CN220050365U - Vacuum welding furnace function pipeline system - Google Patents

Vacuum welding furnace function pipeline system Download PDF

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Publication number
CN220050365U
CN220050365U CN202321551592.7U CN202321551592U CN220050365U CN 220050365 U CN220050365 U CN 220050365U CN 202321551592 U CN202321551592 U CN 202321551592U CN 220050365 U CN220050365 U CN 220050365U
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air source
mixed gas
communicated
protection air
source
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CN202321551592.7U
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李�杰
姜季均
石秀斌
高硕�
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Cowell Technology Co ltd
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Cowell Technology Co ltd
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Abstract

The utility model discloses a functional pipeline system of a vacuum welding furnace, wherein a mounting plate, a pressure air source introducing integrated functional unit, a reduction mixed air source introducing integrated functional unit and a protection air source introducing unit are all mounted on the mounting plate; the pressure air source is introduced into the integrated functional unit to supply the pressure air source, the reduction mixed air source is introduced into the integrated functional unit to supply the reduction mixed air source, and the protection air source is introduced into the unit to supply the protection air source. The utility model is integrated on the mounting plate by leading the pressure air source into the integrated functional unit, leading the reduction mixed air source into the integrated functional unit and leading the protection air source into the unit; the pressure air source is introduced into the integrated functional unit to integrally control the input of the pressure air source of the vacuum welding furnace, the reduction mixed air source is introduced into the integrated functional unit to integrally control the input of the reduction mixed air source of the vacuum welding furnace, the protection air source is introduced into the integrated functional unit to integrally control the input of the protection air of the vacuum welding furnace, the production reliability of equipment is realized, and the final welding quality is ensured.

Description

Vacuum welding furnace function pipeline system
Technical Field
The utility model relates to the technical field of semiconductor welding, in particular to a functional pipeline system of a vacuum welding furnace.
Background
The vacuum welding furnace is used as a high-end process welding furnace and can cope with various complex welding environments. Compared with the traditional chain type furnace, the vacuum welding furnace has the advantages that the vacuum welding furnace is close to a vacuum environment, the welding cavity rate is reduced, meanwhile, the oxidation degree of solder is reduced due to the existence of nitrogen atmosphere, reducing gas can be introduced into the middle process in the vacuum welding furnace, metal can be further purified, and the solder paste or the soldering lug can be liquefied conveniently.
The vacuum welding furnace is used as a high-end process welding furnace and is also an automatic device, an air source is needed when some mechanism actions are realized, the inside of a cavity of the vacuum welding furnace is also needed in an anaerobic environment, and some reducing air is also needed for protecting welding quality, so that a vacuum unit functional pipeline system integrating the comprehensive functions of a power air source, protective air and reducing air is needed, and the system is also needed to have pipeline designs with corresponding functions of pressure monitoring, flow monitoring and the like for safety and stability. The existing demands can be met by the existing and immature vacuum pipeline unit systems in the market, so that an integrated vacuum unit functional pipeline system is needed.
Disclosure of Invention
The technical problems to be solved by the utility model are as follows: the problems of immature design of integrated functional pipelines for supplying and detecting a pressure air source, a protection air source and a reduction air source of a vacuum welding furnace are solved, and welding quality is unstable.
In order to solve the technical problems, the utility model provides the following technical scheme:
a functional pipeline system of a vacuum welding furnace comprises a mounting plate, a pressure air source introducing integrated functional unit, a reduction mixed air source introducing integrated functional unit and a protection air source introducing unit;
the mounting plate, the pressure air source introducing integrated functional unit, the reduction mixed air source introducing integrated functional unit and the protection air source introducing unit are all arranged on the mounting plate;
the pressure air source is introduced into the integrated functional unit to supply the pressure air source, the reduction mixed air source is introduced into the integrated functional unit to supply the reduction mixed air source, and the protection air source is introduced into the unit to supply the protection air source.
The advantages are that: the utility model is integrated on the mounting plate by leading the pressure air source into the integrated functional unit, leading the reduction mixed air source into the integrated functional unit and leading the protection air source into the unit; the pressure air source is introduced into the integrated functional unit to integrally control the input of the pressure air source of the vacuum welding furnace, the reduction mixed air source is introduced into the integrated functional unit to integrally control the input of the reduction mixed air source of the vacuum welding furnace, the protection air source is introduced into the integrated functional unit to integrally control the input of the protection air of the vacuum welding furnace, the production reliability of equipment is realized, and the final welding quality is ensured.
Preferably, the functional pipeline system further comprises an output port A, an output port B and an output port C;
the output port A, the output port B and the output port C are positioned on the mounting plate;
the output port A can be communicated with the input end of the vacuum welding furnace; the output port B can be communicated with a heating cavity of the vacuum welding furnace; the output port C can be communicated with a preheating cavity of the vacuum welding furnace.
Preferably, the pressure air source introducing integrated functional unit comprises a pressure air source direct-connection end, a pressure air source pressure gauge, a pressure air source electromagnetic valve and an air source output end;
the input end of the pressure air source direct connection end can be communicated with the pressure air source, and the output end of the pressure air source direct connection end is communicated with the air source output end after passing through the pressure air source pressure gauge and the pressure air source electromagnetic valve respectively.
Preferably, the pressurized air source is compressed air.
Preferably, the reducing mixed gas source introducing integrated functional unit comprises a reducing mixed gas source direct connection end, a reducing mixed gas source pressure gauge, a first reducing mixed gas source electromagnetic valve, a reducing mixed gas source manual pressure regulating valve, a second reducing mixed gas source electromagnetic valve, a reducing mixed gas source flowmeter, a third reducing mixed gas source electromagnetic valve and a fourth reducing mixed gas source electromagnetic valve;
the input end of the direct connection end of the reducing mixed gas source can be communicated with the reducing mixed gas source, and the output end of the direct connection end of the reducing mixed gas source is communicated with one end of the reducing substance tank body after sequentially passing through a reducing mixed gas source pressure gauge, a first reducing mixed gas source electromagnetic valve and a reducing mixed gas source manual pressure regulating valve; the other end of the reducing substance tank body is communicated with one end of a reducing mixed gas source flowmeter after passing through a second reducing mixed gas source electromagnetic valve;
the other end of the reducing mixed air source flowmeter is communicated with the output port C after passing through a third reducing mixed air source electromagnetic valve, and the other end of the reducing mixed air source flowmeter is communicated with the output port B through a fourth reducing mixed air source electromagnetic valve.
Preferably, the reduction mixed gas source adopts nitrogen and formic acid mixed gas.
Preferably, the protection air source introducing unit comprises a protection air source direct connection end, a protection air source pressure gauge, a first protection air source electromagnetic valve, a second protection air source electromagnetic valve, a first protection air source flowmeter, a second protection air source flowmeter and a third protection air source flowmeter;
the input end of the protection air source direct connection end is communicated with the protection air source, and the output end is communicated with one end of the protection air source pressure gauge;
one end of the first protection air source electromagnetic valve is communicated with the other end of the protection air source pressure gauge, and the other end of the first protection air source electromagnetic valve is communicated with the output port C after passing through the first protection air source flow meter;
one end of the second protection air source electromagnetic valve is communicated with the other end of the protection air source pressure gauge, and the other end of the second protection air source electromagnetic valve is communicated with the output port B after passing through the second protection air source flowmeter;
one end of the third protection air source flowmeter is communicated with the other end of the protection air source pressure gauge, and the other end of the third protection air source flowmeter is communicated with the output port A.
Preferably, the protection gas source adopts nitrogen.
Compared with the prior art, the utility model has the beneficial effects that: according to the utility model, through the integrated design of the functional pipeline layout of the vacuum unit, the real-time accurate control of input on-off of the input pressure feedback of the compressed air by the vacuum welding furnace is realized, the accurate process requirements of the input pressure control, the flow control and the electric control on-off of the nitrogen entering three different cavities by the vacuum welding furnace are realized, the requirements of welding quality process parameters under different pressures and flow conditions of multi-specification products are met, the production reliability of the same equipment of the multi-product is realized, the realization of the pipeline function which is controllable, adjustable and monitorable by the input of the formic acid reducing gas is realized integrally, and the welding quality of the product is ensured.
Drawings
FIG. 1 is a top view of an embodiment of the present utility model;
FIG. 2 is a schematic diagram of the overall structure of an embodiment of the present utility model;
FIG. 3 is a left side view of an embodiment of the present utility model;
FIG. 4 is a front view of an embodiment of the present utility model;
in the figure: 1. a mounting plate; 2. the pressure air source is led into the integrated functional unit; 21. the pressure air source is communicated with the head end; 22. a pressure gauge for pressure source; 23. a pressure air source electromagnetic valve; 24. an air source output end; 3. the reduction mixed gas source is led into the integrated functional unit; 31. reducing the direct connection end of the mixed gas source; 32. a reducing mixed gas source pressure gauge; 33. a first reducing mixed gas source electromagnetic valve; 34. manual pressure regulating valve of reducing mixed gas source; 35. a second reducing mixed gas source electromagnetic valve; 36. a reducing mixed gas source flowmeter; 37. a third reducing mixed gas source electromagnetic valve; 38. a fourth reducing mixed gas source electromagnetic valve; 4. the protection air source is led into the unit; 41. the protection air source is communicated with the head end; 42. a protective air source pressure gauge; 43. a first protection air source electromagnetic valve; 44. a second protection air source electromagnetic valve; 45. a first protected gas source flow meter; 46. a second protected gas source flow meter; 47. and a third protected air source flowmeter.
Detailed Description
In order to facilitate the understanding of the technical scheme of the present utility model by those skilled in the art, the technical scheme of the present utility model will be further described with reference to the accompanying drawings.
The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
Referring to fig. 1, the embodiment discloses a functional pipeline system of a vacuum welding furnace, which comprises a mounting plate 1, a pressure air source introducing integrated functional unit 2, a reduction mixed air source introducing integrated functional unit 3 and a protection air source introducing unit 4.
The pressure air source introducing integrated functional unit 2, the reduction mixed air source introducing integrated functional unit 3 and the protection air source introducing unit 4 are both arranged on the mounting plate 1; the mounting plate 1 is also provided with an output port A, an output port B and an output port C; the output port A can be communicated with the input end of the vacuum welding furnace; the output port B can be communicated with a heating cavity of the vacuum welding furnace; the output port C can be communicated with a preheating cavity of the vacuum welding furnace. In the embodiment, a pressure air source is introduced into the integrated functional unit 2, a reduction mixed air source is introduced into the integrated functional unit 3 and a protection air source is introduced into the unit 4 to be integrated on the mounting plate 1; the pressure air source is introduced into the integrated functional unit 2 to integrally control the input of the pressure air source of the vacuum welding furnace, the reduction mixed air source is introduced into the integrated functional unit 3 to integrally control the input of the reduction mixed air source of the vacuum welding furnace, the protection air source is introduced into the unit 4 to integrally control the input of the reduction gas of the vacuum welding furnace, the reliability of equipment production is realized, and the final welding quality is ensured.
Referring to fig. 1 to 4, the pressure air source introducing integrated functional unit 2 comprises a pressure air source direct connection end 21, a pressure air source pressure gauge 22, a pressure air source electromagnetic valve 23 and an air source output end 24; the input end of the pressure air source through joint end 21 can be communicated with a pressure air source, and the output end of the pressure air source through joint end 21 is communicated with an air source output end 24 after passing through a pressure air source pressure gauge 22 and a pressure air source electromagnetic valve 23 respectively.
In this embodiment, the pressurized air source is compressed air. It should be noted that the compressed air is only a specific example of the present embodiment, and it is not meant to represent that the compressed air source can only use the compressed air.
Compressed air is introduced into the integrated functional unit 2 through the pressure air source through-connection end 21, the compressed air is subjected to input pressure monitoring through the pressure air source pressure gauge 22, the pressure of the air source of the compressed air introduced into the integrated functional unit 2 is too high or too low, and the air source pressure of the compressed air is fed back to the monitoring system of the vacuum welding furnace through the pressure air source pressure gauge 22 through an electric signal, so that the air source supply stability of the pneumatic system of the vacuum welding furnace is ensured, and the operation stability and safety of equipment mechanisms are ensured. The on-off function of the air supply is controlled in real time through the pressure air supply electromagnetic valve 23, the running requirement and economy of equipment are guaranteed, and finally the air supply output end 24 is provided with the function layout.
The reducing mixed gas source introducing integrated functional unit 3 comprises a reducing mixed gas source direct connection end 31, a reducing mixed gas source pressure gauge 32, a first reducing mixed gas source electromagnetic valve 33, a reducing mixed gas source manual pressure regulating valve 34, a second reducing mixed gas source electromagnetic valve 35, a reducing mixed gas source flowmeter 36, a third reducing mixed gas source electromagnetic valve 37 and a fourth reducing mixed gas source electromagnetic valve 38; the input end of the reducing mixed gas source direct connection end 31 can be communicated with a reducing mixed gas source, and the output end of the reducing mixed gas source direct connection end is communicated with one end of a reducing substance tank (not shown) after sequentially passing through a reducing mixed gas source pressure gauge 32, a first reducing mixed gas source electromagnetic valve 33 and a reducing mixed gas source manual pressure regulating valve 34; the other end of the reducing substance tank body is communicated with one end of a reducing mixed gas source flowmeter 36 after passing through a second reducing mixed gas source electromagnetic valve 35; the other end of the reducing mixed gas source flowmeter 36 is communicated with the output port C after passing through a third reducing mixed gas source electromagnetic valve 37, and the other end of the reducing mixed gas source flowmeter 36 is also communicated with the output port B through a fourth reducing mixed gas source electromagnetic valve 38.
In this embodiment, the reducing gas mixture source is nitrogen and formic acid gas mixture. It should be noted that, nitrogen is only a specific example of the present embodiment, and it is not meant to be a reduction mixture gas source, but only a mixture of nitrogen and formic acid.
Nitrogen is input into the reduction mixed gas source introducing integrated functional unit 3 through the reduction mixed gas source direct connection end 31, the input pressure is monitored when the nitrogen passes through the reduction mixed gas source pressure gauge 32, the gas source pressure of the nitrogen introduced into the reduction mixed gas source introducing integrated functional unit 3 is too high or too low, and the reduction mixed gas source pressure gauge 32 feeds back to a vacuum welding furnace monitoring system through an electric signal, so that the stability of gas source supply of a pneumatic system of the vacuum welding furnace is ensured. The on-off function of the air source supply is controlled in real time through the first reducing mixed air source electromagnetic valve 33, so that the running requirement and economy of the equipment are ensured. Meanwhile, the manual pressure regulating valve 34 of the reduction mixed gas source is added to input different pressure values according to the required nitrogen, so that the nitrogen pressure process parameters required by welding products with different specifications in the vacuum welding furnace chamber are realized, and the production of multiple varieties of the same equipment is further ensured.
Then nitrogen enters the reducing substance tank body, formic acid gas with corresponding concentration is output through gas source pressure, the nitrogen and the formic acid gas are mixed and then are input, and the second reducing mixed gas source electromagnetic valve 35 provides the function of controlling on-off of the input mixed gas, so that the time of inputting the required mixed gas and the required state are ensured. And the flow rate of the mixed gas of formic acid and nitrogen is calculated by the reducing mixed gas source flowmeter 36, so that the characteristic function of adjustable process parameters in the preheating cavity and the heating cavity of the vacuum welding furnace is accurately and effectively ensured, and the requirement of welding products of multiple similar devices is met.
Finally, the direction of the mixed gas is selected through the on-off of the two branches, when the third reducing mixed gas source electromagnetic valve 37 is opened and the fourth reducing mixed gas source electromagnetic valve 38 is closed, the mixed gas is communicated with the preheating cavity of the vacuum welding furnace through the output port C after passing through the third reducing mixed gas source electromagnetic valve 37; when the third reducing mixed gas source electromagnetic valve 37 is closed and the fourth reducing mixed gas source electromagnetic valve 38 is opened, the mixed gas is communicated with the heating cavity of the vacuum welding furnace through the output port B after passing through the fourth reducing mixed gas source electromagnetic valve 38; thereby ensuring the technological parameter requirement of product welding more precisely.
The protection air source introducing unit 4 comprises a protection air source direct connection end 41, a protection air source pressure gauge 42, a first protection air source electromagnetic valve 43, a second protection air source electromagnetic valve 44, a first protection air source flowmeter 45, a second protection air source flowmeter 46 and a third protection air source flowmeter 47; the input end of the protecting air source direct connection end 41 is communicated with the protecting air source, and the output end is communicated with one end of the protecting air source pressure gauge 42; one end of the first protection air source electromagnetic valve 43 is communicated with the other end of the protection air source pressure gauge 42, and the other end of the first protection air source electromagnetic valve 43 is communicated with the output port C after passing through the first protection air source flowmeter 45; one end of the second protection air source electromagnetic valve 44 is communicated with the other end of the protection air source pressure gauge 42, and the other end of the second protection air source electromagnetic valve 44 is communicated with the output port B after passing through the second protection air source flowmeter 46; one end of the third protecting gas source flowmeter 47 is communicated with the other end of the protecting gas source pressure gauge 42, and the other end of the third protecting gas source flowmeter 47 is communicated with the output port A.
In this embodiment, the protection gas source is nitrogen. It should be noted that, the nitrogen is only a specific example of the present embodiment, and it does not represent that the protection gas source can only use nitrogen.
The nitrogen is input into the protection air source introducing unit 4 through the protection air source direct connection end 41, the input pressure monitoring is carried out when the nitrogen and formic acid mixed gas passes through the protection air source pressure gauge 42, the air source pressure of the nitrogen and formic acid mixed gas introduced into the protection air source introducing unit 4 is too high or too low, and the protection air source pressure gauge 42 feeds back to the vacuum welding furnace monitoring system through an electric signal, so that the air source supply stability of the pneumatic system of the vacuum welding furnace is ensured.
The nitrogen gas is through three branch road break-make selection trend that set up, and when first protection air supply solenoid valve 43 opened, nitrogen gas, formic acid gas mixture are through preheating chamber intercommunication of export port C with the vacuum welding stove behind first protection air supply solenoid valve 43 and first protection air supply flowmeter 45 in proper order, provide an anaerobic environment state. When the second protecting air source electromagnetic valve 44 is opened, the nitrogen and formic acid mixed gas sequentially passes through the second protecting air source electromagnetic valve 44 and the second protecting air source flowmeter 46 and then is communicated with the heating cavity of the vacuum welding furnace through the output port B, so that an anaerobic environment state is provided. When the first protection gas source electromagnetic valve 43 and the second protection gas source electromagnetic valve 44 are closed, the nitrogen is communicated with the input end of the vacuum welding furnace through the output port A after passing through the third protection gas source flowmeter 47 in sequence, and the nitrogen enters the cooling cavity to provide an anaerobic environment state and an airflow cooling function. The first, second and third source of protection gas flow meters 45, 46, 47 are capable of monitoring flow.
In the embodiment, a pressure air source is introduced into the integrated functional unit 2, a reduction mixed air source is introduced into the integrated functional unit 3 and a protection air source is introduced into the unit 4 to be integrated on the mounting plate 1; the pressure air source is introduced into the integrated functional unit 2 to integrally control the input of the pressure air source of the vacuum welding furnace, the reduction mixed air source is introduced into the integrated functional unit 3 to integrally control the input of the reduction mixed air source of the vacuum welding furnace, the protection air source is introduced into the unit 4 to integrally control the input of the protection air of the vacuum welding furnace, the reliability of equipment production is realized, and the final welding quality is ensured.
According to the embodiment, through the integrated design of the vacuum unit functional pipeline layout, the real-time accurate control input on and off of the vacuum welding furnace to the input pressure feedback of the compressed air is realized, the accurate process requirements of the vacuum welding furnace on the input pressure control, the flow control and the electric control on and off in three different cavities of nitrogen are realized, the requirements of welding quality process parameters under different pressures and flow conditions of multi-specification product requirements are met, the reliability of the same equipment production of the multi-product is realized, the realization of the pipeline function which is controllable, adjustable and monitorable by the input of formic acid reducing gas is realized integrally, and the welding quality of the product is ensured.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
The above-described embodiments merely represent embodiments of the utility model, the scope of the utility model is not limited to the above-described embodiments, and it is obvious to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model.

Claims (8)

1. A vacuum welding furnace function pipe system is characterized in that: the device comprises a mounting plate (1), a pressure air source introducing integrated functional unit (2), a reduction mixed air source introducing integrated functional unit (3) and a protection air source introducing unit (4);
the mounting plate (1), the pressure air source introducing integrated functional unit (2), the reduction mixed air source introducing integrated functional unit (3) and the protection air source introducing unit (4) are all mounted on the mounting plate (1);
the pressure air source is introduced into the integrated functional unit (2) to supply the pressure air source, the reduction mixed air source is introduced into the integrated functional unit (3) to supply the reduction mixed air source, and the protection air source is introduced into the protection air source unit (4) to supply the protection air source.
2. The vacuum welding furnace functional piping system according to claim 1, wherein: the functional pipeline system further comprises an output port A, an output port B and an output port C;
the output port A, the output port B and the output port C are positioned on the mounting plate (1);
the output port A can be communicated with the input end of the vacuum welding furnace; the output port B can be communicated with a heating cavity of the vacuum welding furnace; the output port C can be communicated with a preheating cavity of the vacuum welding furnace.
3. The vacuum welding furnace functional piping system according to claim 1, wherein: the pressure air source introducing integrated functional unit (2) comprises a pressure air source direct-connection end (21), a pressure air source pressure gauge (22), a pressure air source electromagnetic valve (23) and an air source output end (24);
the input end of the pressure air source direct connection end (21) can be communicated with a pressure air source, and the output end of the pressure air source direct connection end (21) is communicated with an air source output end (24) after passing through a pressure air source pressure gauge (22) and a pressure air source electromagnetic valve (23) respectively.
4. A vacuum welding furnace functional piping system according to claim 3, wherein: the pressure air source adopts compressed air.
5. The vacuum welding furnace functional piping system according to claim 1, wherein: the reducing mixed gas source introducing integrated functional unit (3) comprises a reducing mixed gas source direct connection end (31), a reducing mixed gas source pressure gauge (32), a first reducing mixed gas source electromagnetic valve (33), a reducing mixed gas source manual pressure regulating valve (34), a second reducing mixed gas source electromagnetic valve (35), a reducing mixed gas source flowmeter (36), a third reducing mixed gas source electromagnetic valve (37) and a fourth reducing mixed gas source electromagnetic valve (38);
the input end of the reducing mixed gas source direct connection end (31) can be communicated with a reducing mixed gas source, and the output end of the reducing mixed gas source direct connection end is communicated with one end of a reducing substance tank body after sequentially passing through a reducing mixed gas source pressure gauge (32), a first reducing mixed gas source electromagnetic valve (33) and a reducing mixed gas source manual pressure regulating valve (34); the other end of the reducing substance tank body is communicated with one end of a reducing mixed gas source flowmeter (36) after passing through a second reducing mixed gas source electromagnetic valve (35);
the other end of the reducing mixed gas source flowmeter (36) is communicated with the output port C after passing through a third reducing mixed gas source electromagnetic valve (37), and the other end of the reducing mixed gas source flowmeter (36) is also communicated with the output port B through a fourth reducing mixed gas source electromagnetic valve (38).
6. The vacuum welding furnace functional piping system according to claim 5, wherein: the reduction mixed gas source adopts nitrogen and formic acid mixed gas.
7. The vacuum welding furnace functional piping system according to claim 1, wherein: the protection air source introducing unit (4) comprises a protection air source direct connection end (41), a protection air source pressure gauge (42), a first protection air source electromagnetic valve (43), a second protection air source electromagnetic valve (44), a first protection air source flowmeter (45), a second protection air source flowmeter (46) and a third protection air source flowmeter (47);
the input end of the protection air source direct connection end (41) is communicated with a protection air source, and the output end of the protection air source direct connection end is communicated with one end of a protection air source pressure gauge (42);
one end of the first protection air source electromagnetic valve (43) is communicated with the other end of the protection air source pressure gauge (42), and the other end of the first protection air source electromagnetic valve (43) is communicated with the output port C after passing through the first protection air source flowmeter (45);
one end of the second protection air source electromagnetic valve (44) is communicated with the other end of the protection air source pressure gauge (42), and the other end of the second protection air source electromagnetic valve (44) is communicated with the output port B after passing through the second protection air source flowmeter (46);
one end of the third protection air source flowmeter (47) is communicated with the other end of the protection air source pressure gauge (42), and the other end of the third protection air source flowmeter (47) is communicated with the output port A.
8. The vacuum welding furnace functional piping system according to claim 7, wherein: the protection air source adopts nitrogen.
CN202321551592.7U 2023-06-15 2023-06-15 Vacuum welding furnace function pipeline system Active CN220050365U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202321551592.7U CN220050365U (en) 2023-06-15 2023-06-15 Vacuum welding furnace function pipeline system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202321551592.7U CN220050365U (en) 2023-06-15 2023-06-15 Vacuum welding furnace function pipeline system

Publications (1)

Publication Number Publication Date
CN220050365U true CN220050365U (en) 2023-11-21

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CN202321551592.7U Active CN220050365U (en) 2023-06-15 2023-06-15 Vacuum welding furnace function pipeline system

Country Status (1)

Country Link
CN (1) CN220050365U (en)

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