CN220083923U - Magnetic pole gap measuring device of undulator - Google Patents
Magnetic pole gap measuring device of undulator Download PDFInfo
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- CN220083923U CN220083923U CN202321486315.2U CN202321486315U CN220083923U CN 220083923 U CN220083923 U CN 220083923U CN 202321486315 U CN202321486315 U CN 202321486315U CN 220083923 U CN220083923 U CN 220083923U
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- 238000004891 communication Methods 0.000 claims abstract description 17
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- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
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- 238000010894 electron beam technology Methods 0.000 description 1
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Abstract
The utility model provides a magnetic pole gap measuring device of an undulator, which comprises a displacement platform, a sensor tool, a first capacitive displacement sensor and a second capacitive displacement sensor, wherein the sensor tool is fixed on the displacement platform through a screw, the first capacitive displacement sensor and the second capacitive displacement sensor are arranged on two opposite surfaces of the sensor tool, and a signal processing system is in communication connection with the first capacitive displacement sensor and the second capacitive displacement sensor; the undulator pole includes an upper large Liang Ciji and a lower large Liang Ciji having a gap therebetween, and when the sensor fixture is inserted into the gap, the first capacitive displacement sensor faces the upper large Liang Ciji and the second capacitive displacement sensor faces the lower girder pole. The device of the utility model measures the gap between the magnetic poles of the undulator through the non-contact capacitive displacement sensor, and can measure the gap between the magnetic poles of the undulator in a non-contact, real-time, on-line, efficient, rapid and accurate way.
Description
Technical Field
The utility model relates to the technical field of measurement, in particular to a magnetic pole gap measuring device of an undulator, which is particularly suitable for measuring the magnetic pole gap of a conventional undulator or a vacuum undulator.
Background
The undulator is a key device for synchronous radiation light source and free electron laser, and X-rays generated by electron beams passing through the undulator have very important application in various fields of physics, chemistry, materials and the like. The upper and lower large plates Liang Ciji and Liang Ciji of the undulator are shown in fig. 1, and the gap between the upper and lower large plates Liang Ciji and Liang Ciji of the undulator needs to be measured and calibrated in the process of installing and debugging the undulator.
At present, the gap between the upper large part Liang Ciji and the lower large part Liang Ciji of the undulator is measured and calibrated by using a conventional measuring tool, and the following problems exist:
because the permanent magnet is the core element of the undulator, the conventional measuring tool cannot touch the permanent magnet, preventing damage to the permanent magnet. Therefore, the conventional ferrous metal measuring tool is easily sucked by the permanent magnet, so that measurement cannot be performed; the conventional measuring tool has a space size, so that a small magnetic pole gap cannot be measured (for example, a caliper of a vernier caliper is generally 10mm in height, so that the gap cannot be measured by 10mm, the conventional measuring tool is convenient to measure the gap between the two ends of the upper large part Liang Ciji and the lower large part Liang Ciji, and the gap between the inlet and the outlet of the large part Liang Ciji is difficult to measure.
Disclosure of Invention
The utility model aims to provide a magnetic pole gap measuring device of an undulator, which is used for measuring the gap between two metals through non-contact measurement, and is particularly suitable for measuring the magnetic pole gap of a conventional undulator or a vacuum undulator.
In order to achieve the above object, the present utility model provides an undulator magnetic pole gap measuring apparatus for measuring a gap between undulator magnetic poles, comprising a displacement platform, a sensor fixture fixed on the displacement platform by screws, a first capacitive displacement sensor and a second capacitive displacement sensor provided on two opposite surfaces of the sensor fixture, a signal processing system in communication connection with the first capacitive displacement sensor and the second capacitive displacement sensor; the undulator pole includes an upper large Liang Ciji and a lower large Liang Ciji having a gap therebetween, and when the sensor fixture is inserted into the gap, the first capacitive displacement sensor faces the upper large Liang Ciji and the second capacitive displacement sensor faces the lower girder pole.
The first capacitive displacement sensor and the second capacitive displacement sensor are respectively clung to the upper surface and the lower surface of the sensor tool.
The signal processing system comprises a sensor controller which is in communication connection with the first capacitive displacement sensor and the second capacitive displacement sensor, and an industrial personal computer which is in communication connection with the sensor controller; the sensor controller is used for acquiring and processing the measured gap values measured by the first capacitive displacement sensor and the second capacitive displacement sensor and transmitting the measured gap values to the industrial personal computer;
the industrial personal computer is arranged to receive the measured gap values measured by the first capacitive displacement sensor and the second capacitive displacement sensor, and the gap between the upper large part Liang Ciji and the lower large part Liang Ciji is obtained by combining the thickness of the first capacitive displacement sensor, the thickness of the second capacitive displacement sensor and the thickness of the sensor tool.
The measured gap value measured by the first capacitive displacement sensor comprises a fourth gap between the surface of the first capacitive displacement sensor facing away from the sensor tool and the surface of the upper large Liang Ciji facing the first capacitive displacement sensor, and a seventh gap between the surface of the first capacitive displacement sensor facing the sensor tool and the surface of the sensor tool where the surface of the first capacitive displacement sensor facing the sensor tool is located; the measured gap value measured by the second capacitive displacement sensor includes a fifth gap between a surface of the second capacitive displacement sensor facing away from the sensor fixture and a surface of the lower large Liang Ciji facing the second capacitive displacement sensor, and an eighth gap between a surface of the second capacitive displacement sensor facing the sensor fixture and a surface of the sensor fixture where the eighth gap is located.
The effective measurement range of the measurement gap values measured by the first capacitive displacement sensor and the second capacitive displacement sensor is 0.5mm, the resolution is 0.5 mu m, and the repeatability is +/-0.5 mu m; and the sensor tool is replaceable, and the thickness of the sensor tool is less than or equal to 200mm.
The industrial personal computer is also connected with the displacement platform, and is arranged to respond to the operation on the industrial personal computer and send rotating speed and direction instructions to the motion platform so that the motion platform drives the sensor tool to move into the gap between the magnetic poles of the undulator.
The sensor controller is in communication connection with the industrial personal computer through a Modbus TCP communication protocol, and the industrial personal computer is in communication with the displacement platform through a TCP/IP protocol.
The industrial personal computer sends a rotating speed and a direction instruction to the motion platform so that the motion platform drives the first capacitive displacement sensor and the second capacitive displacement sensor to start scanning from the entrance of a gap between the magnetic poles of the undulator to end from the exit of the gap between the magnetic poles of the undulator;
the industrial personal computer sends a rotating speed and direction instruction to the motion platform, so that the motion platform drives the first capacitive displacement sensor and the second capacitive displacement sensor to move to the middle position and the entrance position of a gap between magnetic poles of the undulator along the X-axis direction, the Y-axis direction and the Z-axis direction to serve as a position for starting scanning; the rotation speed and direction instructions sent by the industrial personal computer to the motion platform enable the motion direction of the motion platform during scanning to be parallel to the surfaces of the undulator magnetic poles, which are opposite to each other.
The first and second capacitive displacement sensors are parallel to the mutually opposing surfaces of the undulator poles.
The sensor tool is made of aluminum.
The magnetic pole gap measuring device of the undulator measures the gap between two metals through the non-contact capacitive displacement sensor, and can measure the gap between the two metals in a non-contact, real-time, online, efficient, rapid and accurate manner, and especially measure the gap values of the upper large Liang Ciji and the lower large Liang Ciji of the undulator. In addition, the measuring device for the magnetic pole gap of the undulator can change the measuring range by changing the sensor tools with different thicknesses on the premise of ensuring the precision, so that the measuring range is wide.
Drawings
Fig. 1 is a schematic diagram of the upper and lower large Liang Ciji and Liang Ciji of a typical undulator.
Fig. 2 is a schematic structural view of an undulator pole gap measuring apparatus according to an embodiment of the present utility model.
Fig. 3 is a system block diagram of a circuit portion of an undulator pole gap measuring device according to an embodiment of the present utility model.
Fig. 4 is a schematic structural view of a capacitive displacement sensor assembly.
The reference numerals in the figures are shown below: the device comprises a 1-displacement platform, a 2-screw, a 3-sensor tool, a 4-first capacitive displacement sensor, a 5-second capacitive displacement sensor, a 6-undulator upper size Liang Ciji, a 7-undulator lower size Liang Ciji, an 8-sensor controller and a 9-industrial personal computer.
Detailed Description
In order to make the objects, technical solutions and advantages of the present patent more apparent, the present utility model will be described in detail below with reference to the accompanying drawings and detailed description. The present embodiment is implemented by the technical solution of the present patent, and a detailed implementation manner and a specific operation process are given, but the protection scope of the present patent is not limited to the following examples.
First embodiment: magnetic pole gap measuring device of undulator
Fig. 1-3 show an undulator pole gap measuring device according to an embodiment of the present utility model for measuring gaps between undulator poles, comprising a displacement platform 1, a sensor fixture 3 fixed to the displacement platform 1 by means of screws 2, a first capacitive displacement sensor 4 and a second capacitive displacement sensor 5 provided on two opposite surfaces of the sensor fixture 3, a signal processing system in communication with the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5.
The undulator pole comprises an upper large Liang Ciji and a lower large Liang Ciji with a gap between them, and when the sensor fixture 3 is inserted into the gap, the first capacitive displacement sensor 4 is facing the upper large Liang Ciji and the second capacitive displacement sensor 5 is facing the lower girder pole. In this embodiment, the upper and lower large plates Liang Ciji, liang Ciji are upper girder magnetic poles 6 and lower large plates Liang Ciji 7, respectively, of an undulator, such as a conventional undulator or a vacuum undulator. The first capacitive displacement sensor 4 and the second capacitive displacement sensor 5 are respectively clung to the upper surface and the lower surface of the sensor tool 3.
The signal processing system comprises a sensor controller 8 which is in communication connection with both the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5, and an industrial personal computer 9 which is in communication connection with the sensor controller 8. Wherein the sensor controller 8 is arranged to acquire and process the measured gap values measured by the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5, and subsequently to transmit the measured gap values to the industrial personal computer 9. The sensor controller 8 is in communication connection with the industrial personal computer 9 through a Modbus TCP communication protocol.
Wherein the measured gap value measured by the first capacitive displacement sensor 4 includes a fourth gap L between the surface of the first capacitive displacement sensor 4 facing away from the sensor tool 3 and the surface of the upper large Liang Ciji facing the first capacitive displacement sensor 4 4 (i.e., the gap between the upper surface of the first capacitive displacement sensor 4 and the lower surface of the upper beam pole 6 of the undulator), and a seventh gap L between the surface of the first capacitive displacement sensor 4 facing the sensor fixture 3 and the surface of the sensor fixture 3 where it is located 7 (i.e., the gap between the lower surface of the first capacitive displacement sensor 4 and the upper surface of the tooling 3); the measured gap value measured by the second capacitive displacement sensor 5 comprises a fifth gap L between the surface of the second capacitive displacement sensor 5 facing away from the sensor fixture 3 and the surface of the lower large Liang Ciji facing the second capacitive displacement sensor 5 5 (i.e. the gap between the lower surface of the second capacitive displacement sensor 5 and the upper surface of the lower girder magnetic pole 7 of the undulator), and an eighth gap L between the surface of the second capacitive displacement sensor 5 facing the sensor fixture 3 and the surface of the sensor fixture 3 where it is located 8 (i.e. the gap between the upper surface of the second capacitive displacement sensor 5 and the lower surface of the sensor fixture 3).
The industrial personal computer 9 is configured to receive the measured gap values (i.e. L 4 、L 5 、L 7 And L 8 ) In combination with the thickness L of the first capacitive displacement sensor 4 6 Thickness L of second capacitive displacement sensor 5 9 And thickness L of sensor fixture 3 2 And finally, the gap L between the upper girder magnetic pole 6 and the lower girder magnetic pole 7 is displayed on an operation interface of the industrial personal computer 9.
Wherein L is 1 ＝L 4 +L 6 +L 7 ，
L 3 ＝L 5 +L 8 +L 9 ，
L＝L 1 +L 2 +L 3 ，
Wherein L is 1 For the distance between the upper large Liang Ciji 6 and the mutually opposite surfaces of the sensor fixture 3, L 3 A distance between the lower large Liang Ciji 7 and the mutually opposed surfaces of the sensor fixture 3; l (L) 2 The thickness of the sensor fixture 3 is known as the value.
In other embodiments, L 7 And L 8 May be known and thus do not require measurement.
In the present embodiment, the sampling frequency of the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5 is 1kHz, that is, the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5 measure the gap value once every 1ms, and the gap value is transmitted to the industrial personal computer 9 through the sensor controller 8. In the present embodiment, the effective measurement range (i.e., L 4 、L 5 、L 7 、L 8 Is 0.5mm, the resolution is 0.5 μm, the repeatability is + -0.5 μm.
Preferably, the industrial personal computer 9 is further connected to the displacement platform 1, and the two are in communication with each other through a TCP/IP protocol (transmission control protocol/internet protocol). The industrial personal computer 9 is configured to respond to the operation on the operation interface thereof and send a rotating speed and direction instruction to the motion platform 1, so that the motion platform 1 drives the sensor tool 3 to move into the gap between the undulator magnetic poles. Therefore, the motion platform 1 drives the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5 on the sensor tool 3 to enter a gap between the undulator magnetic poles for measurement. In the moving process of the sensor fixture 3, the relative positions among the sensor fixture 3, the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5 are not changed relatively, so that the first capacitive displacement sensor 4, the second capacitive displacement sensor 5 and the sensor fixture 3 form a capacitive sensor assembly.
In this embodiment, the rotation speed and direction instruction sent by the industrial personal computer 9 to the motion platform 1 enable the motion platform 1 to drive the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5 to start scanning from the entrance of the gap between the undulator magnetic poles to end at the exit of the gap between the undulator magnetic poles. When the undulator magnetic pole comprises an upper large part Liang Ciji and a lower large part Liang Ciji of the undulator, the rotation speed and direction instructions sent by the industrial personal computer 9 to the moving platform 1 enable the moving platform 1 to drive the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5 to start scanning from the entrance of the undulator to finish scanning from the exit of the undulator. Thus, the complete gap was scanned and the pole magnet height variation of the undulator upper girder and lower girder Liang Ciji was measured.
In addition, the rotation speed and direction instruction sent by the industrial personal computer 9 to the motion platform 1 enable the motion platform 1 to drive the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5 to move to the middle position of the gap between the undulator magnetic poles and the entrance position of the gap along the X-axis direction, the Y-axis direction and the Z-axis direction, so as to be used as a scanning starting position. The rotation speed and direction instructions sent by the industrial personal computer 9 to the motion platform 1 enable the motion direction of the motion platform 1 during scanning to be parallel to the surfaces of the undulator magnetic poles, which are opposite to each other. Thereby, the measurement gap is facilitated.
As shown in fig. 4, the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5 are both planar capacitive sensors, so that the sensor fixture 3 can be inserted into the gap between the undulator poles. First, theA capacitive displacement sensor 4 and a second capacitive displacement sensor 5 are attached to the sensor fixture 3 by means of an adhesive material, so as to form a seventh gap L between the surface of the first capacitive displacement sensor 4 facing the sensor fixture 3 and the surface of the sensor fixture 3 where it is located 7 And an eighth gap L between the surface of the second capacitive displacement sensor 5 facing the sensor fixture 3 and the surface of the sensor fixture 3 where it is located 8 。
As shown in fig. 2 and 4, the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5 are parallel to the surfaces of the undulator poles that are opposite to each other. When the undulator pole comprises an upper girder pole 6 and a lower girder pole 7 of the undulator, the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5 are parallel to a horizontal plane (i.e. xoz plane), i.e. the first capacitive displacement sensor 4 and the second capacitive displacement sensor 5 are parallel to both the x-axis direction and the z-axis direction, the first capacitive displacement sensor 4 faces the lower plane of the upper girder pole 6 of the undulator along the positive y-axis direction, the lower planes of the upper girder pole 6 of the first capacitive displacement sensor 4 and the undulator are both parallel to xoz plane, the second capacitive displacement sensor 5 faces the upper plane of the lower girder pole 7 of the undulator along the negative y-axis direction, and the upper planes of the second capacitive displacement sensor 5 and the lower girder pole 7 of the undulator are both parallel to xoz plane. The rotation speed and direction instructions sent by the industrial personal computer 9 to the motion platform 1 enable the motion platform 1 to drive the capacitance sensor assembly to enter a gap between the upper girder magnetic pole 6 and the lower girder magnetic pole 7 along the x-axis direction, wherein the x-axis is the direction from the inlet of the gap to the outlet of the gap, and the capacitance sensor assembly consists of a first capacitance type displacement sensor 4, a second capacitance type displacement sensor 5 and a sensor tool 3.
The material of the sensor fixture 3 is aluminum, since the aluminum material is not magnetized. The sensor fixture 3 is in different versions, the shape of the sensor fixture 3 is in a strip shape, the thickness of the sensor fixture is less than or equal to 200mm, and the change of the measuring range of the magnetic pole gap of the undulator can be realized by replacing the sensor fixture. In order to ensure the measurement accuracy, a larger gap can be measured by selecting a sensor tool 3 with a larger thickness; a smaller gap can be measured by selecting a smaller thickness sensor tool. The thickness of the sensor fixture 3 is considered to be large when it is 10mm to 200mm, and is considered to be small when the thickness of the sensor fixture 3 is less than 10 mm.
While the foregoing is directed to embodiments of the present utility model, other and further embodiments of the utility model may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Claims (10)
1. The undulator magnetic pole gap measuring device is used for measuring the gap between undulator magnetic poles and is characterized by comprising a displacement platform, a sensor tool, a first capacitive displacement sensor and a second capacitive displacement sensor, wherein the sensor tool is fixed on the displacement platform, the first capacitive displacement sensor and the second capacitive displacement sensor are arranged on two opposite surfaces of the sensor tool, and a signal processing system is in communication connection with the first capacitive displacement sensor and the second capacitive displacement sensor; the undulator pole includes an upper large Liang Ciji and a lower large Liang Ciji having a gap therebetween, and when the sensor fixture is inserted into the gap, the first capacitive displacement sensor faces the upper large Liang Ciji and the second capacitive displacement sensor faces the lower girder pole.
2. The undulator pole gap measuring device of claim 1, wherein the first capacitive displacement sensor and the second capacitive displacement sensor are respectively attached to an upper surface and a lower surface of a sensor fixture.
3. The undulator pole gap measuring device of claim 1, wherein the signal processing system comprises a sensor controller in communication with both the first capacitive displacement sensor and the second capacitive displacement sensor, and an industrial personal computer in communication with the sensor controller; the sensor controller is used for acquiring and processing the measured gap values measured by the first capacitive displacement sensor and the second capacitive displacement sensor and transmitting the measured gap values to the industrial personal computer;
the industrial personal computer is arranged to receive the measured gap values measured by the first capacitive displacement sensor and the second capacitive displacement sensor, and the gap between the upper large part Liang Ciji and the lower large part Liang Ciji is obtained by combining the thickness of the first capacitive displacement sensor, the thickness of the second capacitive displacement sensor and the thickness of the sensor tool.
4. The undulator pole gap measuring device of claim 3, wherein the measured gap value measured by the first capacitive displacement sensor includes a fourth gap between a surface of the first capacitive displacement sensor facing away from the sensor fixture and a surface of the upper electrode Liang Ciji facing the first capacitive displacement sensor, and a seventh gap between a surface of the first capacitive displacement sensor facing the sensor fixture and a surface of the sensor fixture in which the first capacitive displacement sensor is located; the measured gap value measured by the second capacitive displacement sensor includes a fifth gap between a surface of the second capacitive displacement sensor facing away from the sensor fixture and a surface of the lower large Liang Ciji facing the second capacitive displacement sensor, and an eighth gap between a surface of the second capacitive displacement sensor facing the sensor fixture and a surface of the sensor fixture where the eighth gap is located.
5. The undulator pole gap measuring device of claim 3, wherein the effective measurement range of the measurement gap values measured by the first capacitive displacement sensor and the second capacitive displacement sensor is 0.5mm, the resolution is 0.5 μm, and the repeatability is ±0.5 μm; and the sensor tool is replaceable, and the thickness of the sensor tool is less than or equal to 200mm.
6. The undulator pole gap measuring device of claim 3, wherein the industrial personal computer is further connected to a displacement platform, the industrial personal computer being configured to send rotational speed and direction instructions to the motion platform in response to operation thereon to cause the motion platform to move the sensor tooling into the gap between the undulator poles.
7. The undulator pole gap measuring device of claim 6, wherein the sensor controller is communicatively coupled to an industrial personal computer via Modbus TCP communication protocol, and the industrial personal computer is communicatively coupled to the displacement platform via TCP/IP protocol.
8. The undulator pole gap measuring device of claim 6, wherein the rotational speed and direction instructions sent by the industrial personal computer to the motion platform cause the motion platform to drive the first capacitive displacement sensor and the second capacitive displacement sensor to start scanning from an entrance of a gap between undulator poles to an exit of the gap between undulator poles;
the industrial personal computer sends a rotating speed and direction instruction to the motion platform, so that the motion platform drives the first capacitive displacement sensor and the second capacitive displacement sensor to move to the middle position and the entrance position of a gap between magnetic poles of the undulator along the X-axis direction, the Y-axis direction and the Z-axis direction to serve as a position for starting scanning; the rotation speed and direction instructions sent by the industrial personal computer to the motion platform enable the motion direction of the motion platform during scanning to be parallel to the surfaces of the undulator magnetic poles, which are opposite to each other.
9. The undulator pole gap measuring device of claim 1, wherein the first capacitive displacement sensor and the second capacitive displacement sensor are parallel to surfaces of the undulator pole that are opposite each other.
10. The undulator pole gap measuring device of claim 1, wherein the material of the sensor tooling is aluminum.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202321486315.2U CN220083923U (en) | 2023-06-12 | 2023-06-12 | Magnetic pole gap measuring device of undulator |
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| CN202321486315.2U CN220083923U (en) | 2023-06-12 | 2023-06-12 | Magnetic pole gap measuring device of undulator |
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