CN220040230U - Chip fixing device for micro-light microscope - Google Patents

Abstract

The utility model discloses a chip fixing device for a micro-light microscope, which comprises a chip fixing device, a chip fixing device and a chip fixing device, wherein the chip fixing device is arranged on the chip fixing device: the micro-light microscope comprises a fixed base arranged on a micro-light microscope, wherein a bidirectional threaded rod is arranged in an inner bearing at the lower end of the fixed base, supporting seats are respectively sleeved on the outer sides of the left end and the right end of the bidirectional threaded rod in a threaded manner, the bottom of each supporting seat is attached to the bottom surface of the fixed base, a turntable roller is arranged on the upper end bearing of each supporting seat, and a limiting assembly capable of fixing a chip is arranged on one side, close to the center of the fixed base, of each turntable roller; the dust collection assembly is arranged in the front side of the fixed base and is connected with a dust collection head; and the bearing of the rotating rod is arranged in the lower end of the fixed base. This little light is chip fixing device for microscope drives the chip that spacing subassembly was fixed through the carousel roller and rotates to adjust to suitable angle, and utilize dust absorption subassembly to carry out the deashing to the chip surface and handle, guarantee the accuracy of testing result.

Description

Chip fixing device for micro-light microscope

Technical Field

The utility model relates to the technical field of micro-light microscope chips, in particular to a chip fixing device for a micro-light microscope.

Background

The micro light microscope uses a high gain camera/detector to detect micro photons emitted by defects/failures of some semiconductor devices, and after the photons are collected and processed by an image, a signal diagram can be obtained to locate the position of a luminous point, so that the position of the failure point is realized, and the micro light microscope is an analysis tool with extremely high efficiency, and the chip needs to be fixed when the chip is processed.

In the patent application with the publication number of CN213122190U and the publication number of 2021-05-04, the name of chip fixing device for a back micro-light microscope, the locking knob is loosened, then the rotating shaft is rotated to drive the clamping plate to move through the rotating block, the locking knob is screwed down after the adjustment is completed according to different chip bodies, the pull ring is pulled to drive the fixing rod to adjust according to the thickness of different chip bodies, the pull ring is loosened to fix the chip bodies under the action of the spring, and the operation is simple.

In the in-service use process of the device, dust impurities are easily attached to the surface of the chip before detection, the detection result of the micro-light microscope is affected, the device is inconvenient to clean the dust impurities, the chip is fixed through the fixing rod and the clamping plate, and the chip is inconvenient to adjust the angle according to the requirement.

Therefore, we propose a chip fixing device for a micro-light microscope so as to solve the above-mentioned problems.

Disclosure of Invention

1. Technical problem to be solved by the utility model

The utility model aims to provide a chip fixing device for a micro-light microscope, which solves the problems that the chip is inconvenient to clean and inconvenient to adjust the angle in the existing chip fixing device for the micro-light microscope in the market, which is proposed by the background technology.

2. Technical proposal

In order to achieve the above purpose, the present utility model provides the following technical solutions: a chip fixing device for a micro light microscope: the micro-light microscope comprises a fixed base arranged on a micro-light microscope, wherein a bidirectional threaded rod is arranged at the inner bearing at the lower end of the fixed base, supporting seats are respectively sleeved on the outer sides of the left end and the right end of the bidirectional threaded rod in a threaded manner, the bottom of each supporting seat is attached to the bottom surface of the fixed base, a turntable roller is arranged at the bearing at the upper end of each supporting seat, a limiting assembly capable of fixing a chip is arranged at one side, close to the center of the fixed base, of each turntable roller, and the end part of each turntable roller positioned on the right side is connected with the output end of a motor;

the dust collection assembly is arranged in the front side of the fixed base, is connected with a dust collection head and is rotatably arranged in the lower end of the fixed base;

and the bearing of the rotating rod is arranged in the lower end of the fixed base.

Further, the fixed cover of one end that spacing subassembly was kept away from to the carousel roller is equipped with first runner, and overlaps between first runner and the second runner and establish and install drive belt, and the second runner bearing install in the lower extreme lateral part of supporting seat, moreover the diameter of first runner is greater than the diameter of second runner.

Through the technical scheme, the first rotating wheel can drive the second rotating wheel to rotate for a plurality of times.

Further, the inside cover of second runner is established the outside of bull stick, and the outside equiangular degree of tip of bull stick installs the drive strip, and the drive strip laminating slide set up in the inner wall of second runner.

Through the technical scheme, after the second rotating wheel rotates, the driving bar can be utilized to drive the rotating rod to synchronously rotate, and the movement of the second rotating wheel outside the rotating rod is not influenced.

Further, the length of the driving bar is greater than the moving distance of the supporting seat, and the central axis of the rotating rod where the driving bar is located and the central axis of the second rotating wheel are located on the same straight line.

Through the technical scheme, the second rotating wheel can be ensured to drive the rotating rod to rotate.

Furthermore, the middle part outside fixed cover of bull stick is equipped with reciprocating screw rod, and reciprocating screw rod's outside thread bush is equipped with the slide bar, and the slide bar control laminating slidable mounting in fixed base's lower extreme is inside.

Through the technical scheme, after the rotating rod rotates, the sliding rod can be driven to move left and right.

Further, the outside fixed cover of dust absorption head pivot is equipped with the gear, and the lower extreme meshing of gear has the tooth piece to the tooth piece evenly installs in the upper end of slide bar, and the dust absorption head is equidistant distribution on fixed base moreover.

Through the technical scheme, when the slide bar moves left and right, the dust collection head can be driven to swing by utilizing the cooperation between the tooth block and the gear, so that the dust collection range is enlarged.

3. Advantageous effects

Compared with the prior art, the chip fixing device for the micro-light microscope provided by the utility model drives the chip fixed by the limiting component to rotate through the turntable roller so as to adjust the chip to a proper angle, and the dust collection component is utilized to carry out dust removal treatment on the surface of the chip, so that the accuracy of a detection result is ensured, and the chip fixing device comprises the following specific contents:

(1) The rotary table roller and the dust collection head are arranged, so that the chip is placed in the left limiting component and the right limiting component to be fixed, the dust collection component is started to clean impurities adhered to the surface of the chip by utilizing the dust collection head, when angle adjustment is needed, a motor connected with the rotary table roller on the right side is started, and the rotary table roller and the limiting component drive the chip to overturn, so that the angle adjustment is realized, and different requirements are met;

(2) Be provided with bull stick and drive strip for when carousel roller rotates, can drive first runner and carry out synchronous rotation, first runner can utilize driving belt to drive the second runner and rotate, the second runner utilizes the unsmooth cooperation with the drive strip can drive the bull stick and carry out synchronous rotation, the fixed cover is established the reciprocating screw rod in the bull stick outside and can be rotated immediately, the slide bar of screw thread cover outside the reciprocating screw rod can be moved about under fixed base's laminating effect, utilize tooth piece and gear's meshing effect to drive the dust absorption head and swing about moving the in-process, in order to enlarge dust collection scope, improve the dust absorption effect.

Drawings

FIG. 1 is a schematic diagram of the overall side view and three-dimensional structure of the present utility model;

FIG. 2 is a schematic side view of a support base of the present utility model;

FIG. 3 is a schematic side sectional perspective view of a stationary base of the present utility model;

figure 4 is a schematic side view and three-dimensional structure of the dust collection head of the utility model;

fig. 5 is a schematic side view of the turning rod of the present utility model.

In the figure: 1. a fixed base; 2. a two-way threaded rod; 3. a support base; 4. a turntable roller; 5. a limit component; 6. a dust collection assembly; 7. a dust collection head; 701. a gear; 702. tooth blocks; 8. a first wheel; 9. a second wheel; 10. a drive belt; 11. a rotating rod; 12. a drive bar; 13. a reciprocating screw rod; 14. and a slide bar.

Detailed Description

In order to facilitate understanding of the present utility model, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "page," "bottom," "inner," "outer," "clockwise," "counterclockwise," etc. indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings are merely for convenience in describing the present utility model and to simplify the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the present utility model, unless explicitly stated and limited otherwise, the terms "mounted," "connected," "secured," "provided," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

Examples

Referring to fig. 1-5, a chip fixing device for a micro-light microscope includes a fixing base 1 mounted on the micro-light microscope, a bidirectional threaded rod 2 is mounted at an inner bearing at a lower end of the fixing base 1, supporting seats 3 are respectively sleeved on outer sides of left and right ends of the bidirectional threaded rod 2 in a threaded manner, bottoms of the supporting seats 3 are attached to a bottom surface of the fixing base 1, a turntable roller 4 is mounted at an upper end bearing of the supporting seats 3, a limiting component 5 capable of fixing a chip is mounted at one side of the turntable roller 4 close to a center of the fixing base 1, and an end part of the turntable roller 4 located on the right side is connected with an output end of a motor; a dust collection assembly 6 mounted inside the front side of the fixed base 1, and the dust collection assembly 6 is connected with a dust collection head 7, and the dust collection head 7 is rotatably mounted inside the lower end of the fixed base 1;

with reference to fig. 1, a chip is firstly placed between a left fixed base 1 and a right fixed base 1, then a bidirectional threaded rod 2 is rotated to drive the two fixed bases 1 to move towards two sides of the chip respectively, then a limiting component 5 is used for fixing the chip, a dust collection component 6 is started to clean impurities adhered to the surface of the chip by using a dust collection head 7, when angle adjustment is required, a motor connected with a right turntable roller 4 is started, and the chip is driven to turn over by the turntable roller 4 and the limiting component 5, so that angle adjustment is realized to adapt to different requirements;

the rotating disc roller 4 is fixedly sleeved with a first rotating wheel 8 at one end far away from the limiting component 5, a transmission belt 10 is sleeved between the first rotating wheel 8 and a second rotating wheel 9, the second rotating wheel 9 is arranged on the side part of the lower end of the supporting seat 3 in a bearing manner, and the diameter of the first rotating wheel 8 is larger than that of the second rotating wheel 9; the inside of the second rotating wheel 9 is sleeved on the outer side of the rotating rod 11, driving strips 12 are arranged at equal angles on the outer side of the end part of the rotating rod 11, and the driving strips 12 are attached to the inner wall of the second rotating wheel 9 in a sliding manner; a rotating lever 11 bearing-mounted in the lower end of the fixed base 1; the length of the driving bar 12 is longer than the moving distance of the supporting seat 3, and the central axis of the rotating rod 11 where the driving bar 12 is positioned and the central axis of the second rotating wheel 9 are positioned on the same straight line; the outer side of the middle part of the rotating rod 11 is fixedly sleeved with a reciprocating screw rod 13, the outer side of the reciprocating screw rod 13 is sleeved with a sliding rod 14 in a threaded manner, and the sliding rod 14 is attached to the inside of the lower end of the fixed base 1 in a sliding manner; the gear 701 is fixedly sleeved on the outer side of the rotating shaft of the dust collection head 7, the lower end of the gear 701 is meshed with the tooth block 702, the tooth block 702 is uniformly arranged at the upper end of the slide bar 14, and the dust collection heads 7 are distributed on the fixed base 1 at equal intervals;

when the turntable roller 4 rotates, the first rotating wheel 8 can be driven to synchronously rotate, the first rotating wheel 8 can drive the second rotating wheel 9 to rotate by using the transmission belt 10, the second rotating wheel 9 drives the rotating rod 11 to synchronously rotate by using concave-convex matching with the driving strip 12, after the rotating rod 11 rotates, the reciprocating screw rod 13 fixedly sleeved on the outer side of the rotating rod 11 can rotate along with the rotating rod, the sliding rod 14 sleeved on the outer side of the reciprocating screw rod 13 moves left and right in the fixed base 1 by using the attaching action between the sliding rod 14 and the fixed base 1, and the dust collection head 7 is driven to swing by using the meshing action of the tooth block 702 and the gear 701 in the left and right moving process, so that the dust collection range is enlarged, and the dust collection effect is improved.

Working principle: when the chip fixing device for the micro-light microscope is used, as shown in fig. 1-5, a chip is firstly placed between the left fixing base 1 and the right fixing base 1, then the bidirectional threaded rod 2 is rotated to drive the two fixing bases 1 to move towards two sides of the chip respectively, the chip is fixed by the limiting component 5, meanwhile, the dust collection component 6 is started to clean impurities adhered to the surface of the chip by the dust collection head 7, when angle adjustment is needed, a motor connected with the right turntable roller 4 is started, the chip is driven to overturn by the turntable roller 4 and the limiting component 5, the angle adjustment is realized, so that different requirements are met, the turntable roller 4 rotates, and meanwhile, the first rotating wheel 8, the driving belt 10 and the second rotating wheel 9 are used to drive the rotating rod 11 to rotate to drive the sliding rod 14 to move left and right, so that the swing of the dust collection head 7 is realized, the dust collection range is enlarged, and the dust collection effect is improved.

What is not described in detail in this specification is prior art known to those skilled in the art.

Although the present utility model has been described with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and changes may be made without departing from the spirit and principles of the present utility model.

Claims (6)

1. A chip fixing device for a micro-light microscope is characterized in that: the micro-light microscope comprises a fixed base (1) arranged on the micro-light microscope, wherein a bidirectional threaded rod (2) is arranged at the inner bearing at the lower end of the fixed base (1), a supporting seat (3) is arranged at the outer sides of the left end and the right end of the bidirectional threaded rod (2) in a threaded sleeved mode, the bottom of the supporting seat (3) is attached to the bottom surface of the fixed base (1), a turntable roller (4) is arranged at the upper end bearing of the supporting seat (3), a limiting component (5) capable of fixing a chip is arranged at one side, close to the center of the fixed base (1), of the turntable roller (4), and the end part of the turntable roller (4) located on the right side is connected with the output end of a motor;

the dust collection assembly (6) is arranged in the front side of the fixed base (1), the dust collection assembly (6) is connected with a dust collection head (7), and the dust collection head (7) is rotatably arranged in the lower end of the fixed base (1);

and the rotating rod (11) is arranged in the lower end of the fixed base (1) in a bearing way.

2. The chip fixing device for a micro-light microscope according to claim 1, wherein: one end of the turntable roller (4) far away from the limiting component (5) is fixedly sleeved with a first rotating wheel (8), a transmission belt (10) is sleeved between the first rotating wheel (8) and a second rotating wheel (9), the second rotating wheel (9) is arranged on the side part of the lower end of the supporting seat (3) in a bearing mode, and the diameter of the first rotating wheel (8) is larger than that of the second rotating wheel (9).

3. The chip fixing device for a micro-light microscope according to claim 2, wherein: the inside cover of second runner (9) is established the outside of bull stick (11), and end outside equiangular installation of bull stick (11) has drive strip (12), and drive strip (12) laminating slip set up in the inner wall of second runner (9).

4. A chip fixing apparatus for a micro light microscope according to claim 3, wherein: the length of the driving strip (12) is longer than the moving distance of the supporting seat (3), and the central axis of the rotating rod (11) where the driving strip (12) is located and the central axis of the second rotating wheel (9) are located on the same straight line.

5. The chip fixing device for a micro-light microscope according to claim 1, wherein: the middle part outside fixed cover of bull stick (11) is equipped with reciprocating lead screw (13), and the outside thread bush of reciprocating lead screw (13) is equipped with slide bar (14), and laminating slidable mounting about slide bar (14) in the lower extreme inside of fixed base (1).

6. The chip fixing device for a micro-light microscope according to claim 1, wherein: the outer side of the rotating shaft of the dust collection head (7) is fixedly sleeved with a gear (701), the lower end of the gear (701) is meshed with a tooth block (702), the tooth block (702) is uniformly arranged at the upper end of the sliding rod (14), and the dust collection heads (7) are distributed on the fixed base (1) at equal intervals.