CN219998181U - Multi-surface correction device for graphite boat - Google Patents
Multi-surface correction device for graphite boat Download PDFInfo
- Publication number
- CN219998181U CN219998181U CN202320924607.3U CN202320924607U CN219998181U CN 219998181 U CN219998181 U CN 219998181U CN 202320924607 U CN202320924607 U CN 202320924607U CN 219998181 U CN219998181 U CN 219998181U
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- CN
- China
- Prior art keywords
- calibration
- seat
- graphite boat
- forward movement
- lateral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 52
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 52
- 239000010439 graphite Substances 0.000 title claims abstract description 52
- 239000011159 matrix material Substances 0.000 claims abstract description 10
- 238000009434 installation Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 2
- 239000010703 silicon Substances 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a multi-surface correction device for a graphite boat, which comprises a calibration main matrix, a forward movement calibration seat, a lateral movement calibration seat and a top calibration swing frame, wherein the forward movement calibration seat is used for carrying the graphite boat, and the calibration main matrix is provided with a station positioning body used for limiting the position of the forward movement calibration seat; the front moving calibration seat, the lateral moving calibration seat and the top calibration swinging frame are respectively provided with a calibration piece for calibrating the graphite boat; the forward movement calibration seat stops to a preset calibration station through the station positioning body, and the lateral movement calibration seat and the top calibration swinging frame move to the preset calibration station respectively, so that the side part and the top of the graphite boat on the forward movement calibration seat are in contact calibration with the calibration pieces of the lateral movement calibration seat and the top calibration swinging frame respectively. By adopting the utility model, the calibration precision is high, and the silicon wafer scratch and wafer dropping caused by unequal graphite boat She Jianju are reduced.
Description
Technical Field
The utility model relates to the technical field of graphite boat production, in particular to a multi-surface correction device for a graphite boat.
Background
The existing graphite boat is generally formed by arranging a plurality of boat sheets in parallel, and the distance between each boat sheet needs to be calibrated to ensure that the distance between each boat sheet meets a preset qualification value.
The existing graphite boat calibrating device cannot accurately position and calibrate the graphite boat, the existing fixing mode of the boat blade is only through the bottom calibration clamping strip, the top and the left side and the right side of the existing graphite boat calibrating device are not provided with positioning and calibrating devices, and the graphite boat calibrating precision cannot be guaranteed.
Disclosure of Invention
The technical problem to be solved by the embodiment of the utility model is to provide a multi-surface correction device for a graphite boat, which has high correction precision and reduces silicon wafer scratches and wafer dropping caused by unequal graphite boat She Jianju.
In order to solve the technical problems, the embodiment of the utility model provides a multi-surface correction device, which comprises a calibration main matrix, a forward movement calibration seat, a lateral movement calibration seat and a top calibration swing frame, wherein the forward movement calibration seat is used for carrying a graphite boat, and the calibration main matrix is provided with a station positioning body used for limiting the position of the forward movement calibration seat;
the front moving calibration seat, the lateral moving calibration seat and the top calibration swinging frame are respectively provided with a calibration piece for calibrating the graphite boat;
the forward movement calibration seat stops to a preset calibration station through the station positioning body, and the lateral movement calibration seat and the top calibration swinging frame move to the preset calibration station respectively, so that the side part and the top of the graphite boat on the forward movement calibration seat are in contact calibration with the calibration pieces of the lateral movement calibration seat and the top calibration swinging frame respectively.
As an improvement of the scheme, the calibration main matrix is provided with a lateral sliding rail and a forward sliding rail, and the lateral movement calibration seat and the forward movement calibration seat are respectively and slidably connected to the lateral sliding rail and the forward sliding rail.
As an improvement of the scheme, the station positioning body is provided with an adjusting base bar for adjusting the installation position, the bottom of the adjusting base bar is provided with a plurality of adjusting positioning holes, and the calibration main base body is provided with positioning columns for sleeving the adjusting positioning holes.
As an improvement of the scheme, the calibration main base body is provided with a rotating shaft seat, and one end of the top calibration swinging frame is arranged on the rotating shaft seat through a rotating shaft.
As an improvement of the scheme, one end of the top calibration swing frame is provided with a supporting plate for auxiliary supporting, so that the supporting plate and the rotating shaft seat respectively support two ends of the top calibration swing frame.
As an improvement of the above scheme, the lateral alignment moving seat is provided with a fixing block corresponding to the supporting plate, and the fixing block is provided with a fixing groove for the supporting plate to be inserted and a pressing piece arranged in the fixing groove, so that the supporting plate is clamped in the fixing groove through the pressing piece.
As the improvement of above-mentioned scheme, the side direction calibration removes the seat be equipped with be used for with backup pad direct fixed connection's locking piece, the backup pad with the locking piece all is equipped with the bolt hole that corresponds each other.
As an improvement of the scheme, the rotating shaft seat is provided with a buffer piece connected with the top calibration swinging frame so as to slow down the lower swinging speed of the top calibration swinging frame.
As an improvement of the scheme, the calibration piece is provided with a plurality of calibration grooves for inserting graphite boat sheets, and a preset interval is reserved between every two adjacent calibration grooves.
As an improvement of the scheme, the calibration piece is provided with a V-shaped notch for guiding the graphite boat piece to be inserted into the calibration groove.
The implementation of the utility model has the following beneficial effects:
the embodiment of the utility model discloses a multi-surface correction device for a graphite boat, which comprises a correction main matrix, a forward movement correction seat, a lateral movement correction seat and a top correction swing frame, wherein the forward movement correction seat, the lateral movement correction seat and the top correction swing frame are used for carrying the graphite boat, and are respectively provided with a correction piece for correcting the graphite boat, so that the side part, the top and the bottom of the graphite boat can be subjected to multi-surface correction to obtain a higher correction effect;
moreover, the calibration main matrix is provided with a station positioning body for limiting the position of the forward movement calibration seat, so that the forward movement calibration seat is conveniently stopped to a preset calibration station by the station positioning body manually, and the lateral movement calibration seat and the top calibration swinging frame can be respectively moved to the preset calibration station, so that the side part and the top of the graphite boat on the forward movement calibration seat are respectively in contact calibration with the calibration pieces of the lateral movement calibration seat and the top calibration swinging frame.
Drawings
FIG. 1 is a schematic perspective view of a multi-sided correction device of the present utility model;
FIG. 2 is a schematic view of the structure of a laterally movable calibration stand according to the present utility model;
FIG. 3 is a schematic view of the structure of the calibration piece of the multi-faceted calibration apparatus of the present utility model;
FIG. 4 is a schematic view of the structure of the station positioner of the multi-sided correction device of the present utility model.
Detailed Description
The present utility model will be described in further detail with reference to the accompanying drawings, for the purpose of making the objects, technical solutions and advantages of the present utility model more apparent.
Referring to fig. 1, 2 and 3, an embodiment of the present utility model provides a multi-sided correction device for a graphite boat, comprising a calibration main base 1, a forward movement calibration seat 2 for carrying the graphite boat, a lateral movement calibration seat 3 and a top calibration swing frame 4, wherein the calibration main base 1 is provided with a station positioning body 5 for defining the position of the forward movement calibration seat 2;
the forward movement calibration seat 2, the lateral movement calibration seat 3 and the top calibration swinging frame are respectively provided with a calibration piece 6 for calibrating the graphite boat, so that the side part, the top and the bottom of the graphite boat can be subjected to multi-surface calibration, and a higher calibration effect can be obtained.
After the graphite boat is placed on the forward moving calibration seat 2, the calibration piece 6 of the forward moving calibration seat 2 performs contact calibration on the bottom of the graphite boat, then the forward moving calibration seat 2 stops to a preset calibration station through the station positioning body 5, and the lateral moving calibration seat 3 and the top calibration swing frame 4 move to the preset calibration station respectively, so that the side and the top of the graphite boat on the forward moving calibration seat 2 perform contact calibration with the calibration piece 6 of the lateral moving calibration seat 3 and the top calibration swing frame 4 respectively.
Specifically, the calibration main body 1 is provided with a lateral sliding rail 11 and a forward sliding rail 12, and the lateral movement calibration seat 3 and the forward movement calibration seat 2 are respectively connected to the lateral sliding rail 11 and the forward sliding rail 12 in a sliding manner. The calibration piece 6 is provided with a plurality of calibration grooves 61 for inserting graphite boat sheets, and a preset distance is reserved between every two adjacent calibration grooves 61.
In order to facilitate the smooth insertion of each boat piece of the graphite boat into the corresponding alignment groove 61, the alignment member 6 is provided with a notch 611 for guiding the insertion of the graphite boat piece into the alignment groove 61, the notch 611 is provided with a chamfer to form a V-shaped notch 611, and the chamfer is preferably a 45 ° chamfer. Thereby the depth of the calibration groove 61 can be effectively increased to 10-20cm, and the calibration effect on the boat sheet can be improved.
Preferably, a preset distance is left between two adjacent notches 611 on the alignment member, so as to form a guiding end head 612 which is placed between two adjacent graphite boat sheets, and in order to better guide the graphite boat sheets into the alignment groove 61, an end surface 613 of the guiding end head 612 is in an arc surface, so that when the graphite boat sheets contact the arc surface of the guiding end head 612, the graphite boat sheets can better slide towards the notches 611, and thus are inserted into the alignment groove 61.
Referring to fig. 4, the station positioning body 5 is provided with an adjusting base strip 51 for adjusting the installation position, a plurality of adjusting positioning holes 511 are formed in the bottom of the adjusting base strip 51, and the adjusting positioning holes 511 are distributed on the adjusting base strip 51 along the direction of the forward sliding rail 12. The calibration main matrix 1 is provided with a positioning column 13 sleeved by the adjusting positioning hole 511, so that the position of the station positioning body 5 can be adjusted according to graphite boats of different specifications, and the graphite boats are ensured to be positioned on corresponding preset calibration stations. The calibration main base body 1 and the adjustment base strip 51 are fixedly connected by using the adjustment positioning holes in a bolt connection mode.
A limit socket 52 for inserting and limiting the forward movement of the calibration seat 2 is formed between the bottom of the station positioning body 5 and the adjusting base strip 51
For the swing of the top calibration swing frame 4, the calibration main base body 1 is provided with a rotating shaft seat 14, one end of the top calibration swing frame 4 is installed on the rotating shaft seat 14 through a rotating shaft, and the rotating shaft seat 14 is correspondingly provided with a bearing hole and a bearing which are matched with the rotating shaft. Therefore, before the graphite boat moves into the calibration station, the open state of the top calibration swing frame 4 is maintained, which ensures that the graphite boat can smoothly enter the calibration station and swing downward after the graphite boat enters the calibration station, so that the calibration piece 6 of the top calibration swing frame 4 can contact the graphite boat and calibrate it. Since the top calibration wobble frame 4 is generally heavy, the pivot base 14 is provided with a buffer 13 connected to the top calibration wobble frame 4 to slow down the swing speed of the top calibration wobble frame 4 in order to assist the swing of the top calibration wobble frame 4. The cushioning member 13 is preferably a hydraulic support rod.
In order to stabilize the position state of the top aligning swing frame 4 at the time of aligning, one end of the top aligning swing frame 4 is provided with a support plate 41 for auxiliary support to support both ends of the top aligning swing frame 4 with the rotation shaft seat 14, respectively. Further, the lateral alignment moving seat 3 is provided with a fixing block 31 corresponding to the support plate 41, the fixing block 31 being provided with a fixing groove 311 into which the support plate is inserted and a pressing piece 312 mounted in the fixing groove 311 to clamp the support plate 41 into the fixing groove 311 by the pressing piece 312, thereby restricting upward rebound swing of the top alignment swing frame 4 at the time of alignment. The pressing piece 312 is preferably a bolt, and the side wall of the fixing groove 311 is correspondingly provided with a bolt hole matched with the bolt.
Further, the lateral calibration moving seat 3 is provided with a locking piece 32 for being directly and fixedly connected with the supporting plate 41, and the supporting plate 41 and the locking piece 32 are respectively provided with a corresponding bolt hole 8, so that the connection between the supporting plate 41 and the locking piece 32 is locked in a bolt connection manner, and therefore the top calibration swinging frame 4 cannot swing upwards.
Preferably, both the forward movement calibration seat 2 and the lateral movement calibration seat 3 are provided with a handle 7 for being pushed and pulled by a human hand.
While the foregoing is directed to the preferred embodiments of the present utility model, it will be appreciated by those skilled in the art that changes and modifications may be made without departing from the principles of the utility model, such changes and modifications are also intended to be within the scope of the utility model.
Claims (10)
1. The multi-surface correction device for the graphite boat is characterized by comprising a calibration main matrix, a forward movement calibration seat, a lateral movement calibration seat and a top calibration swing frame, wherein the forward movement calibration seat is used for carrying the graphite boat, and the calibration main matrix is provided with a station positioning body used for limiting the position of the forward movement calibration seat;
the front moving calibration seat, the lateral moving calibration seat and the top calibration swinging frame are respectively provided with a calibration piece for calibrating the graphite boat;
the forward movement calibration seat stops to a preset calibration station through the station positioning body, and the lateral movement calibration seat and the top calibration swinging frame move to the preset calibration station respectively, so that the side part and the top of the graphite boat on the forward movement calibration seat are in contact calibration with the calibration pieces of the lateral movement calibration seat and the top calibration swinging frame respectively.
2. The multi-sided calibration device of claim 1, wherein the calibration master substrate is provided with a lateral slide and a forward slide, and the lateral movement calibration seat and the forward movement calibration seat are slidably coupled to the lateral slide and the forward slide, respectively.
3. The multi-surface correction device according to claim 1, wherein the station positioning body is provided with an adjusting base bar for adjusting the installation position, a plurality of adjusting positioning holes are formed in the bottom of the adjusting base bar, and the calibration main base body is provided with positioning columns for the adjusting positioning holes to be sleeved in.
4. The multi-faceted calibration device of claim 1, wherein the calibration master substrate is provided with a pivot mount on which one end of the top calibration swing frame is mounted via a pivot.
5. The multi-surface correcting device according to claim 4, wherein one end of the top aligning swing frame is provided with a support plate for auxiliary support to support both ends of the top aligning swing frame with the rotation shaft seat, respectively.
6. The multi-sided correction device of claim 5, wherein the lateral movement alignment seat is provided with a fixing block corresponding to the support plate, the fixing block being provided with a fixing groove into which the support plate is inserted and a pressing piece installed in the fixing groove to clamp the support plate in the fixing groove by the pressing piece.
7. The multi-sided calibration device of claim 5 or 6, wherein the lateral movement calibration seat is provided with a locking block for direct fixed connection with the support plate, and the support plate and the locking block are each provided with a corresponding bolt hole.
8. The multi-faceted mirror of claim 4, wherein the pivot mount is provided with a buffer member coupled to the top calibration wobble frame to slow down a downswing speed of the top calibration wobble frame.
9. The multi-sided calibration device of claim 1, wherein the calibration member is provided with a plurality of calibration slots into which the graphite boat sheets are inserted, and a predetermined distance is provided between adjacent calibration slots.
10. The multi-sided correction device of claim 9, wherein the alignment member is provided with a V-shaped notch for guiding the graphite boat sheet to be inserted into the alignment slot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320924607.3U CN219998181U (en) | 2023-04-18 | 2023-04-18 | Multi-surface correction device for graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320924607.3U CN219998181U (en) | 2023-04-18 | 2023-04-18 | Multi-surface correction device for graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219998181U true CN219998181U (en) | 2023-11-10 |
Family
ID=88610392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320924607.3U Active CN219998181U (en) | 2023-04-18 | 2023-04-18 | Multi-surface correction device for graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219998181U (en) |
-
2023
- 2023-04-18 CN CN202320924607.3U patent/CN219998181U/en active Active
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| GR01 | Patent grant |