air outlet end of a molecular pump.

Background

The molecular pump is a vacuum pump which uses a rotor rotating at a high speed to transfer momentum to gas molecules to obtain directional speed, so that the gas molecules are compressed and driven to an exhaust port to be pumped out for a front stage. Molecular pumps are widely used in the fields of nuclear physics, electric vacuum, surface science and the like, and the market expansion speed of vacuum pumps is fast due to the rapid development of the semiconductor industry.

The molecular pump is installed in the rack of semiconductor preparation equipment below, when installing or maintaining it, maintenance personal need be squatting or horizontal just can be convenient for install, moreover still need ensure the sealing performance between molecular pump and the pipeline, the mode to connecting the outlet duct on the molecular pump at present is generally flange cooperation bolted connection, though can reach sealed installation's effect, but general bolt is comparatively screwed up, need screw up in proper order or dismantle a plurality of bolts when installing and dismantling, waste time and energy, and still need apply sealing gasket between the flange, lead to the fact staff's limbs numbness and aching easily, installation effectiveness has been reduced.

Disclosure of Invention

The utility model aims to provide a mounting structure of an air outlet end of a molecular pump, which realizes double sealing in the transverse direction and the axial direction by adopting a connecting pipe mode and ensures that the structure is more convenient to dismount compared with a flange plate fixed by bolts.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the molecular pump air outlet end mounting structure comprises a molecular pump main body, wherein an air outlet pipe is arranged on the side wall of the molecular pump main body, and the air outlet pipe is connected with one end of a connecting pipe through a threaded sleeve; the threaded sleeve is in threaded connection with the side wall of the connecting pipe; a sealing groove is formed in the side wall of the air outlet pipe, and a sealing ring is correspondingly arranged in the sealing groove; an annular baffle is arranged at one end of the connecting pipe; the air outlet pipe is further connected with the threaded sleeve through a fixing component, the fixing component comprises a fixing plate, the fixing plate is in a U-shaped arrangement, one end of the fixing plate is connected with the threaded sleeve through a bolt arranged on the threaded sleeve, a top plate is arranged at the other end of the fixing plate, and the top plate abuts against the end face of the air outlet pipe.

Preferably, the bottom surface of the thread on the surface of the connecting pipe forms an included angle with the pipe body of the connecting pipe.

Preferably, the side wall of the air outlet pipe is also provided with an annular groove, and the top plate is provided with a positioning plate which is matched with the annular groove.

Preferably, the side wall of the screw sleeve is provided with a plurality of round holes, and the round holes are in threaded connection with the bolts 15.

Preferably, the end face of the screw sleeve is provided with a groove, one end of the fixing plate is located in the groove, and the bolts are in threaded connection with one end of the fixing plate.

Preferably, the other end of the connecting pipe is rotatably connected with a mounting pipe, and the mounting pipe is in a Z-shaped structure.

Still preferably, one end of the installation pipe is fixedly connected with a sealing block, the other end of the connection pipe is provided with a clamping groove, the section of the sealing block is of a T-shaped structure, and the sealing block is matched with the clamping groove.

Compared with the prior art, the utility model has the beneficial effects that the adopted sealing mode can provide double sealing effects from the transverse direction and the axial direction, the assembly is simple, the screw sleeve is only required to be screwed or unscrewed, the quick scheme is disassembled, and the sealing performance is good.

Drawings

FIG. 1 is a perspective view of the present utility model;

FIG. 2 is a schematic view of a fixing assembly according to the present utility model;

FIG. 3 is a schematic view of the structure of the screw sleeve according to the present utility model;

FIG. 4 is an enlarged view of the utility model at A in FIG. 2;

fig. 5 is an enlarged view of the utility model at B in fig. 2.

In the figure: 1. a molecular pump body; 2. an air outlet pipe; 3. a connecting pipe; 4. installing a pipe; 5. a screw sleeve; 6. a fixing plate; 7. a top plate; 8. a positioning plate; 9. an annular groove; 10. a seal ring; 11. sealing grooves; 12. an annular baffle; 13. a sealing block; 14. a clamping groove; 15. a bolt; 16. a groove; 17. and a round hole.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Example 1

Referring to fig. 1 to 5, the present embodiment provides a mounting structure for an air outlet end of a molecular pump, including a molecular pump main body 1, wherein an air outlet pipe 2 is provided on a side wall of the molecular pump main body 1, and the air outlet pipe 2 is connected with one end of a connecting pipe 3 through a screw sleeve 5; the screw sleeve 5 is in threaded connection with the side wall of the connecting pipe 3, a plurality of round holes 17 are formed in the side wall of the screw sleeve 5, and the round holes 17 are in threaded connection with the bolts 15; the side wall of the air outlet pipe 2 is provided with a sealing groove 11, and a sealing ring 10 is correspondingly arranged in the sealing groove 11; an annular baffle 12 is arranged at one end of the connecting pipe 3; the air outlet pipe 2 is also connected with the screw sleeve 5 through a fixing component, the fixing component comprises a fixing plate 6, the fixing plate 6 is U-shaped, one end of the fixing plate 6 is connected with the screw sleeve 5 through a bolt 15 arranged on the screw sleeve 5, a groove 16 is formed in the end face of the screw sleeve 5, one end of the fixing plate 6 can be inserted into the groove 16, the bolts 15 are in threaded connection with one end of the fixing plate 6, a top plate 7 is arranged at the other end of the fixing plate 6, and the top plate 7 abuts against the end face of the air outlet pipe 2; the side wall of the air outlet pipe 2 is also provided with an annular groove 9, the top plate 7 is provided with a positioning plate 8, and the positioning plate 8 is matched with the annular groove 9.

The bottom surface of the surface screw thread of the connecting pipe 3 forms an included angle with the pipe body of the connecting pipe 3, namely, the surface screw thread of the connecting pipe 3 forms an inclined plane inwards from the end surface, and the screw sleeve 5 can press the inner screw thread to deform the connecting pipe 3 in the screwing process, so that axial pressing force is generated.

When the sealing device is used, when the connecting pipe 3 and the air outlet pipe 2 are required to be in butt joint, the sealing ring 10 is firstly embedded into the sealing groove 11, then the connecting pipe 3 is sleeved on the air outlet pipe 2, and the annular baffle 12 abuts against the end face of the air outlet pipe 2 at the moment, so that the sealing performance is further ensured; then one end of the fixed plate 6 is inserted into the groove 16, the bolt 15 is screwed from the round hole 17 to lock one end of the fixed plate 6, the screw sleeve 5 is sleeved on the outer side wall of the connecting pipe 3, then the screw sleeve 5 is rotated to drive the fixed plate 6 to move, the fixed plate 6 drives the top plate 7 to prop against the air outlet pipe 2, and after the screw sleeve 5 is screwed, a crow bar or a spanner can be used for being inserted into the round hole 17 to further screwed and reinforced; in the screwing process of the screw sleeve 5, the fixed plate 6 gradually approaches to the air outlet pipe 2, the top plate 7 and the air outlet pipe 2 are tightly abutted finally, the positioning plate 8 on the top plate 7 is embedded into the annular groove 9 to further realize tight abutment, and at the moment, a transverse pressing force is provided under the combined action of the screw sleeve 5 and the fixed plate 6 to realize sealing.

In this embodiment, in the threaded connection between the threaded sleeve 5 and the connecting tube 3, the threaded surface of the connecting tube 3 is an inclined surface, that is, in the process of the threaded connection between the threaded sleeve 5 and the connecting tube 3, the surface thread of the connecting tube 3 is an inclined surface, so that the threaded sleeve 5 continuously presses the connecting tube 3 to deform and form a force for pressing the air outlet tube 2, that is, a force for pressing the air outlet tube 2 toward the axis, during the screwing process, so that an axial tight seal is provided, and therefore, the sealing between the air outlet tube 2 and the connecting tube 3 is realized under the double pressing of the transverse direction and the axial direction.

Example two

In the embodiment, as a further preferable scheme of the first embodiment, the other end of the connecting pipe 3 is rotationally connected with an installation pipe 4, and the installation pipe 4 is in a Z-shaped structure; one end fixedly connected with sealing block 13 of installation tube 4, draw-in groove 14 has been seted up to the other end of connecting pipe 3, and sealing block 13 cross-section is T shape structure, and sealing block 13 and draw-in groove 14 mutually match.

Through the cooperation of sealing block 13 and draw-in groove 14, can make installation tube 4 rotate, make it reach appointed angle, be convenient for dock with outside pipeline, promote its installation effectiveness.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a mounting structure of molecular pump end of giving vent to anger, includes molecular pump main part (1), be provided with outlet duct (2) on the lateral wall of molecular pump main part (1), its characterized in that:

the air outlet pipe (2) is connected with one end of the connecting pipe (3) through a threaded sleeve (5); the screw sleeve (5) is in threaded connection with the side wall of the connecting pipe (3);

a sealing groove (11) is formed in the side wall of the air outlet pipe (2), and a sealing ring (10) is correspondingly arranged in the sealing groove (11);

an annular baffle (12) is arranged at one end of the connecting pipe (3);

the utility model discloses a screw-type air outlet pipe, including fixed subassembly, air outlet pipe (2) still are connected with swivel nut (5) through fixed subassembly, fixed subassembly includes fixed plate (6), fixed plate (6) are the U-shaped setting, the one end of fixed plate (6) is connected with swivel nut (5) through bolt (15) that set up on swivel nut (5), be provided with roof (7) on the other end of fixed plate (6), roof (7) with the terminal surface of air outlet pipe (2) offsets.

2. The molecular pump outlet end mounting structure according to claim 1, wherein:

the bottom surface of the surface thread of the connecting pipe (3) forms an included angle with the pipe body of the connecting pipe (3).

3. The molecular pump outlet end mounting structure according to claim 1, wherein:

an annular groove (9) is further formed in the side wall of the air outlet pipe (2), a positioning plate (8) is arranged on the top plate (7), and the positioning plate (8) is matched with the annular groove (9).

4. The molecular pump outlet end mounting structure according to claim 1, wherein:

the side wall of the screw sleeve (5) is provided with a plurality of round holes (17), and the round holes (17) are in threaded connection with the bolts (15).

5. The molecular pump outlet end mounting structure according to claim 1, wherein: the end face of the screw sleeve (5) is provided with a groove (16), one end of the fixing plate (6) is located in the groove (16), and the bolts (15) are in threaded connection with one end of the fixing plate (6).

6. The molecular pump outlet end mounting structure according to claim 1, wherein:

the other end of the connecting pipe (3) is rotationally connected with a mounting pipe (4), and the mounting pipe (4) is in a Z-shaped structure.

7. The molecular pump outlet port mounting structure according to claim 6, wherein: one end fixedly connected with sealing block (13) of installation pipe (4), draw-in groove (14) have been seted up to the other end of connecting pipe (3), sealing block (13) cross-section is T shape structure, sealing block (13) and draw-in groove (14) mutually match.