CN220132344U - Rotatable supporting mechanism of quartz tube part - Google Patents
Rotatable supporting mechanism of quartz tube part Download PDFInfo
- Publication number
- CN220132344U CN220132344U CN202321575579.5U CN202321575579U CN220132344U CN 220132344 U CN220132344 U CN 220132344U CN 202321575579 U CN202321575579 U CN 202321575579U CN 220132344 U CN220132344 U CN 220132344U
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- CN
- China
- Prior art keywords
- supporting
- bearing seat
- quartz tube
- roller
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000010453 quartz Substances 0.000 title claims abstract description 37
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 230000000149 penetrating effect Effects 0.000 claims abstract description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 9
- 239000010935 stainless steel Substances 0.000 claims description 9
- 239000002390 adhesive tape Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to the field of semiconductor production auxiliary equipment. The supporting mechanism comprises at least two supporting pieces which are arranged from left to right, wherein each supporting piece comprises a base and two supporting wheels which are arranged front and back, and the two supporting wheels which are arranged front and back are respectively used for supporting different positions of the quartz tube in the circumferential direction; the supporting wheel comprises a bearing seat and a roller, and the roller is rotationally connected with the bearing seat; the base is provided with a strip-shaped opening for guiding the bearing seat to move back and forth, the bearing seat is provided with a mounting hole, and the bearing seat is detachably connected with the base through bolts penetrating through the mounting hole and the strip-shaped opening. According to the utility model, through the plurality of supporting pieces, the quartz tube component can be freely rotated after being supported. The manpower is reduced. The bearing seat can move forwards and backwards to adjust, so that quartz tubes with different outer diameters can be supported conveniently.
Description
Technical Field
The utility model relates to the field of auxiliary equipment for semiconductor production, in particular to a furnace tube supporting mechanism.
Background
In the fabrication of semiconductor devices, chemical vapor deposition is one of the processes. In the chemical vapor deposition process, a silicon wafer needs to be put into a furnace tube. The furnace tube, which may also be referred to as a quartz tube, needs to be cleaned and regenerated after the quartz tube is used periodically.
In the cleaning and regenerating process, quartz tube surface detection work is carried out in many links such as material feeding, cleaning, finish burning and the like, and a rotating part is required during surface detection.
The traditional mode is to place the boiler tube on the U type supporting seat that the plastics supported, when the work piece that needs to rotate sees different faces, need the manual work to lift up the boiler tube and rotate the back, continue to put into U type supporting seat and support to carry out the surface inspection, this kind of mode that relies on the manual work to carry out the rotation just causes the rotation process and brings a lot of inconveniences. Firstly, the frequent rotation of the furnace tube with too large size is very labor-intensive, secondly, the furnace tube is a fragile piece, and the frequent rotation can bring more cracking risks.
At present, a quartz tube supporting mechanism capable of replacing manual work is lacking, so that the furnace tube is convenient to rotate and support.
Disclosure of Invention
The present utility model has been made to solve at least one of the above-mentioned problems occurring in the prior art, and provides a rotatable support mechanism for a quartz tube member.
The technical scheme of the utility model is as follows: a rotatable supporting mechanism of a quartz tube part is characterized by comprising at least two supporting pieces which are arranged from left to right,
the support piece comprises a base and two support wheels which are arranged front and back, and the two support wheels which are arranged front and back are respectively used for supporting different positions of the quartz tube part in the circumferential direction;
the supporting wheel comprises a bearing seat and a roller, and the roller is rotationally connected with the bearing seat;
the base is provided with a strip-shaped opening for guiding the front-back movement of the bearing seat, the bearing seat is provided with a mounting hole, and the bearing seat is detachably connected with the base through bolts penetrating through the mounting hole and the strip-shaped opening.
According to the utility model, through the plurality of supporting pieces, the quartz tube component can be freely rotated after being supported. The manpower is reduced. The bearing seat can move forwards and backwards to adjust, so that quartz tubes with different outer diameters can be supported conveniently.
Further preferably, the bearing seat is provided with angle graduation marks;
the roller is provided with an alignment line, and the length direction of the alignment line is parallel to the radial direction of the roller.
The rotation angle of the roller is convenient to visually check. Because the linear speeds of the roller and the workpiece are consistent, the rotation angle of the workpiece can be calculated through the outer diameter ratio of the roller and the workpiece.
Further preferably, a balancing weight is installed on the outer wall of the roller, and the center of the balancing weight and the alignment line are respectively located on opposite sides of the rotation center line of the roller.
Facilitating the constant initial position.
Further preferably, the roller comprises a stainless steel sleeve and a PP buffer layer, wherein the stainless steel sleeve and the PP buffer layer are arranged inside and outside, and the stainless steel sleeve is rotationally connected with the bearing seat.
Further preferably, a guide hole is formed in the base, and the guide hole is used for sliding into the limiting rod.
The left and right side by side arrangement of a plurality of supporting pieces is convenient.
Further preferably, the circumferential outer wall of the roller is covered with adhesive tape.
The method is suitable for the thin-wall quartz tube. For example, a quartz tube having a wall thickness of 5mm or less.
Further preferably, the base comprises a supporting plate, and supporting feet are connected to the lower side of the supporting plate;
the supporting plate is provided with a strip-shaped opening.
Further preferably, the front side of the supporting plate is provided with two strip-shaped openings which are arranged side by side left and right, and the strip-shaped opening at the front side of the supporting plate is connected with one supporting wheel;
two strip-shaped openings which are arranged side by side left and right are formed in the rear side of the supporting plate, and the strip-shaped openings in the rear side of the supporting plate are connected with the other supporting wheel.
Further preferably, the mounting holes are formed in the left end and the right end of the bearing seat.
The beneficial effects are that:
1) The universality that quartz tubes with almost different outer diameters can be used is guaranteed.
2) The sleeve is made of stainless steel, so that the PP buffer layer can be protected under the condition of unpowered rotation, the service life of the roller is prolonged, and meanwhile, the stability of the roller in supporting is also improved.
2) The detachable structure improves the interchangeability of the parts of the device and the whole service cycle, and stably improves the cost performance of the product in the service cycle.
Drawings
FIG. 1 is a schematic view of a structure of an embodiment 1 of the present utility model;
FIG. 2 is a schematic view showing a structure of a supporting member according to embodiment 1 of the present utility model;
fig. 3 is a schematic structural view of embodiment 2 of the present utility model.
In the figure: 1 is a supporting piece, 11 is a base, 12 is a roller, and 13 is a bearing seat; and 2 is an alignment line.
Detailed Description
Referring to fig. 1 to 2, in an embodiment 1, a rotatable supporting mechanism for a quartz tube member includes at least two supporting members 1 arranged from left to right, the supporting members 1 including a base 11 and two supporting wheels disposed front to back, the two supporting wheels disposed front to back being respectively used for supporting different positions in a circumferential direction of the quartz tube member; the supporting wheel comprises a bearing seat 13 and a roller 12, and the roller 12 is rotationally connected with the bearing seat 13; the base 11 is provided with a strip-shaped opening for guiding the bearing seat 13 to move back and forth, the bearing seat 13 is provided with a mounting hole, and the bearing seat 13 is detachably connected with the base 11 through bolts penetrating through the mounting hole and the strip-shaped opening. The utility model can realize the free rotation after supporting the quartz tube component through a plurality of supporting pieces 1. The manpower is reduced. The bearing seat 13 can move forwards and backwards to adjust, so that quartz tubes with different outer diameters are supported conveniently.
The base 11 comprises a supporting plate, and supporting feet are connected to the lower side of the supporting plate; the supporting plate is provided with a strip-shaped opening. The front side of the supporting plate is provided with two strip-shaped openings which are arranged side by side left and right, and the strip-shaped opening at the front side of the supporting plate is connected with a supporting wheel; two strip-shaped openings which are arranged side by side left and right are arranged on the rear side of the supporting plate, and the strip-shaped openings on the rear side of the supporting plate are connected with another supporting wheel. Mounting holes are formed in the left end and the right end of the bearing seat 13. The guiding direction (length direction) of the strip-shaped opening is front and back.
The bearing seat comprises a bottom plate and a hinge seat for hinging the idler wheels. The upper part of the bottom plate is connected with a hinge seat. The bottom plate is provided with a mounting hole.
The roller 12 comprises a stainless steel sleeve and a PP buffer layer which are arranged inside and outside, and the stainless steel sleeve is rotationally connected with the bearing seat 13.
Working principle: the distance between the supporting wheels is kept at a proper distance according to the diameter of the quartz tube, then the quartz tube is supported on the two supporting pieces by using the two supporting pieces within a certain distance, and then the quartz tube can be rotated freely and powerlessly by rotating the quartz tube by hand while checking.
Referring to fig. 3, embodiment 2, on the basis of embodiment 1, angle graduation marks are arranged on the bearing seat; the roller is provided with an alignment line 2, and the length direction of the alignment line 2 is parallel to the radial direction of the roller. The rotation angle of the roller is convenient to visually check. Because the linear speeds of the roller and the workpiece are consistent, the rotation angle of the workpiece can be calculated through the outer diameter ratio of the roller and the workpiece. The center of the angle scale mark is the rotation center of the roller.
Embodiment 3, on the basis of embodiment 2, a balancing weight is installed on the outer wall of the roller, and the center and the alignment line of the balancing weight are respectively located on opposite sides of the rotation center line of the roller.
Embodiment 4, on the basis of embodiment 1, a guide hole is formed in the base, and the guide hole is used for sliding into the limiting rod. The left and right side by side arrangement of a plurality of support pieces is convenient. The guide holes of the bases of the supporting pieces are inserted into the same limiting rod.
Embodiment 5. On the basis of embodiment 1, the circumferential outer wall of the roller is covered with an adhesive tape. The method is suitable for the thin-wall quartz tube. For example, a quartz tube having a wall thickness of 5mm or less. The tape is preferably a soft tape.
In embodiment 6, in addition to embodiment 1, graduation marks whose longitudinal direction is the front-rear direction are provided on the support plate. And the visual observation of the distance between the two supporting wheels is convenient.
The foregoing is merely a preferred embodiment of the present utility model and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present utility model, which are intended to be comprehended within the scope of the present utility model.
Claims (9)
1. A rotatable supporting mechanism of a quartz tube part is characterized by comprising at least two supporting pieces which are arranged from left to right,
the support piece comprises a base and two support wheels which are arranged front and back, and the two support wheels which are arranged front and back are respectively used for supporting different positions of the quartz tube part in the circumferential direction;
the supporting wheel comprises a bearing seat and a roller, and the roller is rotationally connected with the bearing seat;
the base is provided with a strip-shaped opening for guiding the front-back movement of the bearing seat, the bearing seat is provided with a mounting hole, and the bearing seat is detachably connected with the base through bolts penetrating through the mounting hole and the strip-shaped opening.
2. A rotatable support mechanism for a quartz tube member in accordance with claim 1, wherein: angle scale marks are arranged on the bearing seat;
the roller is provided with an alignment line, and the length direction of the alignment line is parallel to the radial direction of the roller.
3. A rotatable support mechanism for a quartz tube member as in claim 2, wherein: and the outer wall of the roller is provided with a balancing weight, and the center of the balancing weight and the alignment line are respectively positioned on the opposite sides of the rotation center line of the roller.
4. A rotatable support mechanism for a quartz tube member in accordance with claim 1, wherein: the roller comprises a stainless steel sleeve and a PP buffer layer, wherein the stainless steel sleeve and the PP buffer layer are arranged inside and outside the roller, and the stainless steel sleeve is rotationally connected with the bearing seat.
5. A rotatable support mechanism for a quartz tube member in accordance with claim 1, wherein: the base is provided with a guide hole, and the guide hole is used for sliding into the limiting rod.
6. A rotatable support mechanism for a quartz tube member in accordance with claim 1, wherein: and the circumferential outer wall of the roller is covered with an adhesive tape.
7. A rotatable support mechanism for a quartz tube member in accordance with claim 1, wherein: the base comprises a supporting plate, and supporting feet are connected to the lower side of the supporting plate;
the supporting plate is provided with a strip-shaped opening.
8. A rotatable support mechanism for a quartz tube member in accordance with claim 7, wherein: the front side of the supporting plate is provided with two strip-shaped openings which are arranged side by side left and right, and the strip-shaped opening at the front side of the supporting plate is connected with one supporting wheel;
two strip-shaped openings which are arranged side by side left and right are formed in the rear side of the supporting plate, and the strip-shaped openings in the rear side of the supporting plate are connected with the other supporting wheel.
9. A rotatable support mechanism for a quartz tube component in accordance with claim 8, wherein: the left end and the right end of the bearing seat are provided with the mounting holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321575579.5U CN220132344U (en) | 2023-06-20 | 2023-06-20 | Rotatable supporting mechanism of quartz tube part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321575579.5U CN220132344U (en) | 2023-06-20 | 2023-06-20 | Rotatable supporting mechanism of quartz tube part |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220132344U true CN220132344U (en) | 2023-12-05 |
Family
ID=88953668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321575579.5U Active CN220132344U (en) | 2023-06-20 | 2023-06-20 | Rotatable supporting mechanism of quartz tube part |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220132344U (en) |
-
2023
- 2023-06-20 CN CN202321575579.5U patent/CN220132344U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |