CN220123116U - Carbon dioxide static electricity removing equipment - Google Patents
Carbon dioxide static electricity removing equipment Download PDFInfo
- Publication number
- CN220123116U CN220123116U CN202321267128.5U CN202321267128U CN220123116U CN 220123116 U CN220123116 U CN 220123116U CN 202321267128 U CN202321267128 U CN 202321267128U CN 220123116 U CN220123116 U CN 220123116U
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- carbon dioxide
- valve
- pure water
- pipeline
- metal shell
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- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims abstract description 280
- 239000001569 carbon dioxide Substances 0.000 title claims abstract description 140
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims abstract description 140
- 230000005611 electricity Effects 0.000 title abstract description 11
- 230000003068 static effect Effects 0.000 title abstract description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 138
- 239000002184 metal Substances 0.000 claims abstract description 24
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 238000001514 detection method Methods 0.000 claims abstract description 17
- 239000003595 mist Substances 0.000 claims abstract description 12
- 239000008213 purified water Substances 0.000 claims abstract description 6
- 238000007599 discharging Methods 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 229910000831 Steel Inorganic materials 0.000 description 13
- 239000010959 steel Substances 0.000 description 13
- 239000002173 cutting fluid Substances 0.000 description 4
- 238000011010 flushing procedure Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
Abstract
The utility model relates to the technical field of semiconductor chip processing and discloses carbon dioxide static electricity removing equipment which comprises a shell mechanism and an internal mixing mechanism, wherein the shell mechanism comprises a metal shell, a detection control area is arranged above the metal shell, the side surfaces of the metal shell are respectively connected with a power interface, a carbon dioxide air inlet pipe, a mist water outlet pipe, a purified water inlet and a mixed water outlet, and extend to the inside of the metal shell, a pure water inlet pipeline and a mixed water outlet pipeline are arranged in the metal shell to be connected, and a pure water and carbon dioxide mixer is arranged to be respectively connected with a carbon dioxide air inlet valve, a carbon dioxide air outlet valve, a carbon dioxide air check valve and a carbon dioxide filter to inject carbon dioxide, and the injected carbon dioxide and purified water are mixed in the pure water and carbon dioxide mixer, so that low-pressure mixing is realized without continuous pressurization, pipeline damage is avoided, and the effect of improving safety is achieved.
Description
Technical Field
The utility model relates to the technical field of semiconductor chip processing, in particular to carbon dioxide static electricity removing equipment.
Background
The ultrapure water in the dicing process of the semiconductor chip can generate static electricity to the chip, and if the static electricity is not released, the circuit of the chip can be damaged, so that gas needs to be injected into a water body through high pressure to reduce the resistance value of the ultrapure water, and the static electricity is eliminated on the surface of the chip.
The prior art needs to inject the gas into the water body through high pressure, which can lead to the pipeline to be subjected to high pressure for a long time, the risk of the pipeline breaking exists, and the usage amount of the gas can be large in order to maintain the high pressure.
Therefore, there is a need for a carbon dioxide static electricity removing device for low-pressure mixed gas, improving safety and reducing gas consumption.
Disclosure of Invention
The utility model aims to provide carbon dioxide static electricity removing equipment for solving the problems in the background technology.
In order to solve the technical problems, the utility model provides the following technical scheme: the carbon dioxide static electricity removing equipment comprises a shell mechanism and an internal mixing mechanism, wherein the shell mechanism comprises a metal shell, a detection control area is arranged above the metal shell, and the side surfaces of the metal shell are respectively connected with a power interface, a carbon dioxide air inlet pipe, a mist water outlet pipe, a purified water inlet and a mixed water outlet and extend to the inside of the metal shell;
the mixing mechanism comprises a pure water inlet pipeline and a mixed water outlet pipeline, one end of the pure water inlet pipeline is connected with a pure water inlet, the other end of the pure water inlet pipeline is connected with a resistance measuring electrode, one end of the mixed water outlet pipeline is connected with a mixed water outlet, the other end of the mixed water outlet pipeline is provided with a pure water pressure gauge and a sensor, and the middle parts of the pure water inlet pipeline and the mixed water outlet pipeline are connected through pipelines;
the inside of the metal shell is fixedly connected with a pure water and carbon dioxide mixer, a carbon dioxide air inlet valve, a carbon dioxide air outlet valve, a carbon dioxide one-way valve and a carbon dioxide filter, the pure water and carbon dioxide mixer is respectively connected with the carbon dioxide air inlet valve, the carbon dioxide air outlet valve and the carbon dioxide one-way valve through pipelines, and two ends of the carbon dioxide filter are respectively communicated with the carbon dioxide air inlet pipe and the carbon dioxide one-way valve;
the side face of the pure water inlet pipeline is connected with the pure water and carbon dioxide mixer through a thin pipe to realize gas mixing.
Preferably, the detection control regionComprises a resistivity adjusting knob, an alarm reset switch, a manual mist discharge button, a water pressure low alarm, a air pressure low alarm, a resistivity alarm indicator lamp, a resistivity meter and CO 2 Air supply pressure gauge, CO 2 A pressure gauge and a flow regulating valve.
Preferably, a green indicator light and a red indicator light are also arranged at the top of the detection control area.
Preferably, the carbon dioxide air inlet valve and the carbon dioxide air outlet valve are both check valves, and the carbon dioxide air outlet valve and the carbon dioxide air check valve are both connected to the detection control area.
Preferably, a solenoid valve is arranged at the pipeline opening of the fog outlet pipe, and the solenoid valve is connected with a manual fog discharging button.
Preferably, the end parts of the pure water pressure gauge and the sensor are provided with a hand valve, and the hand valve seals the end part of the mixed water outlet pipeline.
Preferably, a thin film is provided inside the pure water and carbon dioxide mixer.
Compared with the prior art, the utility model has the following beneficial effects:
the first, the utility model is connected through setting up pure water inlet pipeline and mixed water outlet pipeline in the inside of the metal casing, and set up pure water and carbon dioxide mixer and connect carbon dioxide admission valve, carbon dioxide discharge valve, carbon dioxide gas check valve and carbon dioxide filter respectively, carry on the carbon dioxide to pour into, and make carbon dioxide and pure water poured into mix in pure water and carbon dioxide mixer, and use when cutting the chip into, thus realize the low-pressure to mix and need not to pressurize continuously, avoid the pipeline damage, has reached and promoted the security effect.
The second, the utility model is connected with the pure water and carbon dioxide mixer through arranging the carbon dioxide air inlet valve, the carbon dioxide air outlet valve, the carbon dioxide gas one-way valve and the carbon dioxide filter, and the pure water and carbon dioxide mixer is connected with the pure water inlet pipeline, so that water and gas can enter the pure water and carbon dioxide mixer in equal proportion for mixing, and the gas consumption can be effectively reduced by controlling the detection control area.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic view of the inside of the structure of the present utility model;
FIG. 3 is a schematic view showing the structure of a pure water and carbon dioxide mixer according to the present utility model;
FIG. 4 is a schematic diagram of a mixing process according to the present utility model.
Wherein: 1. a housing mechanism; 101. a metal housing; 102. detecting a control area; 103. a power interface; 104. a carbon dioxide intake pipe; 105. a mist outlet pipe; 106. a purified water inlet; 107. a mixed water outlet; 2. a mixing mechanism; 201. pure water inlet pipeline; 202. a mixed water outlet pipeline; 203. resistance value measuring electrodes; 204. a pure water pressure gauge and a sensor; 205. a pure water and carbon dioxide mixer; 206. a carbon dioxide intake valve; 207. a carbon dioxide exhaust valve; 208. a carbon dioxide gas one-way valve; 209. a carbon dioxide filter.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-4, a carbon dioxide static electricity removing device comprises a shell mechanism 1 and an internal mixing mechanism 2, wherein the shell mechanism 1 comprises a metal shell 101, a detection control area 102 is arranged above the metal shell 101, and the side surfaces of the metal shell 101 are respectively connected with a power interface 103, a carbon dioxide air inlet pipe 104, a mist water air outlet pipe 105, a purified water inlet 106 and a mixed water outlet 107 and extend into the metal shell 101;
the mixing mechanism 2 comprises a pure water inlet pipeline 201 and a mixed water outlet pipeline 202, one end of the pure water inlet pipeline 201 is connected with the pure water inlet 106, the other end of the pure water inlet pipeline 201 is connected with a resistance value measuring electrode 203, one end of the mixed water outlet pipeline 202 is connected with the mixed water outlet 107, the other end of the mixed water outlet pipeline 202 is provided with a pure water pressure gauge and a sensor 204, and the pure water inlet pipeline 201 and the mixed water outlet pipeline 202 are interconnected through pipelines;
the inside of the metal shell 101 is also fixedly connected with a pure water and carbon dioxide mixer 205, a carbon dioxide air inlet valve 206, a carbon dioxide air outlet valve 207, a carbon dioxide one-way valve 208 and a carbon dioxide filter 209, wherein the pure water and carbon dioxide mixer 205 is respectively connected with the carbon dioxide air inlet valve 206, the carbon dioxide air outlet valve 207 and the carbon dioxide one-way valve 208 through pipelines, and two ends of the carbon dioxide filter 209 are respectively communicated with the carbon dioxide air inlet pipe 104 and the carbon dioxide one-way valve 208;
the side of the pure water inlet pipeline 201 is connected with the pure water and carbon dioxide mixer 205 through a thin pipe to realize gas mixing.
Through the technical scheme, the pure water inlet pipeline 201 and the mixed water outlet pipeline 202 are arranged in the metal shell 101 to be connected, the pure water and carbon dioxide mixer 205 is respectively connected with the carbon dioxide air inlet valve 206, the carbon dioxide air outlet valve 207, the carbon dioxide one-way valve 208 and the carbon dioxide filter 209 to inject carbon dioxide, and the injected carbon dioxide and the pure water are mixed in the pure water and carbon dioxide mixer 205, so that low-pressure mixing is realized without continuous pressurization, pipeline damage is avoided, and the safety improvement effect is achieved;
the carbon dioxide air inlet valve 206, the carbon dioxide air outlet valve 207, the carbon dioxide air one-way valve 208 and the carbon dioxide filter 209 are arranged to be connected with the pure water and carbon dioxide mixer 205, and the pure water and carbon dioxide mixer 205 is connected with the pure water inlet pipeline 201, so that water and air can enter the pure water and carbon dioxide mixer 205 in equal proportion to be mixed, and the air can be controlled through the detection control area 102, so that the consumption of air can be effectively reduced.
Specifically, the detection control area 102 includes a resistivity adjustment knob, an alarm reset switch, a manual mist discharge button, a low water pressure alarm, a low air pressure alarm, and a resistivityAlarm indicator lamp, resistivity meter and CO 2 Air supply pressure gauge, CO 2 A pressure gauge and a flow regulating valve.
Through the technical scheme, a resistivity adjusting knob (the resistivity of water is set, the resistance value of a machine is controlled by the knob, the resistance value of the machine is reduced when the machine rotates leftwards, the resistance value of the machine rotates rightwards and the resistance value of the machine rotates rightwards is increased), an alarm reset switch (the upper limit and the lower limit of the resistance value are used for alarming, a buzzer can be manually turned off), a manual mist discharging button (when the resistance value is not very stable (higher), the reason is that a small amount of mist in CELL is not discharged, the machine has an automatic discharging function, the machine normally discharges once in 4 hours, when an emergency is met, the manual discharging can be performed by pressing the discharging button on a panel (the buzzer can be opened after being pressed for a few seconds), and the air inlet (CO) 2 ) The pressure must be more than or equal to 0.5 kg), low water pressure alarm, low air pressure alarm, resistivity alarm indicator lamp, resistivity meter and CO 2 Air supply pressure gauge, CO 2 The pressure gauge and the flow regulating valve are used for monitoring and controlling equipment in real time so as to improve the safety and the operation convenience of the equipment.
Specifically, a green indicator light and a red indicator light are also mounted on top of the detection control area 102.
Through above-mentioned technical scheme, green pilot lamp and red pilot lamp, when for green pilot lamp light, equipment normal operating, when red pilot lamp light back, resistance value is higher or the alarm of being low.
Specifically, the carbon dioxide intake valve 206 and the carbon dioxide exhaust valve 207 are check valves, and the carbon dioxide exhaust valve 207 and the carbon dioxide check valve 208 are connected to the detection control section 102.
Through the above technical scheme, the carbon dioxide air inlet valve 206 and the carbon dioxide air outlet valve 207 are arranged to be check valves so as to avoid backflow, thereby improving the working efficiency of the equipment, and the carbon dioxide air outlet valve 207 and the carbon dioxide air check valve 208 are controlled by keys in the detection control area 102.
Specifically, a solenoid valve is installed at the pipe opening of the mist outlet pipe 105, and the solenoid valve is connected with a manual mist discharging button.
Through above-mentioned technical scheme, when the resistance value is not very stable, through using manual emission fog button to connect the fog in with the pipeline and discharge to promote the stability of equipment operation.
Specifically, a hand valve is mounted to the end of the pure water pressure gauge and sensor 204, which seals the end of the mixed water outlet line 202.
Through the above technical scheme, the hand valve is used for sealing the end part of the mixed water outlet pipeline 202, and can realize real-time monitoring through the cooperation of the hand valve, the pure water pressure gauge and the sensor 204.
Specifically, a thin film is provided inside the pure water and carbon dioxide mixer 205.
Through the technical scheme, the water-gas mixing device can only mix low-pressure gas to the high-pressure water chamber through the wall of the film tube, and high-pressure water cannot pass through the film to the gas pipeline.
When in use, the pure water inlet pipeline 201 and the mixed water outlet pipeline 202 are arranged in the metal shell 101 to be connected, the pure water and carbon dioxide mixer 205 is respectively connected with the carbon dioxide air inlet valve 206, the carbon dioxide air outlet valve 207, the carbon dioxide one-way valve 208 and the carbon dioxide filter 209 to inject carbon dioxide, and the injected carbon dioxide and the pure water are mixed in the pure water and carbon dioxide mixer 205, so that low-pressure mixing is realized without continuous pressurization, pipeline damage is avoided, and the safety improvement effect is achieved;
the pure water and carbon dioxide mixer 205 is connected with the pure water and carbon dioxide mixer 205 by arranging the carbon dioxide air inlet valve 206, the carbon dioxide air outlet valve 207, the carbon dioxide air one-way valve 208 and the carbon dioxide filter 209, and the pure water and carbon dioxide mixer 205 is connected with the pure water pipeline 201, so that water and air can enter the pure water and carbon dioxide mixer 205 in equal proportion for mixing, and the consumption of the air can be effectively reduced by controlling the detection control area 102;
if the cutting fluid injector is additionally arranged at the tail end of the carbon dioxide, a check valve is additionally arranged between the cutting fluid injector and the carbon dioxide injector, and if the cutting fluid injector is not arranged, the cutting fluid can flow back, so that the service life of CELL is possibly damaged.
The operation steps are as follows:
mounting
The housing mechanism (1) places the machine in a desired position.
The mixing mechanism (2) opens the cabinet door of the equipment to ensure 2 COs 2 The gas cylinder is firmly fixed in the bottle clamp, and the bottle valve is in a closed state, and all the inner pipes in the sight line are connected correctly.
(3) And (3) confirming that the pressure reducing valve of the steel cylinder is in a closed state (the hand wheel is left-handed to the loosest state), and tightly connecting the pressure reducing valve with the steel cylinder to ensure that the interface is free from leakage.
(4) The water supply pipe of deionized water is correctly connected with the water inlet joint of the device, and the water outlet joint of the device is correctly connected with the water pipeline, so that the joint is ensured to be free from leakage. The pipeline is provided with a sewage outlet and a valve.
(5) The power line of the local machine is correctly connected with power supply equipment provided by a user, so that the ground line is well grounded, and a socket without the ground line is strictly forbidden to supply power for the local machine.
Starting up
Shell mechanism (1) is ready for starting up
Confirming that the current ambient temperature is not more than 40 ℃;
confirming that the exhaust pipeline works normally;
confirming that the water inlet/outlet pipe valve is in a closed state;
confirming that the water supply quality meets the water inlet requirement, wherein the water supply pressure is more than 0.15MPa and less than 0.5MPa;
confirming native panel resistivity knob and CO 2 The gas adjusting knobs are all in the closed state (the resistivity adjusting knob is right-handed to the bottom, CO 2 The gas adjusting knob is left-handed to the end position);
checking for CO 2 The bottle valve and the pressure reducing valve are both in a closed state;
checking for CO 2 The filter cup has water accumulation or not, if the water accumulation exists, the filter cup is emptied.
Starting up step
(1) The power supply of the device is turned on, the work indicator lamp is confirmed to be turned on, and the resistivity meter starts to be started in a self-checking mode;
(2) opening the water outlet valve and slowly opening the water inlet valve (provided by a user);
(3) slowly starting the resistivity adjusting knob for about 3 circles, simultaneously ensuring that the inflow is not less than 8L/MIN, and continuously flushing for several minutes to prevent residual bubbles in the pipeline;
(4) opening a cabinet door of the equipment, slowly opening a steel cylinder valve, confirming that a corresponding pressure gauge at the high-pressure end of the pressure reducing valve indicates normal pressure (5-7 MPa at normal temperature), slowly opening the pressure reducing valve, confirming that the pressure at the low-pressure end is 0.2-0.3MPa, and closing the cabinet door;
(5) slowly turn on CO on panel 2 Gas adjusting knob to make CO on panel 2 The gas pressure gauge shows that the pressure is 0.02-0.05MPa (not higher than the water inlet pressure);
(6) pressing a manual exhaust button for 5 seconds (vapor, condensed water and the like generated in a gas flushing gas circuit pipeline);
(7) and (3) adjusting: the left-handed resistivity adjusting knob is slowly started for 1/8 circle, after the resistivity is stabilized, the resistivity adjusting knob is finely adjusted, and after the resistivity is stabilized, the next adjustment is needed to be carried out every time the adjustment is carried out until the resistivity table shows that the value is stabilized at the resistivity value (the set range is 0.2-2.0MΩ & cm) required by the user.
When the device is used for the first time, the pipeline needs to be washed. The specific method comprises the following steps:
ensure that the resistivity regulating valve of the equipment is closed and the CO is closed 2 The air source ensures that the quality of the inlet water is the water quality above RO, then the drain valve is opened, the water inlet valve is slowly opened to carry out high-flow flushing (not more than 40L/MIN) on the pipeline, and the flushing time is not less than 30 minutes.
Stopping the machine
(1) Steel cylinder valve for closing
(2) Pressing the manual bleed button until the faceplate gas gauge pointer reaches the 0 position (relieving the residual pressure in the trachea)
(3) Attention to closing the inlet valve
(4) Closing resistivity regulating valve
(5) Closing the power switch
(6) Cutting off the power supply
Switching/changing cylinders
2 cylinders are prepared for connection in the system, typically with only one cylinder open. When the CO in the steel cylinder is 2 When the gas is used up, the operation can be switched to the other steel cylinder to continue.
The steel cylinder can be switched under the starting-up running state.
The method for replacing the steel cylinder comprises the following steps:
note that: the cylinder replacement operation must be performed with the machine stopped.
And confirming that the cylinder valve of the steel cylinder to be replaced is completely closed, loosening a corresponding hand wheel of the pressure reducing valve of the steel cylinder (the hand wheel is left-handed to the end), and loosening and detaching the pressure reducing valve of the steel cylinder by using a proper wrench. Opening the bottle clamp, taking out the steel bottle from the bottle clamp and vertically placing the steel bottle in a safe place. Taking a filled CO 2 And (3) confirming that the cylinder valve is in a completely closed state, putting the cylinder valve into a cylinder clamp in the cabinet body, fixing the cylinder clamp, fastening an interface of a corresponding cylinder pressure reducing valve and the cylinder by using a proper wrench, and ensuring that the connection is tight and no gas leakage exists.
Note that: empty cylinders are the same as the cylinder storage/transportation/use safety regulations followed by filled cylinders, and cannot reduce their operational safety standards.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. Carbon dioxide destatics equipment, including housing mechanism (1) and inside mixed mechanism (2), its characterized in that: the shell mechanism (1) comprises a metal shell (101), a detection control area (102) is arranged above the metal shell (101), and the side surfaces of the metal shell (101) are respectively connected with a power interface (103), a carbon dioxide air inlet pipe (104), a mist water air outlet pipe (105), a purified water inlet (106) and a mixed water outlet (107) and extend to the inside of the metal shell (101);
the mixing mechanism (2) comprises a pure water inlet pipeline (201) and a mixed water outlet pipeline (202), one end of the pure water inlet pipeline (201) is connected with the pure water inlet (106), the other end of the pure water inlet pipeline is connected with a resistance value measuring electrode (203), one end of the mixed water outlet pipeline (202) is connected with the mixed water outlet (107), the other end of the mixed water outlet pipeline is provided with a pure water pressure gauge and a sensor (204), and the pure water inlet pipeline (201) and the mixed water outlet pipeline (202) are connected through pipelines;
the inside of the metal shell (101) is fixedly connected with a pure water and carbon dioxide mixer (205), a carbon dioxide air inlet valve (206), a carbon dioxide air outlet valve (207), a carbon dioxide one-way valve (208) and a carbon dioxide filter (209), wherein the pure water and carbon dioxide mixer (205) is respectively connected with the carbon dioxide air inlet valve (206), the carbon dioxide air outlet valve (207) and the carbon dioxide one-way valve (208) through pipelines, and two ends of the carbon dioxide filter (209) are respectively communicated with the carbon dioxide air inlet pipe (104) and the carbon dioxide one-way valve (208);
the side surface of the pure water inlet pipeline (201) is connected with the pure water and carbon dioxide mixer (205) through a thin pipe to realize gas mixing.
2. A carbon dioxide destaticizing apparatus according to claim 1 wherein: the detection control area (102) comprises a resistivity adjusting knob, an alarm reset switch, a manual mist discharge button, a water pressure low alarm, a gas pressure low alarm, a resistivity alarm indicator lamp, a resistivity meter and a CO 2 Air supply pressure gauge, CO 2 A pressure gauge and a flow regulating valve.
3. A carbon dioxide destaticizing apparatus according to claim 2 wherein: and a green indicator light and a red indicator light are also arranged at the top of the detection control area (102).
4. A carbon dioxide destaticizing apparatus according to claim 1 wherein: the carbon dioxide air inlet valve (206) and the carbon dioxide air outlet valve (207) are all check valves, and the carbon dioxide air outlet valve (207) and the carbon dioxide air check valve (208) are both connected into the detection control area (102).
5. A carbon dioxide destaticizing apparatus according to claim 2 wherein: an electromagnetic valve is arranged at the pipeline opening of the fog outlet pipe (105), and the electromagnetic valve is connected with a button for manually discharging fog.
6. A carbon dioxide destaticizing apparatus according to claim 1 wherein: and a hand valve is arranged at the end parts of the pure water pressure gauge and the sensor (204), and seals the end part of the mixed water outlet pipeline (202).
7. A carbon dioxide destaticizing apparatus according to claim 1 wherein: a thin film is provided inside the pure water and carbon dioxide mixer (205).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321267128.5U CN220123116U (en) | 2023-05-24 | 2023-05-24 | Carbon dioxide static electricity removing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321267128.5U CN220123116U (en) | 2023-05-24 | 2023-05-24 | Carbon dioxide static electricity removing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220123116U true CN220123116U (en) | 2023-12-01 |
Family
ID=88892314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321267128.5U Active CN220123116U (en) | 2023-05-24 | 2023-05-24 | Carbon dioxide static electricity removing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220123116U (en) |
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2023
- 2023-05-24 CN CN202321267128.5U patent/CN220123116U/en active Active
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