CN220049100U - Cleaning device for probe card - Google Patents

Cleaning device for probe card Download PDF

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Publication number
CN220049100U
CN220049100U CN202321559465.1U CN202321559465U CN220049100U CN 220049100 U CN220049100 U CN 220049100U CN 202321559465 U CN202321559465 U CN 202321559465U CN 220049100 U CN220049100 U CN 220049100U
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CN
China
Prior art keywords
probe card
fixing
cleaning
fixedly connected
rods
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Active
Application number
CN202321559465.1U
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Chinese (zh)
Inventor
刘大兵
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Wuxi Jijia Microelectronics Co ltd
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Wuxi Jijia Microelectronics Co ltd
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Priority to CN202321559465.1U priority Critical patent/CN220049100U/en
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Publication of CN220049100U publication Critical patent/CN220049100U/en
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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

The utility model discloses a cleaning device for a probe card, which relates to the technical field of probe card cleaning devices and comprises a cleaning table, wherein a fixing groove is fixedly connected to the upper surface of the cleaning table, a fixing mechanism is arranged in the fixing groove, the fixing mechanism comprises two fixing cylinders and a vertical cylinder, sliding rods are slidingly connected to the inner walls of the two fixing cylinders, and springs are fixedly connected to the inner walls of the two fixing cylinders. The utility model can enable staff to fix the probe card body conveniently through the cooperation arrangement among the cleaning table, the fixing groove and the fixing mechanism, thereby effectively avoiding the condition that the cleaning efficiency of the probe card body by the group of staff is reduced due to trouble when fixing the probe card body, and simultaneously avoiding the condition that the staff is easy to cause needle insertion damage when fixing the probe card, and further ensuring that the probe card body can be normally used after cleaning.

Description

Cleaning device for probe card
Technical Field
The utility model relates to the technical field of probe card cleaning devices, in particular to a cleaning device for a probe card.
Background
In the field of integrated circuit manufacturing, chip testing is an essential element of the chip manufacturing industry, and probe cards are precision tools necessary for chip testing, so that as the test is performed, part of pollutants such as chips and particles adhere to the needle wall or the needle tip of a probe after the probe card is inserted, and therefore the probe card needs to be cleaned by a cleaning device.
When people use cleaning device to clean the probe card, generally need fix the probe card, but in current technique, the staff is comparatively troublesome when fixing the probe card, not only leads to the staff to reduce the cleaning efficiency of probe card to the staff leads to the damage of inserting needle when fixing the probe card easily, makes the probe card can not normal use. To this end, we provide a cleaning device for a probe card that solves the above problems.
Disclosure of Invention
Technical problem to be solved
The utility model aims to make up the defects of the prior art and provides a cleaning device for a probe card.
Technical proposal
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a cleaning device of probe card, includes clean bench, the upper surface fixedly connected with fixed slot of clean bench, the inside of fixed slot is provided with fixed establishment, fixed establishment includes two fixed barrels and a vertical section of thick bamboo, two the equal sliding connection of inner wall of fixed barrel has the slide bar, the equal fixedly connected with spring of inner wall of two fixed barrels, two the equal fixedly connected with dead lever of surface of slide bar, two the equal fixedly connected with arc grip block of one end that the dead lever is close to each other, two the reservation groove has all been seted up to the inner wall of arc grip block, the inner wall sliding connection of vertical section of thick bamboo has the actuating lever, the both ends of actuating lever all articulate there is the transfer line.
Above-mentioned, slide bar and spring fixed connection, the transfer line articulates mutually with the slide bar, when the device uses, can provide an elasticity to the slide bar through the spring, along with the slide bar to the fixed section of thick bamboo in remove, can compress the spring, along with the rotation of transfer line, can drive the slide bar to the fixed section of thick bamboo in slide.
Above-mentioned, two the equal fixed connection of fixed cylinder is in the inner wall of fixed slot, the interior bottom wall of fixed slot is fixed in to a vertical section of thick bamboo fixed connection, and two fixed cylinders are fixed in the both sides inner wall of fixed slot respectively, can provide the supporting role to the fixed cylinder through the fixed slot.
In the above, the upper surface of the cleaning table is fixedly connected with the fixing plate, the inner wall of the fixing plate is provided with the servo motor, the fixing plate is U-shaped and provided with the reserved hole, the servo motor is arranged in the reserved hole formed in the fixing plate through the screw, the servo motor is in the prior art, and the model of the servo motor is not further limited in the utility model.
Above-mentioned, servo motor's output fixedly connected with cleaning plate, the surface bonding of cleaning plate has a set of clean hair, can drive the cleaning plate through starting servo motor and rotate, can realize the cleanness to the probe card under the effect of clean hair along with the rotation of cleaning plate.
Above-mentioned, the upper surface fixedly connected with equidistance arrangement's rack of clean bench, the inner wall of rack is provided with the probe card body, through setting up the rack, can make people place the probe card body that has cleaned and wait the probe card body of cleaning, and the probe card body belongs to prior art, and does not do further limit to the model of probe card body in the utility model.
Above-mentioned, the bottom surface fixedly connected with four supporting legs of clean bench, four the supporting legs is located four corners of clean bench bottom surface respectively, four the equal fixedly connected with non slipping spur in bottom of supporting legs can play the supporting role to clean bench through four supporting legs, through setting up the stability of assurance device in the use that the non slipping spur can be further.
The beneficial effects are that:
compared with the prior art, the cleaning device of the probe card has the following beneficial effects:
1. the utility model can ensure that staff can fix the probe card body conveniently through the cooperation arrangement among the cleaning table, the fixing groove and the fixing mechanism, thereby effectively avoiding the condition that the cleaning efficiency of the probe card body by the group of staff is reduced due to trouble when fixing the probe card body, and simultaneously avoiding the condition that the staff is easy to cause needle insertion damage when fixing the probe card, and further ensuring that the probe card body can be normally used after cleaning.
2. According to the utility model, through the cooperation arrangement among the driving rod, the transmission rod, the sliding rod, the fixing rod, the arc clamping plates and the springs, people can conveniently and rapidly fix the probe card body, the driving rod can be driven to rotate by pressing down the driving rod, the sliding rod is driven to slide into the fixing cylinder, the two arc clamping plates are driven to be mutually far away, then a worker only needs to place the probe card body between the two arc clamping plates, and the two arc clamping plates can be driven to reset through the elastic action of the springs, so that the fixing of the probe card body is realized.
Additional advantages, objects, and features of the utility model will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the utility model.
Drawings
FIG. 1 is a schematic perspective view of the front view of the present utility model;
FIG. 2 is a schematic perspective view of the present utility model from a side view;
FIG. 3 is a schematic perspective view of the fixing mechanism of the present utility model;
fig. 4 is a schematic view of a mounting structure of a servo motor and a cleaning plate in the present utility model.
In the figure:
1. a cleaning table; 2. a fixing groove;
3. a fixing mechanism; 301. a fixed cylinder; 302. a slide bar; 303. a spring; 304. a fixed rod; 305. an arc-shaped clamping plate; 306. a vertical tube; 307. a driving rod; 308. a transmission rod;
4. a fixing plate; 5. a servo motor; 6. a cleaning plate; 7. cleaning the soft hair;
8. a placing rack; 9. a probe card body; 10. and supporting the feet.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1 and 3, the present utility model provides a technical solution: the utility model provides a cleaning device of probe card, includes clean bench 1, and the upper surface fixedly connected with fixed slot 2 of clean bench 1, the inside of fixed slot 2 is provided with fixed establishment 3, and fixed establishment 3 includes two fixed barrels 301 and a vertical section of thick bamboo 306, and the equal sliding connection of inner wall of two fixed barrels 301 has slide bar 302, and the frictional resistance between slide bar 302 and the fixed barrel 301 is less.
The inner walls of the two fixing cylinders 301 are fixedly connected with springs 303, when the device is used for fixing the probe card, the springs 303 are in a compressed state, the outer surfaces of the two sliding rods 302 are fixedly connected with fixing rods 304, and the fixing rods 304 can be driven to move along with the movement of the sliding rods 302, so that the fixing rods 304 are L-shaped.
Two dead levers 304 are all fixedly connected with arc grip block 305 near one end each other, along with the removal of dead lever 304 can drive the removal of arc grip block 305, reserve groove has all been seted up to the inner wall of two arc grip blocks 305, and the thickness in reserve groove and the thickness looks adaptation of probe card are seted up on the arc grip block 305, when cleaning the probe card, must place the probe card between two arc grip blocks 305 and be located the reserve inslot of seting up.
The inner wall sliding connection of the vertical tube 306 has the actuating lever 307, and frictional resistance between the vertical tube 306 and the actuating lever 307 is less, and actuating lever 307's shape is T shape, and actuating lever 307's both ends all articulate has transfer line 308, along with the downward movement of actuating lever 307 can drive the rotation of transfer line 308.
The sliding rod 302 is fixedly connected with the spring 303, the transmission rod 308 is hinged with the sliding rod 302, when the device is used, the spring 303 can provide an elastic force for the sliding rod 302, the sliding rod 302 moves towards the fixed cylinder 301 along with the sliding rod 302, the spring 303 can be compressed, and the sliding rod 302 can be driven to slide towards the fixed cylinder 301 along with the rotation of the transmission rod 308.
The two fixing barrels 301 are fixedly connected to the inner wall of the fixing groove 2, the vertical barrel 306 is fixedly connected to the inner bottom wall of the fixing groove 2, the two fixing barrels 301 are respectively fixed to the inner walls of the two sides of the fixing groove 2, and the fixing barrels 301 can be supported through the fixing groove 2.
As shown in fig. 1 and 4, the upper surface of the cleaning table 1 is fixedly connected with a fixing plate 4, a servo motor 5 is installed on the inner wall of the fixing plate 4, the fixing plate 4 is in a U shape and provided with a reserved hole, the servo motor 5 is installed in the reserved hole formed in the fixing plate 4 through a screw, the servo motor 5 is in the prior art, and the model of the servo motor 5 is not further limited in the utility model.
The output end fixedly connected with cleaning plate 6 of servo motor 5, the surface bonding of cleaning plate 6 has a set of clean fur 7, can drive cleaning plate 6 rotation through starting servo motor 5, can realize the cleanness to the probe card under the effect of clean fur 7 along with the rotation of cleaning plate 6.
As shown in fig. 1 and 2, the upper surface of the cleaning table 1 is fixedly connected with a placing rack 8 which is arranged at equal distance, the inner wall of the placing rack 8 is provided with a probe card body 9, and by arranging the placing rack 8, people can place the cleaned probe card body 9 and the probe card body 9 to be cleaned, the probe card body 9 belongs to the prior art, and the model of the probe card body 9 is not further limited in the utility model.
The bottom surface fixedly connected with four supporting legs 10 of clean bench 1, four supporting legs 10 are located four corners of clean bench 1 bottom surface respectively, and the equal fixedly connected with non slipping spur in bottom of four supporting legs 10 can play the supporting role to clean bench 1 through four supporting legs 10, through setting up the stability of the device in the use that can be further guaranteed.
Working principle: when the device is required to be used for cleaning the probe card body 9, the worker only needs to press the driving rod 307 downwards, the driving rod 307 is pressed downwards, the driving rod 308 can be driven to rotate, the sliding rod 302 is driven to slide in the fixed cylinder 301, the spring 303 can be compressed along with the sliding of the sliding rod 302 in the fixed cylinder 301, at the moment, the spring 303 provides an elastic force for the sliding rod 302, and then the two arc clamping plates 305 are driven to be far away from each other, then the worker only needs to place the probe card body 9 between the two arc clamping plates 305, the two arc clamping plates 305 can be driven to reset through the elastic force of the spring 303, and further the worker can conveniently fix the probe card body 9, so that the situation that the cleaning efficiency of the probe card body 9 by the common group personnel is reduced due to trouble when the probe card body 9 is fixed is effectively avoided, the situation that the worker is easy to cause the needle pricking damage when the probe card is fixed is avoided, and the probe card body 9 can be used normally after cleaning.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. A cleaning device for a probe card, comprising a cleaning table (1), characterized in that: the cleaning table is characterized in that a fixing groove (2) is fixedly connected to the upper surface of the cleaning table (1), a fixing mechanism (3) is arranged in the fixing groove (2), the fixing mechanism (3) comprises two fixing barrels (301) and a vertical barrel (306), the two fixing barrels (301) are slidably connected with sliding rods (302) on the inner walls, springs (303) are fixedly connected to the inner walls of the two fixing barrels (301), fixing rods (304) are fixedly connected to the outer surfaces of the sliding rods (302), arc-shaped clamping plates (305) are fixedly connected to one ends, close to each other, of the fixing rods (304), reserved grooves are formed in the inner walls of the arc-shaped clamping plates (305), driving rods (307) are slidably connected to the inner walls of the vertical barrels (306), and transmission rods (308) are hinged to the two ends of the driving rods (307).
2. The probe card cleaning apparatus of claim 1, wherein: the sliding rod (302) is fixedly connected with the spring (303), and the transmission rod (308) is hinged with the sliding rod (302).
3. The probe card cleaning apparatus of claim 1, wherein: the two fixing cylinders (301) are fixedly connected to the inner wall of the fixing groove (2), and the vertical cylinder (306) is fixedly connected to the inner bottom wall of the fixing groove (2).
4. The probe card cleaning apparatus of claim 1, wherein: the upper surface of clean bench (1) is fixedly connected with fixed plate (4), servo motor (5) are installed to the inner wall of fixed plate (4).
5. The probe card cleaning apparatus of claim 4, wherein: the output end of the servo motor (5) is fixedly connected with a cleaning plate (6), and a group of cleaning fur (7) is adhered to the outer surface of the cleaning plate (6).
6. The probe card cleaning apparatus of claim 1, wherein: the cleaning table is characterized in that the upper surface of the cleaning table (1) is fixedly connected with a placing frame (8) which is arranged at equal distance, and the inner wall of the placing frame (8) is provided with a probe card body (9).
7. The probe card cleaning apparatus of claim 1, wherein: the cleaning table is characterized in that four supporting feet (10) are fixedly connected to the bottom surface of the cleaning table (1), the four supporting feet (10) are respectively located at four corners of the bottom surface of the cleaning table (1), and anti-slip blocks are fixedly connected to the bottom ends of the four supporting feet (10).
CN202321559465.1U 2023-06-19 2023-06-19 Cleaning device for probe card Active CN220049100U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202321559465.1U CN220049100U (en) 2023-06-19 2023-06-19 Cleaning device for probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202321559465.1U CN220049100U (en) 2023-06-19 2023-06-19 Cleaning device for probe card

Publications (1)

Publication Number Publication Date
CN220049100U true CN220049100U (en) 2023-11-21

Family

ID=88767282

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202321559465.1U Active CN220049100U (en) 2023-06-19 2023-06-19 Cleaning device for probe card

Country Status (1)

Country Link
CN (1) CN220049100U (en)

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