CN219967405U - Monocrystalline silicon piece chamfer device - Google Patents
Monocrystalline silicon piece chamfer device Download PDFInfo
- Publication number
- CN219967405U CN219967405U CN202223416041.8U CN202223416041U CN219967405U CN 219967405 U CN219967405 U CN 219967405U CN 202223416041 U CN202223416041 U CN 202223416041U CN 219967405 U CN219967405 U CN 219967405U
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- China
- Prior art keywords
- sliding
- monocrystalline silicon
- side wall
- plate
- base
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 30
- 238000004140 cleaning Methods 0.000 claims abstract description 9
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 229910001651 emery Inorganic materials 0.000 description 5
- 230000010405 clearance mechanism Effects 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 239000012634 fragment Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- CBVWMGCJNPPAAR-HJWRWDBZSA-N (nz)-n-(5-methylheptan-3-ylidene)hydroxylamine Chemical compound CCC(C)C\C(CC)=N/O CBVWMGCJNPPAAR-HJWRWDBZSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Abstract
The utility model discloses a monocrystalline silicon wafer chamfering device in the technical field of monocrystalline silicon wafer chamfering, which comprises a base, wherein a rotating motor is arranged on the left side of the top of the base, a rotating rod is connected to the output end of the rotating motor, one end of the rotating rod is connected with a disc, a fixing mechanism is arranged on the outer side wall of the disc, a sliding plate is arranged on the top of the base in a sliding connection manner, a vertical plate is arranged on the right side of the top of the base, a hydraulic rod is arranged on the left side wall of the vertical plate, a motor is arranged on the front side wall of the mounting frame, the output end of the motor penetrates through the front side wall of the mounting frame to be connected with the other end of a rotating shaft, a grinding wheel is sleeved and installed on the outer wall of the rotating shaft, a sliding groove is formed in the top of the sliding plate, and a cleaning mechanism is arranged in the sliding groove.
Description
Technical Field
The utility model relates to the technical field of monocrystalline silicon wafer chamfering, in particular to a monocrystalline silicon wafer chamfering device.
Background
The monocrystalline silicon wafer is a silicon monocrystal, is a crystal with a basically complete lattice structure, has different properties in different directions, is a good semiconductor material, is used for manufacturing semiconductor devices, solar cells and the like, is formed by pulling high-purity polycrystalline silicon in a monocrystal furnace, and is mostly chamfered at four corners of the monocrystalline silicon wafer in reality, the monocrystalline silicon wafer is mostly polished by a grinding wheel when being chamfered, fragments generated during polishing the monocrystalline silicon wafer are easily adhered to the surface of the grinding wheel, and more fragments can be accumulated during polishing for a long time, so that the polishing performance of the grinding wheel can be reduced, and the chamfering quality of the monocrystalline silicon wafer can be influenced, and therefore, the monocrystalline silicon wafer chamfering device is needed.
Disclosure of Invention
The utility model aims to provide a monocrystalline silicon wafer chamfering device which aims to solve the problems in the background art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a monocrystalline silicon piece chamfer device, includes the base, base top left side is equipped with the rotating electrical machines, the rotating electrical machines output connection is equipped with the dwang, dwang one end is connected and is equipped with the disc, the disc lateral wall is equipped with fixed establishment, base top sliding connection is equipped with the sliding plate, base top right side is equipped with vertical board, vertical board left side wall is equipped with the hydraulic stem, hydraulic stem one end is connected with the sliding plate right side wall, the sliding plate left side wall is equipped with the mounting bracket, be equipped with the pivot in the mounting bracket, pivot one end is connected with the bearing that the rear side wall was equipped with in the mounting bracket, the mounting bracket front side wall is equipped with the motor, the motor output runs through the mounting bracket front side wall and is connected with the pivot other end, the installation is cup jointed to the pivot outer wall and is equipped with the emery wheel, the spout has been seted up at the sliding plate top, be equipped with clearance mechanism in the spout.
Further, the clearance mechanism includes the lead screw that is equipped with in the spout, lead screw one end is connected with the bearing one that the back lateral wall was equipped with in the spout, the lead screw other end runs through the interior preceding lateral wall of spout and is connected with the driven gear that outside was equipped with, the lateral wall is equipped with driving motor before the sliding plate, the driving motor output is connected and is equipped with the driving gear with driven gear engaged with, the lead screw outer wall has cup jointed the slider, the slider top is equipped with the slide bar, slide bar one end is connected and is equipped with electric telescopic handle, electric telescopic handle one end is connected and is equipped with the brush board, brush board bottom evenly is equipped with the clearance brush hair.
Further, a limiting groove is formed in the inner bottom of the sliding groove, and a limiting block matched with the limiting groove is arranged at the bottom of the sliding block.
Further, the guide groove is formed in the top of the base, and the guide block matched with the guide groove is arranged at the bottom of the sliding plate.
Further, fixed establishment includes the mount that the disc lateral wall was equipped with, the mount top runs through and is equipped with the threaded rod, be equipped with the rubber clamp plate in the mount, threaded rod one end is connected with the bearing two that the rubber clamp plate top was equipped with, the threaded rod other end is connected and is equipped with the pivoted plate.
Furthermore, the fixing frame is arranged in a U shape.
Compared with the prior art, the utility model has the beneficial effects that: the utility model discloses can clear up the piece on emery wheel surface under clearance mechanism's cooperation to can avoid piece accumulation on the emery wheel surface, thereby improve the polishing performance of emery wheel, improve monocrystalline silicon piece's chamfer quality.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a top view of the structure of the present utility model;
FIG. 3 is a schematic view of the structure A of the present utility model.
In the figure: 1. a base; 2. a vertical plate; 3. a hydraulic rod; 4. a sliding plate; 5. a mounting frame; 6. a chute; 7. a cleaning mechanism; 70. cleaning brush hair; 71. brushing a plate; 72. an electric telescopic rod; 73. a slide bar; 74. a slide block; 75. a screw rod; 76. a driven gear; 77. a drive gear; 78. a driving motor; 8. a motor; 9. grinding wheel; 10. a rotating electric machine; 11. a rotating lever; 12. a disc; 13. a fixing mechanism; 130. a rubber press plate; 131. a threaded rod; 132. a rotating plate; 133. a fixing frame; 14. a rotating shaft.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1:
referring to fig. 1-2, the present utility model provides a technical solution: the utility model provides a monocrystalline silicon piece chamfer device, including base 1, base 1 top left side is equipped with rotating electrical machines 10, rotating electrical machines 10 output connection is equipped with dwang 11, the connection of dwang 11 one end is equipped with disc 12, disc 12 lateral wall is equipped with fixed establishment 13, base 1 top sliding connection is equipped with slide plate 4, the guide way has been seted up at base 1 top, slide plate 4 bottom is equipped with the guide block with guide way assorted, make slide plate 4 remove more stably under the effect of guide way and guide block, base 1 top right side is equipped with vertical board 2, vertical board 2 left side wall is equipped with hydraulic stem 3, hydraulic stem 3 one end is connected with slide plate 4 right side wall, slide plate 4 left side wall is equipped with mounting bracket 5, be equipped with pivot 14 in the mounting bracket 5, pivot 14 one end is connected with the bearing that rear side wall was equipped with in the mounting bracket 5, the mounting bracket 5 front side wall is equipped with motor 8, the motor 8 output runs through the mounting bracket 5 front side wall and is connected with the pivot 14 other end, the installation is equipped with emery wheel 9 in the outer wall sleeve joint of pivot 14, spout 6 has been seted up at slide plate 4 top, be equipped with clearance mechanism 7 in spout 6.
Referring to fig. 3, the cleaning mechanism 7 includes a screw rod 75 disposed in the chute 6, one end of the screw rod 75 is connected with a bearing one disposed on the inner rear side wall of the chute 6, the other end of the screw rod 75 penetrates through the inner front side wall of the chute 6 and is connected with a driven gear 76 disposed outside, the front side wall of the sliding plate 4 is provided with a driving motor 78, an output end of the driving motor 78 is connected with a driving gear 77 meshed with the driven gear 76, a sliding block 74 is sleeved on the outer wall of the screw rod 75, a limit groove is disposed in the inner bottom of the chute 6, a limit block matched with the limit groove is disposed at the bottom of the sliding block 74, the sliding block 74 moves more stably on the outer wall of the screw rod 75 under the action of the limit groove and the limit block, a sliding rod 73 is disposed at the top of the sliding block 74, an electric telescopic rod 72 is disposed at one end of the sliding rod 73, a brush plate 71 is disposed at one end of the electric telescopic rod 72, and cleaning bristles 70 are uniformly disposed at the bottom of the brush plate 71.
Referring to fig. 1, the fixing mechanism 13 includes a fixing frame 133 disposed on an outer sidewall of the disc 12, the fixing frame 133 is disposed in a U shape, a threaded rod 131 is disposed at a top of the fixing frame 133 in a penetrating manner, a rubber pressing plate 130 is disposed in the fixing frame 133, one end of the threaded rod 131 is connected with a bearing disposed at a top of the rubber pressing plate 130, a rotating plate 132 is disposed at another end of the threaded rod 131 in a connecting manner, a worker places a monocrystalline silicon piece on the disc 12, and then the worker rotates the rotating plate 132 to drive the threaded rod 131 to rotate, and the threaded rod 131 drives the rubber pressing plate 130 to compress the monocrystalline silicon piece.
Working principle: when the monocrystalline silicon piece needs to be chamfered, the staff places the monocrystalline silicon piece on the disc 12, then the staff rotates the rotating plate 132 to drive the threaded rod 131 to rotate, the threaded rod 131 drives the rubber pressing plate 130 to press the monocrystalline silicon piece, the rotating rod 11 is driven to rotate under the action of the rotating motor 10, the rotating rod 11 drives the disc 12 to rotate, thereby the chamfering position of the monocrystalline silicon piece can be rotated to the left side of the grinding wheel 9 (the four corners of the monocrystalline silicon piece need to be chamfered), then the motor 8 drives the rotating shaft 14 to rotate, the rotating shaft 14 drives the grinding wheel 9 to rotate, the sliding plate 4 is driven to move under the action of the hydraulic rod 3, thereby the sliding plate 4 drives the grinding wheel 9 to move, the grinding wheel 9 can chamfer monocrystalline silicon piece, when chips on the surface of the grinding wheel 9 need to be cleaned, the brush plate 71 is driven to move under the action of the electric telescopic rod 74, the brush plate 71 drives the cleaning brush hair 70 to be in contact with the surface of the grinding wheel 9, then the driving gear 77 is driven to rotate under the action of the driving motor 78, the driving gear 77 drives the driven gear 76 to rotate the driven gear 76, the driven gear 76 to rotate the driven gear 75 to rotate, the sliding plate 75 drives the sliding plate 75 to move, and accordingly the sliding plate 74 can be cleaned on the surface of the grinding wheel 9 to slide on the surface of the grinding wheel 9, and the surface of the grinding wheel is cleaned completely, and the chips can be cleaned by the sliding plate 74 is also driven to move the sliding plate 74, so that the chips can be cleaned on the surface of the grinding wheel 9.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a monocrystalline silicon piece chamfer device, includes base (1), its characterized in that: the utility model discloses a grinding wheel cleaning device, including base (1), slide plate (4), slide plate (6), slide plate (4) are equipped with slide plate (4), base (1) top left side is equipped with rotating electrical machines (10), rotating electrical machines (10) output connection is equipped with dwang (11), dwang (11) one end connection is equipped with disc (12), disc (12) lateral wall is equipped with fixed establishment (13), base (1) top sliding connection is equipped with slide plate (4), base (1) top right side is equipped with vertical board (2), vertical board (2) left side wall is equipped with hydraulic stem (3), hydraulic stem (3) one end is connected with slide plate (4) right side wall, slide plate (4) left side wall is equipped with mounting bracket (5), be equipped with pivot (14) in mounting bracket (5), mounting bracket (5) lateral wall is equipped with motor (8) in the front of mounting bracket (5), motor (8) output runs through mounting bracket (5) lateral wall and is connected with the pivot (14) other end, spout (14) outer wall cup joints and installs (9), spout (6) have been seted up in slide mechanism (6).
2. The monocrystalline silicon piece chamfering device according to claim 1, wherein: the cleaning mechanism (7) comprises a screw rod (75) arranged in a sliding groove (6), one end of the screw rod (75) is connected with a first bearing arranged on the inner rear side wall of the sliding groove (6), the other end of the screw rod (75) penetrates through a driven gear (76) arranged on the inner front side wall of the sliding groove (6) and is connected with an outside driven gear (78), the front side wall of a sliding plate (4) is provided with a driving motor (78), the output end of the driving motor (78) is connected with a driving gear (77) meshed with the driven gear (76), the outer wall of the screw rod (75) is sleeved with a sliding block (74), the top of the sliding block (74) is provided with a sliding rod (73), one end of the sliding rod (73) is connected with an electric telescopic rod (72), one end of the electric telescopic rod (72) is connected with a brush plate (71), and cleaning bristles (70) are uniformly arranged at the bottom of the brush plate (71).
3. The monocrystalline silicon piece chamfering device according to claim 2, wherein: the limiting groove is formed in the inner bottom of the sliding groove (6), and a limiting block matched with the limiting groove is arranged at the bottom of the sliding block (74).
4. The monocrystalline silicon piece chamfering device according to claim 1, wherein: the guide groove is formed in the top of the base (1), and guide blocks matched with the guide groove are arranged at the bottom of the sliding plate (4).
5. The monocrystalline silicon piece chamfering device according to claim 1, wherein: the fixing mechanism (13) comprises a fixing frame (133) arranged on the outer side wall of the disc (12), a threaded rod (131) is arranged at the top of the fixing frame (133) in a penetrating mode, a rubber pressing plate (130) is arranged in the fixing frame (133), one end of the threaded rod (131) is connected with a bearing arranged at the top of the rubber pressing plate (130), and a rotating plate (132) is arranged at the other end of the threaded rod (131) in a connecting mode.
6. The monocrystalline silicon piece chamfering device as recited in claim 5, wherein: the fixing frame (133) is arranged in a U shape.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202223416041.8U CN219967405U (en) | 2022-12-20 | 2022-12-20 | Monocrystalline silicon piece chamfer device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202223416041.8U CN219967405U (en) | 2022-12-20 | 2022-12-20 | Monocrystalline silicon piece chamfer device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN219967405U true CN219967405U (en) | 2023-11-07 |
Family
ID=88590168
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202223416041.8U Active CN219967405U (en) | 2022-12-20 | 2022-12-20 | Monocrystalline silicon piece chamfer device |
Country Status (1)
Country | Link |
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CN (1) | CN219967405U (en) |
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2022
- 2022-12-20 CN CN202223416041.8U patent/CN219967405U/en active Active
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