CN220116225U - Silane recovery system in silane-containing tail gas - Google Patents
Silane recovery system in silane-containing tail gas Download PDFInfo
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- CN220116225U CN220116225U CN202320850637.4U CN202320850637U CN220116225U CN 220116225 U CN220116225 U CN 220116225U CN 202320850637 U CN202320850637 U CN 202320850637U CN 220116225 U CN220116225 U CN 220116225U
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- silane
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- membrane
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- 229910000077 silane Inorganic materials 0.000 title claims abstract description 110
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 109
- 238000011084 recovery Methods 0.000 title claims abstract description 34
- 239000007789 gas Substances 0.000 claims abstract description 89
- 239000012528 membrane Substances 0.000 claims abstract description 83
- 239000001257 hydrogen Substances 0.000 claims abstract description 28
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 28
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 26
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 15
- 229920005591 polysilicon Polymers 0.000 claims abstract description 13
- 239000007788 liquid Substances 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 19
- 239000002808 molecular sieve Substances 0.000 claims description 9
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 9
- 239000004642 Polyimide Substances 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 8
- -1 polydimethylsiloxane Polymers 0.000 claims description 8
- 229920001721 polyimide Polymers 0.000 claims description 8
- 238000007670 refining Methods 0.000 claims description 6
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims description 5
- 238000005984 hydrogenation reaction Methods 0.000 claims description 5
- 239000005049 silicon tetrachloride Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 239000002033 PVDF binder Substances 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 4
- 239000012621 metal-organic framework Substances 0.000 claims description 4
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 4
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 4
- 239000004696 Poly ether ether ketone Substances 0.000 claims description 3
- 239000004743 Polypropylene Substances 0.000 claims description 3
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical group OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 claims description 3
- 239000003575 carbonaceous material Substances 0.000 claims description 3
- 229910021389 graphene Inorganic materials 0.000 claims description 3
- 239000012510 hollow fiber Substances 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000004941 mixed matrix membrane Substances 0.000 claims description 3
- 229920000620 organic polymer Polymers 0.000 claims description 3
- 229920005548 perfluoropolymer Polymers 0.000 claims description 3
- 229920002492 poly(sulfone) Polymers 0.000 claims description 3
- 229920002530 polyetherether ketone Polymers 0.000 claims description 3
- 229920001155 polypropylene Polymers 0.000 claims description 3
- 238000004064 recycling Methods 0.000 claims description 3
- 239000012920 MOF membrane Substances 0.000 claims description 2
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 claims description 2
- 238000006386 neutralization reaction Methods 0.000 claims description 2
- 238000005406 washing Methods 0.000 claims description 2
- 238000009833 condensation Methods 0.000 abstract description 6
- 230000005494 condensation Effects 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 3
- 238000002360 preparation method Methods 0.000 abstract description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000001601 blood-air barrier Anatomy 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The utility model discloses a silane recovery system in silane-containing tail gas, and belongs to the technical field of high-purity polysilicon preparation. The system comprises a first storage tank, a first tail gas pipe, a membrane separator, a condenser, a demister and a third storage tank; the first storage tank is used for storing silane-containing tail gas and is provided with an air inlet and an air outlet; the air inlet of the first storage tank is connected with a first tail gas pipe; the air outlet of the first storage tank is connected with the inlet of the membrane separator; the membrane separator is provided with a first outlet and a second outlet, the first outlet of the membrane separator is connected with the inlet of the condenser, the liquid outlet of the condenser is connected with the inlet of the third storage tank, the gas outlet of the condenser is connected with the gas inlet of the demister, the liquid outlet of the demister is connected with the inlet of the third storage tank, and the recovered silane is stored in the third storage tank. The silane and hydrogen are recovered, the condensation load of silane gas is reduced, the condensation effect of silane is improved, the cost of recovering tail gas containing silane is reduced, and the purity of recovered hydrogen is improved.
Description
Technical Field
The utility model relates to a silane recovery system in silane-containing tail gas, and belongs to the field of high-purity polysilicon preparation.
Background
Monosilane is a basic raw material for preparing granular polycrystalline silicon by a fluidized bed method and preparing rod-shaped polycrystalline silicon by an improved Siemens method, and is also commonly called silane, part of tail gas is discharged in the processes of silane gas preparation and silane gas rectification and purification (such as China patent 2010800034385), the discharged tail gas is mainly hydrogen, and a small amount of silane, methane and other carbon-containing compound impurities are contained in the tail gas, and the direct treatment of the part of tail gas can lead to silane waste and hydrogen waste.
Disclosure of Invention
The purpose is as follows: in order to overcome the defects in the prior art, the utility model provides a silane recovery system in silane-containing tail gas, which combines a membrane separation process and a condensation system, so that the concentration of silane in the tail gas is improved when the silane-containing tail gas is condensed, the integral cooling capacity requirement of the system is reduced, and the purity of recovered hydrogen is improved.
The technical scheme is as follows: in order to solve the technical problems, the utility model adopts the following technical scheme:
in a first aspect, there is provided a silane recovery system for silane-containing tail gas, comprising: the system comprises a first storage tank, a first tail gas pipe, a membrane separator, a condenser, a demister and a third storage tank;
the first storage tank is used for storing silane-containing tail gas and is provided with an air inlet and an air outlet; wherein the air inlet of the first storage tank is connected with a first tail gas pipe; the air outlet of the first storage tank is connected with the inlet of the membrane separator;
the membrane separator is provided with a first outlet and a second outlet, the first outlet of the membrane separator is connected with the inlet of the condenser, the liquid outlet of the condenser is connected with the inlet of the third storage tank, the gas outlet of the condenser is connected with the gas inlet of the demister, the liquid outlet of the demister is connected with the inlet of the third storage tank, and the recovered silane is stored in the third storage tank.
In some embodiments, the silane recovery system in the silane-containing tail gas further comprises a second storage tank and a compressor; the second outlet of the membrane separator is connected with the inlet of the second storage tank, and the outlet of the second storage tank is connected with the air inlet of the compressor.
In some embodiments, the silane recovery system in the silane-containing tail gas further comprises a hydrogen pipe, wherein one end of the hydrogen pipe is connected with the air outlet of the compressor, and the other end of the hydrogen pipe is connected with the fluidized bed device or the modified siemens process polysilicon deposition reduction furnace or the silicon tetrachloride hydrogenation device.
In some embodiments, the demister gas outlet is connected to the second offgas duct for recycling non-condensable gases in the second offgas duct back to the first offgas duct to the first storage tank or to the offgas scrubbing and neutralization apparatus.
In some embodiments, the third reservoir is provided with an outlet, the outlet of the third reservoir being in communication with a silane recovery tube.
In some embodiments, the third tank is connected to the silane refining device through a silane recovery pipe.
In some embodiments, the membrane separator employs one or more of a dense metal membrane, an inorganic porous membrane, a metal-organic framework MOF membrane, an organic polymer membrane, and a mixed matrix membrane; wherein the inorganic porous membrane is a molecular sieve membrane and SiO 2 One or more of membrane and carbon-based material membrane.
Further, in some embodiments, the membrane separator employs a membrane selected from the group consisting of PEEK membranes, polyimide membranes, polydimethylsiloxane membranes, perfluoropolymer-based membranes, polytetrafluoroethylene membranes, polyvinylidene fluoride membranes, polypropyleneCapillary membrane, polysulfone hollow fiber membrane, cubic crystal type molecular sieve membrane, na-LTA type molecular sieve membrane, graphene membrane, diethylamine modified hexafluorodianhydride-tetramethylene polyimide membrane, polyimide/SiO 2 One or more of the matrix films are mixed.
In a second aspect, there is provided a method for recovering silane from a silane-containing tail gas, based on a silane recovery system in the silane-containing tail gas, the method comprising:
the silane-containing tail gas enters a first storage tank through a first tail gas pipe, then enters a membrane separator, wherein in the membrane separator, a first part of hydrogen is separated and enters a second storage tank, a second part of hydrogen and silane enter a condenser, the silane is condensed in the condenser, condensed silane liquid enters a third storage tank, the condensed gas enters a demister to filter silane tiny liquid drops in the gas and enter the third storage tank, and recovered silane is stored in the third storage tank.
In some embodiments, the method for recovering silane from the tail gas containing silane further comprises: the hydrogen entering the second storage tank is compressed by the compressor and then returns to the fluidized bed device or the modified Siemens process polysilicon deposition reduction furnace or the silicon tetrachloride hydrogenation device through the hydrogen pipe.
In some embodiments, the method for recovering silane from the tail gas containing silane further comprises: the recovered silane stored in the third tank is passed through a silane recovery pipe to a silane refining device.
Further, the silane in the silane recovery pipe is further purified by a silane refining device and then enters a fluidized bed device to produce granular silicon or a modified Siemens method polysilicon deposition reduction furnace to produce rod-shaped polysilicon.
The beneficial effects are that: the recovery system of the silane in the silane-containing tail gas provided by the utility model has the following advantages:
(1) The tail gas containing silane is separated into most hydrogen after passing through the membrane separator, so that the condensation load required by the system is reduced.
(2) A large amount of hydrogen is separated by a membrane separator, so that the purity of the hydrogen recovered from the tail gas containing silane is improved.
In summary, the utility model reduces the condensation load of silane gas while recovering silane and hydrogen, improves the condensation effect of silane, reduces the cost of recovering tail gas containing silane, and improves the purity of recovered hydrogen.
Drawings
FIG. 1 is a schematic diagram of a silane recovery system in a silane-containing tail gas according to an embodiment of the present utility model.
In the figure: the device comprises a first storage tank, a first tail gas pipe, a 3-membrane separator, a second storage tank, a 5-compressor, a 6-hydrogen gas pipe, a 7-condenser, an 8-demister, a third storage tank, a 10-silane recovery pipe and a second tail gas pipe, wherein the first storage tank, the second tail gas pipe, the 3-membrane separator, the second storage tank, the 5-compressor, the 6-hydrogen gas pipe, the 7-condenser, the 8-demister, the third storage tank, the 10-silane recovery pipe and the 11-second tail gas pipe are sequentially arranged.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the utility model, its application, or uses. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present utility model unless it is specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective parts shown in the drawings are not drawn in actual scale for convenience of description. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but should be considered part of the specification where appropriate. In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.
In the description of the present utility model, the meaning of a number is one or more, the meaning of a number is two or more, and greater than, less than, exceeding, etc. are understood to exclude the present number, and the meaning of a number is understood to include the present number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present utility model, the descriptions of the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Example 1
As shown in fig. 1, the silane recovery system in the silane-containing tail gas comprises a first storage tank 1, a first tail gas pipe 2, a membrane separator 3, a second storage tank 4, a compressor 5, a hydrogen pipe 6, a condenser 7, a demister 8 and a third storage tank 9;
the first storage tank 1 is used for storing silane-containing tail gas and is provided with an air inlet and an air outlet; wherein the air inlet of the first storage tank 1 is connected with the first tail gas pipe 2; the air outlet of the first storage tank 1 is connected with the inlet of the membrane separator 3;
the membrane separator 3 is provided with a first outlet and a second outlet, the first outlet of the membrane separator 3 is connected with the inlet of the condenser 7, the liquid outlet of the condenser 7 is connected with the inlet of the third storage tank 9, the gas outlet of the condenser 7 is connected with the gas inlet of the demister 8, the liquid outlet of the demister 8 is connected with the inlet of the third storage tank 9, and the recovered silane is stored in the third storage tank 9.
In some embodiments, the membrane used in the membrane separator 3 may be one or more of dense metal membrane, inorganic porous membrane, metal-organic framework (MOF) membrane, organic polymer membrane, and mixed matrix membrane, and the inorganic porous membrane may be molecular sieve membrane, siO membrane 2 One or more of membrane and carbon-based material membrane.
In some embodiments, the membrane separator 3 is a membrane selected from, for example, PEEK membranes, polyimide membranes, polydimethylsiloxane (PDMS) membranes, perfluoropolymer-based membranes, polytetrafluoroethylene (PTFE) membranes, polyvinylidene fluoride (PVDF) membranes, polypropylene (PP) capillary membranes, polysulfone hollow fiber membranes, cubic crystal (LTA) molecular sieve membranes, na-LTA molecular sieve membranes, graphene membranes, diethylamine-modified hexafluorodianhydride-tetramethylene polyimide membranes, polyimide/SiO membranes 2 Mixed matrix films, and the like.
In some embodiments, the gas outlet of the demister 8 is connected to the second tail gas pipe 11, and is used for recycling the non-condensable gas in the second tail gas pipe 11 back to the first tail gas pipe 2 to the first storage tank 1 or to the tail gas washing and neutralizing device for treatment.
In some embodiments, the third tank 9 is provided with an outlet, the outlet of the third tank 9 being in communication with a silane recovery pipe 10.
Further, the third tank 9 is connected to a silane refining device through a silane recovery pipe 10. Can be further purified and then enters a fluidized bed device to produce granular silicon or a modified Siemens method polysilicon deposition reduction furnace to produce rod-shaped polysilicon.
In some embodiments, the silane recovery system in the silane-containing tail gas further comprises a second storage tank 4 and a compressor 5; the second outlet of the membrane separator 3 is connected with the inlet of the second storage tank 4, and the outlet of the second storage tank 4 is connected with the air inlet of the compressor 5.
Further, in some embodiments, the device further comprises a hydrogen pipe 6, one end of the hydrogen pipe 6 is connected with the air outlet of the compressor 5, and the other end of the hydrogen pipe is connected with a fluidized bed device or a modified Siemens process polysilicon deposition reduction furnace or a silicon tetrachloride hydrogenation device.
Example 2
A method for recovering silane from a silane-containing tail gas based on the silane recovery system in the silane-containing tail gas of example 1, the method comprising: the silane-containing tail gas enters the first storage tank 1 through the first tail gas pipe 2, most of hydrogen is separated into the second storage tank 4 through the membrane separator 3, other part of hydrogen and silane enter the condenser 7, the silane is condensed in the condenser 7, the condensed silane liquid enters the third storage tank 9, the condensed gas enters the demister 8 to filter silane tiny liquid drops in the gas and enter the third storage tank 9, and the recovered silane is stored in the third storage tank 9.
The demister 8 filters silane micro-droplets in the gas and enters the third storage tank 9, so that adverse effects of the silane micro-droplets in the gas on pipelines and equipment when the gas condensed by the condenser 7 returns to the first tail gas pipe 2 through the second tail gas pipe 11 (non-condensable gas) to be recycled by the first storage tank 1 can be effectively avoided.
In some embodiments, the recovered silane stored in the third storage tank 9 is passed through a silane recovery pipe 10 to a silane refining device, further purified, and then fed into a fluidized bed device to produce granular silicon or a modified siemens process polysilicon deposition reduction furnace to produce rod-shaped polysilicon.
In some embodiments, the hydrogen entering the second storage tank 4 is compressed by the compressor 5 and then returned to the fluidized bed device or the modified siemens process polysilicon deposition reduction furnace, or the silicon tetrachloride hydrogenation device through the hydrogen pipe 6.
In the description of the present utility model, it should be understood that the terms "center," "longitudinal," "lateral," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the protection of the present utility model.
The foregoing is only a preferred embodiment of the utility model, it being noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the present utility model, and such modifications and adaptations are intended to be comprehended within the scope of the utility model.
Claims (9)
1. A silane recovery system in a silane-containing tail gas, comprising: the device comprises a first storage tank (1), a first tail gas pipe (2), a membrane separator (3), a condenser (7), a demister (8) and a third storage tank (9);
the first storage tank (1) is used for storing tail gas containing silane and is provided with an air inlet and an air outlet; wherein the air inlet of the first storage tank (1) is connected with the first tail gas pipe (2); the air outlet of the first storage tank (1) is connected with the inlet of the membrane separator (3);
the membrane separator (3) is provided with a first outlet and a second outlet, the first outlet of the membrane separator (3) is connected with the inlet of the condenser (7), the liquid outlet of the condenser (7) is connected with the inlet of the third storage tank (9), the gas outlet of the condenser (7) is connected with the gas inlet of the demister (8), the liquid outlet of the demister (8) is connected with the inlet of the third storage tank (9), and the recovered silane is stored in the third storage tank (9).
2. The silane recovery system in silane-containing tail gas of claim 1, further comprising a second storage tank (4) and a compressor (5); the second outlet of the membrane separator (3) is connected with the inlet of the second storage tank (4), and the outlet of the second storage tank (4) is connected with the air inlet of the compressor (5).
3. The silane recovery system in silane-containing tail gas according to claim 2, further comprising a hydrogen pipe (6), wherein one end of the hydrogen pipe (6) is connected with an air outlet of the compressor (5), and the other end of the hydrogen pipe is connected with a fluidized bed device or a modified Siemens process polysilicon deposition reduction furnace or a silicon tetrachloride hydrogenation device.
4. Silane recovery system in silane-containing tail gas according to claim 1, characterized in that the gas outlet of the demister (8) is connected to the second tail gas pipe (11) for recycling non-condensable gases in the second tail gas pipe (11) back to the first tail gas pipe (2) to the first storage tank (1) or to the tail gas washing neutralization device for treatment.
5. The silane recovery system of silane-containing tail gas of claim 1, wherein,
the third storage tank (9) is provided with an outlet, and the outlet of the third storage tank (9) is communicated with the silane recovery pipe (10).
6. The silane recovery system in silane-containing tail gas according to claim 5, characterized in that the third tank (9) is connected to a silane refining device through a silane recovery pipe (10).
7. The silane recovery system of any one of claims 1-6, wherein the membrane separator is one or more of a dense metal membrane, an inorganic porous membrane, a metal-organic framework MOF membrane, an organic polymer membrane, and a mixed matrix membrane.
8. The silane recovery system of claim 7, wherein the inorganic porous membrane is a molecular sieve membrane or a SiO 2 One or more of membrane and carbon-based material membrane.
9. The silane recovery system of claim 7, wherein the membrane separator is selected from the group consisting of PEEK, polyimide, polydimethylsiloxane, perfluoropolymer-based, polytetrafluoroethylene, polyvinylidene fluoride, polypropylene capillary, polysulfone hollow fiber, cubic molecular sieve, na-LTA molecular sieve, graphene, diethylamine modified hexafluorodianhydride-tetramethylene polyimide, and polyimideamine/SiO 2 One or more of the matrix films are mixed.
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| CN202320850637.4U CN220116225U (en) | 2023-04-17 | 2023-04-17 | Silane recovery system in silane-containing tail gas |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202320850637.4U CN220116225U (en) | 2023-04-17 | 2023-04-17 | Silane recovery system in silane-containing tail gas |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116395700A (en) * | 2023-04-17 | 2023-07-07 | 江苏中能硅业科技发展有限公司 | System and method for recycling silane in silane-containing tail gas |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116395700A (en) * | 2023-04-17 | 2023-07-07 | 江苏中能硅业科技发展有限公司 | System and method for recycling silane in silane-containing tail gas |
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