CN220106459U - Standard SMIF POD sinking type opening device - Google Patents

Abstract

The utility model discloses a standard SMITPUDOD sinking opening device, which comprises a mounting bottom plate, wherein an electric is arranged on the mounting bottom plate; one side of the mounting bottom plate is provided with a butt joint vertical plate which is vertically connected; the mounting bottom is connected with a rectangular channel plate through four upright posts; the center of the channel plate is provided with a rectangular through hole, a channel door is movably arranged in the through hole, the channel door is connected with the interface door plate through a bracket extension arm, and the channel door is electrically connected with a lifting mechanism; the center of the channel door is provided with a load channel opener connected with the motor, and the load channel opener is electrically connected with the electric device and is connected with the control system through a signal; and a cassette detection sensor, a protruding sheet detection sensor and a mapping detection sensor are arranged at the bottom of the rectangular through hole of the channel plate. According to the utility model, through a modularized structure, the interface can be quickly changed only by replacing corresponding modules according to different container requirements; and the opencassette structure is replaced by installing the cassette channel interface disc and the manual protection cover, so that various use modes are realized, and the use range is increased.

Description

Standard SMIF POD sinking type opening device

Technical Field

The utility model relates to a conveying device, in particular to a standard SMIF POD sinking opening device, which belongs to the technical field of universal tool interfaces and/or workpiece conveying devices.

Background

Semiconductor wafers are required to be manufactured in a closed, dust-free environment from production to transportation. Conventionally, wafers are produced in a clean room by placing production equipment in the clean room. However, construction of a class 1 clean room requires expensive construction costs and additional operating costs, and standard mechanical interface (SMIF, standard Mechanical Interface) technology is applied and popularized.

The concept of SMIF technology is to locate a clean room directly in the equipment, and to protect the product from contamination by enclosing the wafers in a clean environment while relaxing the cleanliness requirements outside of this enclosed environment. SMIF consists of three parts: a housing for enclosing and transporting the packaged semiconductor wafers during the manufacturing process, i.e., a SMIF wafer POD (SMIF POD); a loading device, i.e., a SMIF loading interface, for opening the SMIF pod; and a clean room with load port integration achieved by the process system. The SMIF wafer box comprises a box cover, a wafer placing rack and a chassis, wherein the box cover is provided with a clamping groove, the chassis is provided with a clamping jaw and a sealing strip, the clamping jaw is inserted into the clamping groove in the carrying process, and the box cover is tightly pressed with the sealing strip on the chassis, so that the SMIF wafer box is kept airtight.

The manner in which SMIF works is generally as follows: an operator or an automated system delivers the SMIF pod to the SMIF loading interface; when the automatic batch tracking system identifies that the correct product batch is given, the SMIF loading interface automatically opens the SMIF wafer box, takes out the wafer, and places the wafer in equipment in a clean room for corresponding manufacturing procedures; when the process steps are completed, the wafer is returned to the SMIF pod and then transported to the next process by an operator or an automated system.

Disclosure of Invention

The utility model aims to provide a device which can quickly change different containers corresponding to interfaces by replacing corresponding modules; the standard SMIF POD sinking opening device can realize various use modes and increase the use range.

In order to achieve the above purpose, the present utility model adopts the following technical scheme:

a standard SMIF POD sinking opening device comprises a mounting base plate, wherein an electric is arranged on the mounting base plate; one side of the mounting bottom plate is provided with a butt joint vertical plate which is vertically connected; the mounting bottom plate is connected with a rectangular channel plate through four upright posts; the center of the channel plate is provided with a rectangular through hole, a channel door is movably arranged in the through hole, the channel door is connected with an interface door plate (as shown in the figure, the interface door plate is in a closed state when overlapped with the butt joint vertical plate) parallel to the butt joint vertical plate through a bracket extension arm, and the channel door is provided with a lifting mechanism through electric connection; the center of the channel door is provided with a load channel opener connected with the motor, and the load channel opener is electrically connected with the electric device and is connected with the control system through a signal; and the bottom of the rectangular through hole of the channel plate is provided with a cassette detection, a protruding piece detection and a mapping detection.

Preferably, the access door is provided with a container detection sensor which is electrically connected with the control system through a signal.

Preferably, the installation bottom plate is provided with an environment control device, and the environment control device adopts a direct-current axial flow fan.

Preferably, two sides of the rectangular through hole on the channel plate are respectively provided with a container shell locking device which is connected in a rotating way.

Preferably, a locating pin is arranged at the top of one side of the access door away from the butt-joint vertical plate.

Preferably, four corner sides corresponding to the rectangular through holes of the channel plate are respectively provided with a container limit installed on the channel plate.

Preferably, a Smarttag reading device is arranged at the top of one side of the channel plate, which is far away from the butt joint vertical plate, and the Smarttag reading device is arranged between two groups of container limiting positions.

Preferably, the access door is provided with an electrically connected RFID detection, and the RFID detection is connected with the control system through a signal.

Preferably, a guiding mechanism is arranged on one side of the bottom of the channel plate, and the bracket extension arm connected with the channel door is arranged in the guiding mechanism.

Preferably, the lifting mechanism comprises a lifting connecting block, a linear driving screw and a motor; one end of the linear driving screw rod is connected with the passage door through the lifting connecting block, and the other end of the linear driving screw rod is driven and controlled to rotate through a motor.

Compared with the prior art, the utility model has the following beneficial effects:

according to the utility model, through a modularized structure, the interface can be quickly changed only by replacing corresponding modules according to different container requirements; and the Open channel interface disk and the manual protection cover are arranged to replace the Open channel structure, so that various use modes are realized, and the application range of the utility model is increased.

Drawings

Fig. 1 is a schematic structural diagram of a standard SMIF POD sinking opening device according to the present utility model;

fig. 2 is a schematic structural diagram of an access door device in a standard SMIF POD sinking opening device according to the present utility model;

fig. 3 is a schematic structural diagram of a channel plate device in a standard SMIF POD sinking opening device according to the present utility model;

fig. 4 is a schematic structural diagram of a mounting base plate in a standard SMIF POD sinking opening device according to the present utility model.

The numbers in the figure are as follows:

100. butting vertical plates; 101. a column; 200. an access door means; 201. a load path opener; 202. a container detection sensor; 203. RFID detection; 204. an access door; 205. a positioning pin; 206. a bracket extension arm; 207. an interface door panel; 208. wiring drag chain; 300. a channel plate means; 301. a channel plate; 302. limiting a container; 303. smarttag reading means; 304. a container shell locking device; 305. a cassette detection sensor; 306. a tab detection sensor; 307. a mapping detection sensor; 308. a lifting mechanism; 309. a guide mechanism; 400. a mounting base plate; 401. lifting a terminal position adjusting plate; 402. an electric; 403. an environmental control device.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.

As shown in fig. 1 to 4, there is provided a standard SMIF POD-sinking opening device according to the present utility model, which includes a port door means 200, a port plate means 300, and a mounting base 400, and an electrical 402 and a control system are mounted on top of the mounting base 400; a docking riser 100 vertically connected is installed at one side of the installation base 400; the top of the installation base plate 400 is connected with the channel plate device 300 through four upright posts 101, the channel plate device 300 is arranged above the installation base plate 400, the channel plate device 300 comprises a rectangular channel plate 301, a rectangular through hole is arranged in the center of the channel plate 301, and a lifting channel door device 200 is arranged in the through hole; the access door apparatus 200 includes an access door 204, a load path opener 201 connected to a motor mounted on the access door 204, a container detection sensor 202 and an RFID detection 203; the load port opener 201 is mounted in the center of the port door 204; the load path opener 201, the container detection sensor 202, and the RFID detection 203 are all electrically connected to the electrical 402 and all are connected to the control system via signals.

The access door 204 is coupled to the lift mechanism 308 via the electrical 402, the lift mechanism 308 is disposed on the mounting plate 400, and the circuit wiring used in the lift mechanism 308 couples the electrical 402 to the access door 204 via the wiring drag chain 208. The side edge of the access door 204, which is close to the docking riser 100, is connected with an interface door plate 207 through a bracket extension arm 206 with an extension plate, and the interface door plate 207 is parallel to the docking riser 100 and is movably arranged on the docking riser 100; as shown in fig. 1, the interface door panel 207 is in a closed state when it overlaps the docking riser 100; when the access door 204 descends, the interface door 207 also descends, and the interface door is opened after the interface door 207 is displaced, namely, the interface door is opened; when the interface door is opened, the pick and place robot of the docking device within the interface door can move the wafer into the interface door for processing and return the wafer after processing is completed.

The bottom of the rectangular through hole of the channel plate 301 is provided with a cassette detection sensor 305, a tab detection sensor 306 and a mapping detection sensor 307; the top of the side of the channel plate 301 remote from the docking riser 100 is provided with a Smarttag reading device 303, the Smarttag reading device 303 being arranged between two sets of container stops 302. The two sides of the rectangular through hole on the channel plate 301 are respectively provided with a container shell locking device 304 which is connected in a rotating way; when the SMIF pod is manually or automatically placed on the access panel and the access door, the system acquires the pod detection sensor 202 to feed back a signal to the control system, the control system controls the pod locking device 304 to rotate, locks the pod to prevent the pod from being separated, and the Smarttag reading device 303 is used for reading the pod tag and feeding back the read result to the control system; in the descending process of the channel door plate, a cassette detection sensor detects whether a wafer support in the wafer box is in place or not, a protruding sheet detection sensor detects whether a wafer protrudes from the wafer support or not, the wafer support descends, the sensor starts scanning from the lowest layer, when the current wafer is detected to protrude, the descending action is stopped immediately, and the ascending time is the same; mapping detection can be carried out in the descending process, the detection sensor is a fine light spot optical fiber sensor, and whether the wafer in the wafer support groove is provided with a groove, a lamination, a thick sheet and the like can be judged by recording the time of shielding and non-shielding of an optical fiber signal.

Further, the mounting base plate 400 provided by the utility model is provided with an environment control device 403, and the environment control device 403 adopts a direct current axial flow fan.

Further, the lifting mechanism 308 provided by the utility model comprises a lifting connection block, a linear driving screw and a motor; one end of the linear driving screw is connected with the channel door 204 through a lifting connecting block, and the other end of the linear driving screw is controlled to rotate through motor driving.

Furthermore, the top of one side of the access door 204 far away from the docking riser 100 is provided with a positioning pin 205, and the wafer box can be limited by the positioning pin 205 when descending.

Furthermore, the four sides of the rectangular through holes of the channel plate 301 are respectively provided with a container limit 302 arranged on the channel plate 301, and the container limit 302 can limit the wafer box when the wafer box is placed.

Further, a guiding mechanism 309 is provided on one side of the bottom of the channel plate 301, and the rack extension arm 206 to which the channel door 204 is connected is provided in the guiding mechanism 309.

Further, the utility model provides a fan and filter system with an extended cover plate between the access panel and the base for creating a clean mini-environment around the box and circulating fluid to remove particulates and contaminants.

Further, a lifting terminal position adjusting plate 401 parallel to the access door 204 is arranged between the four upright posts 101, and the lifting terminal position adjusting plate 401 can be used as a limiting position of the descending terminal position of the access door panel and can calibrate the horizontal descending terminal position of the access door 204.

The electric 402 provided by the utility model integrates the functions of motion control, IO module, software control, power supply and the like; the installation bottom plate 400 is also provided with an environment control device 403, and the environment control device 403 adopts a direct current axial flow fan to exhaust air to the outside of the equipment, so that the negative pressure of the internal stroke of the system is caused, and the purposes of leading clean air into the system by the treatment equipment and sinking and discharging pollutant particles are achieved.

SMIF pods typically include a pod door mated with a pod housing for providing a sealed environment in which wafers may be stored and transported. So-called "bottom opening" wafer cassettes are known in which a container door is horizontally disposed at the bottom of the wafer cassette and the wafers are supported in the cassette, with the cassette itself being supported on the container door. It is also known to provide "front opening" wafer cassettes in which the container door is oriented vertically and the wafers are supported on cassettes mounted within the container housing, or shelves mounted within the container housing. The scheme is only applied to the wafer box with the bottom opening.

The working principle of the utility model is as follows:

an operator or an automated system delivers the SMIF pod to the SMIF loading interface; when the wafer box contacts the channel plate 301 and the channel door 204, the container detection sensor 202 feeds back a signal to the control system, and the container locking device 304 rotates to lock the container of the wafer box, so that the wafer box cannot be separated; reading the tag on the wafer box by a Smarttag reading device 303; when the automatic batch tracking system identifies that the correct product batch is given, the control system controls the load channel opener 201 to rotate by a motor, so as to unlock a container door at the bottom of the wafer box, separate the container door from a container shell of the wafer box, connect the container door 204 with a lifting connection block through a supporting frame 206, and when the lifting connection block descends through a lifting mechanism 308, the channel door 204 descends along with the lifting connection block, the SMIF container is opened, meanwhile, as the interface door 207 is connected with the channel door 204, the interface door 207 descends while the channel door 204 descends, the interface door is opened, and a pick-and-place mechanical arm in the processing equipment after the descent takes out the wafer, and places the wafer in equipment in a clean room for corresponding processing; when the process steps are completed, the wafer is returned to the SMIF pod and then transported to the next process by an operator or an automated system.

During the descent of the access door 204, the cassette detecting sensor 305 detects whether the wafer holder in the wafer cassette is in place, the tab detecting sensor 306 detects whether the wafer has a protruding wafer holder, the wafer holder descends, the tab detecting sensor 306 starts scanning from the lowest layer, and when the current wafer is detected to protrude, the descending operation is immediately stopped, and the ascending operation is the same; in the descending process, mapping detection is performed through the mapping detection sensor 307, the mapping detection sensor 307 is a fine light spot optical fiber sensor, and whether the wafer in the wafer support groove is provided with a quart groove, a lamination, a thick sheet and the like can be judged by recording the time of shielding and non-shielding of an optical fiber signal.

The SMIF load interface system has three main components:

(1) A minimum volume of sealed wafer cassette for storing and transporting wafer cassettes;

(2) A wafer processing region provided surrounding the cassette loading channel and the processing station;

(3) And the software control and communication and other electric installation areas.

SMIF pods typically include a pod door mated with a pod housing for providing a sealed environment in which wafers may be stored and transported. So-called "bottom opening" wafer cassettes are known in which a container door is horizontally disposed at the bottom of the wafer cassette and the wafers are supported in the cassette, with the cassette itself being supported on the container door. It is also known to provide "front opening" wafer cassettes in which the container door is oriented vertically and the wafers are supported on cassettes mounted within the container housing, or shelves mounted within the container housing. The present utility model is directed to the use of "bottom opening" wafer cassettes.

The present utility model is configured to operate with 200mm SMIF wafer cassettes and semiconductor wafers. The terms "wafer" and "semiconductor wafer" as used in the present specification refer to a wafer substrate that is present at any stage of the semiconductor wafer fabrication process. Furthermore, it should be understood that the present utility model may be operated with workpieces other than semiconductor wafers, such as flat panel displays, scribes, or other substrates.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.

Claims (10)

1. A standard SMIF POD sink opener comprising a mounting base plate (400), the mounting base plate (400) having an electrical (402) thereon; one side of the mounting bottom plate (400) is provided with a butt joint vertical plate (100) which is vertically connected; the device is characterized in that the installation base plate (400) is connected with a rectangular channel plate (301) through four upright posts (101); the center of the channel plate (301) is provided with a rectangular through hole, a channel door (204) is movably arranged in the through hole, the channel door (204) is connected with an interface door plate (207) through a bracket extension arm (206), and the channel door (204) is connected with a lifting mechanism (308) through an electric (402); the center of the channel door (204) is provided with a load channel opener (201) connected with a motor, and the load channel opener (201) is electrically connected with an electric device (402) and is connected with a control system through a signal; the bottom of the rectangular through hole of the channel plate (301) is provided with a cassette detection sensor (305), a protruding piece detection sensor (306) and a mapping detection sensor (307).

2. A standard SMIF POD sinking opening device according to claim 1, wherein the access door (204) is provided with an electrically (402) connected POD detection sensor (202), the POD detection sensor (202) being signally connected to a control system.

3. The standard SMIF POD sinking opening device according to claim 1, wherein the mounting base plate (400) is provided with an environment control device (403), and the environment control device (403) adopts a direct current axial flow fan.

4. A standard SMIF POD-sinking opening device according to claim 1, wherein the passage plate (301) is provided with a container housing locking means (304) rotatably connected to each side of the rectangular through-hole.

5. A standard SMIF POD-sinking opening device according to claim 1, wherein the access door (204) is provided with a locating pin (205) on top of the side remote from the docking riser (100).

6. The standard SMIF POD sinking opening device according to claim 1, wherein the four corner sides corresponding to the rectangular through holes of the tunnel plate (301) are provided with container stoppers (302) mounted on the tunnel plate (301).

7. The standard SMIF POD sinking opening device of claim 6, wherein the top of the side of the access panel (301) away from the docking riser (100) is provided with a Smarttag reader (303), and the Smarttag reader (303) is disposed between two sets of container stops (302).

8. A standard SMIF POD-sinking opening device according to claim 1, wherein the access door (204) is provided with an electrically (402) connected RFID detection (203), the RFID detection (203) being connected to a control system by a signal.

9. A standard SMIF POD-sinking opening device according to claim 1, wherein the bottom side of the access panel (301) is provided with a guide mechanism (309), and the support extension arm (206) to which the access door (204) is connected is provided in the guide mechanism (309).

10. The standard SMIF POD-sinking opening device of claim 1, wherein the lifting mechanism (308) comprises a lifting connection block, a linear drive screw, and a motor; one end of the linear driving screw rod is connected with the channel door (204) through the lifting connecting block, and the other end of the linear driving screw rod is controlled to rotate through motor driving.