CN220047159U - Bubble removal cavity temperature sensing module - Google Patents
Bubble removal cavity temperature sensing module Download PDFInfo
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- CN220047159U CN220047159U CN202321534725.XU CN202321534725U CN220047159U CN 220047159 U CN220047159 U CN 220047159U CN 202321534725 U CN202321534725 U CN 202321534725U CN 220047159 U CN220047159 U CN 220047159U
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- 238000009434 installation Methods 0.000 claims abstract description 58
- 238000007789 sealing Methods 0.000 claims description 67
- 230000000694 effects Effects 0.000 abstract description 6
- 238000009529 body temperature measurement Methods 0.000 abstract description 5
- 239000003292 glue Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
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Abstract
The utility model discloses a defoaming cavity temperature sensing module which comprises a mounting rod and a temperature sensing wire mounting part arranged on the mounting rod, wherein the mounting rod is arranged on a cavity wall, the temperature sensing wire mounting part is detachably arranged on the mounting rod, the temperature sensing wire is arranged in the temperature sensing wire mounting part, and the angle, the number and the length of the temperature sensing wire mounting part relative to the mounting rod are adjustable. The advantage utilizes the effect that sets up the trompil quantity is played to many temperature sensing lines in same installation pole, has also realized the arranging of many temperature sensing lines when reducing the work load and has reduced cavity gas leakage risk, also can adjust the angle and the length of temperature sensing line in the installation pole through temperature sensing line installation department when setting up angle, quantity and the installation of adjustable temperature sensing line installation department in the installation pole temperature sensing line installation of being convenient for, has reached only to set up a hole, and temperature sensing line many places distributes, and even temperature measurement's effect has also guaranteed temperature measurement's accuracy when guaranteeing the leakproofness.
Description
Technical Field
The utility model particularly relates to a defoaming cavity temperature sensing module.
Background
In the manufacturing process of the semiconductor industry, a technology is needed to coat or spray glue on a circuit board, but bubbles are easy to occur in a glue layer of the glue to influence the quality of a product, so that bubbles in the glue need to be removed to ensure the quality of the product, a bubble removing technology and bubble removing equipment are needed, the principle of the bubble removing equipment is mainly focused on controlling the pressure and the temperature, the temperature in a cavity needs to be regulated in the process of removing bubbles, the material curing stage is often carried out at a higher temperature, and good temperature uniformity in the cavity needs to be ensured to ensure the efficient implementation of the manufacturing process; therefore, the temperature in the cavity needs to be accurately controlled, and when the temperature in the cavity is detected, the temperature needs to be measured at different positions in the cavity at the same time, so that the reliability of the temperature can be ensured.
In order to ensure the space tightness of the cavity, a hole is usually punched at a certain position of a cavity door or a cavity wall, and a temperature sensing wire is arranged, but the local temperature measured by the temperature sensing wire is insufficient to be used for representing the uniform temperature in the cavity, if a plurality of temperature sensing wires are punched and implanted at different positions of the cavity wall, the tightness of the cavity can be influenced while the workload is large, and the possibility of air leakage exists in the cavity, so that a device capable of reducing the number of holes to ensure the tightness of the cavity and arranging the plurality of temperature sensing wires is needed.
Disclosure of Invention
The utility model aims to solve the technical problems that a small number of temperature sensing wires in a cavity cannot accurately and uniformly measure the temperature in the cavity in the existing production process and the problem that the air leakage condition of the cavity is caused when a plurality of temperature sensing wires are arranged to increase the workload.
Aiming at the technical problems, a temperature sensing module of a defoaming cavity is provided; the method is realized by the following technical scheme: the utility model provides a remove bubble cavity temperature sensing module, includes the installation pole and sets up the temperature sensing line installation department on the installation pole, the installation pole sets up on the cavity wall, and the temperature sensing line installation department can dismantle the setting on the installation pole, and the temperature sensing line sets up in the temperature sensing line installation department, the angle, quantity and the length of temperature sensing line installation department for the installation pole are adjustable.
According to the utility model, the plurality of temperature sensing wires arranged in the same mounting rod are utilized to play a role of reducing the number of openings, so that the workload is reduced, the risk of cavity air leakage is reduced, the arrangement of the plurality of temperature sensing wires is realized, the angle, the number and the length of the temperature sensing wires are adjustable by the temperature sensing wire mounting part arranged on the mounting rod, the angle and the length of the temperature sensing wires in the mounting rod can be adjusted by the temperature sensing wire mounting part while the temperature sensing wires are conveniently mounted, the effect of only arranging one hole, distributing the temperature sensing wires at a plurality of positions, uniformly measuring the temperature is realized, and the accuracy of temperature measurement is ensured while the tightness is ensured.
According to the technical scheme, the temperature sensing wire installation part comprises an installation table and a sealing plug, wherein the installation table is arranged on the installation rod and communicated with the installation rod, the sealing plug is used for sealing the installation table, the deformation card is arranged on the sealing plug, the temperature sensing wire is arranged in the deformation card, the deformation card is convenient for adjusting the angle of the temperature sensing wire arranged in the deformation card, the temperature sensing wire is convenient for measuring the temperatures of different areas, and the measurement is more accurate.
According to the technical scheme, the deformation card is composed of a plurality of deformation sub-cards, every two adjacent deformation sub-cards are detachably hinged together, the two deformation sub-cards can controllably rotate along the hinge, the controllable rotation is convenient to control the deformation card angle, the temperature of different areas in the cavity is convenient to use when the temperature sensing line is controlled, and the temperature of different areas in the cavity is also convenient to measure by the temperature sensing line.
According to the technical scheme, the limiting block for limiting the rotation of the deformed daughter card is arranged on the hinge surface of the hinge part of the deformed daughter card, and the limiting block is convenient to limit the rotation of the deformed card and is convenient to use.
According to the technical scheme, the deformable sub-card with the end part in contact with the sealing plug is fixed on the sealing plug, and does not move relative to the sealing plug, so that the temperature sensing wire is effectively prevented from being broken at the contact part of the sealing plug, and the stable operation of the temperature sensing wire is ensured.
According to the technical scheme, the temperature sensing wire installation parts are arranged on the installation rod in a plurality, so that the quantity of holes is effectively reduced, meanwhile, the temperature sensing wires can be arranged as much as possible, the use is convenient, and the possibility of cavity air leakage is reduced.
According to the technical scheme, the fixing part is arranged on the mounting rod, the mounting rod is arranged on the cavity wall through the fixing part, and the fixing part is convenient to install and use.
According to the technical scheme, the fixing part comprises the fixing piece, the sealing gasket and the locking nut, the sealing gasket is arranged in the fixing piece, the fixing piece is respectively arranged at the outer wall and the inner wall of the cavity, and the fixing piece is locked through the locking nut, so that the cavity is effectively prevented from leaking air from the fixing piece, and the sealing performance of the cavity is ensured.
According to the technical scheme, the sealing ring for sealing the locking nut is arranged on the contact surface of the fixing piece and the locking nut, so that the sealing performance of the cavity is further enhanced by effectively preventing the cavity from leaking air from the locking nut.
Compared with the prior art, the utility model has the following beneficial effects:
according to the technical scheme, the plurality of temperature sensing wires arranged in the same mounting rod are utilized to play a role in reducing the number of open holes, so that the workload is reduced, the risk of cavity air leakage is reduced, the arrangement of the plurality of temperature sensing wires is realized, the angle, the number and the length of the temperature sensing wire mounting parts arranged on the mounting rod are adjustable, the angle and the length of the temperature sensing wires in the mounting rod can be adjusted through the temperature sensing wire mounting parts while the temperature sensing wires are conveniently mounted, the effect that only one hole is formed, the temperature sensing wires are distributed at a plurality of positions, the effect of uniform temperature measurement is achieved, and the accuracy of temperature measurement is ensured while the tightness is ensured.
Drawings
FIG. 1 is a schematic perspective view of the present utility model;
FIG. 2 is a schematic perspective view of the temperature sensing wire mounting portion after deformation;
FIG. 3 is an exploded view of two adjacent deformed daughter cards;
FIG. 4 is a cross-sectional view of the present utility model;
FIG. 5 is an enlarged view of FIG. 4 at A;
reference numerals illustrate: the device comprises a 1-mounting rod, a 2-temperature sensing wire mounting part, a 21-mounting table, a 22-sealing plug, a 23-deformation card, a 24-temperature sensing wire fixing card, a 25-butterfly nut, a 26-deformation sub card, a 27-limiting table, a 28-fixing table, a 3-fixing part, a 31-fixing sheet, a 32-sealing gasket, a 33-sealing ring and a 34-locking nut.
Detailed Description
The following describes the technical solution in the embodiment of the present utility model in detail with reference to fig. 1 to 5 in the embodiment of the present utility model.
Example 1
As shown in fig. 1, a temperature sensing module for a bubble removal chamber includes a mounting rod 1, a temperature sensing wire mounting part 2, and a fixing part 3.
As shown in fig. 1 and 4, the installation rod 1 is a hollow metal pipe with one end closed, a plurality of installation tables 21 are provided near the closed end of the installation rod 1 for facilitating the installation of the temperature sensing wire installation part 2, the installation tables 21 are cylindrical metal pipes with two ends open, the installation tables 21 are welded on the installation rod 1, and the installation tables 21 are communicated with the installation rod 1, the temperature sensing wires can pass through the installation tables 21 via the installation rod 1, a plurality of installation tables 21 are provided in the radial direction and the axial direction of the installation rod 1 for increasing the number of the temperature sensing wires, and threads are provided on the inner wall of the installation tables 21 for facilitating the sealing of the installation tables 21.
In order to facilitate the installation of the fixing portion 3, two sections of threads are arranged on the outer wall of the mounting rod 1, which is close to the other end of the unsealed end, along the axial direction of the mounting rod 1, the locking nut 34 in the fixing portion 3 is screwed on the threads at the position, and in order to facilitate the installation of the locking nut 34, the diameter of the position, where the threads are arranged, of the mounting rod 1 is larger than the diameter of the position, where the threads are not arranged, of the mounting rod 1, namely, the minor diameter of the threads is equal to or slightly larger than the diameter of the mounting rod 1.
As shown in fig. 1, 2 and 3, the temperature sensing wire mounting portion 2 mainly includes a sealing plug 22 sealing the mounting table 21 on the mounting rod 1 and a deformation card 23 mounting the temperature sensing wire.
The sealing plug 22 is rectangular at one end, a cylindrical plug is arranged at one end, a thread is arranged at the cylindrical end of the sealing plug 22, the end can be screwed in the mounting table 21 to seal the mounting table 21 with the opening, an H-shaped deformation sub-card 26 is fixed on the sealing plug 22 at one rectangular end of the sealing plug 22, a circular through hole penetrating the sealing plug 22 is arranged on the surface of the sealing plug 22 perpendicular to the sealing plug 22 for facilitating the installation of a temperature sensing wire, the temperature sensing wire can penetrate the temperature sensing wire through the through hole on the sealing plug 22, the temperature sensing wire is protected for protecting the temperature sensing wire, the temperature sensing wire arranged at the position during the angle adjustment of the deformation card 23 is prevented from being broken, the deformation sub-card 26 arranged on the sealing plug 22 is permanently fixed with the sealing plug 22, and displacement cannot occur between the two.
Regarding the sealing of the sealing plug 22 to the mounting table 21, since the mounting table 21 is provided with a plurality of mounting tables 21 on the mounting rod 1, when the number of the mounting tables 21 which are not used individually is possibly larger than the number of the needed temperature sensing wires, the mounting table 21 can be directly sealed by the sealing plug 22, meanwhile, in order to avoid the air leakage of the circular through hole on the sealing plug 22, the sealing glue should be poured at the circular through hole of the sealing plug 22, and the sealing tape is additionally arranged at the screwing position of the sealing plug 22 and the mounting table 21, so that the sealing property of the cavity is ensured, and meanwhile, for the sealing plug 22 provided with the temperature sensing wires, the sealing glue should be smeared at the interface of the temperature sensing wires and the sealing plug 22 for sealing treatment when the temperature sensing wires are installed.
As shown in fig. 2 and 3, the deformation card 23 is composed of a plurality of deformation sub-cards 26, and the deformation card 23 is formed by hinging a plurality of deformation sub-cards 26 two by two.
The deformation sub-card 26 is in an H shape as a whole, two vertical arms of the deformation sub-card 26 are connected through a cross rod, in order to facilitate the fixing of a temperature sensing wire inside the deformation sub-card 26, a temperature sensing wire fixing card 24 is fixed on the cross rod between the two vertical arms along the length direction of the deformation sub-card 26, the temperature sensing wire fixing card 24 is a circular arc-shaped card with a certain length, in order to ensure that the temperature sensing wire can be clamped, the diameter of the circular arc-shaped temperature sensing wire fixing card 24 is slightly smaller than that of the temperature sensing wire, and thus the temperature sensing wire can be stably clamped in the temperature sensing wire fixing card 24.
In order to ensure the strength of the deformed daughter card 26, the lower end of the deformed daughter card 26 is also provided with a connection reinforcement, so that the structural strength of the deformed daughter card 26 can be ensured, the whole deformed daughter card 26 is not easy to deform, and both ends of two vertical arms of the deformed daughter card 26 are subjected to fillet treatment for facilitating rotation.
In order to facilitate the connection between the deformed daughter cards 26, the lower ends of the two vertical arms of the deformed daughter cards 26 are perpendicular to the side surfaces of the vertical arms of the deformed daughter cards 26, a fixing table 28 is recessed, and the depth of the fixing table 28 is the same as the thickness of the two vertical arms of the deformed daughter cards 26, so that the side surfaces of the two deformed daughter cards 26 are flush after the two deformed daughter cards 26 are hinged.
In order to facilitate the hinging of the deformed sub-cards 26, two ends of the deformed sub-cards 26 are respectively provided with a round hinging hole, the two deformed sub-cards 26 are hinged together through the hinging holes and the butterfly nuts 25, and in order to facilitate the adjustment of the angle between the two deformed sub-cards 26 hinged together, the outer side surface of the fixed table 28 on the deformed sub-card 26 is provided with a limiting table 27 and a limiting groove matched with the limiting table 27.
The limiting table 27 is a rectangular boss protruding from the surface of the fixed table 28, the limiting table 27 is uniformly distributed on the surface of the fixed table 28 by taking the hinging position as the center of a circle, and meanwhile, the limiting table 27 and a limiting groove matched with the limiting table 27 are also formed in the inner side walls of two vertical arms at the other end of the deformation sub-card 26, so that when the angle of the deformation card 23 needs to be adjusted, the deformation card 23 can be randomly adjusted only by twisting the butterfly nut 25 to be matched with the limiting table 27 and the limiting groove matched with the butterfly nut, and meanwhile, the number of the deformation sub-cards 26 can be adjusted as required, and the length of the deformation card 23 can be adjusted and used conveniently.
Regarding the setting and distribution of temperature sensing line, the temperature sensing line should be arranged in a plurality of different positions and heating source district departments in the cavity, and temperature sensor is connected to the other end of temperature sensing line to real-time supervision temperature variation to set up a plurality of external temperature check ports, make things convenient for the third party to carry out the temperature test.
As shown in fig. 4 and 5, in order to facilitate the fixing of the mounting bar 1 to the wall of the cavity, a fixing portion 3 is provided on the mounting bar 1, and the mounting bar 1 is fixed to the wall of the cavity by the fixing portion 3.
The fixing part 3 comprises a fixing piece 31, a sealing gasket 32, a sealing ring 33 and a locking nut 34, wherein the fixing piece 31 is a circular metal sheet with a hole in the middle, a mounting hole is formed in the center of the circular fixing piece 31, the diameter of the mounting hole is slightly larger than that of the mounting rod 1, the fixing piece 31 can be sleeved outside the mounting rod 1, one side surface of the fixing piece 31 is in contact with the outer wall of a cavity, an annular groove is formed in the contact surface of the fixing piece 31, perpendicular to the fixing piece 31, of the outer wall of the cavity in a concave manner, and the sealing gasket 32 is arranged in the annular groove.
The sealing gasket 32 is an annular gasket, the sealing gasket 32 can be placed in the annular groove on the fixing piece 31 and protrudes out of a part of the annular groove, in addition, the outer diameter of the sealing gasket 32 is larger than the diameter of a circular hole formed in the cavity wall and used for installing the mounting rod 1, and therefore the sealing performance of the joint can be guaranteed.
In addition, in order to be convenient for fix and lock stationary blade 31, lock nut 34 has been connect soon on installation pole 1, lock nut 34 cross section is "protruding" font, lock nut 34 comprises two cylinder pipes of diameter difference, set up the internal thread on the inner wall of the less cylinder of diameter, lock nut 34 can connect together with the screw thread on the installation pole 1 soon, the great one end of diameter and stationary blade 31 contact on the lock nut 34 can promote stationary blade 31 through rotatory lock nut 34 and remove, and then make stationary blade 31 and cavity wall paste tightly, guaranteed sealed shape.
In order to further enhance the sealing performance, a sealing ring 33 is arranged on the contact surface of the locking nut 34 and the fixing piece 31, the cross section of the sealing ring 33 is concave, the locking nut 34 can be stably clamped in a groove on the surface of the sealing ring 33 so as to seal the contact surface, and meanwhile, sealing glue is smeared on the threads of the locking nut 34 and the mounting rod 1.
The fixing parts 3 are provided with two sets of fixing parts which are respectively positioned at two sides of the cavity wall, namely the cavity wall is clamped between the two sets of fixing parts 3, and the fixing of the mounting rod 1 and the sealing of the connecting part are completed.
The implementation process of the embodiment comprises the following steps: the circular hole is formed in the wall of the cavity according to the size and actual needs of the cavity, the mounting rod 1 is fixed to the wall of the cavity by the fixing part 3, then a proper number of mounting tables 21 are selected according to needs to mount the temperature sensing wire, the angle and the length of the deformation card 23 arranged on the sealing plug 22 can be adjusted according to the position, the adjusting mode is to unscrew or take down the butterfly nut 25 on the deformation card 26, then the deformation card 26 is rotated or the deformation card 26 is additionally mounted, after the completion, the butterfly nut 25 is screwed, the temperature sensing wire is clamped in the temperature sensing wire fixing card 24 on the deformation card 26, and thus the installation of the temperature sensing module in the bubble removal cavity can be completed.
Example 2
In the above embodiment 1, the mounting rod 1 is of a detachable structure, and if the cost is reduced and the mounting rod 1 is not detached in the later period, the fixing portion 3 may be omitted on the basis of embodiment 1, that is, the mounting rod 1 is integrally fixed on the wall of the cavity by welding, so long as the sealing effect of welding is ensured, and no air leakage from the welding position is caused.
The above embodiments are only for illustrating the technical idea of the present utility model, and the protection scope of the present utility model is not limited thereto, and any modification made on the basis of the technical scheme according to the technical idea of the present utility model falls within the protection scope of the present utility model.
Claims (9)
1. The utility model provides a remove bubble cavity temperature sensing module which characterized in that: including installation pole (1) and temperature sensing line installation department (2) of setting on installation pole (1), installation pole (1) set up on the cavity wall, and temperature sensing line installation department (2) can dismantle the setting on installation pole (1), and the temperature sensing line setting is in temperature sensing line installation department (2), angle, quantity and the length adjustable of temperature sensing line installation department (2) for installation pole (1).
2. The bubble removal cavity temperature sensing module of claim 1, wherein: the temperature sensing line installation part (2) is including setting up on installation pole (1) with installation pole (1) mount table (21) and to sealing plug (22) that mount table (21) sealed, be provided with on sealing plug (22) and warp card (23), the temperature sensing line sets up in warp card (23).
3. A de-bubbling chamber temperature sensing module according to claim 2, wherein: the deformation card (23) is composed of a plurality of deformation sub-cards (26), every two adjacent deformation sub-cards (26) are detachably hinged together, and the two deformation sub-cards (26) can controllably rotate along the hinge.
4. A bubble removal cavity temperature sensing module according to claim 3, wherein: a limiting block (27) for limiting the rotation of the deformed daughter card (26) is arranged on the hinge surface of the hinge position of the deformed daughter card (26).
5. A bubble removal cavity temperature sensing module according to claim 3, wherein: the deformation sub card (26) of which the end part of the deformation card (23) is contacted with the sealing plug (22) is fixed on the sealing plug (22) and does not generate relative movement with the sealing plug (22).
6. The bubble removal cavity temperature sensing module of claim 1, wherein: the temperature sensing wire mounting part (2) is provided with a plurality of mounting rods (1).
7. The bubble removal cavity temperature sensing module of claim 1, wherein: the mounting rod (1) is provided with a fixing part (3), and the mounting rod (1) is arranged on the cavity wall through the fixing part (3).
8. The bubble removal cavity temperature sensing module of claim 7, wherein: the fixed part (3) comprises a fixing piece (31), a sealing gasket (32) and a locking nut (34), wherein the sealing gasket (32) is arranged in the fixing piece (31), the fixing piece (31) is respectively arranged at the outer wall and the inner wall of the cavity, and the fixing piece (31) is locked through the locking nut (34).
9. The bubble removal cavity temperature sensing module of claim 8, wherein: a sealing ring (33) for sealing the lock nut (34) is arranged on the contact surface of the fixing piece (31) and the lock nut (34).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321534725.XU CN220047159U (en) | 2023-06-16 | 2023-06-16 | Bubble removal cavity temperature sensing module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321534725.XU CN220047159U (en) | 2023-06-16 | 2023-06-16 | Bubble removal cavity temperature sensing module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220047159U true CN220047159U (en) | 2023-11-21 |
Family
ID=88752330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321534725.XU Active CN220047159U (en) | 2023-06-16 | 2023-06-16 | Bubble removal cavity temperature sensing module |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220047159U (en) |
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2023
- 2023-06-16 CN CN202321534725.XU patent/CN220047159U/en active Active
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