CN220018198U - Quartz furnace cap for improving air flow distribution in horizontal high-temperature diffusion furnace - Google Patents
Quartz furnace cap for improving air flow distribution in horizontal high-temperature diffusion furnace Download PDFInfo
- Publication number
- CN220018198U CN220018198U CN202320458748.0U CN202320458748U CN220018198U CN 220018198 U CN220018198 U CN 220018198U CN 202320458748 U CN202320458748 U CN 202320458748U CN 220018198 U CN220018198 U CN 220018198U
- Authority
- CN
- China
- Prior art keywords
- exhaust pipe
- furnace
- cap
- air flow
- flow distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 26
- 239000010453 quartz Substances 0.000 title claims abstract description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 238000007599 discharging Methods 0.000 claims abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 2
- 239000003053 toxin Substances 0.000 description 2
- 231100000765 toxin Toxicity 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates to a quartz furnace cap for improving air flow distribution in a horizontal high-temperature diffusion furnace, belonging to the technical field of integrated circuit or discrete device chip manufacturing. The furnace comprises a furnace cap, wherein the top of the furnace cap is provided with an exhaust hole, and the exhaust hole is connected with an exhaust pipe so that the exhaust pipe is communicated with the inner cavity of the furnace cap; during operation, the air outlet of the exhaust pipe faces the air discharging direction of the diffusion furnace. The exhaust pipe comprises a first exhaust pipe and a second exhaust pipe, the first exhaust pipe is vertically arranged, the second exhaust pipe is horizontally arranged, and an air outlet of the first exhaust pipe is connected with an air inlet of the second exhaust pipe to form an L-shaped structural member. The air outlet of the second exhaust pipe is flush with the edge of the furnace cap. The top of the stove cap is provided with a handle. The utility model has simple and ingenious structure, can effectively improve the uniformity of the air flow in the diffusion furnace after use, and ensures the consistency of parameters in and among sheets of the operation products.
Description
Technical Field
The utility model relates to a quartz furnace cap for improving air flow distribution in a horizontal high-temperature diffusion furnace, belonging to the technical field of integrated circuit or discrete device chip manufacturing.
Background
Diffusion processes are key processes in discrete device fabrication processes, and three elements of diffusion are well known: temperature, time, air flow. The furnace tail of the horizontal diffusion furnace is charged and the furnace mouth is discharged, so that a quartz furnace cap used by the furnace mouth can be provided with an air outlet.
The exhaust of the horizontal diffusion furnace is distributed on the left side or the right side of the furnace mouth toxin expelling cabinet, the exhaust hole of the quartz furnace cap does not face the exhaust hole, the exhaust suction force is not fully utilized, the diameter of the exhaust hole is larger, and the atmosphere in the diffusion furnace is uneven, especially the furnace mouth area is caused under the exhaust effect of one side of the toxin expelling cabinet. Thus, the parameter consistency between the inside and the outside of the operation product cannot be effectively ensured.
Disclosure of Invention
The utility model aims to solve the technical problem of providing the quartz furnace cap for improving the air flow distribution in the horizontal high-temperature diffusion furnace aiming at the prior art, which has simple and ingenious structure, improves the air flow uniformity in the diffusion furnace, and ensures the consistency of parameters in and among sheets of operation products.
The utility model solves the problems by adopting the following technical scheme: the quartz furnace cap for improving the air flow distribution in the horizontal high-temperature diffusion furnace comprises a furnace cap, wherein the top of the furnace cap is provided with an exhaust hole, and the exhaust hole is connected with an exhaust pipe so that the exhaust pipe is communicated with the inner cavity of the furnace cap; during operation, the air outlet of the exhaust pipe faces the air discharging direction of the diffusion furnace.
The exhaust pipe comprises a first exhaust pipe and a second exhaust pipe, the first exhaust pipe is vertically arranged, the second exhaust pipe is horizontally arranged, and an air outlet of the first exhaust pipe is connected with an air inlet of the second exhaust pipe to form an L-shaped structural member.
The air outlet of the second exhaust pipe is flush with the edge of the furnace cap.
The top of the stove cap is provided with a handle.
Compared with the prior art, the utility model has the advantages that: the quartz furnace cap for improving the distribution of the air flow in the horizontal high-temperature diffusion furnace has a simple and ingenious structure, and can effectively improve the uniformity of the air flow in the diffusion furnace after use, thereby ensuring the uniformity of parameters in and among sheets of operation products.
Drawings
FIG. 1 is a schematic view of a quartz furnace cap for improving the gas flow distribution in a horizontal high temperature diffusion furnace according to an embodiment of the present utility model;
FIG. 2 is a top view of FIG. 1;
in the figure, a furnace cap, an exhaust pipe 2, a handle 3 and an exhaust hole 4 are shown.
Detailed Description
The utility model is described in further detail below with reference to the embodiments of the drawings.
As shown in fig. 1 and 2, the quartz furnace cap for improving the air flow distribution in the horizontal high-temperature diffusion furnace in the embodiment comprises a furnace cap 1, wherein the top of the furnace cap 1 is provided with an exhaust hole 4 with the diameter of 6mm, an L-shaped exhaust pipe 2 is welded on the exhaust hole 4, and the exhaust pipe 2 is communicated with the inner cavity of the furnace cap 1. The top of the furnace cap 1 is provided with a handle 3 which is convenient for rotating the furnace cap 1. During operation, the lifting handle 3 is lifted to rotate, and then the furnace cap 1 is rotated, so that the air outlet of the exhaust pipe 2 faces the air discharging direction of the diffusion furnace, and the uniformity of air flow in the furnace is improved by utilizing the air discharging suction, so that the parameter consistency between sheets of products is improved.
The exhaust pipe 2 comprises a first exhaust pipe and a second exhaust pipe, the first exhaust pipe is vertically arranged, and an air inlet of the first exhaust pipe is connected with the exhaust hole. The second exhaust pipe is horizontally arranged, the air outlet of the first exhaust pipe is connected with the air inlet of the second exhaust pipe, and the connection part is in arc transition connection, so that an L-shaped structural member is formed.
The air outlet of the second exhaust pipe is tangent with and flush with the edge of the furnace cap 1.
The utility model has simple and ingenious structure, can effectively improve the uniformity of the air flow in the diffusion furnace after use, and ensures the consistency of parameters in and among sheets of the operation products.
In addition to the above embodiments, the present utility model also includes other embodiments, and all technical solutions that are formed by equivalent transformation or equivalent substitution should fall within the protection scope of the claims of the present utility model.
Claims (4)
1. The utility model provides an improve quartz furnace cap of gas flow distribution in horizontal high temperature diffusion stove which characterized in that: the furnace comprises a furnace cap, wherein the top of the furnace cap is provided with an exhaust hole, and the exhaust hole is connected with an exhaust pipe so that the exhaust pipe is communicated with the inner cavity of the furnace cap; during operation, the air outlet of the exhaust pipe faces the air discharging direction of the diffusion furnace.
2. The quartz furnace cap for improving the air flow distribution in a horizontal high-temperature diffusion furnace according to claim 1, wherein: the exhaust pipe comprises a first exhaust pipe and a second exhaust pipe, the first exhaust pipe is vertically arranged, the second exhaust pipe is horizontally arranged, and an air outlet of the first exhaust pipe is connected with an air inlet of the second exhaust pipe to form an L-shaped structural member.
3. The quartz furnace cap for improving the air flow distribution in the horizontal high-temperature diffusion furnace according to claim 2, wherein: the air outlet of the second exhaust pipe is flush with the edge of the furnace cap.
4. The quartz furnace cap for improving the air flow distribution in a horizontal high-temperature diffusion furnace according to claim 1, wherein: the top of the stove cap is provided with a handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320458748.0U CN220018198U (en) | 2023-03-13 | 2023-03-13 | Quartz furnace cap for improving air flow distribution in horizontal high-temperature diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320458748.0U CN220018198U (en) | 2023-03-13 | 2023-03-13 | Quartz furnace cap for improving air flow distribution in horizontal high-temperature diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220018198U true CN220018198U (en) | 2023-11-14 |
Family
ID=88688768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320458748.0U Active CN220018198U (en) | 2023-03-13 | 2023-03-13 | Quartz furnace cap for improving air flow distribution in horizontal high-temperature diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220018198U (en) |
-
2023
- 2023-03-13 CN CN202320458748.0U patent/CN220018198U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207552388U (en) | A kind of feeding in continuous material vacuum heat treatment furnace | |
| CN220018198U (en) | Quartz furnace cap for improving air flow distribution in horizontal high-temperature diffusion furnace | |
| CN102433422B (en) | Model correcting method for high-temperature alloy thin-wall casting | |
| CN207726961U (en) | A kind of 3D bend glass hot-bending machines using vacuum displacement technology | |
| CN204275915U (en) | A kind of cooling device for paste mixing machine | |
| CN213454893U (en) | Tunnel kiln is used in production of gangue baked brick | |
| CN206532761U (en) | Graphite boat putting device | |
| CN203700471U (en) | High vacuum furnace | |
| CN216274364U (en) | Chemical vapor deposition platen structure | |
| CN206173299U (en) | Fermenting installation before yellow rice wine | |
| CN205437097U (en) | Radiation tooth mould | |
| CN208555915U (en) | A kind of mold sand core gas negative pressure pump drainage device | |
| CN203987869U (en) | A kind of suction-jet type rotoclone collector | |
| CN218969152U (en) | Preparation chamber of anode material tunnel carbonization furnace | |
| CN102709382B (en) | Sintering method for improving rear-passivated solar cell filling performance | |
| CN208073838U (en) | A kind of corrugation forming machine exhaust system | |
| CN213766344U (en) | Sand mold structure for reducing air holes generated on casting surface of common casting product | |
| CN218811872U (en) | AOD furnace secondary desulfurization silicon supplementing device | |
| CN204291657U (en) | Krause mill electric-control system | |
| CN220166254U (en) | Metallurgical high-pre-pumping mechanical vacuum pump system | |
| CN214411302U (en) | System for lithium cell negative pressure ization area clean pipeline | |
| CN104368269A (en) | Cooling device for plaster mixing machine | |
| CN202373674U (en) | Energy-saving anti-explosion battery cooling device | |
| CN207608655U (en) | A kind of single crystal growing furnace continuous feeding | |
| CN204981167U (en) | Graphite base for polycrystalline silicon reduction furnace with exhausting function |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |