CN220047374U - Circulation device used in production process of semiconductor cleaning agent - Google Patents
Circulation device used in production process of semiconductor cleaning agent Download PDFInfo
- Publication number
- CN220047374U CN220047374U CN202321647262.8U CN202321647262U CN220047374U CN 220047374 U CN220047374 U CN 220047374U CN 202321647262 U CN202321647262 U CN 202321647262U CN 220047374 U CN220047374 U CN 220047374U
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- China
- Prior art keywords
- fixedly connected
- box
- production process
- filter screen
- cleaning agent
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 30
- 239000012459 cleaning agent Substances 0.000 title claims abstract description 28
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 239000007788 liquid Substances 0.000 claims abstract description 17
- 238000007790 scraping Methods 0.000 claims abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 238000001914 filtration Methods 0.000 abstract description 16
- 239000002699 waste material Substances 0.000 abstract description 10
- 239000012535 impurity Substances 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 5
- 125000004122 cyclic group Chemical group 0.000 abstract description 2
- 238000012545 processing Methods 0.000 description 5
- 230000003252 repetitive effect Effects 0.000 description 4
- 239000010808 liquid waste Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000012958 reprocessing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model discloses a circulating device used in the production process of a semiconductor cleaning agent, which comprises a box body, wherein a centrifugal machine is arranged at the lower end of a fixing frame, a filter screen is fixedly connected to the inner side of the box body, a scraping plate is arranged at the upper end of the filter screen, a repeated treatment box is arranged at the lower side of the filter screen, and a second rotating shaft is rotatably connected to the inner side of the repeated treatment box. Through the structure, two electric putter of scraper blade one side symmetry fixedly connected with, electric putter one side fixedly connected with mounting bracket, mounting bracket one side fixedly connected with box outer wall for it can drive the scraper blade and move about the filter screen upper end, makes it can strike off the impurity of filtering remaining on the filter screen and get into the collecting box inside and collect, repeatedly handles inboard bottom fixedly connected with filtration cone guipure, makes it be convenient for rotate and mixes the waste liquid after filtering the upper end and filter once more, makes its filter effect splendid, the cyclic utilization of being convenient for.
Description
Technical Field
The utility model relates to the technical field of circulation used in the production process of semiconductor cleaning agents, in particular to a circulation device used in the production process of semiconductor cleaning agents.
Background
When the semiconductor cleaning agent is produced, a lot of waste liquid is generated, and when the semiconductor cleaning agent is produced, a lot of photoresist stripping liquid waste liquid is generated, so that the photoresist stripping liquid waste liquid is directly discharged to waste, and the photoresist stripping liquid waste liquid can be recycled after being treated, so that a recycling device used in the production process of the semiconductor cleaning agent is required to be arranged.
When the circulating device used in the production process of the semiconductor cleaning agent is used, the inner side of the waste liquid contains a plurality of impurities, and when the waste liquid is filtered, the impurities which are generally filtered out always exist at the upper end of the filter screen structure, so that the filtering effect is influenced, the waste liquid is generally filtered by the filtering structure in the prior art, after the filtering structure is filtered, the inner side of the waste liquid also contains a plurality of impurities, and only part of the waste liquid can be reused.
Disclosure of Invention
The utility model aims to provide a circulating device used in the production process of a semiconductor cleaning agent, which is convenient for collecting part of impurities, and can perform rotary mixing filtration again, so that the filtration is more thorough, and the circulating device is convenient for recycling.
In order to achieve the above-mentioned purpose, provide a circulating device who uses in semiconductor cleaner production process, the power distribution box comprises a box body, box upper end fixedly connected with mount, the mount lower extreme is provided with centrifuge, be provided with the mounting panel on the centrifuge, bottom half fixedly connected with base, centrifuge's output and box inboard communicate with each other, box inboard fixedly connected with filter screen, the filter screen upper end is provided with the scraper blade, filter screen one side is provided with the collecting vat, the base downside is provided with the water pump, the filter screen downside is provided with the reprocessing case, reprocessing case outside fixedly connected with box inner wall, reprocessing case inboard rotates and is connected with the second pivot.
According to the circulating device used in the production process of the semiconductor cleaning agent, four support columns are uniformly and fixedly connected to the lower end of the base.
According to the circulating device used in the production process of the semiconductor cleaning agent, the lower end of the fixing frame is fixedly connected with the first motor, the lower end of the first motor is provided with the first rotating shaft, and the upper end of the first rotating shaft is fixedly connected with the output end of the first motor.
According to the circulating device used in the production process of the semiconductor cleaning agent, one side of the mounting plate is fixedly connected with a mounting piece, and two locking bolts are symmetrically connected with the mounting piece in a threaded manner.
According to the circulating device used in the production process of the semiconductor cleaning agent, two electric pushing rods are symmetrically and fixedly connected to one side of the scraping plate, one end of each electric pushing rod is fixedly connected with a mounting frame, and one side of each mounting frame is fixedly connected to the outer wall of the box body.
According to the circulating device used in the production process of the semiconductor cleaning agent, one side of the collecting tank is provided with the collecting box, one side of the collecting box is fixedly connected to the outer wall of the box body, and the collecting box is communicated with one side of the collecting tank.
According to the circulating device used in the production process of the semiconductor cleaning agent, the input end of the water pump is communicated with the inner side of the box body, and the output end of the water pump is fixedly connected with a liquid outlet pipe.
According to the circulating device used in the production process of the semiconductor cleaning agent, four rotary mixing inclined plate members are uniformly and fixedly connected to the outer side of the second rotating shaft, a filtering cone net ring is fixedly connected to the bottom of the inner side of the repeated treatment box, the filtering cone net ring and the rotary mixing inclined plate members are mutually attached, a second motor is arranged at the lower end of the second rotating shaft, the output end of the second motor is fixedly connected with the second rotating shaft, and the upper end of the second motor is fixedly connected to the bottom of the repeated treatment box.
The beneficial effects are that:
1. the filter screen is arranged on the inner side of the box body, the collecting tank is arranged on one side of the filter screen, the collecting tank is fixedly connected to the outer side of the box body, the scraping plate is arranged on the upper end of the filter screen, two electric push rods are symmetrically and fixedly connected to one side of the scraping plate, the mounting frame is fixedly connected to one side of the electric push rods, the mounting frame is fixedly connected to the outer wall of the box body, the scraping plate can be driven to move left and right on the upper end of the filter screen, and impurities left on the filter screen after filtration can be scraped out and enter the collecting tank to be collected.
2. The filter screen downside is provided with the repeat processing case, and repeat processing case lower extreme fixedly connected with second motor, second motor upper end are provided with the second pivot, and the even fixedly connected with in the second pivot outside rotates and mixes the inclined plane spare, and repeat processing case inboard bottom fixedly connected with filters cone guipure for it is convenient for rotate and mix the waste liquid after filtering the upper end and carry out the secondary filtration, makes its filter effect splendid, the cyclic utilization of being convenient for.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
The utility model is further described below with reference to the drawings and examples;
FIG. 1 is a perspective view of a circulation device used in the production process of a semiconductor cleaning agent according to the present utility model;
FIG. 2 is a schematic view of the inside of a repetitive treatment tank inside the tank of a circulating apparatus used in the production process of a semiconductor cleaning agent according to the present utility model;
FIG. 3 is a schematic diagram of a filter screen on the inner side of a tank of a circulating device used in the production process of a semiconductor cleaning agent;
fig. 4 is a schematic structural diagram of fig. 1 a according to the present utility model.
Legend description:
1. a case; 2. a base; 3. a support column; 4. a water pump; 5. a liquid outlet pipe; 6. a fixing frame; 7. a locking bolt; 8. a first motor; 9. a first rotating shaft; 10. a centrifuge; 11. a mounting plate; 12. a mounting member; 13. a filter screen; 14. a collection tank; 15. an electric push rod; 16. a scraper; 17. a mounting frame; 18. a collection box; 19. a second motor; 20. a second rotating shaft; 21. a filter cone mesh; 22. rotating the mixing ramp member; 23. the treatment tank is repeated.
Detailed Description
Reference will now be made in detail to the present embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present utility model, but not to limit the scope of the present utility model.
Referring to fig. 1-4, a circulation device used in a semiconductor cleaning agent production process according to an embodiment of the utility model comprises a box body 1, wherein a fixing frame 6 is fixedly connected to the upper end of the box body 1, a centrifugal machine 10 is arranged at the lower end of the fixing frame 6, the centrifugal machine 10 can separate part of liquid and impurities, the impurities are sprayed out from the other side of the device, a mounting plate 11 is arranged on the centrifugal machine 10, a base 2 is fixedly connected to the bottom of the box body 1, the output end of the centrifugal machine 10 is communicated with the inner side of the box body 1, a filter screen 13 is fixedly connected to the inner side of the box body 1, a scraping plate 16 is arranged at the upper end of the filter screen 13, a collecting groove 14 is arranged at one side of the filter screen 13, a water pump 4 is arranged at the lower side of the base 2, a repeated treatment box 23 is arranged at the lower side of the filter screen 13, the outer side of the repeated treatment box 23 is fixedly connected to the inner wall of the box body 1, and a second rotating shaft 20 is rotatably connected to the inner side of the repeated treatment box 23.
Four support columns 3 are uniformly and fixedly connected to the lower end of the base 2, and the support columns 3 can support the device.
The fixed frame 6 lower extreme fixedly connected with first motor 8, first motor 8 can drive lower extreme structure and rotate, and first motor 8 lower extreme is provided with first pivot 9, and first pivot 9 upper end and first motor 8's output fixed connection.
One side of the mounting plate 11 is fixedly connected with a mounting piece 12, two locking bolts 7 are symmetrically connected with the mounting piece 12 in a threaded mode, and the locking bolts 7 are used for fixing the mounting piece 12.
Two electric push rods 15 are symmetrically and fixedly connected to one side of the scraping plate 16, the electric push rods 15 are in a structure in the prior art and provide power through an internal motor structure, one end of each electric push rod 15 is fixedly connected with a mounting frame 17, and one side of each mounting frame 17 is fixedly connected to the outer wall of the box body 1.
A collecting box 18 is arranged on one side of the collecting tank 14, one side of the collecting box 18 is fixedly connected to the outer wall of the box body 1, and the collecting box 18 is communicated with one side of the collecting tank 14.
The input end of the water pump 4 is communicated with the inner side of the box body 1, and the output end of the water pump 4 is fixedly connected with a liquid outlet pipe 5.
The even fixedly connected with of second pivot 20 outside rotates and mixes inclined plate piece 22, and the inboard bottom fixedly connected with of repeat processing case 23 filters cone guipure 21, filters cone guipure 21 and rotates and mix inclined plate piece 22 laminating each other, and second pivot 20 lower extreme is provided with second motor 19, and second motor 19's output and second pivot 20 fixed connection, second motor 19 upper end fixed connection in repeat processing case 23 bottom.
Working principle: the device is installed, open mounting panel 11 and add waste liquid from this to the inside centrifugation that carries out of device, the box 1 inboard is provided with filter screen 13, filter screen 13 one side is provided with collecting vat 14, collecting vat 14 one side is provided with collecting vat 18, collecting vat 18 fixedly connected with box 1 outside, filter screen 13 upper end is provided with scraper blade 16, two electric putter 15 of scraper blade 16 one side symmetry fixedly connected with, electric putter 15 one side fixedly connected with mounting bracket 17, mounting bracket 17 one side fixedly connected with box 1 outer wall, make it drive scraper blade 16 and carry out the left and right sides removal at filter screen 13 upper end, make it scrape out entering collecting vat 18 inside to filter impurities that filter remains on filter screen 13, filter screen 13 downside is provided with the repetitive treatment case 23, repetitive treatment case 23 lower extreme fixedly connected with second motor 19, the second motor 19 upper end is provided with second pivot 20, the even fixedly connected with of second pivot 20 outside four rotation mix the inclined plate piece 22, repetitive treatment case 23 inboard bottom fixedly connected with filter cone guipure 21, make it be convenient for rotate and mix and carry out the filtration effect once more after the upper end filtration, make it convenient for use the filtration effect.
The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.
Claims (8)
1. The utility model provides a circulating device who uses in semiconductor cleaner production process, includes box (1), its characterized in that: the utility model discloses a centrifugal machine, including box (1), fixed frame (6) lower extreme is provided with centrifuge (10), be provided with mounting panel (11) on centrifuge (10), box (1) bottom fixedly connected with base (2), the output of centrifuge (10) communicates with each other with box (1) inboard, box (1) inboard fixedly connected with filter screen (13), filter screen (13) upper end is provided with scraper blade (16), filter screen (13) one side is provided with collecting vat (14), base (2) downside is provided with water pump (4), filter screen (13) downside is provided with repeatedly handling case (23), repeatedly handling case (23) outside fixedly connected with box (1) inner wall, repeatedly handling case (23) inboard rotation is connected with second pivot (20).
2. The circulating device used in the production process of the semiconductor cleaning agent according to claim 1, wherein four support columns (3) are uniformly and fixedly connected to the lower end of the base (2).
3. The circulating device used in the production process of the semiconductor cleaning agent according to claim 1, wherein the lower end of the fixing frame (6) is fixedly connected with a first motor (8), the lower end of the first motor (8) is provided with a first rotating shaft (9), and the upper end of the first rotating shaft (9) is fixedly connected with the output end of the first motor (8).
4. The circulating device used in the production process of the semiconductor cleaning agent according to claim 1, wherein a mounting piece (12) is fixedly connected to one side of the mounting plate (11), and two locking bolts (7) are symmetrically connected to the mounting piece (12) in a threaded manner.
5. The circulating device used in the production process of the semiconductor cleaning agent according to claim 1, wherein two electric push rods (15) are symmetrically and fixedly connected to one side of the scraping plate (16), one end of each electric push rod (15) is fixedly connected with a mounting frame (17), and one side of each mounting frame (17) is fixedly connected to the outer wall of the box body (1).
6. The circulating device used in the production process of the semiconductor cleaning agent according to claim 1, wherein a collecting box (18) is arranged on one side of the collecting tank (14), one side of the collecting box (18) is fixedly connected to the outer wall of the box body (1), and the collecting box (18) is communicated with one side of the collecting tank (14).
7. The circulating device used in the production process of the semiconductor cleaning agent according to claim 1, wherein the input end of the water pump (4) is communicated with the inner side of the box body (1), and the output end of the water pump (4) is fixedly connected with a liquid outlet pipe (5).
8. The circulating device used in the production process of the semiconductor cleaning agent according to claim 1, wherein four rotary mixing inclined plate members (22) are uniformly and fixedly connected to the outer side of the second rotating shaft (20), a filter cone net ring (21) is fixedly connected to the bottom of the inner side of the repeated treatment box (23), the filter cone net ring (21) and the rotary mixing inclined plate members (22) are mutually attached, a second motor (19) is arranged at the lower end of the second rotating shaft (20), the output end of the second motor (19) is fixedly connected with the second rotating shaft (20), and the upper end of the second motor (19) is fixedly connected to the bottom of the repeated treatment box (23).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321647262.8U CN220047374U (en) | 2023-06-27 | 2023-06-27 | Circulation device used in production process of semiconductor cleaning agent |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321647262.8U CN220047374U (en) | 2023-06-27 | 2023-06-27 | Circulation device used in production process of semiconductor cleaning agent |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220047374U true CN220047374U (en) | 2023-11-21 |
Family
ID=88759755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321647262.8U Active CN220047374U (en) | 2023-06-27 | 2023-06-27 | Circulation device used in production process of semiconductor cleaning agent |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220047374U (en) |
-
2023
- 2023-06-27 CN CN202321647262.8U patent/CN220047374U/en active Active
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| GR01 | Patent grant |