CN220099163U - Physical vapor deposition PVD equipment - Google Patents

Abstract

The utility model discloses physical vapor deposition PVD equipment, and relates to the technical field of material processing. The physical vapor deposition PVD equipment comprises an equipment main body, a transfer device and a clamping device; the equipment main body is provided with a closed cavity for coiled material processing, and a loading position for placing a target material and a working position for processing the target material are arranged in the closed cavity; the transfer device is arranged in the closed cavity, the clamping device is connected with the transfer device, the clamping device is used for taking and placing the target, and the transfer device is used for driving the clamping device to move horizontally and/or vertically in the closed cavity so as to transfer the target from the loading position to the working position. According to the technical scheme, automatic replacement of the target can be realized, labor is greatly saved, and the feeding efficiency and the safety are improved.

Description

Physical vapor deposition PVD equipment

Technical Field

The utility model relates to the technical field of material processing, in particular to physical vapor deposition PVD equipment.

Background

PVD physical vapor deposition: refers to a process in which physical processes are used to effect mass transfer, transferring atoms or molecules from a source onto a substrate surface. The effect of the paint is that certain particles with special properties (high strength, wear resistance, heat dissipation, corrosion resistance and the like) can be sprayed on a parent body with lower properties, so that the parent body has better properties. Taking physical vapor deposition PVD equipment for coating a thin film material roll on a solar substrate as an example, in the existing equipment, a single side of the equipment is opened, the solar substrate, namely a coiled material, is arranged on a door body of the equipment, the thin film material roll, namely a target material, is arranged in the cavity of the equipment, the cavity is sealed through the door body, and then vacuum is pumped, so that the thin film material roll of the target material is sprayed onto the coiled material, and the film coating of the solar substrate is realized. However, the film roll of the target material is used up, a new film roll needs to be manually added, and the operation is difficult; the labor intensity of manual operation is high, meanwhile, the weight of the raw material film is heavy, and the manual operation is laborious and dangerous.

Disclosure of Invention

The utility model mainly aims to provide physical vapor deposition PVD equipment, and aims to solve the problem of low target material feeding efficiency of the conventional physical vapor deposition PVD equipment.

To achieve the above object, the present utility model provides a physical vapor deposition PVD apparatus, comprising:

the device comprises a device main body, wherein the device main body is provided with a closed cavity for coiled material processing, and a loading position for placing a target and a working position for processing the target are arranged in the closed cavity;

the transfer device is arranged in the closed cavity; and

the clamping device is connected with the transferring device and used for taking and placing the target, and the transferring device is used for driving the clamping device to horizontally and/or vertically move in the closed cavity so as to transfer the target from the loading position to the working position.

In an embodiment, the transferring device comprises a vertical moving mechanism for driving the clamping device to move vertically and a horizontal moving mechanism for driving the vertical moving mechanism to move horizontally, wherein the clamping device is installed on the vertical moving mechanism, and the vertical moving mechanism is installed on the horizontal moving mechanism.

In one embodiment, the horizontal moving mechanism comprises a guide piece, a connecting rod capable of moving transversely along the guide piece and a driving plate capable of moving longitudinally along the connecting rod, the vertical moving mechanism comprises a lifting box capable of moving up and down along the driving plate, and the clamping device is connected with the lifting box.

In an embodiment, the guide piece comprises two oppositely arranged cross beams, two transversely arranged sliding grooves are formed in the cross beams, sliding blocks and electric telescopic rods which are in driving connection with the sliding blocks are arranged in the sliding grooves, the electric telescopic rods are used for driving the sliding blocks to transversely move in the sliding grooves, and the connecting rods are in sliding connection with the cross beams through the two sliding blocks in the sliding grooves.

In an embodiment, a threaded rod arranged side by side with the connecting rod is rotationally connected between the two sliding blocks, a first driving motor in driving connection with the threaded rod is installed on one of the two sliding blocks, and the driving plate is in sliding connection with the connecting rod and in threaded connection with the threaded rod.

In an embodiment, be equipped with the second driving motor on the drive plate, with the screw thread post of second driving motor drive connection, and sliding connection the drive plate and with screw thread post threaded connection's lifter, the second driving motor is used for driving the lifter along screw thread post goes up and down to remove, the lift box passes through lifter sliding connection the drive plate.

In an embodiment, the driving plate is provided with a vertically arranged lifting groove, the second driving motor and the threaded column are arranged in the lifting groove, and the lifting block is slidably connected in the lifting groove.

In an embodiment, the clamping device comprises a fixing ring rotationally connected with the lifting box, two clamping plates oppositely arranged in the radial direction of the fixing ring, and air cylinders arranged on the fixing ring and respectively connected with the two clamping plates in a driving mode, wherein the two clamping plates can move in directions approaching to or separating from each other.

In an embodiment, a transverse shaft is connected to the outer circumferential surface of the fixing ring, the fixing ring is rotatably connected to the lifting box through the transverse shaft, a third driving motor is arranged on the lifting box and is in driving connection with the transverse shaft, and the fixing ring can rotate circumferentially around the transverse axis of the fixing ring.

In an embodiment, the lifting box is rotatably connected with a driving shaft which is arranged in the same direction as the transverse shaft, an output shaft of the third driving motor is connected with the driving shaft, a driving wheel is sleeved on the periphery of the driving shaft, a driven wheel is sleeved on the periphery of the transverse shaft, the driving wheel is in transmission connection with the driven wheel, and the outer diameter of the driving wheel is smaller than that of the driven wheel.

According to the technical scheme, the airtight cavity is formed in the equipment main body, so that the airtight cavity can be vacuumized, and the environmental requirement of spraying is met; through set up transfer device and connection in the airtight cavity transfer device's clamping device for clamping device can carry out horizontal or vertical removal in the airtight cavity under transfer device's drive. Before the coiled material is sprayed, the clamping device can be moved to the position of the target material through the transfer device, after the clamping device clamps the target material, the clamping device is moved to the position of the target material through the transfer device, and the clamping device releases the target material so as to place the target material at the position of the target material, and then the spraying treatment of the target material to the coiled material can be realized. Similarly, after the target material at the working position is completely consumed, a new target material can be repeatedly transported from the loading position to the working position through the transporting device and the clamping device. Therefore, the automatic replacement of the target can be realized, compared with the manual replacement of the target, the safety of feeding is improved, and the feeding efficiency of the target is greatly improved; meanwhile, the target is replaced without vacuumizing the closed cavity again, so that the efficiency of the whole deposition spraying process is improved.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a PVD apparatus according to one embodiment of the utility model;

FIG. 2 is a schematic view of a beam structure of an embodiment of a PVD apparatus according to the utility model;

FIG. 3 is a schematic diagram of a physical vapor deposition PVD apparatus of FIG. 1 from another perspective;

FIG. 4 is a schematic diagram of a drive plate in an embodiment of a PVD apparatus according to the utility model;

FIG. 5 is an enlarged schematic view of FIG. 3 at A;

FIG. 6 is a schematic view of a lift box in an embodiment of a PVD apparatus according to the utility model.

Reference numerals illustrate:

the achievement of the objects, functional features and advantages of the present utility model will be further described with reference to the accompanying drawings, in conjunction with the embodiments.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present utility model are merely used to explain the relative positional relationship, movement, etc. between the components in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly.

Furthermore, the description of "first," "second," etc. in this disclosure is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present utility model.

The utility model provides physical vapor deposition PVD equipment which can realize automatic replacement of a target, greatly save labor and improve feeding efficiency and safety.

Referring to fig. 1, in the present embodiment, the PVD apparatus includes an apparatus main body, a transfer device 200, and a clamping device 300; the device main body is provided with a closed cavity 110 for coiled material processing, and a loading position for placing the target material 10 and a working position for processing the target material 10 are arranged in the closed cavity 110; the transferring device 200 is disposed in the closed cavity 110, the clamping device 300 is connected with the transferring device 200, the clamping device 300 is used for picking and placing the target 10, and the transferring device 200 is used for driving the clamping device 300 to horizontally and/or vertically move in the closed cavity 110 so as to transfer the target 10 from the loading position to the working position.

Specifically, the apparatus main body includes a casing, where the casing includes a bottom wall, a top wall opposite to the bottom wall, and a peripheral sidewall connecting the bottom wall and the top wall, where the bottom wall, the peripheral sidewall, and the top wall enclose to form the closed cavity 110; it will be appreciated that, in fig. 1, the peripheral side walls and top wall of the housing are hidden to facilitate the visual observation of the transfer device 200 and the holding device 300 disposed in the closed cavity, in order to facilitate the observation of the specific arrangement of the closed cavity in the apparatus main body.

By forming the closed cavity 110 in the equipment main body, the closed cavity 110 can be vacuumized to meet the environmental requirement of spraying; by arranging the transfer device 200 and the clamping device 300 connected with the transfer device 200 in the closed cavity 110, the clamping device 300 can move horizontally and/or vertically in the closed cavity 110 under the driving of the transfer device 200. Before the coiled material is sprayed, the clamping device 300 can be moved to the feeding position of the target material 10 through the transferring device 200, after the target material 10 is clamped by the clamping device 300, the clamping device 300 is moved to the working position of the target material 10 through the transferring device 200, the target material 10 is released by the clamping device 300, so that the target material 10 is placed at the working position, and then the spraying treatment of the target material 10 on the coiled material can be realized. Similarly, after the target 10 at the working position is completely consumed, a new target 10 can be repeatedly transported from the loading position to the working position by the transporting device 200 and the clamping device 300. Therefore, the automatic replacement of the target material 10 can be realized, compared with the manual replacement of the target material 10, the feeding safety is improved, and the feeding efficiency of the target material 10 is greatly improved; meanwhile, the replacement of the target material 10 is performed without vacuumizing the closed cavity 110 again, so that the efficiency of the whole deposition spraying process is improved.

In an embodiment, the transferring device comprises a vertical moving mechanism for driving the clamping device to move vertically and a horizontal moving mechanism for driving the vertical moving mechanism to move horizontally, wherein the clamping device is installed on the vertical moving mechanism, and the vertical moving mechanism is installed on the horizontal moving mechanism.

Unlike the above, the transfer device may further include a horizontal moving mechanism for driving the clamping device to move horizontally and a vertical moving mechanism for driving the horizontal moving mechanism to move vertically, where the clamping device is installed on the horizontal moving mechanism, and the horizontal moving mechanism is installed on the vertical moving mechanism.

Referring to fig. 1 and 3, in particular, in one embodiment, the horizontal moving mechanism includes a guide, a link 220 laterally movable along the guide, and a driving plate 230 longitudinally movable along the link 220, the vertical moving mechanism includes a lifting box 240 vertically movable along the driving plate 230, and the clamping device 300 is connected to the lifting box 240.

It will be appreciated that the clamping device 300 can be moved from different positions to the loading or working position by corresponding movements in the lateral, longitudinal and vertical directions. The lifting box 240 can lift along the driving plate 230, and then can drive the clamping device 300 to lift; the driving plate 230 may move longitudinally along the connecting rod 220, and may further drive the clamping device 300 to move longitudinally; the link 220 may move laterally along the guide, and may then drive the clamping device 300 to move laterally. By means of the relative movement between the guide, the link 220, the driving plate 230 and the lifting box 240, the movement of the clamping device 300 in the lateral, longitudinal and vertical directions is achieved, i.e. the movement of the clamping device 300 between the loading position and the working position is achieved.

Referring to fig. 2, in an embodiment, the guide member includes two oppositely disposed cross beams 210, two cross beams 210 are provided with laterally disposed sliding grooves 211, a sliding block 212 and an electric telescopic rod 213 drivingly connected to the sliding block 212 are disposed in the sliding grooves 211, the electric telescopic rod 213 is used for driving the sliding block 212 to move laterally in the sliding grooves 211, and the connecting rod 220 is slidably connected to the cross beams 210 through the sliding blocks 212 in the two sliding grooves 211.

The electric telescopic rod 213 is transversely arranged in the sliding groove 211, and the sliding block 212 is connected with the electric telescopic rod 213, so that the electric telescopic rod 213 can transversely perform telescopic movement and simultaneously drive the sliding block 212 to transversely move in the sliding groove 211. Both ends of the connecting rod 220 may be respectively connected with the sliding blocks 212 in the two sliding grooves 211, so that the two sliding blocks 212 respectively move in the corresponding sliding grooves 211 in the transverse direction and simultaneously drive the connecting rod 220 to move in the transverse direction, that is, the connecting rod 220 is moved in the transverse direction along the cross beam 210. It may be appreciated that the slider 212 may be integrally provided with the connecting rod 220, that is, it is equivalent to directly connecting two ends of the connecting rod 220 with the electric telescopic rod 213, and directly driving the connecting rod 220 to move laterally along the beam 210 through the telescopic movement of the electric telescopic rod 213 in the lateral direction.

Specifically, the device body is further disposed on two opposite support columns 100 at the bottom of the inner wall of the casing, and the two support columns 100 are respectively used for supporting the two cross beams 210. The casing comprises a bottom wall, a top wall arranged opposite to the bottom wall, and a peripheral side wall connecting the bottom wall and the top wall, wherein the bottom wall, the peripheral side wall and the top wall enclose to form the closed cavity 110; the support column 100 is disposed at the bottom of the inner wall of the casing, that is, on the bottom wall, and the cross beam 210 is disposed at one end of the support column 100 opposite to the bottom wall, so that the support column 100 plays a role in supporting the cross beam 210. The two support columns 100 are disposed near the edges of the two sides of the bottom wall, so as to avoid occupying the middle of the closed cavity 110. The support column 100 may be disposed near the middle of the beam 210 in the lateral direction, and support of the beam 210 is separately achieved by the support column 100; the support column 100 may be disposed near one end of the cross beam 210 in the transverse direction, and the other end may be supported by providing a support rod on the bottom wall.

Further, to achieve the longitudinal movement of the driving plate 230 along the connecting rod 220, in an embodiment, a threaded rod 221 disposed side by side with the connecting rod 220 is rotatably connected between two sliding blocks 212, a first driving motor 222 in driving connection with the threaded rod 221 is mounted on one of the two sliding blocks 212, and the driving plate 230 is slidably connected with the connecting rod 220 and is in threaded connection with the threaded rod 221.

The first driving motor 222 drives the threaded rod 221 to rotate, the driving plate 230 is slidably connected with the connecting rod 220 and is in threaded connection with the threaded rod 221, so that the driving plate 230 converts the rotational movement of the threaded rod 221 into the sliding movement of the driving plate along the connecting rod 220, obviously, the connecting rod 220 is arranged along the longitudinal extension, and the driving plate 230 slides along the connecting rod 220, namely, slides along the longitudinal direction. At this time, the connecting rods 220 serve as guide rods for sliding the driving plate 230, and the number of the connecting rods 220 is two in order to improve the stability of the driving plate 230 during sliding, and the threaded rods 221 are disposed parallel to the two connecting rods 220 and between the two connecting rods 220. Meanwhile, it will be understood that the rotation direction of the threaded rod 221 determines the sliding direction of the driving plate 230, and thus, in order to ensure the bi-directional sliding of the driving plate 230 in the longitudinal direction, the first driving motor 222 is a bi-directional motor, that is, the first driving motor 222 may change the rotation direction of the threaded rod 221 to achieve the directional adjustment of the sliding of the driving plate 230 in the longitudinal direction.

Preferably, in order to facilitate the installation of the first driving motor 222, the sliding groove 211 penetrates through two end surfaces of the beam 210 in the longitudinal direction, the connecting rod 220 is connected with an end surface of the slider 212 facing the other slider 212, and the first driving motor 222 is connected with an end surface of the slider 212 facing away from the connecting rod 220.

Referring to fig. 4, in an embodiment, the driving plate 230 is provided with a second driving motor 232, a threaded post 231 in driving connection with the second driving motor 232, and a lifting block 233 slidably connected with the driving plate 230 and in threaded connection with the threaded post 231, the second driving motor 232 is used for driving the lifting block 233 to move up and down along the threaded post 231, and the lifting box 240 is slidably connected with the driving plate 230 through the lifting block 233.

The second driving motor 232 drives the threaded column 231 to rotate, the lifting block 233 is in threaded connection with the threaded column 231, and the lifting block 233 can be attached to the driving plate 230 to convert the rotation operation of the threaded column 231 into lifting sliding along the driving plate 230; it is also possible to provide a guide rod extending vertically, the guide rod is connected to the driving plate 230, and the lifting block 233 is slidably connected to the guide rod, so as to convert the rotational movement of the threaded column 231 into the vertical sliding of the lifting block 233 along the guide rod. The lifting box 240 is connected to the lifting block 233, and the lifting block 233 drives the lifting box 240 to lift and move while lifting and sliding relative to the driving plate 230. Meanwhile, it will be appreciated that the rotation direction of the screw post 231 determines the sliding direction of the lifting block 233, so that, in order to ensure that the lifting box 240 can move vertically in both directions, i.e., up and down, the second driving motor 232 is a two-way motor, i.e., the second driving motor 232 can change the rotation direction of the screw post 231, so as to adjust the direction in which the lifting box 240 moves vertically.

Unlike the above-mentioned sliding manner of the lifting block 233 by the guide rod, in an embodiment, the driving plate 230 is provided with a vertically arranged lifting slot 234, the second driving motor 232 and the threaded post 231 are disposed in the lifting slot 234, and the lifting block 233 is slidably connected in the lifting slot 234.

By providing the vertically disposed lifting groove 234 on the driving plate 230, the second driving motor 232 and the threaded post 231 are disposed in the lifting groove 234, which can function to conceal the second driving motor 232 and the threaded post 231, and simultaneously reduce the gravity of the driving plate 230. The lifting block 233 is slidably connected in the lifting groove 234, and through the limiting guiding effect of the inner wall of the lifting groove 234 on the lifting block 233, the lifting block 233 converts the rotation motion of the threaded column 231 into the vertical sliding motion of the threaded column 231 along the guide rod, so that the setting of the guide rod is avoided.

Referring to fig. 5, in an embodiment, the clamping device 300 includes a fixing ring 310 rotatably connected to the lifting box 240, two clamping plates 320 disposed opposite to each other in a radial direction of the fixing ring 310, and air cylinders 330 disposed on the fixing ring 310 and respectively driving the two clamping plates 320 to move in directions approaching or separating from each other.

Taking the target 10 as a film roll as an example, when the target 10 is vertically placed at the loading position, the clamping device 300 is moved to a position right above the target 10 by the transferring device 200, and then the clamping device 300 is controlled to move downwards, so that the target 10 passes through the fixing ring 310. At this time, two oppositely arranged clamping plates 320 are located at the outer sides of the target 10, and the two clamping plates 320 are driven to move towards the direction approaching to each other by the air cylinder 330 until the two clamping plates 320 press against the target 10, that is, the two clamping plates 320 clamp the target 10, so as to realize the fixed pickup of the clamping device 300 to the target 10. When the clamping device 300 drives the target 10 to move to the working position, the two clamping plates 320 are driven to move in the direction away from each other by the air cylinder 330 until the two clamping plates 320 release the target 10, so as to release the target 10 by the clamping device 300, and place the target 10 in the working position.

In order to improve the stability of the movement of the clamping plate 320 driven by the air cylinder 330, the fixed ring 310 is further provided with a sliding rod in sliding connection, the sliding rod is connected with the clamping plate 320 and is respectively located at two sides of the air cylinder 330, when the clamping plate 320 is driven by the air cylinder 330 to move, the sliding rod slides relative to the fixed ring 310, and the sliding rod plays a role in stabilizing the movement direction of the clamping plate 320.

Specifically, the fixing ring 310 is rotatably connected to the lifting box 240, so that when the target 10 is placed at the loading position and the working position, taking the target 10 is placed vertically when the target 10 is placed at the loading position and horizontally when the target is placed at the working position, for example, the clamping device 300 is required to adjust the target 10 from the vertical state to the horizontal state in the process of transferring the target 10 from the loading position to the working position, considering that the posture of the target 10 may be changed in the process of transferring the target 10.

Therefore, in an embodiment, a transverse shaft 340 disposed along a radial direction of the outer circumferential surface of the fixing ring 310 is connected to the outer circumferential surface of the fixing ring 310, the fixing ring 310 is rotatably connected to the lifting box 240 through the transverse shaft 340, a third driving motor 241 is disposed on the lifting box 240 and is in driving connection with the transverse shaft 340, and the fixing ring 310 can rotate circumferentially around a transverse axis thereof.

When the clamping device 300 moves to a position right above the target 10, the clamping device 300 is controlled to descend, so that the vertically placed target 10 passes through the fixing ring 310, and then the two clamping plates 320 are driven to move towards a direction approaching to each other by the air cylinder 330, so that the target 10 is clamped by the two clamping plates 320. At this time, the third driving motor 241 is controlled to drive the transverse shaft 340 to rotate, that is, drive the fixing ring 310 to rotate, so that the fixing ring 310 circumferentially rotates ninety degrees around the transverse axis of the fixing ring 310, and the target 10 can be adjusted from the vertical state to the horizontal state. And then moving the clamping device 300 to a working position, and when the target 10 is fixed at the working position, driving the two clamping plates 320 to move in a direction away from each other to release the target 10 by the clamping device 300.

In order to ensure the stability of the clamping plates 320 to clamp the target 10, anti-slip lines are arranged on opposite sides of the two clamping plates 320, and friction force between the clamping plates 320 and the target 10 is increased through the anti-slip lines, so that the target 10 and the clamping plates 320 are prevented from sliding relatively to cause loosening and falling. Preferably, the clamping plate 320 is made of a material with a certain flexibility, such as a rubber plate, so that the clamping force on the target 10 can be increased by elastic deformation when the clamping plate 320 is pressed against the target 10, and damage to the target 10 due to overlarge clamping force of the clamping plate 320 can be avoided.

From the above, the target 10 can be adjusted from the vertical state to the horizontal state by rotating the fixing ring 310 by ninety degrees in the circumferential direction, and when the rotation speed of the fixing ring 310 is too high, the detachment of the target 10 is obviously easy to be caused.

Referring to fig. 6, in this regard, in an embodiment, a driving shaft 242 disposed in the same direction as the transverse shaft 340 is rotatably connected to the lifting box 240, an output shaft of the third driving motor 241 is connected to the driving shaft 242, a driving wheel 243 is sleeved on an outer periphery of the driving shaft 242, a driven wheel 244 is sleeved on an outer periphery of the transverse shaft 340, the driving wheel 243 is in driving connection with the driven wheel 244, and an outer diameter of the driving wheel 243 is smaller than an outer diameter of the driven wheel 244.

The third driving motor 241 is configured to indirectly drive the transverse shaft 340 by providing the driving shaft 242, the driving wheel 243 and the driven wheel 244, and the outer diameter of the driving wheel 243 is set smaller than the outer diameter of the driven wheel 244, so that the rotation angular velocity of the driven wheel 244 is smaller than the rotation angular velocity of the driving wheel, that is, the rotation velocity of the fixed ring 310 is slowed down, and the falling off or shaking deviation of the target 10 caused by too fast rotation of the fixed ring 310 is avoided. Specifically, the driving wheel 243 and the driven wheel 244 may be configured as pulleys, and the driving wheel 243 and the driven wheel 244 are in transmission connection through a belt; the driving wheel 243 and the driven wheel 244 may also be provided as gears, the driving wheel 243 and the driven wheel 244 being driven by a meshing connection.

The foregoing description is only of the preferred embodiments of the present utility model and is not intended to limit the scope of the utility model, and all equivalent structural changes made by the description of the present utility model and the accompanying drawings or direct/indirect application in other related technical fields are included in the scope of the utility model.

Claims (10)

1. A physical vapor deposition PVD apparatus comprising:

the device comprises a device main body, wherein the device main body is provided with a closed cavity for coiled material processing, and a loading position for placing a target and a working position for processing the target are arranged in the closed cavity;

the transfer device is arranged in the closed cavity; and

the clamping device is connected with the transferring device and used for taking and placing the target, and the transferring device is used for driving the clamping device to horizontally and/or vertically move in the closed cavity so as to transfer the target from the loading position to the working position.

2. The PVD apparatus of claim 1, wherein the transfer device comprises a vertical movement mechanism for driving the clamping device to move vertically and a horizontal movement mechanism for driving the vertical movement mechanism to move horizontally, the clamping device being mounted to the vertical movement mechanism, the vertical movement mechanism being mounted to the horizontal movement mechanism.

3. The PVD apparatus of claim 2, wherein the horizontal movement mechanism comprises a guide, a link laterally movable along the guide, and a drive plate longitudinally movable along the link, the vertical movement mechanism comprises a lift box movable up and down along the drive plate, and the clamping device is connected to the lift box.

4. The PVD equipment of claim 3, wherein the guide comprises two oppositely arranged cross beams, two cross beams are provided with transversely arranged sliding grooves, a sliding block and an electric telescopic rod are arranged in the sliding grooves and are in driving connection with the sliding block, the electric telescopic rod is used for driving the sliding block to transversely move in the sliding grooves, and the connecting rod is in sliding connection with the cross beams through the sliding blocks in the two sliding grooves.

5. The PVD apparatus of claim 4, wherein a threaded rod is rotatably connected between the two sliders and is disposed side-by-side with the connecting rod, a first drive motor is mounted on one of the two sliders and is in driving connection with the threaded rod, and the drive plate is slidably connected with the connecting rod and is in threaded connection with the threaded rod.

6. The PVD equipment of claim 3, wherein the driving plate is provided with a second driving motor, a threaded column in driving connection with the second driving motor, and a lifting block in sliding connection with the driving plate and in threaded connection with the threaded column, the second driving motor is used for driving the lifting block to move up and down along the threaded column, and the lifting box body is in sliding connection with the driving plate through the lifting block.

7. The PVD apparatus of claim 6, wherein the drive plate has a vertically disposed lift slot, the second drive motor and the threaded post are disposed in the lift slot, and the lift block is slidably coupled in the lift slot.

8. The PVD equipment of claim 3, wherein the clamping device comprises a fixed ring rotatably connected with the lifting box, two clamping plates oppositely arranged in the radial direction of the fixed ring, and air cylinders arranged on the fixed ring and respectively connected with the two clamping plates in a driving mode, wherein the two clamping plates can move in directions approaching to or separating from each other.

9. The PVD apparatus of claim 8, wherein the outer circumferential surface of the stationary ring is connected with a transverse shaft disposed along a radial direction thereof, the stationary ring is rotatably connected to the lift box through the transverse shaft, the lift box is provided with a third driving motor in driving connection with the transverse shaft, and the stationary ring is circumferentially rotatable about a transverse axis thereof.

10. The physical vapor deposition PVD apparatus of claim 9, wherein a driving shaft disposed in the same direction as the transverse shaft is rotatably connected to the lift box, an output shaft of the third driving motor is connected to the driving shaft, a driving wheel is sleeved on the periphery of the driving shaft, a driven wheel is sleeved on the periphery of the transverse shaft, the driving wheel is in transmission connection with the driven wheel, and an outer diameter of the driving wheel is smaller than an outer diameter of the driven wheel.