CN220072645U - Semiconductor ultrasonic cleaner - Google Patents
Semiconductor ultrasonic cleaner Download PDFInfo
- Publication number
- CN220072645U CN220072645U CN202321682356.9U CN202321682356U CN220072645U CN 220072645 U CN220072645 U CN 220072645U CN 202321682356 U CN202321682356 U CN 202321682356U CN 220072645 U CN220072645 U CN 220072645U
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- liquid
- ultrasonic
- cleaning machine
- bin
- cleaning
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 29
- 239000007788 liquid Substances 0.000 claims abstract description 100
- 238000004140 cleaning Methods 0.000 claims abstract description 72
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 23
- 238000007789 sealing Methods 0.000 claims description 23
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims description 9
- 235000017491 Bambusa tulda Nutrition 0.000 claims description 9
- 241001330002 Bambuseae Species 0.000 claims description 9
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 9
- 239000011425 bamboo Substances 0.000 claims description 9
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- 230000009471 action Effects 0.000 abstract description 5
- 238000004064 recycling Methods 0.000 abstract description 4
- 239000002699 waste material Substances 0.000 abstract description 3
- 238000005406 washing Methods 0.000 description 29
- 230000000694 effects Effects 0.000 description 9
- 239000000243 solution Substances 0.000 description 6
- 125000004122 cyclic group Chemical group 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model discloses a semiconductor ultrasonic cleaner which comprises an ultrasonic cleaner body, wherein a cleaning bin is arranged at the top of the ultrasonic cleaner body, a bin cover is arranged at the top of the cleaning bin, and movable doors are arranged on two sides of the front surface of the ultrasonic cleaner body. According to the utility model, the control valve is arranged for controlling the opening and closing of the liquid discharge pipe, so that the cleaning liquid is conveniently led into the storage box through the liquid discharge pipe, the storage box is arranged for temporarily storing the cleaning liquid, the control panel is arranged for controlling the opening and closing of the liquid pump, the cleaning liquid in the storage box is pumped out under the action of the liquid pump and is conveyed upwards through the liquid guide pipe, and the cleaning liquid is led into the cleaning bin again, so that the purpose of recycling the cleaning liquid is achieved, and meanwhile, the problem that the cleaning liquid cannot be recycled after the semiconductor is cleaned by the conventional ultrasonic cleaner, and a large amount of waste of the cleaning liquid is caused is solved.
Description
Technical Field
The utility model relates to the technical field of ultrasonic cleaners, in particular to a semiconductor ultrasonic cleaner.
Background
The ultrasonic wave propagates in the liquid to make the liquid vibrate together with the cleaning tank at the ultrasonic frequency, and the liquid and the cleaning tank vibrate at their own natural frequency, which is the sound wave frequency, so that people hear the buzzing sound. With the continuous development of the cleaning industry, more and more industries and enterprises apply ultrasonic cleaners. Ultrasonic cleaners are used in the semiconductor industry to clean semiconductors.
With respect to the above and related art, the inventors believe that there are often the following drawbacks: after the semiconductor is cleaned, the conventional ultrasonic cleaner directly discharges the cleaning fluid, so that the cleaning fluid cannot be recycled, and a large amount of cleaning fluid is wasted; therefore, a semiconductor ultrasonic cleaner has been proposed to solve the above-mentioned problems.
Disclosure of Invention
The utility model aims to provide a semiconductor ultrasonic cleaner, which has the advantages of recycling cleaning liquid and avoiding serious waste of the cleaning liquid, and solves the problems that the conventional ultrasonic cleaner directly discharges the cleaning liquid after cleaning the semiconductor, so that the cleaning liquid cannot be recycled and a large amount of cleaning liquid is wasted.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a semiconductor ultrasonic cleaner, includes the ultrasonic cleaner body, the washing storehouse has been seted up at the top of ultrasonic cleaner body, and the top of washing storehouse is provided with the cang gai, the positive both sides of ultrasonic cleaner body all are provided with the dodge gate, the inboard fixed mounting of ultrasonic cleaner body has the bin, the top intercommunication of bin has an internal thread section of thick bamboo, and the bottom intercommunication of washing storehouse has the fluid-discharge tube, the surface of fluid-discharge tube is provided with the control valve, the bottom of fluid-discharge tube is provided with an external screw thread section of thick bamboo, the external screw thread section of thick bamboo is located the inboard of internal screw thread section of thick bamboo and with internal screw thread section of thick bamboo threaded connection, the left side fixed mounting of ultrasonic cleaner body inner chamber has the liquid pump, the input of liquid pump communicates with the left side of bin, the output intercommunication of liquid pump has the catheter, the other end of catheter is located the top of washing storehouse, the front of ultrasonic cleaner body is provided with the control panel, the output of control panel is connected with the input electricity of liquid pump.
The effects achieved by the components are as follows: through setting up the bin cover and being used for opening and closing the washhouse, and then be convenient for put into and take out the semiconductor, and when semiconductor washs, can prevent that the washing liquid from leaking, be used for controlling the opening and closing of fluid-discharge tube through setting up the control valve, and then conveniently pass through the inside of fluid-discharge tube leading-in bin with the washing liquid, be used for keeping in the washing liquid through setting up the bin, be used for controlling opening and closing of liquid pump through setting up the control panel, pump the inside washing liquid of bin under the effect of liquid pump, and upwards carry through the catheter, and then import the inside of wasing the bin with the washing liquid again, reach the purpose to washing liquid cyclic utilization.
Preferably, the bottom of bin just is located the inside fixed mounting of internal thread section of thick bamboo and has the brace table, and the top of brace table is provided with filter screen and active carbon plate respectively, the filter screen is located the top of active carbon plate.
The effects achieved by the components are as follows: through setting up filter screen and active carbon plate mutually supporting and be used for filtering the washing liquid, prevent the inside impurity cyclic utilization of washing liquid, lead to ultrasonic cleaner body not good to the semiconductor cleaning effect.
Preferably, the bottom of the liquid discharge pipe is communicated with a first corrugated pipe, a rotary joint is arranged at the bottom of the first corrugated pipe, and the bottom of the rotary joint is rotationally connected with the external thread cylinder.
The effects achieved by the components are as follows: the first corrugated pipe and the rotary joint are matched with each other to be used for mounting the external thread cylinder on the inner side of the internal thread cylinder or taking the external thread cylinder out of the internal thread cylinder, so that the external thread cylinder and the internal thread cylinder are conveniently communicated, the filter screen and the activated carbon plate are further convenient to replace, and the filtering performance of the filter screen and the activated carbon plate is guaranteed.
Preferably, a concave part is formed in the bottom of the external thread cylinder, a sealing ring is arranged in the concave part, and the bottom of the sealing ring is abutted to the bottom of the filter screen.
The effects achieved by the components are as follows: the sealing ring is used for increasing the tightness between the external thread cylinder and the filter screen, so that cleaning liquid is prevented from penetrating between the external thread cylinder and the internal thread cylinder, rust of the external thread cylinder and the internal thread cylinder is easy to cause, and inconvenience in replacement of the filter screen and the activated carbon plate is avoided.
Preferably, a guide plate is fixedly arranged on the right side of the inner cavity of the storage box, and the top of the guide plate is high on the right and low on the left.
The effects achieved by the components are as follows: through setting up the guide plate and be used for carrying out the water conservancy diversion to the inside washing liquid of bin for the left side flow of washing liquid to the bin is inside, and then the liquid pump of being convenient for pumps the inside washing liquid of bin, prevents that the inside washing liquid of bin from remaining more, leads to the unable cyclic utilization of some washing liquid.
Preferably, the other end of the liquid guide tube is communicated with a second corrugated tube, a sealing plug is arranged at the bottom of the second corrugated tube, an injection hole is formed in the left side of the top of the bin cover, and a sealing plug is arranged in the injection hole.
The effects achieved by the components are as follows: through setting up the inside that second bellows and sealed chock plug mutually support be convenient for pour into the washing storehouse into the washing liquid, prevent that the washing liquid from unrestrained, when needs pour into the washing storehouse with the washing liquid inside into, take out the sealing plug from the inside of filling hole earlier, with the inside of sealing chock plug stopper filling hole into, the second bellows is stretched the grow this moment, can prevent that the washing liquid from unrestrained.
Compared with the prior art, the utility model has the following beneficial effects:
according to the utility model, the bin cover is arranged for opening and closing the cleaning bin, so that the semiconductor is conveniently put in and taken out, in addition, the cleaning liquid can be prevented from leaking during semiconductor cleaning, the control valve is arranged for controlling the opening and closing of the liquid discharge pipe, so that the cleaning liquid can be conveniently led into the storage box through the liquid discharge pipe, the storage box is arranged for temporarily storing the cleaning liquid, the control plate is arranged for controlling the opening and closing of the liquid pump, the cleaning liquid in the storage box is pumped out under the action of the liquid pump, and is conveyed upwards through the liquid guide pipe, so that the cleaning liquid is led into the cleaning bin again, the purpose of recycling the cleaning liquid is achieved, and meanwhile, the problem that the cleaning liquid cannot be recycled after the semiconductor is cleaned, and a large amount of waste of the cleaning liquid is caused is solved.
Drawings
FIG. 1 is a perspective view of the structure of the present utility model;
FIG. 2 is a schematic view of the internal structure of the ultrasonic cleaner body according to the present utility model;
FIG. 3 is a schematic view of a drain pipe according to the present utility model;
FIG. 4 is a schematic view of the internal structure of the storage box according to the present utility model;
fig. 5 is a schematic view of a catheter according to the present utility model.
In the figure: 1. an ultrasonic cleaner body; 2. a control board; 3. a bin cover; 4. a movable door; 5. a storage tank; 6. a liquid pump; 7. a catheter; 8. a liquid discharge pipe; 9. a control valve; 10. a first bellows; 11. a rotary joint; 12. an external thread cylinder; 13. a seal ring; 14. an internal thread cylinder; 15. a filter screen; 16. an activated carbon plate; 17. a deflector; 18. a second bellows; 19. and a sealing plug.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-5, a semiconductor ultrasonic cleaner comprises an ultrasonic cleaner body 1, a cleaning bin is arranged at the top of the ultrasonic cleaner body 1, a bin cover 3 is arranged at the top of the cleaning bin, movable doors 4 are arranged on two sides of the front of the ultrasonic cleaner body 1, a storage box 5 is fixedly arranged on the inner side of the ultrasonic cleaner body 1, an internal thread cylinder 14 is communicated with the top of the storage box 5, a liquid discharge pipe 8 is communicated with the bottom of the cleaning bin, a control valve 9 is arranged on the surface of the liquid discharge pipe 8, an external thread cylinder 12 is arranged at the bottom of the liquid discharge pipe 8, the external thread cylinder 12 is arranged on the inner side of the internal thread cylinder 14 and is in threaded connection with the internal thread cylinder 14, a liquid pump 6 is fixedly arranged on the left side of an inner cavity of the ultrasonic cleaner body 1, the input end of the liquid pump 6 is communicated with the left side of the storage box 5, a liquid guide pipe 7 is communicated with the output end of the liquid pump 6, the other end of the liquid guide pipe 7 is arranged above the cleaning bin, a control board 2 is arranged on the front of the ultrasonic cleaner body 1, and the output end of the control board 2 is electrically connected with the input end of the liquid pump 6.
Specifically, the bottom of the storage box 5 and the inside that is located the internal thread section of thick bamboo 14 are fixedly installed with the brace table, and the top of brace table is provided with filter screen 15 and active carbon plate 16 respectively, and filter screen 15 is located the top of active carbon plate 16.
The filter screen 15 and the activated carbon plate 16 are mutually matched to filter the cleaning liquid, so that the impurity inside the cleaning liquid is prevented from being recycled, and the ultrasonic cleaner body 1 has poor cleaning effect on the semiconductor.
Specifically, the bottom of the liquid discharge pipe 8 is communicated with a first corrugated pipe 10, a rotary joint 11 is arranged at the bottom of the first corrugated pipe 10, and the bottom of the rotary joint 11 is rotationally connected with an external thread cylinder 12.
The first corrugated pipe 10 and the rotary joint 11 are matched with each other to be used for installing the external thread cylinder 12 on the inner side of the internal thread cylinder 14 or taking the external thread cylinder 12 out of the internal thread cylinder 14, so that the external thread cylinder 12 and the internal thread cylinder 14 are conveniently communicated, the filter screen 15 and the activated carbon plate 16 are further conveniently replaced, and the filtering performance of the filter screen 15 and the activated carbon plate 16 is ensured.
Specifically, a concave portion is formed in the bottom of the external thread cylinder 12, a sealing ring 13 is arranged in the concave portion, and the bottom of the sealing ring 13 is abutted to the bottom of the filter screen 15.
The sealing ring 13 is used for increasing the tightness between the external thread cylinder 12 and the filter screen 15, so as to prevent cleaning liquid from penetrating between the external thread cylinder 12 and the internal thread cylinder 14, and rust of the external thread cylinder 12 and the internal thread cylinder 14 is easy to cause, so that inconvenience in replacing the filter screen 15 and the activated carbon plate 16 is avoided.
Specifically, a guide plate 17 is fixedly installed on the right side of the inner cavity of the storage box 5, and the top of the guide plate 17 is high on the right and low on the left.
The guide plate 17 is used for guiding the cleaning solution in the storage tank 5, so that the cleaning solution flows to the left side in the storage tank 5, and then the liquid pump 6 is convenient for pumping the cleaning solution in the storage tank 5, so that the cleaning solution in the storage tank 5 is prevented from being more left, and part of the cleaning solution cannot be recycled.
Specifically, the other end of the catheter 7 is communicated with a second corrugated pipe 18, a sealing plug 19 is arranged at the bottom of the second corrugated pipe 18, an injection hole is formed in the left side of the top of the bin cover 3, and a sealing plug is arranged in the injection hole.
The second bellows 18 and the sealing plug 19 mutually support and are convenient for pour into the inside of washing storehouse into the washing liquid, prevent that the washing liquid from unrestrained, when needs pour into the washing storehouse inside into the washing liquid, take out the sealing plug from the inside of filling hole earlier, with the inside of filling hole is plugged into to the sealing plug 19, the second bellows 18 is stretched to become longer this moment, can prevent that the washing liquid from unrestrained.
When the cleaning machine is used, the bin cover 3 is opened, a semiconductor is placed in the cleaning bin, the bin cover 3 is closed again, the semiconductor in the cleaning bin is subjected to ultrasonic cleaning under the action of the ultrasonic cleaning machine body 1, after cleaning is completed, the bin cover 3 is opened, the semiconductor is taken out from the cleaning bin, the control valve 9 is opened, cleaning liquid in the cleaning bin flows out through the liquid discharge pipe 8 and is led into the storage box 5, the cleaning liquid is guided under the action of the guide plate 17, the cleaning liquid is converged at the left side in the storage box 5, when the cleaning liquid in the storage box 5 is required to be led into the cleaning bin for use, the sealing plug is firstly taken out, the second corrugated pipe 18 is pulled, the sealing plug 19 is plugged into the injection hole, the liquid pump 6 is started through the control plate 2, the cleaning liquid in the storage box 5 is pumped out under the action of the liquid pump 6, the cleaning liquid is led into the cleaning bin through the liquid guide pipe 7, the second corrugated pipe 18 and the sealing plug 19, and the purpose of recycling the cleaning liquid is achieved.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. Semiconductor ultrasonic cleaner, including ultrasonic cleaner body (1), its characterized in that: the ultrasonic cleaning machine comprises an ultrasonic cleaning machine body (1), wherein a cleaning bin is arranged at the top of the ultrasonic cleaning machine body (1), bin covers (3) are arranged at the top of the cleaning bin, movable doors (4) are arranged on two sides of the front face of the ultrasonic cleaning machine body (1), a storage box (5) is fixedly arranged on the inner side of the ultrasonic cleaning machine body (1), an inner thread cylinder (14) is communicated with the top of the storage box (5), a liquid drain pipe (8) is communicated with the bottom of the cleaning bin, a control valve (9) is arranged on the surface of the liquid drain pipe (8), an outer thread cylinder (12) is arranged at the bottom of the liquid drain pipe (8), the outer thread cylinder (12) is located inside the inner thread cylinder (14) and is in threaded connection with the inner thread cylinder (14), a liquid pump (6) is fixedly arranged on the left side of an inner cavity of the ultrasonic cleaning machine body (1), a liquid guide pipe (7) is communicated with the left side of the storage box (5), the other end of the liquid guide pipe (7) is communicated with the output end of the liquid pump (6), and the other end of the liquid guide pipe (7) is located above the cleaning machine body, and is connected with the output end of the ultrasonic cleaning machine (1).
2. The ultrasonic semiconductor cleaning machine according to claim 1, wherein: the bottom of bin (5) just is located the inside fixed mounting of internal thread section of thick bamboo (14) and has a supporting bench, and the top of supporting bench is provided with filter screen (15) and active carbon plate (16) respectively, filter screen (15) are located the top of active carbon plate (16).
3. The ultrasonic semiconductor cleaning machine according to claim 1, wherein: the bottom of fluid-discharge tube (8) is linked together and is had first bellows (10), the bottom of first bellows (10) is provided with rotary joint (11), the bottom and the external screw thread section of thick bamboo (12) swivelling joint (11).
4. The ultrasonic semiconductor cleaning machine according to claim 1, wherein: the bottom of the external thread cylinder (12) is provided with a concave part, a sealing ring (13) is arranged in the concave part, and the bottom of the sealing ring (13) is abutted with the bottom of the filter screen (15).
5. The ultrasonic semiconductor cleaning machine according to claim 1, wherein: the right side of the inner cavity of the storage box (5) is fixedly provided with a guide plate (17), and the top of the guide plate (17) is high right and low left.
6. The ultrasonic semiconductor cleaning machine according to claim 1, wherein: the other end of the liquid guide pipe (7) is communicated with a second corrugated pipe (18), a sealing plug head (19) is arranged at the bottom of the second corrugated pipe (18), an injection hole is formed in the left side of the top of the bin cover (3), and a sealing plug is arranged in the injection hole.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202321682356.9U CN220072645U (en) | 2023-06-29 | 2023-06-29 | Semiconductor ultrasonic cleaner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202321682356.9U CN220072645U (en) | 2023-06-29 | 2023-06-29 | Semiconductor ultrasonic cleaner |
Publications (1)
Publication Number | Publication Date |
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CN220072645U true CN220072645U (en) | 2023-11-24 |
Family
ID=88829414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202321682356.9U Active CN220072645U (en) | 2023-06-29 | 2023-06-29 | Semiconductor ultrasonic cleaner |
Country Status (1)
Country | Link |
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CN (1) | CN220072645U (en) |
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2023
- 2023-06-29 CN CN202321682356.9U patent/CN220072645U/en active Active
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