CN220072737U - Improved structure of stripping machine cleaning cavity - Google Patents
Improved structure of stripping machine cleaning cavity Download PDFInfo
- Publication number
- CN220072737U CN220072737U CN202321193052.6U CN202321193052U CN220072737U CN 220072737 U CN220072737 U CN 220072737U CN 202321193052 U CN202321193052 U CN 202321193052U CN 220072737 U CN220072737 U CN 220072737U
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- Prior art keywords
- cleaning cavity
- welding body
- cavity
- cleaning
- mounting substrate
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- 238000004140 cleaning Methods 0.000 title claims abstract description 117
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 238000003466 welding Methods 0.000 claims description 54
- 238000007789 sealing Methods 0.000 claims description 31
- 238000009434 installation Methods 0.000 claims 2
- 230000000694 effects Effects 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000020347 spindle assembly Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model discloses an improved structure of a cleaning cavity of a stripping machine, which comprises the following components: the cleaning cavity mounting substrate, the lower part of cleaning cavity mounting substrate is provided with servo motor and servo motor's power take off end is provided with motor spindle unit, motor spindle unit's upper portion is provided with cleaning cavity sucking disc assembly. According to the utility model, four supporting rods are detached and replaced into the existing supporting ring, four through holes are uniformly drilled on the supporting ring according to 90 degrees, four connecting screws are penetrated in the middle of the supporting ring, the lower parts of the screws are fixed on a cleaning cavity mounting substrate, the upper parts of the screws are locked and fixed by four locking nuts, in addition, annular grooves are respectively machined on a main shaft motor assembly base and the cleaning cavity mounting substrate, and are positioned with the upper annular surface and the lower annular surface of the supporting ring, so that the coaxiality and the parallelism requirements of a lower servo motor and an upper main shaft motor assembly can be fully ensured, and the rigidity is greatly enhanced because the supporting ring is a part.
Description
Technical Field
The utility model relates to the technical field of strippers, in particular to an improved structure of a cleaning cavity of a stripper.
Background
The existing stripper cleaning cavity has insufficient positioning precision in the aspect of cleaning wafers, and the servo motor has insufficient rigidity when rotating at a high speed. Therefore, a new solution is needed.
Disclosure of Invention
The utility model aims to provide an improved structure of a stripping machine cleaning cavity, which solves the problems that the existing stripping machine cleaning cavity has insufficient positioning precision in the aspect of cleaning wafers and the servo motor has insufficient rigidity in the high-speed rotation.
In order to achieve the above purpose, the present utility model provides the following technical solutions: an improved structure of a cleaning cavity of a stripping machine, comprising: the cleaning cavity mounting substrate, the lower part of cleaning cavity mounting substrate is provided with servo motor and servo motor's power take off end is provided with motor spindle unit, motor spindle unit's upper portion is provided with the cleaning cavity sucking disc assembly, cleaning cavity mounting substrate's upper portion is provided with the outer chamber welding body of cleaning cavity, cleaning cavity outer chamber welding body's upper portion is provided with cleaning cavity sealing ring welding body and cleaning cavity sealing ring welding body's upper portion is provided with peels off the cavity sealing ring upper end cover, cleaning cavity sealing ring welding body's inside is provided with cleaning cavity splash guard welding body, cleaning cavity splash guard welding body's upper portion is provided with cleaning cavity splash guard connecting plate and washs between cavity splash guard connecting plate and the cleaning cavity splash guard welding body fixed connection, cleaning cavity splash guard welding body's upper portion is provided with first baffle and second baffle, cleaning cavity splash guard connecting plate's side is provided with lift cylinder module assembly.
As a preferred embodiment of the present utility model, a cleaning chamber mounting support plate is provided between the cleaning chamber external chamber welding body and the cleaning chamber mounting substrate.
As a preferred embodiment of the utility model, the joint of the cleaning cavity splash guard welding body and the cleaning cavity sealing ring welding body is respectively provided with a first sealing gasket and a second sealing gasket.
As a preferred embodiment of the utility model, the lower part of the cleaning cavity sealing ring welding body is provided with a cleaning cavity outer cavity welding body, and the surface of the cleaning cavity outer cavity welding body is provided with a cleaning cavity exhaust pipe sleeve.
As a preferable implementation mode of the utility model, the upper part of the motor spindle assembly is provided with a cavity waterproof cap positioning plate, the surface of the cavity waterproof cap positioning plate is provided with a cleaning cavity waterproof cap welding body, and an O-shaped ring is arranged between the cleaning cavity outer cavity waterproof table and the cleaning cavity waterproof cap welding body.
Compared with the prior art, the utility model has the following beneficial effects:
according to the utility model, four supporting rods are detached and replaced into the existing supporting ring, four through holes are uniformly drilled on the supporting ring according to 90 degrees, four connecting screws are penetrated in the middle, the lower parts of the screws are fixed on a cleaning cavity mounting substrate, the upper parts of the screws are locked and fixed by four locking nuts, in addition, annular grooves are respectively machined on a main shaft motor assembly base and the cleaning cavity mounting substrate and form positioning with the upper annular surface and the lower annular surface of the supporting ring, the coaxiality and the parallelism requirements of a lower servo motor and an upper main shaft motor assembly can be fully ensured, because the supporting ring is a part, the rigidity is greatly enhanced, the stability is greatly increased when the servo motor rotates at a high speed, the inner side of a cleaning waterproof cap mounting flange opening and the outer side of a cleaning cavity waterproof table opening are provided with O-shaped rings by the grooves, and the O-shaped rings have the advantages of high elasticity, good sealing effect, wear resistance, convenience in purchase, low cost, easiness in use and the like.
Drawings
FIG. 1 is a schematic cross-sectional view of the present utility model;
fig. 2 is a schematic top view of the present utility model.
In the figure: 1. cleaning a cavity splash guard connecting plate; 2. cleaning a cavity splash guard baffle; 3. the cavity waterproof cap positioning plate; 4. cleaning a welding body of the cavity splash guard; 5. cleaning a cavity splash guard baffle; 6. a motor spindle assembly; 7. stripping the upper end cover of the cavity sealing ring; 8. cleaning a cavity sealing ring welding body; 9. cleaning a waterproof cap welding body of the cavity; 10. cleaning the welding body of the outer cavity of the cavity; 11. cleaning a cavity exhaust pipe sleeve; 12. cleaning the cavity mounting substrate; 13. a servo motor; 14. cleaning the cavity sucker assembly; 15. an O-ring; 16. a cleaning cavity mounting support plate; 17. lifting cylinder module assembly; 18. a first gasket; 19. and a second gasket.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-2, the present utility model provides a technical solution: an improved structure of a cleaning cavity of a stripping machine, comprising: a cleaning cavity mounting substrate 12, a servo motor 13 is arranged at the lower part of the cleaning cavity mounting substrate 12, a motor main shaft assembly 6 is arranged at the power output end of the servo motor 13, a cleaning cavity sucker assembly 14 is arranged at the upper part of the motor main shaft assembly 6, a cleaning cavity outer cavity welding body 10 is arranged at the upper part of the cleaning cavity mounting substrate 12, a stripping cavity sealing ring upper end cover 7 is arranged at the upper part of the cleaning cavity outer cavity welding body 10), a cleaning cavity sealing ring welding body 8 and a stripping cavity sealing ring upper end cover 7 are arranged at the upper part of the cleaning cavity sealing ring welding body 8, a cleaning cavity splash guard welding body 4 is arranged in the cleaning cavity sealing ring welding body 8, a cleaning cavity splash guard connecting plate 1 is arranged at the upper part of the cleaning cavity splash guard welding body 4 and is fixedly connected between the cleaning cavity splash guard connecting plate 1 and the cleaning cavity splash guard welding body 4, a first baffle 2 and a second baffle 5 are arranged at the upper part of the cleaning cavity splash guard welding body 4, the side of the cleaning cavity splash guard connecting plate 1 is provided with a lifting cylinder module assembly 17, four supporting rods are detached and replaced into a current supporting ring, four through holes are uniformly drilled on the supporting ring according to 90 degrees, four connecting screws are penetrated in the middle, the lower parts of the screws are fixed on a cleaning cavity mounting substrate 12, the upper parts are locked and fixed by four locking nuts, in addition, annular grooves are respectively processed on a main shaft motor assembly base and the cleaning cavity mounting substrate 12 and form positioning with the upper annular surface and the lower annular surface of the supporting ring, the coaxiality and parallelism requirements of a lower servo motor 13 and an upper main shaft motor assembly can be fully ensured, because the supporting ring is a part, the rigidity is greatly enhanced, the stability is greatly increased when the servo motor 13 rotates at a high speed, an O-shaped ring is arranged in the groove near the inner side of a cleaning waterproof cap mounting flange opening and the outer side of a cleaning cavity waterproof table opening, the O-shaped ring has the advantages of large elasticity, good sealing effect, wear resistance, convenient purchase, low cost, durable use, easy replacement and the like, and also has the important advantage of not generating upward elasticity to the waterproof cap, so that the waterproof cap is positioned more stably.
Further improved, as shown in fig. 1: a cleaning chamber mounting support plate 16 is arranged between the cleaning chamber outer chamber welding body 10 and the cleaning chamber mounting substrate 12, and the cleaning chamber mounting stability is ensured by the arrangement.
Further improved, as shown in fig. 1: the joint of the cleaning cavity splash guard welding body 4 and the cleaning cavity sealing ring welding body 8 is respectively provided with a first sealing gasket 18 and a second sealing gasket 19, and the arrangement ensures the tightness.
Further improved, as shown in fig. 1: the lower part of the cleaning cavity sealing ring welding body 8 is provided with a cleaning cavity outer cavity welding body 10, and the surface of the cleaning cavity outer cavity welding body 10 is provided with a cleaning cavity exhaust pipe sleeve 11.
Further improved, as shown in fig. 1: the upper portion of motor spindle unit 6 is provided with waterproof cap locating plate 3 of cavity and the surface of waterproof cap locating plate 3 of cavity is provided with the waterproof cap welding body 9 of washing chamber, be provided with O type circle 15 between the waterproof platform of outer chamber of washing chamber and the waterproof cap welding body 9 of washing chamber, this kind of setting has guaranteed the leakproofness.
According to the utility model, four supporting rods are detached and replaced into the existing supporting ring, four through holes are uniformly drilled on the supporting ring according to 90 degrees, four connecting screws are penetrated in the middle, the lower parts of the screws are fixed on the cleaning cavity mounting substrate 12, the upper parts of the screws are locked and fixed by four locking nuts, in addition, annular grooves are respectively machined on the base of the spindle motor assembly and the cleaning cavity mounting substrate 12 and form positioning with the upper annular surface and the lower annular surface of the supporting ring, the coaxiality and the parallelism requirements of the lower servo motor 13 and the upper spindle motor assembly can be fully ensured, because the supporting ring is a part, the rigidity is greatly enhanced, the stability is greatly increased when the servo motor 13 rotates at a high speed, the O-shaped rings 15 are arranged in the grooves near the inner sides of the openings of the cleaning waterproof cap mounting flange and the outer cavity waterproof table, the O-shaped rings 15 have the advantages of high elasticity, good sealing effect, wear resistance, convenience in purchase, low cost, easiness in use and the like, and the important advantages of not producing upward elasticity for positioning the waterproof cap are realized, and the positioning is more stable.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (4)
1. An improved structure of a cleaning cavity of a stripping machine is characterized in that: comprising the following steps: the cleaning cavity mounting substrate (12), the lower part of cleaning cavity mounting substrate (12) is provided with servo motor (13) and servo motor (13) power take off end is provided with motor spindle unit (6), the upper portion of motor spindle unit (6) is provided with cleaning cavity sucking disc assembly (14), the upper portion of cleaning cavity mounting substrate (12) is provided with cleaning cavity outer chamber welding body (10), cleaning cavity outer chamber welding body (10) upper portion is provided with cleaning cavity sealing ring welding body (8) and cleaning cavity sealing ring welding body (8) upper portion is provided with peels cavity sealing ring upper end cover (7), the inside of cleaning cavity sealing ring welding body (8) is provided with cleaning cavity splash guard welding body (4), the upper portion of cleaning cavity splash guard welding body (4) is provided with cleaning cavity splash guard connecting plate (1) and cleaning fixedly connected between the cavity splash guard welding body (4), the upper portion of cleaning cavity splash guard welding body (4) is provided with first baffle (2) and second baffle (5), cleaning cavity sealing ring welding body (8) inside is provided with cleaning cavity splash guard connecting plate (1).
2. The improved structure of a stripper wash chamber of claim 1, wherein: a cleaning cavity installation supporting plate (16) is arranged between the cleaning cavity outer cavity welding body (10) and the cleaning cavity installation base plate (12).
3. The improved structure of a stripper wash chamber of claim 1, wherein: the joint of the cleaning cavity splash guard welding body (4) and the cleaning cavity sealing ring welding body (8) is respectively provided with a first sealing gasket (18) and a second sealing gasket (19).
4. The improved structure of a stripper wash chamber of claim 1, wherein: the lower part of the cleaning cavity sealing ring welding body (8) is provided with a cleaning cavity outer cavity welding body (10), and the surface of the cleaning cavity outer cavity welding body (10) is provided with a cleaning cavity exhaust pipe sleeve (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321193052.6U CN220072737U (en) | 2023-05-17 | 2023-05-17 | Improved structure of stripping machine cleaning cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321193052.6U CN220072737U (en) | 2023-05-17 | 2023-05-17 | Improved structure of stripping machine cleaning cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220072737U true CN220072737U (en) | 2023-11-24 |
Family
ID=88828709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321193052.6U Active CN220072737U (en) | 2023-05-17 | 2023-05-17 | Improved structure of stripping machine cleaning cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220072737U (en) |
-
2023
- 2023-05-17 CN CN202321193052.6U patent/CN220072737U/en active Active
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