CN219991782U - Heater and single crystal furnace thermal field system - Google Patents

Abstract

The utility model discloses a heater and a single crystal furnace thermal field system, wherein the heater comprises: at least two first heating bodies, at least two second heating bodies and at least two connecting foot plates which are distributed oppositely; the first heating body is connected with the second heating body and is enclosed to form an annular heating body; along the circumferential direction of the annular heating body, two ends of the first heating body are respectively connected to the bottoms of two adjacent second heating bodies, and the connecting foot plate is fixedly connected to the bottoms of the second heating bodies. The safe distance from the outer wall of the second heating element to the heat preservation cylinder can be increased, the adjustable range of the wall thickness of the second heating element is further increased, the corrosion speed of the second heating element is reduced, the service life of the heater is prolonged, and the scrapping cost of the heater is reduced.

Description

Heater and single crystal furnace thermal field system

Technical Field

The utility model belongs to the technical field of crystal pulling, and particularly relates to a heater and a single crystal furnace thermal field system.

Background

In the existing crystal pulling technology, the bottom heater is generally formed by connecting heating petals spliced through the outside, so that the adjustable space between the outside of the bottom heater and the heat preservation barrel is limited, and the thickness of the adjustable connecting part of the heating petals is limited to be larger.

However, under the condition of insufficient thickness of the heating valve, the heating valve is easy to corrode faster, and further the service life of the bottom heater is lower, and the scrapping cost is higher.

Disclosure of Invention

In view of the above, embodiments of the present utility model have been developed to provide a heater and single crystal furnace thermal field system that overcomes or at least partially solves the above-described problems.

In order to solve the above-mentioned problems, in a first aspect, an embodiment of the present utility model discloses a heater including: at least two first heating bodies, at least two second heating bodies and at least two connecting foot plates which are distributed oppositely; wherein,

the first heating body is connected with the second heating body and is enclosed to form an annular heating body;

along the circumferential direction of the annular heating body, two ends of the first heating body are respectively connected to the bottoms of two adjacent second heating bodies;

the connecting foot plate is fixedly connected to the bottom of the second heating body.

Optionally, the first heat generator comprises a heat generating flap;

two ends of the heating valve are fixedly connected with two adjacent second heating bodies respectively, and the heating valve extends towards the center of the annular heating body;

the shape of the heating valve comprises: one of U-shaped, arcuate and circular.

Optionally, the first heating body further comprises two connecting parts;

the connecting part is vertically connected with the end part of the heating valve;

the connecting part is abutted with the bottom of the second heating body and fixed.

Optionally, the heater further comprises a first fastener, a first penetrating hole is formed in the first heating body at a position opposite to the second heating body, and a first mounting groove is formed in the second heating body at a position opposite to the first heating body;

the first fastener is respectively arranged in the first penetrating hole and the first mounting groove in a penetrating mode and used for fixing the first heating body to the bottom of the second heating body.

Optionally, the first penetrating hole includes a first through hole and a second through hole, and the first fastener includes a first penetrating portion and a second penetrating portion;

the second through hole is arranged between the second heating element and the first through hole;

the first through hole and the second through hole are communicated, and the aperture of the first through hole is larger than that of the second through hole so as to form a stepped hole in a combined mode;

the outer diameter of the first penetrating part is larger than that of the second penetrating part so as to form a step structure in a combined way;

the first penetrating part is arranged corresponding to the first through hole, and the second penetrating part is arranged corresponding to the second through hole.

Optionally, the second heating body comprises a first sub-body and a second sub-body;

the connecting foot plate is fixedly connected with the first sub-body and the second sub-body respectively.

Optionally, a second penetrating hole and a third penetrating hole are respectively arranged on the connecting foot plate, a second mounting groove is arranged at the bottom of the first sub-body, a third mounting groove is arranged at the bottom of the second sub-body, and the heater further comprises a second fastening piece and a third fastening piece;

the second fastener is respectively arranged in the second penetrating hole and the second mounting groove in a penetrating way and used for fixing the connecting foot plate and the first sub-body;

the third fastener is respectively arranged in the third penetrating hole and the third mounting groove in a penetrating mode and used for fixing the connecting foot plate and the second sub-body.

Optionally, the connecting foot plate is of a flat plate structure;

one end of the connecting foot plate is fixedly connected with the bottom of the second heating body, and the other end extends towards the center of the annular heating body.

Optionally, the connecting foot plate comprises a bending part and a straight part which are vertically connected;

the bending part is abutted with the bottom of the second heating body and fixed;

the straight part is bent towards the center of the annular heating body along the bending part.

In a second aspect, the embodiment of the utility model also discloses a thermal field system of the single crystal furnace, which comprises: the heater is provided.

In the embodiment of the utility model, along the circumferential direction of the annular heating body, two ends of the first heating body are respectively connected to the bottoms of two adjacent second heating bodies, and the connecting foot plate is fixedly connected to the bottoms of the second heating bodies, so that the first heating body and the connecting foot plate are arranged at the bottoms of the second heating bodies, the first heating body and the connecting foot plate can be prevented from interfering with the wall thickness of the second heating bodies, the safe distance from the outer wall of the second heating body to the heat preservation cylinder can be further increased, the adjustable range of the wall thickness of the second heating body is increased, the corrosion speed of the second heating body is reduced, the service life of the heater is prolonged, and the scrapping cost of the heater is reduced.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

FIG. 1 is a schematic view of a heater according to an embodiment of the present utility model;

FIG. 2 is a schematic diagram of a first sub-body according to an embodiment of the present utility model;

FIG. 3 is a schematic diagram of a first heat generator according to an embodiment of the present utility model;

FIG. 4 is a schematic view of a connecting foot plate according to an embodiment of the present utility model;

FIG. 5 is a schematic view of another connecting foot plate according to an embodiment of the present utility model;

FIG. 6 is a schematic view of a first fastener in an embodiment of the present utility model;

fig. 7 is a schematic cross-sectional view of a first fastener in accordance with an embodiment of the present utility model.

Reference numerals:

1-a first heating body, 11-a first penetrating hole, 12-a heating flap, 13-a connecting part, 2-a second heating body, 21-a first mounting groove, 22-a first sub-body, 221-a second mounting groove, 23-a second sub-body, 31-a first fastening piece, 311-a first penetrating part, 312-a second penetrating part, 32-a second fastening piece, 33-a third fastening piece, 4-a connecting foot plate, 41-a bending part, 42-a straight part, 43-a second penetrating hole, 44-a third penetrating hole and 45-a connecting hole.

Detailed Description

Reference will now be made in detail to embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements throughout or elements having like or similar functionality. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

The features of the utility model "first", "second" and the like in the description and in the claims may be used for the explicit or implicit inclusion of one or more such features. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more. Furthermore, in the description and claims, "and/or" means at least one of the connected objects, and the character "/", generally means that the associated object is an "or" relationship.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element in question must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The heater and single crystal furnace thermal field system described in embodiments of the present utility model are described below in conjunction with fig. 1-7. As shown in fig. 1, an embodiment of the present utility model discloses a heater including: at least two first heating bodies 1, at least two second heating bodies 2 and at least two connecting foot plates 4 which are distributed oppositely; the first heating body 1 and the second heating body 2 are connected and are enclosed to form an annular heating body; along the circumferential direction of the annular heating body, two ends of the first heating body 1 are respectively connected to the bottoms of two adjacent second heating bodies 2; the connecting foot plate 4 is fixedly connected to the bottom of the second heating body 2.

In the embodiment of the utility model, along the circumferential direction of the annular heating body, two ends of the first heating body 1 are respectively connected to the bottoms of two adjacent second heating bodies 2, and the connecting foot plate 4 is fixedly connected to the bottoms of the second heating bodies 2, so that the first heating body 1 and the connecting foot plate 4 are arranged at the bottoms of the second heating bodies 2, the first heating body 1 and the connecting foot plate 4 can be prevented from interfering with the wall thickness of the second heating bodies 2, the safe distance from the outer wall of the second heating body 2 to the heat preservation cylinder can be further increased, the adjustable range of the wall thickness of the second heating body 2 is increased, the corrosion speed of the second heating body 2 is reduced, the service life of the heater is prolonged, and the scrapping cost of the heater is reduced.

The heater in the embodiment of the utility model is an electric appliance which achieves a heating effect by utilizing electric energy. The application range is wide, the service life is long, and the reliability is high. At the heart of the heater principle is energy conversion, most widely electrical energy to thermal energy. The heater may be classified into electromagnetic heating, infrared heating, and resistance heating according to the kind of heating means.

The heater can be applied to a single crystal furnace, and particularly can be used for heating silicon materials in a quartz crucible in the single crystal furnace so as to draw a single crystal silicon rod. Alternatively, the heater may be used in industries requiring heating at high temperature, such as polysilicon production and ingot casting, electric spark machining, continuous metal casting, precious metal smelting, etc., and the embodiment of the utility model is described only by taking the application of the heater in a single crystal furnace to draw a single crystal silicon rod as an example, and other cases may be referred to as setting.

Specifically, the heater in the embodiment of the utility model can be used as a bottom heater and is arranged at the bottom of the quartz crucible. Specifically, the heater may be disposed around the crucible during the crystal pulling process to heat the silicon material within the crucible; the heat preservation cylinder can be covered outside the heater to play a role in heat preservation and heat insulation. The distance between the outer wall of the second heating body 2 and the inner wall of the heat preservation cylinder is a safe distance, wherein the safe distance is a distance between the heater and the heat preservation cylinder, no accident occurs, and the safe distance is at least controlled to be 20-30 mm.

Specifically, the heater may include at least two first heating bodies 1 and at least two second heating bodies 2 which are distributed relatively, the first heating bodies 1 and the second heating bodies 2 are connected to form an annular heating body in a surrounding manner, the number of the first heating bodies 1 and the number of the second heating bodies 2 can be the same or different, the heater can be specifically set according to actual requirements, the embodiment of the utility model is not specifically limited in this respect, the annular heating body is sleeved outside the quartz crucible, and the heating uniformity of silicon materials in the quartz crucible can be improved.

Specifically, the first heating body 1 is arranged at the bottom of the second heating bodies 2, and two ends of the first heating body 1 are respectively connected to the bottoms of two adjacent second heating bodies 2, so that the annular heating body can be conveniently assembled.

Specifically, the first heating element 1 is arranged at the bottom of the second heating element 2 and is fixed with the bottom of the second heating element 2, so that at least partial overlapping of the first heating element 1 and the second heating element 2 can be avoided, the adjustable range of the wall thickness of the second heating element 2 can be increased under the condition of ensuring the safe distance from the outer wall of the second heating element 2 to the heat preservation cylinder, the corrosion rate of the second heating element 2 is reduced, the service life of the heater is prolonged, and the scrapping cost of the heater is reduced.

Specifically, the first heating element 1 is disposed at the bottom of the second heating element 2, and the first heating element 1 may be fixed at the bottom of the second heating element 2 by adopting a bottom splicing manner, so that the first heating element 1 may protrude from the bottom of the second heating element 2.

Specifically, the wall thickness of the first heating element 1 and the wall thickness of the second heating element 2 may be the same, the overall thickness of the second heating element 2 may be the same, or the wall thickness of the second heating element 2 at the joint with the first heating element 1 may be thicker, so as to effectively improve the connection strength between the first heating element 1 and the second heating element 2, and the wall thicknesses of the first heating element 1 and the second heating element 2 may be thicker, so that the corrosion resistance of the annular heating body may be improved, further the service life of the heater may be prolonged, and the rejection cost of the heater may be reduced. In short, the thickness of the first heating element 1 and the second heating element 2 may be adjusted as needed, and may be partially reduced or partially increased.

Specifically, compared with the prior art, the first heating element 1 is fixed on the outer wall of the second heating element 2 in an outer splicing manner, the wall thickness of the second heating element 2 is designed to be 18 mm, and the safety distance between the heater and the heat preservation cylinder is 24-26 mm. In the embodiment of the utility model, the first heating element 1 is fixed at the bottom of the second heating element 2 in a bottom splicing manner, the wall thickness of the second heating element 2 can be designed to be 20 mm, and the safety distance from the heater to the heat preservation cylinder can be increased to 28-32 mm.

Specifically, connect sole 4 setting in the bottom of second heat-generating body 2 for connect sole 4 can connect second heat-generating body 2 from the bottom, make the heater can adopt the mode of bottom concatenation, can avoid connecting sole 4 and influence the wall thickness of second heat-generating body 2, and then can increase the safe distance of second heat-generating body 2 to the section of thick bamboo that keeps warm, can avoid connecting the junction of sole 4 and second heat-generating body 2 to appear striking sparks and draw the arc, and then can reduce the disability rate of heater and the disability cost of heater.

Specifically, the connecting foot plate 4 is disposed at the bottom of the second heating element 2, and the connecting foot plate 4 can be fixed at the bottom of the second heating element 2 in a bottom splicing manner, so that the connecting foot plate 4 can protrude from the bottom of the second heating element 2.

Specifically, the connection foot plates 4 may be provided in one-to-one correspondence with the second heat generating bodies 2.

Optionally, the first heat generator 1 comprises heat generating lobes 12; two ends of the heating valve 12 are fixedly connected with the bottoms of the two adjacent second heating bodies 2 respectively, and the heating valve 12 extends towards the center of the annular heating body; the shape of the heat generating lobes 12 includes: one of U-shaped, arcuate and circular.

In the embodiment of the utility model, the two ends of the heating flap 12 are respectively and fixedly connected with the bottoms of the two adjacent second heating bodies 2, so that the convenience and reliability of connecting the first heating body 1 with the second heating bodies 2 can be improved. The heating petals 12 extend towards the center of the annular heating body, so that the reliability of heating the quartz crucible by the first heating body 1 can be improved.

Specifically, the shape of the heat generating lobes 12 includes: one of the U-shape, the arc shape and the circular shape can improve the structural diversity of the heat generating lobes 12, and as shown in fig. 3, a case where the shape of the heat generating lobes 12 is the U-shape is shown, and other cases can be referred to as settings.

Optionally, as shown in fig. 3, the first heat generator 1 further includes two connection portions 13; the connecting part 13 is vertically connected to the end part of the heating valve 12; the connection portion 13 is fixed in contact with the bottom of the second heating element 2.

In the embodiment of the utility model, the connecting portion 13 is vertically connected to the end of the heat generating flap 12, and the connecting portion 13 is abutted and fixed with the bottom of the second heat generating body 2, so that the connecting portion 13 can fix the end of the heat generating flap 12 with the second heat generating body 2.

Specifically, the heat generating lobes 12 are fixedly connected to one end of the connecting portion 13 near the second heat generating body 2, so that the connecting portion 13 can protrude from the heat generating lobes 12 in a direction away from the bottom of the second heat generating body 2; alternatively, the heat generating lobes 12 are fixedly connected to one end of the connection portion 13 away from the second heat generating body 2, so that the connection portion 13 may protrude from the heat generating lobes 12 in a direction approaching the bottom of the second heat generating body 2.

Specifically, the connection portion 13 may be a plate-like structure, the wall thickness of the connection portion 13 may be the same as the wall thickness of the second heat generating body 2, and a side of the connection portion 13 away from the heat generating flap 12 may be disposed flush with the outer wall of the second heat generating body 2.

Specifically, the connection portion 13 may be provided with a first penetration hole 11 corresponding to the first mounting groove 21.

Specifically, the connection portion 13 may be fixed to the end portion of the heat generating flap 12 by bonding or bolting, or the connection portion 13 may be integrally formed with the heat generating flap 12.

Specifically, the purpose of reducing the material consumption and the cost can be achieved by reducing the height of the connecting part 13 protruding from the heating flap 12 and shortening the length of the heating flap 12 extending towards the center of the annular heating body.

Optionally, the heater further includes a first fastener 31, the first heating element 1 is provided with a first penetrating hole 11 at a position opposite to the second heating element 2, and the second heating element 2 is provided with a first mounting groove 21 at a position opposite to the first heating element 1; the first fastening members 31 are respectively inserted into the first insertion holes 11 and the first installation grooves 21, and fix the first heating element 1 to the bottom of the second heating element 2.

In the embodiment of the utility model, the first fastening piece 31 is respectively arranged on the first through hole 11 and the first mounting groove 21 in a penetrating way, so that the first heating body 1 is conveniently fixed at the bottom of the second heating body 2, and the structural stability of the annular heating body is further improved.

Specifically, when the first heat generating body 1 and the second heat generating body 2 are assembled, the first penetration hole 11 may be aligned with the first installation groove 21 first, and then the first fastener 31 may be sequentially penetrated through the first penetration hole 11 and the first installation groove 21.

Specifically, the first through hole 11 is a through hole hollowed out along the axial direction of the annular heating body, the first through hole 11 may be a threaded hole or a common through hole, and may be specifically set according to actual requirements, which is not specifically limited in the embodiment of the present utility model.

Specifically, the notch of the first installation groove 21 communicates with the first through hole 11, and the side wall of the first installation groove 21 may be a smooth surface, or a threaded structure may be disposed on the side wall of the first installation groove 21, which may be specifically set according to actual requirements, which is not specifically limited in the embodiment of the present utility model.

Specifically, the first heat generating body 1 is disposed at the bottom of the second heat generating body 2, and the first fastener 31 may be sequentially inserted through the first insertion hole 11 and the first installation groove 21 from the bottom to fix the first heat generating body 1 at the bottom of the second heat generating body 2. Furthermore, the first heat generating body 1 and the second heat generating body 2 are fixed by the first fastening member 31, and the connection plate can be eliminated, so that the use cost of the heater can be reduced.

Specifically, the connection part of the second heating element 2 and the first heating element 1 is a heating area of the second heating element 2, the wall thickness of the second heating element 2 in the heating area is the same as the wall thickness of other positions of the second heating element 2, so that the wall thickness of the heating area of the second heating element 2 can be increased, and the corrosion resistance of the second heating element 2 can be improved.

Specifically, the first fastener 31 may be a high-density carbon long bolt or a screw, which may be specifically set according to practical requirements, and the embodiment of the present utility model is not limited thereto.

Alternatively, the first penetration hole 11 includes a first through hole and a second through hole, and as shown in fig. 6 and 7, the first fastener 31 includes a first penetration portion 311 and a second penetration portion 312; the second through hole is arranged between the second heating body 2 and the first through hole; the first through hole is communicated with the second through hole, and the aperture of the first through hole is larger than that of the second through hole so as to form a stepped hole in a combined mode; the outer diameter of the first penetrating part 311 is larger than that of the second penetrating part 312 to form a step structure; the first penetrating portion 311 is disposed corresponding to the first through hole, and the second penetrating portion 312 is disposed corresponding to the second through hole.

In the embodiment of the present utility model, the outer diameter of the first penetrating portion 311 is larger than the outer diameter of the second penetrating portion 312, so that the first fastening member 31 may form a stepped structure, and the aperture of the first through hole is larger than the aperture of the second through hole, so that the first penetrating hole 11 may form a stepped hole, so that the first penetrating hole 11 is convenient to be matched with the first fastening member 31. Further, the first through hole 11 can limit the first through portion 311, and the reliability of fixing the first heat generating element 1 and the second heat generating element 2 by the first fastener 31 can be improved.

Alternatively, the second heat generating body 2 includes a first sub-body 22 and a second sub-body 23; the connecting foot plate 4 is fixedly connected with the first sub-body 22 and the second sub-body 23 respectively.

In the embodiment of the utility model, the connecting foot plate 4 is fixedly connected with the first sub-body 22 and the second sub-body 23 respectively, so that the assembly of the second heating body 2 is convenient to realize.

Specifically, the first sub-body 22 and the second sub-body 23 may be arc structures, and the arc lengths of the first sub-body 22 and the second sub-body 23 may be the same or different, which may be specifically set according to actual requirements, which is not specifically limited in the embodiment of the present utility model. As shown in fig. 2, a structure of the first sub-body 22 is shown, and the second sub-body 23 may be provided with reference.

Optionally, the connecting foot plate 4 is provided with a second penetrating hole 43 and a third penetrating hole 44 respectively, the bottom of the first sub-body 22 is provided with a second mounting groove 221, the bottom of the second sub-body 23 is provided with a third mounting groove, and the heater further comprises a second fastener 32 and a third fastener 33; the second fastening piece 32 is respectively arranged in the second penetrating hole 43 and the second mounting groove 221 in a penetrating way and is used for fixedly connecting the foot plate 4 and the first sub-body 22; the third fastening member 33 is respectively disposed through the third through hole 44 and the third mounting groove, and is used for fixedly connecting the foot board 4 and the second sub-body 23.

In the embodiment of the present utility model, the second fastening member 32 is respectively disposed through the second through hole 43 and the second mounting groove 221, so as to fixedly connect the foot board 4 and the first sub-body 22; the third fastening member 33 is respectively inserted into the third insertion hole 44 and the third mounting groove, so as to fixedly connect the foot board 4 and the second sub-body 23.

Specifically, the connection foot plate 4 is disposed at the bottom of the second heat generating body 2, and the second fastener 32 may be sequentially inserted into the second insertion hole 43 and the second mounting groove 221 from the bottom to fix the connection foot plate 4 and the first sub-body 22; the third fastener 33 may be sequentially inserted into the third insertion hole 44 and the third mounting groove from the bottom to fix the connection foot plate 4 and the second sub-body 23.

Specifically, the second through hole 43 and the third through hole 44 may be disposed with reference to the first through hole 11, which is not described in detail in the embodiment of the present utility model.

Specifically, the second mounting groove 221 and the third mounting groove may be set with reference to the first mounting groove 21, which is not described in detail in the embodiment of the present utility model.

Specifically, the second fastening member 32 and the third fastening member 33 may be disposed with reference to the first fastening member 31, which is not described in detail in the embodiment of the present utility model.

Alternatively, the connecting foot plate 4 is of a flat plate structure; one end of the connecting foot plate 4 is fixedly connected with the bottom of the second heating body 2, and the other end extends towards the center of the annular heating body.

In the embodiment of the present utility model, the connecting foot board 4 may have a flat plate structure, so that the structure of the connecting foot board 4 and the manufacturing cost of the connecting foot board 4 can be simplified. Moreover, the other end of the connecting foot plate 4 extends towards the center of the annular heating body, so that the connection of a power supply is facilitated.

Specifically, one end of the connecting foot plate 4 may be provided with the second through hole 43 and the third through hole 44, respectively; as shown in fig. 4, the other end of the connecting foot board 4 may be further provided with a connecting hole 45 so as to connect with a power supply, where the connecting hole 45 may be a strip hole or a step hole, and may be specifically set according to actual requirements, which is not specifically limited in the embodiment of the present utility model.

Specifically, the end of the connection foot plate 4 remote from the second heat-generating body 2 is also provided with a connection hole 45 for connecting a power supply.

Alternatively, as shown in fig. 4 and 5, the connection foot plate 4 includes a bent portion 41 and a flat portion 42 that are vertically connected; the bending part 41 is abutted and fixed with the bottom of the second heating element 2; the flat portion 42 is bent toward the center of the annular heat generating body along the bending portion 41.

In the embodiment of the utility model, the bending part 41 is vertically connected with the straight part 42, and the bending part 41 is abutted and fixed with the bottom of the second heating body 2, so that the fixed connection of the connecting foot plate 4 and the second heating body 2 is realized.

Specifically, the straight portion 42 is fixedly connected to one end of the bent portion 41 near the second heat generating body 2 such that the bent portion 41 protrudes from the straight portion 42 in a direction away from the bottom of the second heat generating body 2; alternatively, the straight portion 42 is fixedly connected to an end of the bent portion 41 remote from the second heat generating body 2 such that the bent portion 41 protrudes from the straight portion 42 in a direction approaching the bottom of the second heat generating body 2.

Specifically, the bent portion 41 may be provided with a second through hole 43 and a third through hole 44, respectively, and an end of the flat portion 42 remote from the bent portion 41 may be provided with a connection hole 45 for connecting a power source.

Specifically, the bent portion 41 and the flat portion 42 are vertically connected, so that the connection foot plate 4 may have an L-shaped structure. The bent portion 41 and the flat portion 42 may be fixed by bonding, welding or bolting, or the bent portion 41 and the flat portion 42 may be integrally formed, and may be specifically configured according to actual needs, which is not particularly limited in the embodiment of the present utility model.

Specifically, the overall height of the connecting foot plate 4 in the axial direction of the annular heat generating body may be 40 to 50 mm, the height of the bent portion 41 protruding from the straight portion 42 may be 30 to 35 mm, and the thickness of the straight portion 42 may be 15 to 20 mm. Taking the second through hole 43 as an example of a stepped hole, the stepped hole includes a large hole and a small hole which are stacked and conducted, the center lines of the large hole and the small hole coincide, and the large hole is disposed away from the second heating element 2.

Specifically, the purpose of reducing the material consumption and the cost can be achieved by reducing the height of the bending portion 41 and reducing the length of the straight portion 42 extending toward the center of the annular heating body along the bending portion 41.

The heater provided by the embodiment of the utility model at least comprises the following advantages:

in the embodiment of the utility model, along the circumferential direction of the annular heating body, two ends of the first heating body are respectively connected to the bottoms of two adjacent second heating bodies, and the connecting foot plate is fixedly connected to the bottoms of the second heating bodies, so that the first heating body and the connecting foot plate are arranged at the bottoms of the second heating bodies, the first heating body and the connecting foot plate can be prevented from interfering with the wall thickness of the second heating bodies, the safe distance from the outer wall of the second heating body to the heat preservation cylinder can be further increased, the adjustable range of the wall thickness of the second heating body is increased, the corrosion speed of the second heating body is reduced, the service life of the heater is prolonged, and the scrapping cost of the heater is reduced.

In a second aspect, the embodiment of the utility model also discloses a thermal field system of the single crystal furnace, which comprises the heater.

Specifically, the single crystal furnace thermal field system can also include the single crystal furnace, and set up in heat preservation section of thick bamboo, quartz crucible in the single crystal furnace and heater etc. the heater encircles quartz crucible sets up, and heat preservation section of thick bamboo can be covered and is located the heater is outside.

The single crystal furnace thermal field system provided by the embodiment of the utility model at least comprises the following advantages:

in the embodiment of the utility model, along the circumferential direction of the annular heating body, two ends of the first heating body are respectively connected to the bottoms of two adjacent second heating bodies, and the connecting foot plate is fixedly connected to the bottoms of the second heating bodies, so that the first heating body and the connecting foot plate are arranged at the bottoms of the second heating bodies, the first heating body and the connecting foot plate can be prevented from interfering with the wall thickness of the second heating bodies, the safe distance from the outer wall of the second heating body to the heat preservation cylinder can be further increased, the adjustable range of the wall thickness of the second heating body is increased, the corrosion speed of the second heating body is reduced, the service life of the heater is prolonged, and the scrapping cost of the heater is reduced.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims (9)

1. A heater, comprising: at least two first heating bodies, at least two second heating bodies and at least two connecting foot plates which are distributed oppositely; wherein,

the first heating body is connected with the second heating body and is enclosed to form an annular heating body;

along the circumferential direction of the annular heating body, two ends of the first heating body are respectively connected to the bottoms of two adjacent second heating bodies;

the connecting foot plate is fixedly connected to the bottom of the second heating body;

the first heating body comprises a heating flap and two connecting parts;

the connecting part is vertically connected with the end part of the heating valve;

the connecting part is abutted with the bottom of the second heating body and fixed.

2. The heater of claim 1, wherein both ends of the heating petals are fixedly connected with bottoms of two adjacent second heating bodies respectively, and the heating petals extend towards the center of the annular heating body;

the shape of the heating valve comprises: one of U-shaped, arcuate and circular.

3. The heater of claim 1, further comprising a first fastener, wherein the first heat-generating body is provided with a first through hole at a position opposite to the second heat-generating body, and wherein the second heat-generating body is provided with a first mounting groove at a position opposite to the first heat-generating body;

the first fastener is respectively arranged in the first penetrating hole and the first mounting groove in a penetrating mode and used for fixing the first heating body at the bottom of the second heating body.

4. The heater of claim 3, wherein the first through hole comprises a first through hole and a second through hole, and the first fastener comprises a first through portion and a second through portion;

the second through hole is arranged between the second heating element and the first through hole;

the first through hole and the second through hole are communicated, and the aperture of the first through hole is larger than that of the second through hole so as to form a stepped hole in a combined mode;

the outer diameter of the first penetrating part is larger than that of the second penetrating part so as to form a step structure in a combined way;

the first penetrating part is arranged corresponding to the first through hole, and the second penetrating part is arranged corresponding to the second through hole.

5. The heater of claim 1, wherein the second heat generating body comprises a first sub-body and a second sub-body;

the connecting foot plate is fixedly connected with the first sub-body and the second sub-body respectively.

6. The heater of claim 5, wherein the connecting foot plate is provided with a second through hole and a third through hole, the bottom of the first sub-body is provided with a second mounting groove, the bottom of the second sub-body is provided with a third mounting groove, and the heater further comprises a second fastener and a third fastener;

the second fastener is respectively arranged in the second penetrating hole and the second mounting groove in a penetrating way and used for fixing the connecting foot plate and the first sub-body;

the third fastener is respectively arranged in the third penetrating hole and the third mounting groove in a penetrating mode and used for fixing the connecting foot plate and the second sub-body.

7. The heater of claim 1 wherein said connecting foot plate is of flat configuration;

one end of the connecting foot plate is fixedly connected with the bottom of the second heating body, and the other end extends towards the center of the annular heating body.

8. The heater of claim 1 wherein said connecting foot plate includes a vertically connected bend and a flat portion;

the bending part is abutted with the bottom of the second heating body and fixed;

the straight part extends towards the center of the annular heating body along the bending part.

9. A single crystal furnace thermal field system, comprising: the heater of any one of claims 1-8.