CN219979497U - Ellipsoidal reflector, cathode fluorescent probe and detection system thereof - Google Patents

Abstract

The utility model provides an ellipsoidal reflector, a cathode fluorescent probe and a detection system thereof, wherein the ellipsoidal reflector comprises: a first inclined plane, an ellipsoid and a signal reflection space; the signal reflection space is used for accommodating a sample, and the first inclined plane is arranged above the ellipsoid; the first inclined plane is provided with a center small hole, and the electron beam focused by the electromagnetic lens is converged on the sample surface in the signal reflection space through the center small hole, so that the sample surface excites a cathode fluorescent signal; and the ellipsoidal surface is used for reflecting the cathode fluorescent signal according to a preset ellipsoidal path under the signal reflection space. The reflection signals obtained by reflection are converged at one focus, so that the cathode fluorescence collection efficiency can be improved, the signal intensity is improved, the signal-to-noise ratio is improved, and the image quality is improved by collecting more cathode fluorescence signals. Meanwhile, the collected high signal intensity is favorable for carrying out spectrum analysis of cathode fluorescence signals, and the applicability is stronger.

Description

Ellipsoidal reflector, cathode fluorescent probe and detection system thereof

Technical Field

The utility model relates to the technical field of cathode fluorescence, in particular to an ellipsoidal reflector, a cathode fluorescence probe and a detection system thereof.

Background

At present, a chip direct detection mode is mainly adopted for collecting cathode fluorescence signals excited by electron beams in a scanning electron microscope. For the direct detection mode of the chip, a detector is mainly formed by mounting a silicon photomultiplier (Silicon photomultiplier, siPM) chip on a printed circuit board (Printed Circuit Board, PCB) with an opening at a specific angle, and the detector is placed under a pole shoe of a scanning electron microscope to collect cathode fluorescence signals excited by electron beams for full-spectrum imaging.

However, due to the limitation of chip arrangement, some cathode fluorescence can not be collected, resulting in degradation of imaging quality. Furthermore, direct detection using a chip is not possible for cathodic fluorescence spectroscopy.

Disclosure of Invention

The embodiment of the utility model at least provides an ellipsoidal reflector, a cathode fluorescent probe and a detection system thereof, so as to improve imaging quality through ellipsoidal reflection.

In a first aspect, an embodiment of the present utility model provides an ellipsoidal reflector, including: a first inclined plane, an ellipsoid and a signal reflection space; the signal reflection space is used for accommodating a sample, and the first inclined plane is arranged above the ellipsoidal surface;

the first inclined plane is provided with a center small hole, and the electron beam focused by the electromagnetic lens passes through the center small Kong Huiju and is arranged on the sample surface in the signal reflection space, so that the sample surface excites a cathode fluorescence signal;

the ellipsoidal surface is used for reflecting the cathode fluorescent signal according to a preset ellipsoidal path under the signal reflection space.

In one possible embodiment, the device further comprises a second inclined plane; the second inclined plane is arranged above the ellipsoidal surface and is abutted against the first inclined plane;

the second inclined plane is used for fixing the ellipsoidal reflector on an optical fiber assembly for connecting signal processing equipment through at least one first fixing hole.

In one possible embodiment, the inclination angle of the first inclined surface is larger than the inclination angle of the second inclined surface.

In one possible embodiment, the device further comprises a connecting piece; the connecting piece is abutted with the ellipsoid;

the connecting piece is used for fixing the ellipsoidal reflector on the optical fiber assembly for connecting the signal processing equipment through at least one second fixing hole.

In a possible embodiment, the ellipsoid is specifically used for:

and transmitting a reflection signal obtained by reflecting the cathode fluorescent signal according to a preset ellipsoidal path to the signal processing equipment through the optical fiber assembly.

In one possible embodiment, the device further comprises a plurality of side surfaces, wherein the plurality of side surfaces are respectively arranged around the ellipsoid;

the side surfaces are used for supporting the ellipsoid so that the ellipsoid is vertically arranged right above the sample in the signal reflection space.

In one possible embodiment, the ellipsoid conforms to the ellipsoid equation:

wherein a, b and c are used for representing half shafts of ellipsoids, and a > b is larger than or equal to c >0.

In one possible embodiment, the ellipsoid is made of aluminum.

In one possible embodiment, the central aperture has a diameter of 1mm.

In a second aspect, the present utility model also provides a cathode fluorescence probe comprising: a fiber optic assembly, and an ellipsoidal mirror as set forth in the first aspect and any of its various embodiments; the optical fiber assembly is abutted with the ellipsoidal reflector;

the ellipsoidal reflector is used for reflecting a cathode fluorescent signal generated by scanning the electron beam focused by the electromagnetic lens on the surface of the sample according to a preset ellipsoidal path to obtain a reflected signal;

the optical fiber assembly is used for transmitting the reflected signal to signal processing equipment.

In one possible embodiment, the optical fiber assembly comprises an optical fiber component for deriving the reflected signal, and a soft optical fiber tube connecting the optical fiber component and the signal processing apparatus;

wherein the optical fiber component is disposed at a signal receiving focal point of the ellipsoidal reflector.

In a third aspect, the present utility model also provides a cathode fluorescence detection system, comprising: a scanning electron microscope, the cathode fluorescence probe of the second aspect, and a signal processing device;

the scanning electron microscope is used for generating electron beams and converging the electron beams focused by the electromagnetic lens on the surface of the sample accommodated under the cathode fluorescent probe;

the cathode fluorescence probe is used for reflecting a cathode fluorescence signal excited by the surface of the sample according to a preset ellipsoidal path and transmitting the obtained reflected signal to the signal processing equipment;

the signal processing device is used for processing the reflected signal to obtain a processing result.

In one possible embodiment, the signal processing device comprises at least one of:

the image processing equipment is used for carrying out cathode fluorescence imaging based on the reflection signals to obtain cathode fluorescence images;

and the spectrum analysis equipment is used for carrying out cathode fluorescence spectrum analysis based on the reflection signals to obtain spectrum data.

By adopting the ellipsoidal reflector, the cathode fluorescent probe and the detection system thereof, the ellipsoidal reflector mainly comprises a first inclined plane, an ellipsoidal surface and a signal reflection space; the electron beam focused by the electromagnetic lens is converged on the surface of the sample in the signal reflection space through the central small hole arranged on the first inclined plane, so that the surface of the sample is excited to emit cathode fluorescent signals, the ellipsoidal surface reflects the cathode fluorescent signals according to a preset ellipsoidal path in the signal reflection space, the reflected signals obtained through reflection are converged at one focus, the cathode fluorescent collection efficiency can be improved, more cathode fluorescent signals are collected, the signal intensity is improved, the signal to noise ratio is improved, and the image quality is improved. Meanwhile, the high signal intensity collected here is favorable for the subsequent spectral analysis of the cathode fluorescence signal, and the applicability is stronger.

Other advantages of the present utility model will be explained in more detail in connection with the following description and accompanying drawings.

It should be understood that the foregoing description is only an overview of the technical solutions of the present utility model, so that the technical means of the present utility model may be more clearly understood and implemented in accordance with the content of the specification. The following specific embodiments of the present utility model are described in order to make the above and other objects, features and advantages of the present utility model more comprehensible.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are necessary for the embodiments to be used are briefly described below, the drawings being incorporated in and forming a part of the description, these drawings showing embodiments according to the present utility model and together with the description serve to illustrate the technical solutions of the present utility model. It is to be understood that the following drawings illustrate only certain embodiments of the utility model and are therefore not to be considered limiting of its scope, for the person of ordinary skill in the art may admit to other equally relevant drawings without inventive effort. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:

fig. 1 shows a schematic structural diagram of an ellipsoidal reflector according to an embodiment of the present utility model;

FIG. 2 (a) is a top view of an ellipsoidal reflector according to an embodiment of the present utility model at a first viewing angle;

FIG. 2 (b) is a side view of an ellipsoidal reflector according to an embodiment of the present utility model at a second viewing angle;

FIG. 2 (c) is a side view of an ellipsoidal reflector according to an embodiment of the present utility model at a third viewing angle;

FIG. 2 (d) is a side view of an ellipsoidal reflector according to an embodiment of the present utility model at a fourth viewing angle;

FIG. 3 illustrates a side view of a cathode fluorescence probe provided by an embodiment of the present utility model;

fig. 4 shows a schematic block diagram of a cathode fluorescence detection system according to an embodiment of the present utility model.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present utility model.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.

In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The research shows that the cathode fluorescence is that the focused high-energy electron beam excites electromagnetic waves with wavelengths in ultraviolet, visible and infrared wave bands on the surface of the luminescent substance. The valence electrons in the valence band are excited by the incident electrons to transition to the conduction band, so that the conversion from a low energy state to a high energy state is completed.

The high energy state belongs to an unstable state, and the excited electrons finally transit back to a valence band to be recombined with holes generated during excitation through processes of conversion, vibration relaxation, intersystem leap and the like. The composite transition process releases energy, a portion of which is emitted as electromagnetic radiation, i.e., cathodofluorescence. The wavelength range of the cathode fluorescence spectrum depends on the valence electron energy level distribution of the luminescent substance (including host substance and impurities), the valence electron energy level distribution and element type, lattice defects, and the environment in which the substance is located. Thus, cathodofluorescence spectroscopy can be used to study the physical properties of luminescent materials by obtaining the spectra of the materials.

Scanning electron microscopes and transmission electron microscopes are the main devices for exciting the cathode fluorescence signals, and at present, the collection of electron beam excited cathode fluorescence signals in the scanning electron microscope mainly adopts a chip direct detection mode. For the direct detection mode of the chip, a detector is mainly formed by mounting an SiPM chip on a PCB with an opening according to a specific angle, and the detector is placed under a pole shoe of a scanning electron microscope to collect cathode fluorescence signals excited by electron beams for full spectrum imaging.

However, due to the limitation of chip arrangement, some cathode fluorescence can not be collected, resulting in degradation of imaging quality.

In order to at least partially solve one or more of the above problems and other potential problems, the present utility model provides at least one ellipsoidal mirror, a cathode fluorescence probe, and a detection system thereof for cathode fluorescence collection based on ellipsoidal reflection, so as to improve the collection efficiency while improving the imaging quality.

For the convenience of understanding the present embodiment, firstly, an ellipsoidal reflector according to the present embodiment of the present utility model is described in detail, and the ellipsoidal reflector provided by the present embodiment of the present utility model can perform ellipsoidal reflection on a cathode fluorescent signal excited by a sample surface in a signal reflection space, so that the collection efficiency is higher, and meanwhile, cathode fluorescent collection is performed in the whole signal reflection space, so that signal leakage is avoided, and thus, the final imaging quality is also higher.

Referring to fig. 1, a schematic structural diagram of an ellipsoidal reflector according to an embodiment of the present utility model mainly includes a first inclined plane 11, an ellipsoidal surface 22, and a signal reflection space 33; the signal reflection space 33 is used for accommodating a sample, and the first inclined plane 11 is arranged above the ellipsoid 22;

a first inclined plane 11 for converging the electron beam focused by the electromagnetic lens on the sample surface contained in the signal reflection space 33 through the arranged central small hole 111 so that the sample surface excites a cathode fluorescence signal;

an ellipsoid 22 for reflecting the cathode fluorescent signal according to a preset ellipsoid path in the signal reflection space 33.

In order to facilitate understanding of the ellipsoidal reflector 1 provided in the embodiment of the present utility model, a simple description is given next to an application scenario of the ellipsoidal reflector 1. The embodiment of the utility model can be mainly applied to the technical field of cathode fluorescence detection, wherein the cathode fluorescence can be an optical signal excited by an electron beam, and the cathode fluorescence signal excited by the electron beam has the characteristics of high spatial resolution, large excitation depth, wide spectrum range and the like, and can realize full spectrum scanning and single spectrum scanning presentation. At the same time, the cathode fluorescence has higher sensitivity to elements and lower detection limit relative to energy dispersive spectroscopy (Energy Dispersive Spectrometer, EDS) and electron probe microanalysis (Electron Probe Micro Analyzer, EPMA) techniques.

In the embodiment of the present utility model, the cathode fluorescent signal may be excited by an electron beam emitted by a scanning electron microscope, a transmission electron microscope, or the like, and the electron beam spot size may reach a nanometer level as illustrated by the scanning electron microscope.

The ellipsoidal reflector 1 provided by the embodiment of the utility model can converge the electron beam on the sample through the central small hole 111 arranged on the first inclined plane 11, wherein the sample is accommodated in the signal reflection space 33, and the cathode fluorescence signal can be excited under the condition of converging the electron beam on the surface of the sample. For the ellipsoidal surface 22 provided by the ellipsoidal reflector 1, once a cathode fluorescence signal is excited on the surface of a sample, the cathode fluorescence signal is reflected in the ellipsoidal surface 22 according to a preset ellipsoidal path, so that the reflection speed is extremely high, and the signal can be rapidly focused at a focus outside the reflector (namely, a signal receiving focus of the ellipsoidal reflector), and the signal captured at the focus can be well subjected to signal processing through an external signal processing device, wherein the signal processing can be imaging processing or spectral analysis, and the like.

In addition to reflecting the focused focal point, the ellipsoidal mirror 1 provided in the present embodiment has a focal point located at the center aperture 111, which may be, for example, about 1mm below the ellipsoid 22. In practical application, the ellipsoidal reflector 1 in the embodiment of the utility model can be placed under the pole shoe of the scanning electron microscope, the sample on the sample stage of the scanning electron microscope is lifted to the focus, the electron beam passes through the center small hole 111 and then excites the cathode fluorescence signal, and the cathode fluorescence signal emitted from the surface of the sample is reflected by the ellipsoidal surface 22 and then converged at the other focus of the ellipsoidal reflector 1, and the focus is positioned outside the ellipsoidal reflector 1.

Therefore, if image processing equipment such as a silicon photomultiplier is arranged at the focused focal point, the cathode fluorescent signals can be converted into electric signals through the silicon photomultiplier and output, the electric signals can be displayed in a picture form after being processed, and the collecting mode is higher than the efficiency of direct detection of a chip; if the optical fiber section is fixed at the focal point, the cathode fluorescence signal can be transmitted to spectrum analysis equipment such as a spectrometer along the optical fiber, and the cathode fluorescence spectrum analysis can be performed by the optical fiber coupling mode of the ellipsoidal reflector 1, for example, the analysis result for each band interval can be obtained, which is especially important for performing the spectrum analysis on the sample for different bands mainly considering that the spectrum characteristics corresponding to different wavelengths/bands are different.

In the embodiment of the utility model, the central small hole 111 on the first inclined plane 11 is used as an electron beam channel, and the electron beam focused by the electromagnetic lens is converged on the surface of the sample through the central small hole 111 to excite a cathode fluorescence signal, and other signals such as secondary electrons, back scattering electrons and the like, and the ellipsoid 22 is used for converging the cathode fluorescence signal excited by the electron beam at a focus.

Wherein the diameter setting of the central aperture 111 is not too large nor too small. Too large a small hole can cause the loss of a paraxial signal of the electron beam, thereby affecting the reflection effect; the too small aperture can limit the electron beam and affect the maximum field of view observed by a scanning electron microscope (hereinafter referred to as electron microscope), and based on this, the diameter of the central aperture 111 in the embodiment of the present utility model may be about 1mm, so that the reflection effect can be well ensured when the diameter of the excited electron beam is at the nm level.

In addition, the design of the first inclined surface 11 can ensure that the ellipsoidal reflector 1 is relatively safe under the pole shoe of the scanning electron microscope. In addition to the first inclined plane 11, the ellipsoidal reflecting mirror 1 provided in the embodiment of the utility model is further provided with a second inclined plane 44, as shown in fig. 1, the second inclined plane 44 abuts against the first inclined plane 11, and the ellipsoidal reflecting mirror 1 can be fixed on an optical fiber assembly for connecting a signal processing device through at least one first fixing hole 441.

The first fixing hole 441 may be a fixing screw hole so that the ellipsoidal mirror 1 is more conveniently fixed to the optical fiber assembly by screws, and the optical fiber assembly may include an optical fiber part for guiding out a reflected signal and may further include a soft optical fiber tube connected to a signal processing apparatus after the optical fiber part.

In order to facilitate the fixed installation of the ellipsoidal reflector 1, the optical fiber assembly herein may have a fixing member capable of wrapping the side surface of the ellipsoidal reflector 1, where the fixing member includes two parallel surfaces and a vertical surface connecting the two parallel surfaces, and in practical application, the ellipsoidal reflector 1 may be installed on the two parallel surfaces of the fixing member through the two first fixing holes 441, respectively.

It should be noted that, the second inclined plane 44 is designed to be a inclined plane, mainly to adapt to the curved structure of the ellipsoidal surface 22, and in practical application, the inclination angle of the second inclined plane 44 may be smaller than that of the first inclined plane 11, so as to ensure smooth passing of the electron beam while ensuring safer installation. The inclination angle may be characterized as a degree of inclination with respect to the same horizontal plane, a larger inclination angle indicating a larger degree of inclination, whereas a smaller inclination angle indicates a smaller degree of inclination.

It should be noted that, in the embodiment of the present utility model, the design of the first inclined plane and the second inclined plane aims at approaching the probe to the lower stage boot of the conical objective lens as much as possible, so as to shorten the distance from the sample to the lower stage boot of the objective lens, thereby improving the resolution of the electron microscope on the sample, and further improving a certain cathode fluorescence resolution.

The ellipsoidal reflector 1 provided in the embodiment of the present utility model is further provided with a plurality of side surfaces 55, as shown in fig. 1, where the plurality of side surfaces 55 are respectively disposed around the ellipsoidal surface 22 and used for supporting the ellipsoidal surface 22, so that the ellipsoidal surface 22 is vertically disposed right above the sample contained in the signal reflection space 33, thereby facilitating better collection of the excited cathode fluorescent signals.

In order to ensure that the ellipsoids 22 in the embodiments of the present utility model have good reflectivity for different wavebands, the ellipsoids 22 may be processed by aluminum materials, and in order to satisfy the reflection path of the preset ellipsoial path, the ellipsoial surfaces 22 may conform to the following ellipsoial equation:

wherein a, b, c are used to represent half axes of the ellipsoid 22, a > b > c >0.

In practical application, specific values of a, b and c can be set based on different ellipsoids, and can be determined by combining the diameters of the central small holes, so that the method is not particularly limited.

In order to facilitate the cathode fluorescence detection, the ellipsoidal mirror 1 provided in the embodiment of the present utility model may be integrated on the cathode fluorescence probe, so that, as shown in fig. 1, in the case where the ellipsoidal mirror 1 is provided with the connector 66, the ellipsoidal mirror 1 may be fixed on the optical fiber assembly for connecting the signal processing device through at least one second fixing hole 661. The reflected signal obtained by reflection can be transmitted to the signal processing equipment through the optical fiber assembly.

In the case where the optical fiber assembly still includes a fixing member having a side surface that can wrap around the ellipsoidal reflector 1, in practical application, the ellipsoidal reflector 1 can be fixedly mounted on a vertical surface of the fixing member through two second fixing holes 661.

To facilitate further understanding of the ellipsoidal mirror 1 in the embodiment of the present utility model, the ellipsoidal mirror 1 can be further described by views at four viewing angles as in fig. 2 (a) to 2 (d).

As shown in fig. 2 (a), in a top view of the ellipsoidal reflector 1 at a first viewing angle, the central small hole 111 formed on the first inclined surface 11 and the two first fixing holes 441 formed on the second inclined surface 44 are in balance; as shown in fig. 2 (b), the side 55, the first inclined surface 11 and the second inclined surface 44 are disposed obliquely with respect to each other in a side view of the ellipsoidal reflector 1 at the second viewing angle; as shown in fig. 2 (c), which is a side view of the ellipsoidal reflector 1 at a third viewing angle, the central aperture 111 falls on the centerline of the ellipsoid 22, thereby facilitating reflection of the excited cathode fluorescent signal in accordance with a predetermined ellipsoidal path; as shown in fig. 2 (d), when the ellipsoidal reflector 1 is seen from the side view under the fourth view angle, two second fixing holes 661 formed on the connecting member 66 are disposed in a balanced manner with respect to the central small hole 111 at the center line position.

In order to further understand the cathode fluorescent probe integrated with the ellipsoidal reflector 1 according to the embodiment of the present utility model, the following description will be made with reference to fig. 3.

It is known that the reflected signal reflected by the ellipsoidal reflector 1 is guided out from the soft optical fiber tube by various refractions through an optical fiber coupling mode, and then is subjected to spectral analysis by a signal processing device such as a spectrometer.

The soft optical fiber tube is not in direct contact with the ellipsoidal reflector 1, and is in contact with a section of optical fiber placed on a signal receiving focal point of the ellipsoidal reflector, and the section of optical fiber is used for guiding the obtained reflected signal out of a cavity of the scanning electron microscope. Since the length of optical fiber is inconvenient to bend, a soft fiber tube is used after the optical fiber as a subsequent signal transmission medium to quickly and efficiently transmit the reflected signal to the signal processing device.

Based on the ellipsoidal reflector 1 provided in the foregoing embodiment, the embodiment of the present utility model further provides a cathode fluorescent probe, where the ellipsoidal reflector 1 in the cathode fluorescent probe is abutted against an optical fiber assembly, and a reflected signal obtained by reflecting a cathode fluorescent signal generated by focusing an electron beam on a sample surface according to a preset ellipsoidal path can be transmitted to a signal processing device through a soft optical fiber tube in the optical fiber assembly, and particularly, refer to fig. 3 and related descriptions thereof.

In addition, the embodiment of the utility model also provides a cathode fluorescence detection system, which comprises a scanning electron microscope, a cathode fluorescence probe and signal processing equipment; wherein:

the scanning electron microscope is used for generating electron beams, and the electron beams focused by the electromagnetic lens are converged on the surface of the sample accommodated under the cathode fluorescent probe;

the cathode fluorescent probe is used for reflecting a cathode fluorescent signal excited by the surface of the sample according to a preset ellipsoidal path and transmitting the obtained reflected signal to the signal processing equipment;

and the signal processing equipment is used for processing the reflected signals to obtain processing results.

The working principles of the scanning electron microscope and the cathode fluorescent probe can be specifically referred to the above description, and are not repeated here.

The relevant signal processing device can be an image processing device which can be arranged at a converging focus to convert the cathode fluorescence signal into an electric signal for output, and the electric signal can be presented in a picture form after being processed; in addition, the signal processing device may be a spectrum analysis device, which may be presented as a spectrum waveform or spectrum intensity pattern by performing spectrum analysis after fixing the fiber section at a converging focus so that the extracted signal is transmitted along the fiber.

In the description of the present specification, reference to the terms "some possible embodiments," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiments or examples is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the various embodiments or examples described in this specification and the features of the various embodiments or examples may be combined and combined by those skilled in the art without contradiction.

With respect to the method flow diagrams of embodiments of the utility model, certain operations are described as distinct steps performed in a certain order. Such a flowchart is illustrative and not limiting. Some steps described herein may be grouped together and performed in a single operation, may be partitioned into multiple sub-steps, and may be performed in an order different than that shown herein. The various steps illustrated in the flowcharts may be implemented in any manner by any circuit structure and/or tangible mechanism (e.g., by software running on a computer device, hardware (e.g., processor or chip implemented logic functions), etc., and/or any combination thereof).

It will be appreciated by those skilled in the art that in the above-described method of the specific embodiments, the written order of steps is not meant to imply a strict order of execution but rather should be construed according to the function and possibly inherent logic of the steps.

It will be apparent to those skilled in the art that embodiments of the present utility model may be provided as a method, apparatus (device or system), or computer readable storage medium. Accordingly, the present utility model may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the utility model may take the form of a computer-readable storage medium embodied in one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) having computer-usable program code embodied therein.

The present utility model is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (devices or systems) and computer-readable storage media according to embodiments of the utility model. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.

These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.

These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.

In one typical configuration, a computing device includes one or more processors (CPUs), input/output interfaces, network interfaces, and memory.

The memory may include volatile memory in a computer-readable medium, random Access Memory (RAM) and/or nonvolatile memory, such as Read Only Memory (ROM) or flash memory (flash RAM). Memory is an example of computer-readable media.

Computer readable media, including both non-transitory and non-transitory, removable and non-removable media, may implement information storage by any method or technology. The information may be computer readable instructions, data structures, modules of a program, or other data. Examples of storage media for a computer include, but are not limited to, phase change memory (PRAM), static Random Access Memory (SRAM), dynamic Random Access Memory (DRAM), other types of Random Access Memory (RAM), read Only Memory (ROM), electrically Erasable Programmable Read Only Memory (EEPROM), flash memory or other memory technology, compact disc read only memory (CD-ROM), digital Versatile Discs (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices, or any other non-transmission medium, which can be used to store information that can be accessed by a computing device. Furthermore, although the operations of the methods of the present utility model are depicted in the drawings in a particular order, this is not required to either imply that the operations must be performed in that particular order or that all of the illustrated operations be performed to achieve desirable results. Additionally or alternatively, certain steps may be omitted, multiple steps combined into one step to perform, and/or one step decomposed into multiple steps to perform.

Finally, it should be noted that: the above examples are only specific embodiments of the present utility model for illustrating the technical solution of the present utility model, but not for limiting the scope of the present utility model, and although the present utility model has been described in detail with reference to the foregoing examples, it will be understood by those skilled in the art that the present utility model is not limited thereto: any person skilled in the art may modify or easily conceive of the technical solution described in the foregoing embodiments, or perform equivalent substitution of some of the technical features, while remaining within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the corresponding technical solutions. Are intended to be encompassed within the scope of the present utility model. Therefore, the protection scope of the utility model is subject to the protection scope of the claims.

Claims (13)

1. An ellipsoidal reflector, comprising: a first inclined plane, an ellipsoid and a signal reflection space; the signal reflection space is used for accommodating a sample, and the first inclined plane is arranged above the ellipsoidal surface;

the first inclined plane is provided with a center small hole, and the electron beam focused by the electromagnetic lens passes through the center small Kong Huiju and is arranged on the sample surface in the signal reflection space, so that the sample surface excites a cathode fluorescence signal;

the ellipsoidal surface is used for reflecting the cathode fluorescent signal according to a preset ellipsoidal path under the signal reflection space.

2. The ellipsoidal reflector of claim 1, further comprising a second bevel; the second inclined plane is arranged above the ellipsoidal surface and is abutted against the first inclined plane;

the second inclined plane is used for fixing the ellipsoidal reflector on an optical fiber assembly for connecting signal processing equipment through at least one first fixing hole.

3. The ellipsoidal reflector of claim 2, wherein the tilt angle of the first slope is greater than the tilt angle of the second slope.

4. The ellipsoidal reflector of claim 1, further comprising a connector; the connecting piece is abutted with the ellipsoid;

the connecting piece is used for fixing the ellipsoidal reflector on the optical fiber assembly for connecting the signal processing equipment through at least one second fixing hole.

5. The ellipsoidal reflector of claim 4, wherein the ellipsoids are specifically configured to:

and transmitting a reflection signal obtained by reflecting the cathode fluorescent signal according to a preset ellipsoidal path to the signal processing equipment through the optical fiber assembly.

6. The ellipsoidal reflector of any of claims 1-5, further comprising a plurality of sides, each of the plurality of sides disposed about the ellipsoid;

the side surfaces are used for supporting the ellipsoid so that the ellipsoid is vertically arranged right above the sample in the signal reflection space.

7. The ellipsoidal mirror of any of claims 1-5, wherein the ellipsoid conforms to the ellipsoidal equation:

wherein a, b and c are used for representing half shafts of ellipsoids, and a > b is larger than or equal to c >0.

8. The ellipsoidal reflector of any of claims 1-5, wherein the ellipsoids are made of aluminum.

9. The ellipsoidal mirror of any of claims 1 to 5, wherein the central aperture has a diameter of 1mm.

10. A cathode fluorescence probe, comprising: an optical fiber assembly, an ellipsoidal mirror of any one of claims 1 to 9; the optical fiber assembly is abutted with the ellipsoidal reflector;

the ellipsoidal reflector is used for reflecting a cathode fluorescent signal generated by scanning the electron beam focused by the electromagnetic lens on the surface of the sample according to a preset ellipsoidal path to obtain a reflected signal;

the optical fiber assembly is used for transmitting the reflected signal to signal processing equipment.

11. The cathode fluorescence probe of claim 10, wherein the fiber optic assembly comprises a fiber optic component for deriving the reflected signal, and a soft fiber optic tube connecting the fiber optic component with the signal processing device;

wherein the optical fiber component is disposed at a signal receiving focal point of the ellipsoidal reflector.

12. A cathode fluorescence detection system, comprising: scanning electron microscope, cathode fluorescence probe according to claim 10 or 11, and signal processing device;

the scanning electron microscope is used for generating electron beams and converging the electron beams focused by the electromagnetic lens on the surface of the sample accommodated under the cathode fluorescent probe;

the cathode fluorescence probe is used for reflecting a cathode fluorescence signal excited by the surface of the sample according to a preset ellipsoidal path and transmitting the obtained reflected signal to the signal processing equipment;

the signal processing device is used for processing the reflected signal to obtain a processing result.

13. The cathode fluorescence detection system of claim 12, wherein the signal processing device comprises at least one of:

the image processing equipment is used for carrying out cathode fluorescence imaging based on the reflection signals to obtain cathode fluorescence images;

and the spectrum analysis equipment is used for carrying out cathode fluorescence spectrum analysis based on the reflection signals to obtain spectrum data.