CN219981064U - Anti-blocking heating rod for semiconductor tail gas pipeline - Google Patents
Anti-blocking heating rod for semiconductor tail gas pipeline Download PDFInfo
- Publication number
- CN219981064U CN219981064U CN202320816614.1U CN202320816614U CN219981064U CN 219981064 U CN219981064 U CN 219981064U CN 202320816614 U CN202320816614 U CN 202320816614U CN 219981064 U CN219981064 U CN 219981064U
- Authority
- CN
- China
- Prior art keywords
- heating rod
- sealing cover
- gas pipeline
- heat dissipation
- blocking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 62
- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 230000017525 heat dissipation Effects 0.000 claims abstract description 16
- 238000007789 sealing Methods 0.000 claims description 33
- 238000005260 corrosion Methods 0.000 claims description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 20
- 239000007789 gas Substances 0.000 abstract description 18
- 229910001873 dinitrogen Inorganic materials 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 239000002912 waste gas Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000010006 flight Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Abstract
The utility model discloses an anti-blocking heating rod for a semiconductor tail gas pipeline, which comprises a device body, wherein the device body comprises a heating rod device and a connecting wire, and the connecting wire is arranged at the left end of the heating rod device; the heating rod device is of a cylindrical structure, a plurality of groups of heat dissipation spiral sheets distributed in a transverse equidistant mode are arranged on the surface of the heating rod device, and the heat dissipation spiral sheets are of a spiral structure. This kind of device can make and sweep nitrogen gas temperature higher, prevents that anti-blocking effect is better to and extension heating rod life, this kind of semiconductor tail gas pipeline prevents that anti-blocking heating rod closely welds the heat dissipation flight around the heating rod, makes nitrogen gas rotate around the heating rod is spiral, increases with nitrogen gas area of contact, makes heat exchange efficiency higher, and gas temperature is higher.
Description
Technical Field
The utility model relates to the technical field of semiconductor equipment, in particular to an anti-blocking heating rod for a semiconductor tail gas pipeline.
Background
In the production process of the general semiconductor industry, a large amount of chemicals and special gases are used, a large amount of process waste gas of toxic and harmful gases is continuously generated in the production link, the process waste gas needs to be collected, treated and discharged synchronously with the production process, and waste gas treatment equipment is an integral part of the production process, and the safety and stability of the waste gas treatment equipment are directly related to the productivity utilization rate, the product yield rate, the professional health of staff and the ecological environment.
The conventional semiconductor device has the following defects:
in the existing semiconductor tail gas pipeline or waste gas treatment equipment, pipeline blockage is easily caused at the position with larger angle or temperature change of the pipeline, so that the production of semiconductors is delayed, the contact surface of a heating rod and nitrogen is small, and the heat exchange efficiency is low.
Disclosure of Invention
(one) solving the technical problems
Aiming at the defects of the prior art, the utility model provides an anti-blocking heating rod for a semiconductor tail gas pipeline, which solves the problems of low heat exchange efficiency and small contact surface between the heating rod and nitrogen gas caused by pipeline blockage easily caused by the pipeline blockage at the position with larger angle or temperature change in the existing semiconductor tail gas pipeline or waste gas treatment equipment.
(II) technical scheme
In order to achieve the above purpose, the utility model is realized by the following technical scheme: the anti-blocking heating rod for the semiconductor tail gas pipeline comprises a device body, wherein the device body comprises a heating rod device and a connecting wire, and the connecting wire is arranged at the left end of the heating rod device;
preferably, the heating rod device is in a cylindrical structure, a plurality of groups of heat dissipation spiral sheets distributed in a transverse equidistant mode are arranged on the surface of the heating rod device, and the heat dissipation spiral sheets are in a spiral structure.
Preferably, the heating rod device comprises an anti-corrosion shell, a heating rod core and a sealing cover, wherein the anti-corrosion shell is of a hollow structure, the heating rod core is arranged in the anti-corrosion shell, and the sealing cover is arranged at the top of the anti-corrosion shell.
Preferably, the sealing cover is of a circular structure, a connecting block is arranged at the bottom of the sealing cover, a plurality of groups of threads are arranged on the surface of the connecting block, a sealing gasket is arranged on the outer side of the top of the sealing cover, a connecting hole is formed in the top of the sealing cover, and a rubber ring is arranged on the outer side of the connecting hole.
(III) beneficial effects
The utility model provides an anti-blocking heating rod for a semiconductor tail gas pipeline. The beneficial effects are as follows:
the anti-blocking heating rod for the semiconductor tail gas pipeline is characterized in that the temperature of nitrogen purging is higher, the anti-blocking effect is better, the service life of the heating rod is prolonged, the heat dissipation spiral sheets are tightly welded around the heating rod, nitrogen is enabled to spirally rotate around the heating rod, the contact area with the nitrogen is increased, the heat exchange efficiency is higher, and the gas temperature is higher.
Drawings
FIG. 1 is a schematic view of the overall structure of the present utility model;
FIG. 2 is a schematic view of the structure of the inside of the heating rod device of the present utility model;
fig. 3 is a schematic structural view of the sealing cap of the present utility model.
In the figure, 1, a device body; 2. a heating rod device; 3. a connecting wire; 4. a heat dissipation spiral sheet; 5. an anti-corrosion enclosure; 6. a heating rod core; 7. sealing cover; 8. a connecting block; 9. a thread; 10. a connection hole; 11. a rubber ring; 12. and a sealing gasket.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-3, the embodiment of the utility model provides a technical scheme: the anti-blocking heating rod for the semiconductor tail gas pipeline comprises a device body 1, wherein the device body 1 comprises a heating rod device 2 and a connecting wire 3, and the connecting wire 3 is arranged at the left end of the heating rod device 2;
the heating rod device 2 is cylindric structure, heating rod device 2 surface is equipped with a plurality of groups and is the heat dissipation flight 4 that horizontal equidistance mode distributes, heat dissipation flight 4 is heliciform structure, and when setting up a plurality of groups of heat dissipation flights 4 to the heating rod device 2 outside, nitrogen gas can rotate around the heat dissipation flight 4 in the heating rod device 2 outside, further increases and nitrogen gas area of contact, makes heat exchange efficiency higher, and gas temperature is higher.
The heating rod device 2 comprises an anti-corrosion shell 5, a heating rod core 6 and a sealing cover 7, wherein the interior of the anti-corrosion shell 5 is of a hollow structure, the heating rod core 6 is arranged in the anti-corrosion shell 5, the sealing cover 7 is arranged at the top of the anti-corrosion shell 5, the heating rod core 6 is placed in the anti-corrosion shell 5, and the anti-corrosion shell 5 can protect the heating rod core 6 and prevent the heating rod core 6 from being corroded.
The sealing cover 7 is circular structure, sealing cover 7 bottom is equipped with connecting block 8, connecting block 8 surface is equipped with a plurality of screw threads 9 of group, sealing cover 7 top outside is equipped with sealing gasket 12, connecting hole 10 has been seted up at sealing cover 7 top, the connecting hole 10 outside is equipped with rubber circle 11, sealing cover 7 can insert anticorrosive outer shell 5 top through connecting block 8 of bottom to connect anticorrosive outer shell 5 and sealing cover 7 through screw thread 9, fixed, and sealing gasket 12 can improve the compactness of junction, prevent that the condition of seepage from taking place, and the connecting hole 10 at sealing cover 7 top is in order to be convenient for the plug-in connection of connecting wire 3, and the rubber circle 11 in the connecting hole 10 outside can seal the junction of connecting hole 10.
Working principle: during operation, when the heat dissipation spiral sheets 4 are arranged on the outer side of the heating rod device 2, nitrogen can rotate around the heat dissipation spiral sheets 4 on the outer side of the heating rod device 2, the contact area with the nitrogen is further increased, the heat exchange efficiency is higher, the gas temperature is higher, the heating rod core 6 is placed in the anti-corrosion shell 5, the anti-corrosion shell 5 can protect the heating rod core 6, the heating rod core 6 is prevented from being corroded, the sealing cover 7 in the device body 1 can be inserted into the top of the anti-corrosion shell 5 through the connecting block 8 at the bottom, so that the anti-corrosion shell 5 and the sealing cover 7 are connected and fixed through the threads 9, the tightness of the connecting position can be improved by the sealing gasket 12, the occurrence of leakage is prevented, the connecting hole 10 at the top of the sealing cover 7 is convenient for the insertion connection of the connecting wire 3, and the rubber ring 11 on the outer side of the connecting hole 10 can seal the connecting position of the connecting hole 10.
The utility model relates to a device body, in particular to a device body; 2. a heating rod device; 3. a connecting wire; 4. a heat dissipation spiral sheet; 5. an anti-corrosion enclosure; 6. a heating rod core; 7. sealing cover; 8. a connecting block; 9. a thread; 10. a connection hole; 11. a rubber ring; 12. the utility model solves the problems that in the existing semiconductor tail gas pipeline or waste gas treatment equipment, pipeline blockage is easy to occur at a position with larger angle or temperature change of the pipeline, so that the production of a semiconductor is delayed, the contact surface of a heating rod and nitrogen is small, and the heat exchange efficiency is low.
While the fundamental and principal features of the utility model and advantages of the utility model have been shown and described, it will be apparent to those skilled in the art that the utility model is not limited to the details of the foregoing exemplary embodiments, but may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (3)
1. The utility model provides a stifled heating rod is prevented to semiconductor tail gas pipeline which characterized in that: the device comprises a device body (1), wherein the device body (1) comprises a heating rod device (2) and a connecting wire (3), and the connecting wire (3) is arranged at the left end of the heating rod device (2);
the heating rod device (2) is of a cylindrical structure, a plurality of groups of heat dissipation spiral sheets (4) distributed in a transverse equidistant mode are arranged on the surface of the heating rod device (2), and the heat dissipation spiral sheets (4) are of a spiral structure.
2. The semiconductor off-gas pipeline anti-blocking heating rod according to claim 1, wherein: the heating rod device (2) comprises an anti-corrosion shell (5), a heating rod core (6) and a sealing cover (7), wherein the interior of the anti-corrosion shell (5) is of a hollow structure, the heating rod core (6) is installed in the anti-corrosion shell (5), and the sealing cover (7) is installed at the top of the anti-corrosion shell (5).
3. The semiconductor off-gas pipeline anti-blocking heating rod according to claim 2, wherein: the sealing cover (7) is of a circular structure, a connecting block (8) is arranged at the bottom of the sealing cover (7), a plurality of groups of threads (9) are arranged on the surface of the connecting block (8), a sealing gasket (12) is arranged on the outer side of the top of the sealing cover (7), a connecting hole (10) is formed in the top of the sealing cover (7), and a rubber ring (11) is arranged on the outer side of the connecting hole (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320816614.1U CN219981064U (en) | 2023-04-13 | 2023-04-13 | Anti-blocking heating rod for semiconductor tail gas pipeline |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320816614.1U CN219981064U (en) | 2023-04-13 | 2023-04-13 | Anti-blocking heating rod for semiconductor tail gas pipeline |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219981064U true CN219981064U (en) | 2023-11-07 |
Family
ID=88584435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320816614.1U Active CN219981064U (en) | 2023-04-13 | 2023-04-13 | Anti-blocking heating rod for semiconductor tail gas pipeline |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219981064U (en) |
-
2023
- 2023-04-13 CN CN202320816614.1U patent/CN219981064U/en active Active
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| GR01 | Patent grant |