CN220094456U

CN220094456U - Seat electrode taking and placing tool for PECVD (plasma enhanced chemical vapor deposition) equipment

Info

Publication number: CN220094456U
Application number: CN202320643882.8U
Authority: CN
Inventors: 吴云; 肖洁; 梁浩
Original assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Current assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Priority date: 2023-03-27
Filing date: 2023-03-27
Publication date: 2023-11-28
Anticipated expiration: 2033-03-27

Abstract

The utility model discloses a seat electrode taking and placing tool for PECVD equipment, which comprises the following components: the device comprises a handle, a pull buckle, a supporting rod, a pull rope and an elastic clamping part for clamping the seat electrode, wherein one end of the supporting rod is connected with the handle, the other end of the supporting rod is connected with the elastic clamping part, the pull buckle is hinged with the supporting rod, one end of the pull rope is connected with the pull buckle, and the other end of the pull rope is connected with the elastic clamping part; the elastic clamping part is placed on the seat electrode through the reaction chamber of the PECVD equipment by the handle and the supporting rod, the pull buckle is stirred, and the inhaul cable drives the elastic clamping part to clamp or loosen the seat electrode. The utility model has the advantages of compact structure, simple operation, high clamping reliability and the like, solves the problems of low disassembly and assembly efficiency, easy damage to a reaction cavity and the like of the seat electrode caused by the fact that the seat electrode is far away from a furnace mouth and the disassembly and assembly operation of a furnace tail is complex, improves the maintenance efficiency of the seat electrode and improves the running stability of PECVD equipment.

Description

Seat electrode taking and placing tool for PECVD (plasma enhanced chemical vapor deposition) equipment

Technical Field

The utility model belongs to the technical field of fixture tools, and particularly relates to a seat electrode taking and placing tool for PECVD equipment.

Background

In the operation process of the tubular PECVD equipment, a film is easy to grow at the metal seat electrode, and after a period of use, the conductivity at the seat electrode is poor, so that the periodic maintenance is required. When the furnace mouth seat electrode and the furnace tail seat electrode of the tubular PECVD device are maintained, the front seat electrode and the rear seat electrode movable block are taken out from the reaction chamber by using the fixture after the furnace door is opened or the furnace tail is removed, and the seat electrode movable block is inserted into the corresponding position of the reaction chamber by using the fixture after the polishing treatment of the insulating film on the surface of the seat electrode movable block is completed. Because the furnace tail structure is comparatively complicated, demolishs consuming time longer, and the repeated demolishs the furnace tail, causes the sealing performance of reaction chamber to reduce easily. In addition, because the distance from the rear seat electrode to the furnace mouth is longer, the tool clamp is inconvenient to grasp and clamp the rear seat electrode, and the reaction chamber is easy to damage.

Disclosure of Invention

The utility model aims to solve the technical problem of overcoming the defects of the prior art and providing the seat electrode taking and placing tool for the PECVD equipment, which has the advantages of compact structure, simple operation and high clamping reliability.

In order to solve the technical problems, the utility model adopts the following technical scheme:

a pedestal electrode pick-and-place tool for a PECVD apparatus, comprising: the device comprises a handle, a pull buckle, a supporting rod, a pull rope and an elastic clamping part for clamping the seat electrode, wherein one end of the supporting rod is connected with the handle, the other end of the supporting rod is connected with the elastic clamping part, the pull buckle is hinged with the supporting rod, one end of the pull rope is connected with the pull buckle, and the other end of the pull rope is connected with the elastic clamping part; the elastic clamping part is placed on the seat electrode through the reaction chamber of the PECVD equipment by the handle and the supporting rod, the pull buckle is stirred, and the inhaul cable drives the elastic clamping part to clamp or loosen the seat electrode.

As a further improvement of the present utility model, the elastic clamping portion includes: the elastic reset piece, the clamping piece, the connecting seat and the compression block; the end part of the supporting rod is connected with the top part of the clamping piece, the clamping piece penetrates through the connecting seat along the vertical direction, one end of the compression block is connected with the inhaul cable, and the other end of the compression block is connected with the connecting seat through the elastic reset piece; the pull buckle is pulled, the inhaul cable drives the compressing block to compress or loosen the elastic resetting piece, so that the connecting seat compresses or loosens the clamping piece, and the bottom of the clamping piece is clamped or loosened to realize the seat electrode.

As a further improvement of the present utility model, the connecting base includes a first connecting base and a second connecting base, the first connecting base and the second connecting base are connected by a first screw, and the upper portion of the clamping member penetrates through a space enclosed by the first connecting base, the second connecting base and the first screw in a vertical direction.

As a further improvement of the utility model, the first connecting seat is in an L-shaped structure, an elastic reset piece is arranged between the horizontal end of the first connecting seat and the end part of the compression block, and the second screw sequentially penetrates through the end part of the compression block, the elastic reset piece and the horizontal end of the first connecting seat along the vertical direction, so that the end part of the compression block is elastically connected with the horizontal end of the first connecting seat.

As a further improvement of the utility model, two sides of the vertical end of the first connecting seat are respectively hinged with two side parts of the pressing block through third screws.

As a further improvement of the utility model, a plurality of sleeves are also arranged on the inhaul cable in a penetrating way, and the sleeves are used for assisting in inhaul cable positioning.

As a further improvement of the utility model, the end of the support rod is in threaded connection with the handle.

As a further improvement of the utility model, the inhaul cable is a steel wire rope.

As a further improvement of the utility model, the elastic restoring element is a spring.

As a further improvement of the utility model, two hooks are arranged at the bottom of the clamping piece side by side, and the hooks are matched with grooves at the top of the seat electrode.

Compared with the prior art, the utility model has the advantages that:

according to the seat electrode taking and placing tool for the PECVD equipment, one end of the supporting rod is connected with the handle, the other end of the supporting rod is connected with the elastic clamping part for clamping the seat electrode, the pull buckle is hinged on the supporting rod, and the pull buckle and the elastic clamping part are respectively connected by the stay rope, so that the seat electrode taking and placing tool with compact structure and convenient operation is obtained; when the seat electrode is required to be taken out, an operator lifts the handle, stretches the elastic clamping part into the reaction cavity through the observation window or the furnace mouth on the furnace tail flange of the PECVD device, and places the elastic clamping part above the seat electrode, pulls the pull buckle, the inhaul cable drives the elastic clamping part to clamp the seat electrode, and then drags the seat electrode to move to the vicinity of the observation window or the furnace mouth along the ceramic rod, so that the seat electrode can be removed. And (5) reversely operating to realize the installation of the seat electrode. The problems that the disassembly and assembly efficiency of the seat electrode is low, the reaction cavity is easy to damage and the like due to the fact that the seat electrode is far from the furnace mouth or the disassembly and assembly operation of the furnace tail is complex are effectively solved, the maintenance efficiency of the seat electrode is improved, and the operation stability of PECVD equipment is also improved.

Drawings

FIG. 1 is a schematic diagram of the structure of a pedestal electrode pick-and-place tool for PECVD equipment.

Fig. 2 is a schematic diagram of the structural principle at a in fig. 1.

Fig. 3 is a schematic structural diagram of the seat electrode pick-and-place tool according to the present utility model.

Fig. 4 is a schematic diagram of the structural principle at B in fig. 3.

Legend description: 1. a handle; 2. pulling buckle; 3. a plug pin; 4. a support rod; 5. a guy cable; 6. a sleeve; 7. an elastic reset piece; 8. a clamping member; 81. a claw; 9. a connecting seat; 91. a first connection base; 92. a second connecting seat; 10. a compaction block; 11. a first screw; 12. a second screw; 13. a third screw; 14. positioning a nut; 100. a furnace mouth flange; 200. a furnace tail flange; 300. a graphite boat; 400. a ceramic rod; 500. an extraction opening; 600. an observation window; 700. a rear seat electrode; 800. a front seat electrode.

Detailed Description

The utility model is further described below in connection with the drawings and the specific preferred embodiments, but the scope of protection of the utility model is not limited thereby.

Examples

As shown in fig. 1 to 4, the pedestal electrode pick-and-place tool for a PECVD apparatus of the present utility model comprises: handle 1, pull buckle 2, bracing piece 4, cable 5 and be used for the elasticity clamping part of grip slipper electrode. One end of the supporting rod 4 is in threaded connection with the handle 1, namely, the end part of the supporting rod 4 is provided with external threads, the end of the handle 1 is internally provided with internal threads, and the two are in detachable connection through threaded fit; the other end of the supporting rod 4 is connected with the elastic clamping part. The pull buckle 2 is hinged with the support rod 4 through the bolt 3, and the hinged part of the pull buckle 2 and the support rod 4 is close to the handle 1. One end of the inhaul cable 5 is connected with the pull buckle 2, and the other end of the inhaul cable 5 is connected with the elastic clamping part. During operation, the elastic clamping part is placed on the seat electrode through the reaction chamber of the PECVD device by the handle 1 and the supporting rod 4, the pull buckle 2 is stirred, and the inhaul cable 5 drives the elastic clamping part to clamp or loosen the seat electrode.

As shown in fig. 2, in the present embodiment, the elastic clamping portion includes: the elastic reset piece 7, the clamping piece 8, the connecting seat 9 and the compression block 10. The end part of the support rod 4 far away from the handle 1 is in threaded connection with the top of the clamping piece 8, namely, the end part of the support rod 4 is provided with internal threads, the top of the clamping piece 8 is provided with external threads, and the two parts are detachably connected through threaded fit. The clamping piece 8 penetrates through the connecting seat 9 along the vertical direction, one end of the compression block 10 is connected with the inhaul cable 5, and the other end of the compression block 10 is connected with the connecting seat 9 through the elastic reset piece 7. Pulling the pull buckle 2, the inhaul cable 5 drives the compressing block 10 to compress or loosen the elastic resetting piece 7, so that the connecting seat 9 compresses or loosens the clamping piece 8, and the bottom of the clamping piece 8 is clamped or loosened to realize the seat electrode. In this embodiment, the elastic restoring member 7 is a spring. It will be appreciated that in other embodiments, the resilient return member 7 may take other forms, such as a resilient rubber block, provided that clamping or unclamping of the holder electrode by the clamping member 8 is enabled.

As shown in fig. 2, in this embodiment, the connection base 9 includes a first connection base 91 and a second connection base 92, the first connection base 91 and the second connection base 92 are detachably connected by two first screws 11, and the upper portion of the clamping member 8 penetrates through the space enclosed by the first connection base 91, the second connection base 92 and the two first screws 11 along the vertical direction. The clamping piece 8 is further provided with a positioning nut 14, and the positioning nut 14 is located below the connecting seat 9 and used for limiting the displacement of the clamping piece 8 in the vertical direction so as to improve the clamping stability.

As shown in fig. 2, in this embodiment, the first connecting seat 91 is in an "L" structure, the compression block 10 is in an "twenty" structure, an elastic restoring member 7 is disposed between a horizontal end of the first connecting seat 91 and an end of the compression block 10, and the second screw 12 sequentially penetrates through the end of the compression block 10, the elastic restoring member 7 and the horizontal end of the first connecting seat 91 along a vertical direction, so as to realize elastic connection between the end of the compression block 10 and the horizontal end of the first connecting seat 91. At the same time, the second screw 12 penetrates the elastic restoring member 7, and can limit the moving path of the elastic restoring member 7, thereby avoiding the elastic restoring member 7 from being deviated.

As shown in fig. 2, in the present embodiment, the pressing block 10 surrounds the connection seat 9 inside thereof, and both sides of the vertical end of the first connection seat 91 are hinged to both side portions of the pressing block 10 by means of the third screws 13, respectively. The compression block 10 can be rotated along the side of the first coupling seat 91 during the tightening or loosening of the compression block 10 by the cable 5. And the stability of torque transmission is improved.

As shown in fig. 1, in this embodiment, the cable 5 is further provided with a plurality of sleeves 6, and the sleeves 6 are used for assisting in positioning the cable 5, so as to avoid the cable 5 from being deviated or curled onto the support rod 4 during the working process.

In the embodiment, the supporting rod 4 is made of stainless steel materials, and the inhaul cable 5 is a steel wire rope and has the characteristics of high mechanical strength and high structural stability.

As shown in fig. 2, in this embodiment, two claws 81 are arranged side by side at the bottom of the clamping member 8, and the claws 81 are matched with grooves at the top of the seat electrode, so as to realize connection between the clamping member 8 and the seat electrode.

As shown in fig. 3 and 4, the tube type PECVD apparatus includes: a reaction chamber (not shown), a furnace mouth flange 100 and a furnace tail flange 200, and a ceramic rod 400 for carrying a graphite boat 300. The two ends of the ceramic rod 300 are respectively connected with the furnace mouth flange 100 and the furnace tail flange 200, the ceramic rod 300 is provided with a front seat electrode 800 and a rear seat electrode 700 which are connected with the radio frequency component, and the front seat electrode 800 and the rear seat electrode 700 are respectively positioned at the foremost end and the rearmost end of the joint of the graphite boat 300 and the ceramic rod 400. The furnace port flange 100 is provided with an inlet port (not shown) for delivering process gas into the reaction chamber, which is ionized and decomposed by excitation of the seat electrode. An extraction opening 500 is arranged in the middle of the furnace tail flange 200, and the extraction opening 500 is used for extracting waste gas in the reaction cavity. Two observation windows 600 are symmetrically arranged at the lower part of the furnace tail flange 200, and the observation windows 600 are mainly used for observing the state in the reaction cavity.

When the rear seat electrode 700 in the tubular PECVD device is required to be taken out, the observation window 600 on the furnace tail flange 200 of the PECVD device is opened, an operator lifts the handle 1, an elastic clamping part stretches into the reaction chamber through the observation window 600, the hook 81 at the bottom of the clamping piece 8 stretches into the groove above the rear seat electrode 700, the pull buckle 2 is pulled, the inhaul cable 5 drives the compression block 10 to downwards compress the elastic reset piece 7, the connecting seat 9 downwards compresses the clamping piece 8, the bottom of the clamping piece 8 is clamped to clamp the rear seat electrode 700, and then the rear seat electrode 700 is dragged to move to the vicinity of the observation window 600 along the ceramic rod 300, so that the rear seat electrode 700 can be dismantled. And (5) reversely operating to realize the installation of the seat electrode. When the front seat electrode 800 in the tubular PECVD device is required to be taken out, the furnace door is opened, the seat electrode taking and placing tool is extended into the reaction cavity, and corresponding operation is carried out.

In this embodiment, through being connected the one end and the handle 1 of bracing piece 4, the other end and the elasticity clamping part that are used for the grip slipper electrode of bracing piece 4 are connected, articulated on bracing piece 4 draw and detain 2, set up cable 5 and connect respectively and draw knot 2 and elasticity clamping part, obtain compact structure, simple operation's seat electrode and get and put frock promptly. The rear seat electrode in the tubular PECVD device can be taken and placed through the observation window, so that the problems that the seat electrode is low in disassembly and assembly efficiency, the reaction cavity is easy to damage and the like due to the fact that the seat electrode is far away from a furnace mouth or the disassembly and assembly operation of a furnace tail is complex are effectively solved, the maintenance efficiency of the seat electrode is improved, and the running stability of the PECVD device is also improved.

While the utility model has been described with reference to preferred embodiments, it is not intended to be limiting. Any person skilled in the art can make many possible variations and modifications to the technical solution of the present utility model or equivalent embodiments using the method and technical solution disclosed above without departing from the spirit and technical solution of the present utility model. Therefore, any simple modification, equivalent substitution, equivalent variation and modification of the above embodiments according to the technical substance of the present utility model, which do not depart from the technical solution of the present utility model, still fall within the scope of the technical solution of the present utility model.

Claims

1. A pedestal electrode pick-and-place tool for a PECVD apparatus, comprising: the electrode clamping device comprises a handle (1), a pull buckle (2), a support rod (4), a pull rope (5) and an elastic clamping part for clamping a seat electrode, wherein one end of the support rod (4) is connected with the handle (1), the other end of the support rod (4) is connected with the elastic clamping part, the pull buckle (2) is hinged with the support rod (4), one end of the pull rope (5) is connected with the pull buckle (2), and the other end of the pull rope (5) is connected with the elastic clamping part; the handle (1) and the supporting rod (4) are used for placing the elastic clamping part on the seat electrode through the reaction chamber of the PECVD equipment, and when the pull buckle (2) is pulled, the inhaul cable (5) drives the elastic clamping part to clamp or loosen the seat electrode.

2. The chuck electrode pick-and-place tool for a PECVD apparatus of claim 1, wherein the elastic clamping portion comprises: the elastic resetting piece (7), the clamping piece (8), the connecting seat (9) and the compression block (10); the end part of the supporting rod (4) is connected with the top part of the clamping piece (8), the clamping piece (8) penetrates through the connecting seat (9) along the vertical direction, one end of the compression block (10) is connected with the inhaul cable (5), and the other end of the compression block (10) is connected with the connecting seat (9) through the elastic reset piece (7); when the pull buckle (2) is pulled, the inhaul cable (5) drives the compressing block (10) to compress or loosen the elastic resetting piece (7), so that the connecting seat (9) compresses or loosens the clamping piece (8), and the bottom of the clamping piece (8) is clamped or loosened to realize the seat electrode.

3. The socket electrode taking and placing tool for the PECVD equipment according to claim 2, wherein the connecting socket (9) comprises a first connecting socket (91) and a second connecting socket (92), the first connecting socket (91) and the second connecting socket (92) are connected through a first screw (11), and the upper part of the clamping piece (8) penetrates through a space enclosed by the first connecting socket (91), the second connecting socket (92) and the first screw (11) along the vertical direction.

4. A socket electrode picking and placing tool for a PECVD apparatus according to claim 3, wherein the first connecting socket (91) is in an L-shaped structure, an elastic reset member (7) is arranged between the horizontal end of the first connecting socket (91) and the end of the pressing block (10), and the second screw (12) sequentially penetrates through the end of the pressing block (10), the elastic reset member (7) and the horizontal end of the first connecting socket (91) along the vertical direction, so that the end of the pressing block (10) is elastically connected with the horizontal end of the first connecting socket (91).

5. The socket electrode pick-and-place tool for a PECVD apparatus according to claim 4, wherein both sides of the vertical end of the first connection socket (91) are hinged with both sides of the pressing block (10) by means of third screws (13), respectively.

6. The seat electrode taking and placing tool for the PECVD equipment according to any one of claims 1 to 5, wherein a plurality of sleeves (6) are further arranged on the inhaul cable (5) in a penetrating way, and the sleeves (6) are used for assisting in positioning the inhaul cable (5).

7. The tool for taking and placing a seat electrode for a PECVD apparatus according to any one of claims 1 to 5, wherein the end of the support bar (4) is screw-coupled with the handle (1).

8. The tool for taking and placing a seat electrode for a PECVD apparatus according to any one of claims 1 to 5, wherein the stay cable (5) is a wire rope.

9. The tool for taking and placing a seat electrode for a PECVD apparatus according to any one of claims 2 to 5, wherein the elastic restoring member (7) is a spring.

10. The tool for taking and placing a seat electrode for a PECVD apparatus according to any one of claims 2 to 5, wherein two hooks (81) are arranged side by side at the bottom of the clamping member (8), and the hooks (81) are matched with grooves at the top of the seat electrode.