CN219967737U - Vacuum adsorption fixing tool suitable for ultra-precise optical machining - Google Patents
Vacuum adsorption fixing tool suitable for ultra-precise optical machining Download PDFInfo
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- CN219967737U CN219967737U CN202321713385.7U CN202321713385U CN219967737U CN 219967737 U CN219967737 U CN 219967737U CN 202321713385 U CN202321713385 U CN 202321713385U CN 219967737 U CN219967737 U CN 219967737U
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- 238000001179 sorption measurement Methods 0.000 title claims abstract description 69
- 230000003287 optical effect Effects 0.000 title claims abstract description 27
- 238000003754 machining Methods 0.000 title description 6
- 230000007704 transition Effects 0.000 claims description 33
- 238000007789 sealing Methods 0.000 claims description 18
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 210000001503 joint Anatomy 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 5
- 230000006698 induction Effects 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 210000003437 trachea Anatomy 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 206010022000 influenza Diseases 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model relates to the field of ultra-precise optical element processing, in particular to a vacuum adsorption fixing tool suitable for ultra-precise optical processing, which comprises a base, a vacuum chuck and a vacuum generator, wherein a mirror blank is adsorbed and fixed on the upper surface of the vacuum chuck, the upper part of the base is connected with the vacuum chuck, the inside of the base is hollow, an adsorption hole is formed in the vacuum chuck, a vacuum pipeline is connected to the adsorption hole on the vacuum chuck from the inside of the base.
Description
Technical Field
The utility model relates to the technical field of ultra-precise optical element processing, in particular to a vacuum adsorption fixing tool suitable for ultra-precise optical processing.
Background
In the field of ultra-precise optical element machining of conformal and complex free curved surfaces, the existing machining equipment is provided with rapid forming equipment for combining a cradle machine tool and an optical machining module, a mirror blank is placed on a cradle turntable, the mirror blank is clamped by adopting a fixture such as a stop block or a flange, and then a screw fixing mode is adopted, and a mode of machining and fixing a steel part is prolonged. The existing fixture clamping mode is to fix a mirror blank on a processing station by utilizing clamping force and friction force, but for ultra-precise optical element processing, the precision reaches the nanometer level, a little tiny force and heat can have great influence on the surface type precision, when the lens processing is finished, the mirror can be deformed after the clamping fixture is loosened, a detected result can generate larger error, and if the lens is clamped again, vicious circle can be generated; secondly, the tightening torque of the screw is manually controlled, and the tightening torque is different according to the different force and modes of each person, so that the generated clamping force is also different, and even the same person, the tightening torque is also different for multiple times, which is one of uncontrollable factors.
In the prior art, the following scheme discloses a vacuum adsorption device for clamping thin-wall revolving body parts:
1. the utility model discloses a publication number is "CN115431081A", the name is a vacuum adsorption fixture ", a vacuum adsorption fixture is disclosed, including the adsorption component, the adsorption component has the sucking disc of being connected with the lathe main shaft, set up the induction port with air source treatment facility intercommunication on the sucking disc, set up the annular air flue of multichannel inwards sunken on the adsorption surface of sucking disc one side, every annular air flue all communicates with the induction port, the adsorption surface of sucking disc is circular, the induction port is located the center of adsorption surface, the position of induction port is all regard as the centre of a circle to the annular air flue of multichannel, and the clearance between the adjacent two annular air flues is the same, still be provided with the setting element that is used for radial positioning part on the adsorption surface, the setting element includes two spacing portions of perpendicular connection and is located the circular arc transition portion of two spacing portion junctions. The technical scheme disclosed by the scheme can be used for adsorbing and clamping thin-wall rotary parts, but the installation and matching of the clamp and the cradle machine tool are not considered in the structural design of the optical element applied to the combination of the cradle machine tool and the optical processing module.
2. The patent with the publication number of CN115431081A and the name of vacuum adsorption fixture discloses a vacuum adsorption fixture for numerical control intelligent milling and polishing, which comprises an adapter flange, a vacuum adsorption substrate and a vacuum adsorption bottom plate; the lower end of the adapter flange is fixedly connected with a machine tool adapter port, the upper end of the adapter flange is fixedly connected with and sealed with the lower end of the vacuum adsorption base plate, and the upper end of the vacuum adsorption base plate is fixedly connected with and sealed with the lower end of the vacuum adsorption base plate, so that an air guide hole in the adapter flange, an air guide groove between the vacuum adsorption base plate and an adsorption hole in the vacuum adsorption base plate are communicated and form an air guide channel; an inner hole special-shaped sealing ring groove is formed in the upper end of the vacuum adsorption substrate, and an inner hole special-shaped sealing ring is arranged in the inner hole special-shaped sealing ring groove; the lower end of the adsorbed mirror body is matched and connected with the upper end of the vacuum adsorption substrate and is sealed, the conical hole in the adsorbed mirror body corresponds to the position of the adsorption hole in the vacuum adsorption substrate, and the special-shaped hole in the adsorbed mirror body is matched and connected with the inner hole special-shaped sealing ring in the vacuum adsorption substrate. The technical scheme has certain requirements on the adsorbed mirror body, and the adsorption is realized by matching the taper hole and the special-shaped hole of the mirror body.
3. The utility model discloses a publication number is "CN214212269U", and the name is "vacuum adsorption turning fixture for thin slice type part", discloses a vacuum adsorption turning fixture for thin slice type part, including locating the main shaft on the lathe, the main shaft rotates and supports in the sleeve, and main shaft inner chamber cavity, main shaft front end fixedly connected with are used for carrying out the sucking disc that adsorbs fixedly to accurate thin slice type part, and inside the sucking disc is equipped with the gas circuit structure, is equipped with the trachea in the cavity inner chamber of main shaft, the interface connection of gas circuit structure in trachea one end and the sucking disc, the hollow inner chamber of main shaft and the interface fixed connection with the vacuum pump are stretched out to the trachea other end. The technical scheme is similar to the comparison document, the installation and the matching of the clamp and the cradle machine tool are not considered, and the processing difficulty of arranging the air passage structure on the sucker is high.
In summary, how to design a vacuum adsorption fixture suitable for ultra-precise optical processing, reduce processing time, and improve processing efficiency and processing precision is a problem to be solved.
Disclosure of Invention
The utility model provides a vacuum adsorption fixing tool which is applicable to ultra-precise optical processing, can improve the universality of use and the convenience of clamping, and avoids interference phenomenon.
In order to achieve the above purpose, the present utility model proposes the following technical scheme: the utility model provides a vacuum adsorption fixing tool suitable for ultraprecise optical processing, includes base, vacuum chuck and vacuum generator, and the mirror base adsorbs and is fixed in on vacuum chuck's the upper surface, and the base top is connected with vacuum chuck, and the inside cavity of base has the absorption hole on the vacuum chuck, and vacuum pipeline is from base internal connection to the absorption hole department on the vacuum chuck.
Preferably, the vacuum pipeline is characterized by further comprising a workbench, a mandrel and a transition piece, wherein the top of the base is connected with the lower surface of the workbench, the transition piece, the mandrel and the base are sequentially and coaxially sleeved from inside to outside, the transition piece is provided with a mounting surface and a mounting column perpendicular to the mounting surface, the mounting column is sleeved in the base, the top surface of the mounting surface is connected with the vacuum chuck, the bottom surface is connected with the upper surface of the workbench, and a vacuum pipeline enters from the base and extends from the mandrel and the inside of the transition piece to an adsorption hole on the vacuum chuck.
Preferably, the side wall of the base is provided with a pipeline through hole, the horizontal section of the vacuum pipeline is connected with the vertical section of the vacuum pipeline through a pneumatic connector after entering the inside of the base along the radial direction of the base from the pipeline through hole, and the vertical section axially extends to the adsorption hole on the vacuum chuck along the mandrel and the transition piece.
Preferably, the adsorption holes are N and uniformly distributed by taking the vacuum chuck as the center, the vertical section is radially divided into N branch sections along the mounting column in the mounting column, each branch section is communicated with branch air passages distributed along the axis of the mounting column in the mounting column, and each branch air passage is communicated with each adsorption hole.
Preferably, the vacuum chuck is provided with sealing structures between the connecting surfaces of the mirror blanks and between the mounting surface and the connecting surface of the vacuum chuck.
Preferably, the sealing structure comprises a plurality of concentric ring grooves formed on the upper surface of the vacuum chuck, and the outer edge of the mirror blank is positioned between two adjacent concentric ring grooves.
Preferably, the sealing arrangement further comprises a sealing ring located on the mounting face of the transition piece.
Preferably, the installation column between the mandrel and the transition piece is mechanically clamped, and the side wall of the base is provided with a clamping operation opening.
Preferably, hydraulic clamping is arranged between the mandrel and the mounting column of the transition piece, and the mandrel is provided with a hydraulic channel which is in butt joint with an external hydraulic device.
Preferably, the vacuum pipeline is also connected with a pressure regulating valve and a digital display meter.
Compared with the prior art, the utility model has the following beneficial effects: according to the utility model, the hollow base is adopted as the fixing piece of the cradle turntable, and the vacuum chuck is fixed on the base to adsorb the mirror blank, so that the interference problem between the turntable and the tool during rotation can be effectively avoided, the hollow base can be convenient for connection of a vacuum pipeline, and a corresponding operation interface can be provided for clamping an internal mandrel, so that the applicability is strong and the clamping is convenient.
Drawings
FIG. 1 is a schematic view of the installation of the fixture in an embodiment of the present utility model;
FIG. 2 is a schematic diagram of the overall structure of a fixture in an embodiment of the utility model;
FIG. 3 is a cross-sectional view of a fixture in accordance with an embodiment of the present utility model;
FIG. 4 is a schematic view of a transition piece structure in an embodiment of the present utility model.
Reference numerals: the vacuum chuck comprises a vacuum chuck 1, an adsorption hole 101, a base 2, a pipeline through hole 21, a workbench 3, a vacuum generator 4, a transition piece 5, a mounting surface 51, a mounting column 52, a pressure regulating valve 6, a digital display meter 7, a pneumatic connector 8, a mirror blank 9, a cradle turntable 10, a sealing structure 11, a vacuum pipeline 12, a horizontal section 121, a vertical section 122, a branch section 123 and a branch air passage 124.
Detailed Description
Hereinafter, an embodiment of the present utility model will be described with reference to fig. 1 to 4. In the following description, like modules are denoted by like reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, a detailed description thereof will not be repeated.
The present utility model will be further described in detail with reference to fig. 1 to 4 and the specific embodiments thereof in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limiting the utility model.
As shown in fig. 1 and 2, a vacuum adsorption fixture suitable for ultra-precise optical processing comprises a base 2, a vacuum chuck 1 and a vacuum generator 4, wherein a mirror blank 9 is adsorbed and fixed on the upper surface of the vacuum chuck 1, the vacuum chuck 1 is connected above the base 2, the inside of the base 2 is hollow, an adsorption hole 101 is formed in the vacuum chuck 1, and a vacuum pipeline 12 is connected to the adsorption hole 101 on the vacuum chuck 1 from the inside of the base 2. In order to realize the multi-axis linkage function and better process a large-caliber free-form surface optical element, a base 2 is added on the cradle turntable 10, the height of the base 2 is adjustable, a workbench 3 is arranged on the base 2, the center of the base 2 is hollow, the hollow base 2 is convenient for the vacuum pipeline 12 to be introduced and connected, and the hollow interior can be matched with mandrels 13 in different clamping modes to adapt to different cradle turntable machine tools.
As shown in fig. 2 and 3, the fixing tool further comprises a workbench 3, a mandrel 13 and a transition piece 5, wherein the top of the base 2 is connected with the lower surface of the workbench 3, the transition piece 5, the mandrel 13 and the base 2 are sequentially and coaxially sleeved from inside to outside, the transition piece 5 is provided with a mounting surface 51 and a mounting column 52 perpendicular to the mounting surface 51, the mounting column 52 is sleeved in the base 2, the top surface of the mounting surface 51 is connected with the vacuum chuck 1, the bottom surface is connected with the upper surface of the workbench 3, and a vacuum pipeline 12 enters from the base 2 and extends from the inside of the mandrel 13 and the transition piece 5 to the adsorption hole 101 on the vacuum chuck 1.
In this embodiment, the transition piece 5 may be set to match with the mandrel 13 to achieve different clamping modes, and the processing difficulty of opening a corresponding vacuum air passage in the transition piece 5 is smaller than that of the vacuum chuck 1 with thinner overall thickness. The transition piece 5 is fixed on the vacuum chuck 1, the vacuum chuck 1 and the transition piece 5 are put into the mandrel 13, and are clamped through hydraulic pressure or manual clamping, so that the vacuum chuck is completely fixed, the size of the vacuum chuck 1 can be made into a plurality of sizes according to actual processing requirements, a one-to-many exchange function can be realized, the repeated positioning precision is high, and the mirror blank 9 is placed on the vacuum chuck. All gas path junctions include sealing structures 11 to ensure that gas losses are minimized. When the vacuum generator 4 is started, the environment in the circuit is changed into a vacuum state, the mirror blank 9 is adsorbed on the vacuum chuck, and in order to reduce the influence of the adsorption force on the deformation of the mirror, the proper pressure is selected according to the size and the material of the mirror blank 9 through the pressure regulating valve 6, so that the influence of external factors on the surface type precision is reduced.
As shown in fig. 3 and 4, the vacuum pipeline 12 has a pipeline through hole 21 on the side wall of the base 2, the horizontal section 121 of the vacuum pipeline 12 is connected with the vertical section 122 of the vacuum pipeline 12 through the pneumatic connector 8 after entering the inside of the base 2 from the pipeline through hole 21 along the radial direction of the base 2, and the vertical section 122 extends to the adsorption hole 101 on the vacuum chuck 1 along the axial direction of the mandrel 13 and the transition piece 5.
In order to improve the adsorption force of the vacuum chuck 1 on the mirror blank 9, the adsorption holes 101 are N and uniformly distributed by taking the vacuum chuck 1 as a center, the vertical section 122 is radially divided into N branch sections 123 along the mounting column 52 inside the mounting column 52, each branch section 123 is communicated with a branch air passage 124 distributed along the axis of the mounting column 52 inside the mounting column, and each branch air passage 124 is communicated with each adsorption hole 101. In this embodiment, as shown in fig. 3, a three-branch gas path structure is adopted in the transition piece 5, and three adsorption holes 101 are also formed in the corresponding vacuum chuck 1.
The connection surface of the vacuum chuck 1 and the mirror blank 9 and the connection surface of the mounting surface 51 and the vacuum chuck 1 are provided with a sealing structure 11. The sealing structure 11 comprises a plurality of concentric ring grooves 112 formed on the upper surface of the vacuum chuck 1, and the outer edge of the mirror blank 9 is positioned between two adjacent concentric ring grooves 112. The sealing arrangement 11 further comprises a sealing ring (not shown) on the mounting surface 51 of the transition piece 5.
Mechanical clamping is performed between the mandrel 13 and the mounting column 52 of the transition piece 5, and a clamping operation opening 22 is formed in the side wall of the base 2. The operator can manually clamp the mandrel 13 with the transition piece 5 by inserting a manual hex wrench into the clamping operation port 22. The person skilled in the art can clamp the mandrel 13 and the mounting column 52 of the transition piece 5 in a hydraulic clamping mode according to actual requirements, the mandrel 13 is provided with a hydraulic channel which is in butt joint with an external hydraulic device, and in the embodiment, the hydraulic channel can be reserved for connecting with the cradle turntable 10 when the hydraulic clamping is selected, so that an automatic clamping function is realized.
The vacuum pipeline 12 is also connected with a pressure regulating valve 6 and a digital display meter 7, the bottom of the mandrel 13 is connected with a pneumatic connector 8, and the pneumatic connector is connected with the external digital display meter 7, the pressure regulating valve 6 and the vacuum generator 4; when processing, the vacuum generator 4 changes the air path environment into a vacuum state, and the pressure regulating valve 6 is regulated and controlled according to the size of the optical element, so that the size of the adsorption force is controlled, the deformation influence on the mirror blank 9 is reduced, the pressure change in the air path is monitored in real time through the digital display meter 7, and the loss of the adsorption force caused by unexpected situations such as air leakage is avoided. While the clamping force of the spindle 13 varies according to the size.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present disclosure may be performed in parallel, sequentially, or in a different order, provided that the desired results of the technical solutions of the present disclosure are achieved, and are not limited herein.
The above embodiments do not limit the scope of the present utility model. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included in the scope of the present utility model.
Claims (10)
1. The utility model provides a frock is fixed in vacuum adsorption suitable for ultraprecise optical processing, includes base (2), vacuum chuck (1) and vacuum generator (4), and mirror base (9) adsorb to be fixed in on the upper surface of vacuum chuck (1), its characterized in that: the vacuum chuck is characterized in that a vacuum chuck (1) is connected above the base (2), the base (2) is hollow, an adsorption hole (101) is formed in the vacuum chuck (1), and a vacuum pipeline (12) is connected to the adsorption hole (101) in the vacuum chuck (1) from the inside of the base (2).
2. The vacuum adsorption fixture for ultra-precise optical processing according to claim 1, wherein: the automatic cutting machine further comprises a workbench (3), a mandrel (13) and a transition piece (5), wherein the top of the base (2) is connected with the lower surface of the workbench (3), and the transition piece (5), the mandrel (13) and the base (2) are coaxially sleeved from inside to outside in sequence; the transition piece (5) is provided with a mounting surface (51) and a mounting column (52) perpendicular to the mounting surface (51), the mounting column (52) is sleeved in the base (2), the top surface of the mounting surface (51) is connected with the vacuum chuck (1), and the bottom surface is connected with the upper surface of the workbench (3); the vacuum pipeline (12) enters from the base (2) and extends from the inside of the mandrel (13) and the transition piece (5) to the adsorption hole (101) on the vacuum chuck (1).
3. The vacuum adsorption fixture for ultra-precise optical processing according to claim 2, wherein: the side wall of the base (2) is provided with a pipeline through hole (21), a horizontal section (121) of the vacuum pipeline (12) is connected with a vertical section (122) of the vacuum pipeline (12) through a pneumatic connector (8) after entering the inside of the base from the pipeline through hole (21) along the radial direction of the base (2), and the vertical section (122) axially extends to an adsorption hole (101) on the vacuum chuck (1) along the mandrel (13) and the transition piece (5).
4. The vacuum adsorption fixture for ultra-precise optical processing according to claim 3, wherein: the adsorption holes (101) are N and uniformly distributed by taking the vacuum chuck (1) as the center, the vertical sections (122) are radially divided into N branch sections (123) along the mounting column (52) in the mounting column (52), each branch section (123) is communicated with branch air passages (124) distributed along the axis of the mounting column (52) in the mounting column (52), and each branch air passage (124) is communicated with each adsorption hole (101).
5. The vacuum adsorption fixture for ultra-precise optical processing of claim 4, wherein: sealing structures (11) are arranged between the connecting surfaces of the vacuum sucker (1) and the mirror blank (9) and between the mounting surface (51) and the connecting surface of the vacuum sucker (1).
6. The vacuum adsorption fixture for ultra-precise optical processing of claim 5, wherein: the sealing structure (11) comprises a plurality of concentric ring grooves (112) formed in the upper surface of the vacuum chuck (1), and the outer edge of the mirror blank (9) is positioned between two adjacent concentric ring grooves (112).
7. The vacuum adsorption fixture for ultra-precise optical processing of claim 6, wherein: the sealing structure (11) further comprises a sealing ring positioned on the mounting surface (51) of the transition piece (5).
8. The vacuum adsorption fixture for ultra-precise optical processing according to any one of claims 2-7, wherein: mechanical clamping is performed between the mandrel (13) and the mounting column (52) of the transition piece (5), and a clamping operation opening (22) is formed in the side wall of the base (2).
9. The vacuum adsorption fixture for ultra-precise optical processing according to any one of claims 2-7, wherein: the mandrel (13) and the mounting column (52) of the transition piece (5) are hydraulically clamped, and the mandrel (13) is provided with a hydraulic channel which is in butt joint with an external hydraulic device.
10. The vacuum adsorption fixture for ultra-precise optical processing of claim 8, wherein: the vacuum pipeline (12) is also connected with a pressure regulating valve (6) and a digital display meter (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321713385.7U CN219967737U (en) | 2023-06-30 | 2023-06-30 | Vacuum adsorption fixing tool suitable for ultra-precise optical machining |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321713385.7U CN219967737U (en) | 2023-06-30 | 2023-06-30 | Vacuum adsorption fixing tool suitable for ultra-precise optical machining |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219967737U true CN219967737U (en) | 2023-11-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321713385.7U Active CN219967737U (en) | 2023-06-30 | 2023-06-30 | Vacuum adsorption fixing tool suitable for ultra-precise optical machining |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219967737U (en) |
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2023
- 2023-06-30 CN CN202321713385.7U patent/CN219967737U/en active Active
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