CN219987442U - Dismounting and mounting device - Google Patents

Abstract

The embodiment of the utility model provides a dismounting device which is used for dismounting parts of semiconductor epitaxial equipment; the dismounting and mounting device comprises a supporting mechanism and a bearing mechanism; the support mechanism comprises a moving assembly and a support seat, the moving assembly is arranged at the bottom of the support seat, and the moving assembly is configured to drive the support seat to move; one side of the bearing mechanism is arranged on the supporting seat, the other side of the bearing mechanism extends back to the supporting seat, and the bearing mechanism is configured to reciprocate on the supporting seat along the vertical direction; the bearing mechanism comprises a first bearing arm and a second bearing arm, a bearing space is formed between the first bearing arm and the second bearing arm, and the bearing space is used for bearing parts; the first bearing arm and the second bearing arm can realize relative displacement along the radial direction of the bearing mechanism, so that the length of the bearing space along the radial direction is adjusted, the dismounting and mounting device is stable in structure, and labor is saved.

Description

Dismounting and mounting device

Technical Field

The utility model relates to the technical field of semiconductor equipment, in particular to a dismounting and mounting device.

Background

Various devices in the semiconductor field are large in size, and many parts constituting the devices are heavy, and taking semiconductor epitaxial devices as an example, semiconductor peripheral devices are devices for processing semiconductor wafers, and comprise parts such as a lower lamp set, a lower clamping ring, a dynamic seal lifting rotating assembly and the like.

In the related art, the components of the semiconductor epitaxial apparatus are generally carried to a designated position after being disassembled by a worker or are carried from the designated position to the mounting position of the semiconductor extension apparatus for assembly.

However, because the parts are heavy, the process of manual handling is time-consuming and labor-consuming.

Disclosure of Invention

The embodiment of the utility model provides a dismounting device, which is used for solving the technical problems that in the related art, in the process of dismounting semiconductor epitaxial equipment, the handling is carried out by manpower, and the time and the labor are wasted.

The embodiment of the utility model provides a dismounting device which is used for dismounting parts of semiconductor epitaxial equipment; the dismounting and mounting device comprises a supporting mechanism and a bearing mechanism;

the support mechanism comprises a moving assembly and a support seat, the moving assembly is arranged at the bottom of the support seat, and the moving assembly is configured to drive the support seat to move;

one side of the bearing mechanism is arranged on the supporting seat, the other side of the bearing mechanism extends back to the supporting seat, and the bearing mechanism is configured to reciprocate on the supporting seat along the vertical direction;

the bearing mechanism comprises a first bearing arm and a second bearing arm, a bearing space is formed between the first bearing arm and the second bearing arm, and the bearing space is used for bearing parts; the first bearing arm and the second bearing arm can realize relative displacement along the radial direction of the bearing mechanism so as to adjust the length of the bearing space along the radial direction.

In one possible implementation mode, the bearing mechanism further comprises a lifting piece, one side of the lifting piece is fixed on the supporting seat, a guide rail is arranged on the other side of the lifting piece, and the guide rail is arranged along the radial direction of the bearing mechanism;

the first bearing arm and the second bearing arm are arranged on the guide rail in parallel, and both the first bearing arm and the second bearing arm can reciprocate along the guide rail.

In one possible implementation, the guide rail comprises a first guide rail and a second guide rail, the first carrying arm and the first guide rail are mutually matched, the second carrying arm and the second guide rail are mutually matched, and the first guide rail and the second guide rail are arranged at intervals.

In one possible implementation manner, the guide rail further comprises a third guide rail and a fourth guide rail, wherein the third guide rail is arranged below the first guide rail in parallel, and the fourth guide rail is arranged below the second guide rail in parallel;

the bearing mechanism further comprises a first reinforcing arm and a second reinforcing arm, one end of the first reinforcing arm is matched with the third guide rail, and the other end of the first reinforcing arm extends along the extending direction of the first bearing arm and is fixed on the first bearing arm;

one end of the second reinforcing arm and the fourth guide rail are mutually matched, and the other end of the second reinforcing arm extends along the extending direction of the second bearing arm and is fixed on the second bearing arm.

In one possible implementation, the surfaces of the first bearing arm and the second bearing arm are both provided with a first locking member, the first locking member comprises a first fixing block and a first bolt, the first fixing block is provided with a first bolt hole, and the first bolt can pass through the first bolt hole to be abutted against the side wall of the part.

In one possible embodiment, the shape of the first carrier arm and the second carrier arm and the outer contour of the component part are adapted to one another.

In one possible implementation, the lifting member comprises a mounting frame, and the guide rail is arranged at one side of the mounting frame;

the supporting mechanism comprises an auxiliary piece, the auxiliary piece can reciprocate on the supporting seat along the vertical direction, the auxiliary piece is provided with a mounting groove which is mutually matched with the other side of the mounting frame, and the mounting frame is detachably mounted in the mounting groove.

In one possible implementation, the side walls of the mounting groove are provided with openings along which the mounting rack can be mounted in the mounting groove.

In one possible implementation, the dismounting device further comprises a second bolt which can be abutted against the outer side wall of the mounting frame through the side wall of the mounting groove.

In a possible implementation mode, the top of auxiliary member is provided with the second retaining member, and the second retaining member is provided with the butt joint, and the butt joint sets up to circular rubber spare, and the butt joint can butt in the supporting seat inside wall.

The embodiment of the utility model provides a dismounting and mounting device which can play a bearing role on semiconductor epitaxial equipment through the arrangement of a bearing mechanism; the bearing mechanism comprises a first bearing arm and a second bearing arm, and the first bearing arm and the second bearing arm realize relative displacement along the radial direction of the bearing mechanism so as to adjust the length of the bearing space along the radial direction, thereby being capable of adjusting the length of the bearing space along the radial direction according to the radial dimension of the part; according to the embodiment of the utility model, the bearing mechanism is driven to move to the designated position through the matching of the bearing mechanism and the supporting seat by the moving assembly, and particularly, the moving assembly can drive the bearing mechanism to move to a space inconvenient for workers to enter, so that the dismounting and mounting device is convenient to move. Through the arrangement of the embodiment of the utility model, the dismounting and mounting device which saves labor, has stable structure and is convenient to use is provided.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model and do not constitute a limitation on the utility model. In the drawings:

FIG. 1 is a schematic view of a detachable mounting device according to an embodiment of the present utility model;

FIG. 2 is a schematic view of the bearing mechanism in FIG. 1;

FIG. 3 is a schematic view of the support mechanism of FIG. 1;

fig. 4 is an enlarged schematic view of a part of the structure of the support mechanism in fig. 3.

Reference numerals illustrate:

100-supporting mechanisms; 200-a carrying mechanism;

110-a movement assembly; 120-supporting seats; 121-an auxiliary member; 122-mounting slots; 130-a third bolt; 140-a second locking member; 150-hanging ropes; 160-winch; 170-a load space;

210-a first load arm; 211-a first stiffening arm; 220-a second load arm; 221-a second stiffening arm; 230-lifting member; 231-a first rail; 232-a second rail; 233-a third rail; 234-fourth rail; 235-mounting frame; 240-first locking member.

Detailed Description

In order to make the technical solution of the present utility model better understood by those skilled in the art, the technical solution of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present utility model without making any inventive effort, shall fall within the scope of the present utility model.

It should be noted that in the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model, however, the present utility model may be practiced in other ways than as described herein, and therefore the scope of the present utility model is not limited by the specific embodiments disclosed below.

In the description of the present utility model, it should be understood that the directions or positional relationships indicated by the terms "center", "upper", "lower", "top", "bottom", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model. In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and include, for example, either fixedly attached, detachably attached, or integrally formed; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. However, it is noted that a direct connection indicates that two bodies connected together do not form a connection relationship by an excessive structure, but are connected to form a whole by a connection structure. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

The description as it relates to "first", "second", etc. in the present utility model is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature.

Various devices in the semiconductor field are large in size, a lot of parts constituting the devices are heavy, and the semiconductor epitaxial device is used as an example of the semiconductor epitaxial device, and is used for processing a semiconductor wafer, and the semiconductor epitaxial device comprises a lower lamp set, a lower clamping ring, a dynamic seal lifting rotating assembly and other parts, for example, in the installation process, the lower clamping ring and the dynamic seal lifting rotating assembly are usually installed after being assembled, and the assembled lower clamping ring and the assembled dynamic seal lifting rotating assembly are as heavy as 80 kg.

In the related art, the components of the semiconductor epitaxial apparatus are generally carried to a designated position after being disassembled by a worker or are carried from the designated position to the mounting position of the semiconductor extension apparatus for assembly.

However, because the spare part is heavier, and the setting position of spare part is higher, does not have special anchor clamps to fix the spare part in the in-process of manpower transport, wastes time and energy, and causes the landing of spare part easily, causes the spare part to damage.

Therefore, the embodiment of the utility model provides a disassembly and assembly device, which solves the technical problems that the disassembly, assembly and transportation of semiconductor epitaxial equipment are carried out only by manpower, and time and labor are wasted.

FIG. 1 is a schematic view of a detachable mounting device according to an embodiment of the present utility model; fig. 2 is a schematic structural view of the carrying mechanism in fig. 1.

The embodiment of the utility model provides a dismounting device, which is used for dismounting parts of semiconductor epitaxial equipment, and is shown in fig. 1 to 2; comprising a support mechanism 100 and a carrying mechanism 200;

the support mechanism 100 includes a moving assembly 110 and a support base 120, the moving assembly 110 is disposed at the bottom of the support base 120, and the moving assembly 110 is configured to drive the support base 120 to move;

one side of the bearing mechanism 200 is arranged on the supporting seat 120, the other side of the bearing mechanism 200 extends back to the supporting seat 120, and the bearing mechanism 200 is configured to reciprocate on the supporting seat 120 along the vertical direction;

the bearing mechanism 200 comprises a first bearing arm 210 and a second bearing arm 220, a bearing space 170 is formed between the first bearing arm 210 and the second bearing arm 220, and the bearing space 170 is used for bearing parts; the first carrying arm 210 and the second carrying arm 220 can implement relative displacement along the radial direction of the carrying mechanism 200, so as to adjust the length of the carrying space 170 along the radial direction, the direction shown by x1 in fig. 1 is the radial direction of the carrying mechanism 200, the direction shown by x2 in fig. 2 is the radial direction of the carrying space 170, and the directions of x1 and x2 are consistent, i.e. the radial direction of the carrying mechanism 200 is the radial direction of the carrying space 170.

For example, the moving assembly 110 may be provided as a universal wheel. Of course, the moving assembly 110 may be provided as other forms of pulleys.

The lower lamp group, the lower clamping ring, the dynamic seal lifting rotating assembly and other devices in the semiconductor epitaxial equipment are suspended in a containing cavity formed by the semiconductor epitaxial equipment through a suspension device.

In some examples, the first and second carrier arms 210 and 220 may be disposed crosswise, wherein first ends of the first and second carrier arms 210 and 220, which are distal from the connection point, are adjustment ends, and second ends of the first and second carrier arms 210 and 220, which are distal from the connection point, are carrier ends, wherein the carrier ends form the carrier space 170, the adjustment ends being for adjusting a length of the carrier space 170 in a radial direction.

In the disassembly process, the moving assembly 110 drives the disassembly and assembly device to move to the vicinity of the semiconductor epitaxial device, the bearing mechanism 200 reciprocates on the supporting seat 120 along the vertical direction until the bearing space 170 is positioned below the part to be disassembled, the relative displacement between the first bearing arm 210 and the second bearing arm 220 is adjusted, so that the bearing space 170 formed by the first bearing arm 210 and the second bearing arm 220 and the part are mutually matched, namely, the edge of the part is supported on the surfaces of the first bearing arm 210 and the second bearing arm 220, after a worker disassembles a connecting piece between the part and the semiconductor epitaxial device, the bearing mechanism 200 drives the part to reciprocate on the supporting seat 120 along the vertical direction, so that the part is separated from the semiconductor epitaxial device, and after the moving assembly 110 drives the semiconductor epitaxial device to a designated position, the part is driven to reciprocate on the supporting seat 120 along the vertical direction, so that the part is placed at the designated position.

Similarly, in the installation process, the dismounting and mounting device is driven by the moving assembly 110 to move to the part storage position, so that the carrying mechanism 200 reciprocates on the supporting seat 120 in the vertical direction until the part is mounted at the designated position of the semiconductor epitaxial device, the worker fixes the part on the semiconductor epitaxial device, and the carrying mechanism 200 reciprocates on the supporting seat 120 in the vertical direction and is separated from the part.

It should be noted that the bearing space 170 formed by the first bearing arm 210 and the second bearing arm 220 includes surfaces of the first bearing arm 210 and the second bearing arm 220. In particular implementations, the outer contoured edges of the components generally bear against the surfaces of the first and second carrier arms 210, 220.

The embodiment of the utility model provides a dismounting and mounting device, which can play a bearing role on semiconductor epitaxial equipment through the arrangement of a bearing mechanism 200; the bearing mechanism 200 comprises a first bearing arm 210 and a second bearing arm 220, and the first bearing arm 210 and the second bearing arm 220 realize relative displacement along the radial direction of the bearing mechanism 200 so as to adjust the length of the bearing space 170 along the radial direction, thereby being capable of adjusting the length of the bearing space 170 along the radial direction according to the radial dimension of the parts; according to the embodiment of the utility model, through the cooperation of the bearing mechanism 200 and the supporting seat 120, the bearing mechanism 200 can be driven to move to a designated position by the moving assembly 110, and particularly, the moving assembly 110 can drive the bearing mechanism 200 to move to a space inconvenient for a worker to enter, so that the movement of the dismounting and mounting device is facilitated. Through the arrangement of the embodiment of the utility model, the dismounting and mounting device which saves labor, has stable structure and is convenient to use is provided.

The implementation of the carrying mechanism 200 is illustrated below:

in some examples, the carrying mechanism 200 further includes a lifting member 230, one side of the lifting member 230 is fixed to the supporting seat 120, and the other side of the lifting member 230 is provided with a guide rail, and the guide rail is disposed along a radial direction of the carrying mechanism 200;

the first carrying arm 210 and the second carrying arm 220 are arranged in parallel on the guide rail, and the first carrying arm 210 and the second carrying arm 220 can both reciprocate along the guide rail.

It should be noted that, one side of the lifting member 230 is fixed to the supporting seat 120, and the lifting member 230 can reciprocate on the supporting seat 120 along the vertical direction.

According to the embodiment of the utility model, through the arrangement of the guide rails, the first bearing arm 210 and the second bearing arm 220 can reciprocate along the guide rails, so that the relative displacement of the first bearing arm 210 and the second bearing arm 220 along the radial direction of the bearing mechanism 200 is adjusted, the length of the bearing space 170 along the radial direction is adjusted, and the bearing space 170 can be mutually matched with parts of the semiconductor epitaxial equipment.

For example, the guide rails include a first guide rail 231 and a second guide rail 232, the first carrier arm 210 and the first guide rail 231 are fitted to each other, the second carrier arm 220 and the second guide rail 232 are fitted to each other, and the first guide rail 231 and the second guide rail 232 are disposed at a distance.

The first rail 231 and the second rail 232 each extend in the radial direction of the carrying mechanism 200.

One end of the first bearing arm 210 is provided with a first matching piece matched with the first guide rail 231, and the other end of the first bearing arm 210 extends away from the first guide rail 231; one end of the second carrying arm 220 is provided with a second matching piece matched with the second guide rail 232, and the other end of the second carrying arm 220 extends away from the second guide rail 232.

In a specific implementation, a first limiting member is disposed at an end of the first guide rail 231 facing away from the space, and a second limiting member is disposed at an end of the second guide rail 232 facing away from the space. The first bearing arm 210 can be protected through the arrangement of the first limiting piece, so that the first bearing arm 210 is prevented from derailing; likewise, the second limiting member can protect the second bearing arm 220, so as to prevent the second bearing arm 220 from derailing.

Further, the carrying mechanism 200 further includes a first housing and a second housing, the first housing forms a first accommodating cavity, the first accommodating cavity is used for accommodating the first rail 231, the second housing forms a second accommodating cavity, and the second accommodating cavity is used for accommodating the second rail 232. Of course, the first housing and the second housing may be integrally formed, and the first housing and the second housing may be separately formed. According to the embodiment of the utility model, the first guide rail 231 can be dustproof through the arrangement of the first shell; similarly, the second housing is provided to prevent dust on the second rail 232.

According to the embodiment of the utility model, the first guide rail 231 mutually matched with the first bearing arm 210 and the second guide rail 232 mutually matched with the second bearing arm 220 are arranged, and the first guide rail 231 and the second guide rail 232 are arranged at intervals, so that the first bearing arm 210 and the second bearing arm 220 are prevented from being damaged due to collision when moving to the extreme limit position, and the first bearing arm 210 and the second bearing arm 220 are protected.

Further, the guide rail further includes a third guide rail 233 and a fourth guide rail 234, the third guide rail 233 is disposed below the first guide rail 231 in parallel, and the fourth guide rail 234 is disposed below the second guide rail 232 in parallel;

the carrying mechanism 200 further includes a first reinforcing arm 211 and a second reinforcing arm 221, wherein one end of the first reinforcing arm 211 and the third guide rail 233 are mutually matched, and the other end of the first reinforcing arm 211 extends along the extending direction of the first carrying arm 210 and is fixed to the first carrying arm 210;

one end of the second reinforcement arm 221 and the fourth guide rail 234 are fitted to each other, and the other end of the second reinforcement arm 221 extends along the extending direction of the second carrying arm 220 and is fixed to the second carrying arm 220.

The first reinforcing arm 211 and the first bearing arm 210 are integrally welded and formed, and the second reinforcing arm 221 and the second bearing arm 220 are integrally welded and formed.

The third rail 233 and the fourth rail 234 are disposed at a distance from each other.

According to the embodiment of the utility model, through the arrangement of the first reinforcing arm 211 and the second reinforcing arm 221, one end of the first reinforcing arm 211 and the third guide rail 233 are mutually matched, and the other end of the first reinforcing arm 211 extends along the extending direction of the first bearing arm 210 and is fixed on the first bearing arm 210; and one end of the second reinforcement arm 221 and the fourth guide rail 234 are fitted to each other, and the other end of the second reinforcement arm 221 extends along the extending direction of the second carrying arm 220. The bearing strength of the first bearing arm 210 and the second bearing arm 220 can be improved, the first bearing arm 210 and the second bearing arm 220 are prevented from being deformed due to larger stress, and the service life of the bearing mechanism 200 is prolonged.

In other examples, the surfaces of the first and second carrier arms 210, 220 are each provided with a first retaining member 240, the first retaining member 240 comprising a first fixed block and a first bolt, the first fixed block being provided with a first bolt hole through which the first bolt can be passed against the component side wall.

The first locking member 240 is uniformly disposed around the surfaces of the first and second carrier arms 210 and 220.

Illustratively, the side wall of the component may be provided with a third bolt 130 hole that is mutually compatible with the first bolt. The first bolt can pass through the first bolt hole and the third bolt 130 hole in order to limit the parts.

According to the embodiment of the utility model, through the arrangement of the first locking piece 240, and the first locking piece 240 comprises the first fixing block and the first bolt, the first bolt passes through the first bolt hole to be abutted against the side wall of the part, so that the part can be limited, and the stability of the bearing mechanism 200 is improved.

In a further embodiment, the shape of the first carrier arm 210 and the second carrier arm 220 and the outer contour of the components are adapted to each other.

It should be noted that, the outer contours of the structures such as the lower lamp set, the lower clamping ring, the dynamic seal lifting and rotating assembly, etc. in the semiconductor epitaxial apparatus are all circular, so the shapes of the first carrying arm 210 and the second carrying arm 220 tend to be circular arc.

In the embodiment of the utility model, the shapes of the first bearing arm 210 and the second bearing arm 220 and the outer contour of the parts are mutually adapted, so that the first bearing arm 210 and the second bearing arm 220 can be better matched with the parts, the adaptation degree of the first bearing arm 210 and the second bearing arm 220 to the parts is improved, and the stability of the bearing mechanism 200 is further improved.

Fig. 3 is a schematic structural view of the support mechanism of fig. 1. Fig. 4 is an enlarged schematic view of a part of the structure of the support mechanism in fig. 3.

Further, referring to fig. 3 and 4, the elevating member 230 includes a mounting frame 235, and a guide rail is provided at one side of the mounting frame 235;

the supporting mechanism 100 includes an auxiliary member 121, the auxiliary member 121 can reciprocate on the supporting seat 120 along a vertical direction, the auxiliary member 121 is provided with a mounting groove 122 mutually matched with the other side of the mounting frame 235, and the mounting frame 235 is detachably mounted in the mounting groove 122.

By detachably mounting the mounting frame 235 to the mounting groove 122 of the auxiliary member 121, the embodiment of the utility model can replace different bearing mechanisms 200 through the detachable connection of the mounting frame 235 and the mounting groove 122. Different types of bearing mechanisms 200 can be replaced according to different parts, so that the adaptability of the dismounting and mounting device is further improved.

In other implementations, the side walls of the mounting slot 122 are provided with openings along which the mounting bracket 235 can be mounted within the mounting slot 122.

It should be noted that the mounting groove 122 has a first side wall and a second side wall that restrict the movement of the mounting frame 235 in the vertical direction, and the mounting groove 122 further has a third side wall and a fourth side wall that restrict the movement of the mounting frame 235 in the axial direction perpendicular to the vertical direction. The opening may be disposed on the first sidewall, where the first sidewall is a sidewall facing upward in the vertical direction.

The embodiment of the utility model facilitates the installation of the installation frame 235 in the installation groove 122 through the opening by arranging the opening, and facilitates the disassembly and the installation of the installation frame 235.

Further, the dismounting device further comprises a second bolt, and the second bolt can penetrate through the side wall of the mounting groove 122 to abut against the outer side wall of the mounting frame 235.

It should be noted that, the side wall of the mounting groove 122 is provided with a third bolt 130 hole, and the second bolt passes through the third bolt 130 hole to abut against the outer side wall of the mounting frame 235.

According to the embodiment of the utility model, through the arrangement of the second bolts, the second bolts can pass through the holes of the third bolts 130 to abut against the outer side wall of the mounting frame 235 so as to fix the mounting frame 235 in the mounting groove 122, thereby improving the structural stability of the dismounting and mounting device.

In another implementation manner, the top of the auxiliary member 121 is provided with a second locking member 140, and the second locking member 140 is provided with an abutment, which is provided as a circular rubber member and can abut against the inner side wall of the supporting seat 120.

For example, second locking member 140 may employ a quick clamp. The quick clamp comprises an operation part and a telescopic part, wherein the abutting joint is one end of the telescopic part abutting against the inner side wall of the supporting seat 120, the operation part and the telescopic part are connected through a connecting rod structure, and when the operation part is rotated in a first direction, the telescopic part can be abutted against the inner side wall of the supporting seat 120; rotation of the operating portion in the second direction may cause the telescoping portion and the sidewall of the support base 120 to separate.

For another example, the second locking member 140 includes a second fixing block and a third bolt 130, the second fixing block is disposed on the top wall of the auxiliary member 121, the second fixing block is provided with a second bolt hole, the third bolt 130 can penetrate through the second bolt hole to abut against the inner side wall of the supporting seat 120, and a circular rubber member may be disposed at the abutting end of the third bolt 130.

In the specific implementation, when the auxiliary piece 121 drives the mounting frame 235 to move to the designated position, the fastening piece is propped against the inner side wall of the supporting seat 120, so that the auxiliary piece 121 can be fixed at the designated position, and then the bearing mechanism 200 is fixed at the designated position, the shaking of the parts in the process of disassembling and assembling the parts by workers is avoided, and the structural stability of the disassembling and assembling device is improved.

In other implementations, the support mechanism 100 further includes a lifting rope 150, a winch 160, and a rolling member, wherein one end of the lifting rope 150 is wound around the winch 160, the other end of the lifting rope is fixed to the auxiliary member 121 via the rolling member, the rolling member is fixed to a top wall of the support base, and the winch is fixed to a side of the support base 120 facing away from the lifting mechanism.

For example, the rolling elements may be provided as fixed pulleys.

Illustratively, the support mechanism 100 may further include a screw drive assembly by which the carrier mechanism 200 reciprocates in a vertical direction on the support base 120. Of course, the supporting mechanism 100 may also implement the carrier mechanism 200 to reciprocate on the supporting seat 120 along the vertical direction by other devices, which is not limited herein.

The embodiment of the utility model can realize the movement of the bearing mechanism 200 on the supporting seat 120 along the vertical direction by the retraction of the lifting rope 150 through the mutual matching of the lifting rope 150 and the winch 160 and the retraction of the lifting rope 150 through the winch 160.

It is to be understood that, based on the several embodiments provided in the present utility model, those skilled in the art may combine, split, reorganize, etc. the embodiments of the present utility model to obtain other embodiments, which all do not exceed the protection scope of the present utility model.

The foregoing detailed description of the embodiments of the present utility model further illustrates the purposes, technical solutions and advantageous effects of the embodiments of the present utility model, and it should be understood that the foregoing is merely a specific implementation of the embodiments of the present utility model, and is not intended to limit the scope of the embodiments of the present utility model, and any modifications, equivalent substitutions, improvements, etc. made on the basis of the technical solutions of the embodiments of the present utility model should be included in the scope of the embodiments of the present utility model.

Claims (10)

1. A dismounting device for dismounting parts of a semiconductor epitaxial apparatus; the dismounting and mounting device is characterized by comprising a supporting mechanism (100) and a bearing mechanism (200);

the supporting mechanism (100) comprises a moving assembly (110) and a supporting seat (120), wherein the moving assembly (110) is arranged at the bottom of the supporting seat (120), and the moving assembly (110) is configured to drive the supporting seat (120) to move;

one side of the bearing mechanism (200) is arranged on the supporting seat (120), the other side of the bearing mechanism (200) extends away from the supporting seat (120), and the bearing mechanism (200) is configured to reciprocate on the supporting seat (120) along the vertical direction;

the bearing mechanism (200) comprises a first bearing arm (210) and a second bearing arm (220), a bearing space (170) is formed between the first bearing arm (210) and the second bearing arm (220), and the bearing space (170) is used for bearing the parts; the first bearing arm (210) and the second bearing arm (220) can realize relative displacement along the radial direction of the bearing mechanism (200) so as to adjust the length of the bearing space (170) along the radial direction.

2. The dismounting and mounting device according to claim 1, characterized in that the carrying mechanism (200) further comprises a lifting member (230), one side of the lifting member (230) being fixed to the support base (120), the other side of the lifting member (230) being provided with a guide rail, which is arranged in the radial direction of the carrying mechanism (200);

the first bearing arm (210) and the second bearing arm (220) are arranged on the guide rail in parallel, and the first bearing arm (210) and the second bearing arm (220) can both reciprocate along the guide rail.

3. The dismounting device as claimed in claim 2, characterized in that the guide rail comprises a first guide rail (231) and a second guide rail (232), the first carrier arm (210) and the first guide rail (231) being mutually adapted, the second carrier arm (220) and the second guide rail (232) being mutually adapted, the first guide rail (231) and the second guide rail (232) being arranged at a distance.

4. A dismounting device as claimed in claim 3, characterized in that the guide rail further comprises a third guide rail (233) and a fourth guide rail (234), the third guide rail (233) being arranged side by side under the first guide rail (231), the fourth guide rail (234) being arranged side by side under the second guide rail (232);

the bearing mechanism (200) further comprises a first reinforcing arm (211) and a second reinforcing arm (221), one end of the first reinforcing arm (211) and the third guide rail (233) are mutually matched, and the other end of the first reinforcing arm (211) extends along the extending direction of the first bearing arm (210) and is fixed on the first bearing arm (210);

one end of the second reinforcing arm (221) and the fourth guide rail (234) are mutually matched, and the other end of the second reinforcing arm (221) extends along the extending direction of the second bearing arm (220) and is fixed on the second bearing arm (220).

5. A dismounting and mounting arrangement according to claim 3, characterized in that the surfaces of the first and second carrier arms (210, 220) are each provided with a first locking member (240), the first locking members (240) comprising a first fixing block and a first bolt, the first fixing block being provided with a first bolt hole through which the first bolt can be passed against the component side wall.

6. The dismounting device as claimed in any one of claims 1-5, characterized in that the shape of the first carrier arm (210) and the second carrier arm (220) and the outer contour of the component part are adapted to each other.

7. The dismounting device as claimed in claim 2, characterized in that the lifting member (230) comprises a mounting frame (235), the guide rail being provided at one side of the mounting frame (235);

the supporting mechanism (100) comprises an auxiliary piece (121), the auxiliary piece (121) can reciprocate on the supporting seat (120) along the vertical direction, the auxiliary piece (121) is provided with a mounting groove (122) mutually matched with the other side of the mounting frame (235), and the mounting frame (235) is detachably mounted in the mounting groove (122).

8. The dismounting device as claimed in claim 7, characterized in that the side wall of the mounting groove (122) is provided with an opening along which the mounting bracket (235) can be mounted in the mounting groove (122).

9. The dismounting device as claimed in claim 7, further comprising a second bolt that is capable of abutting against the outer side wall of the mounting bracket (235) through the mounting slot (122) side wall.

10. The dismounting and mounting device according to claim 7, characterized in that the top of the auxiliary member (121) is provided with a second locking member (140), the second locking member (140) being provided with an abutment, which abutment is capable of abutting against the inner side wall of the support base (120).