CN219964303U - Tail gas treatment equipment - Google Patents
Tail gas treatment equipment Download PDFInfo
- Publication number
- CN219964303U CN219964303U CN202321684284.1U CN202321684284U CN219964303U CN 219964303 U CN219964303 U CN 219964303U CN 202321684284 U CN202321684284 U CN 202321684284U CN 219964303 U CN219964303 U CN 219964303U
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- filter
- filter vat
- vat
- filter chamber
- gas
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- 238000005192 partition Methods 0.000 claims description 4
- 239000003463 adsorbent Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract description 2
- 238000001816 cooling Methods 0.000 description 8
- 238000001179 sorption measurement Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The utility model discloses tail gas treatment equipment, which comprises a filter vat for purifying tail gas, wherein the inner space of the filter vat is divided into a first filter cavity and a second filter cavity, a first air inlet and a first air outlet which are communicated with the first filter cavity and a second air inlet and a second air outlet which are communicated with the second filter cavity are arranged on the filter vat, the first air inlet and the second air inlet are commonly connected with a main air inlet pipe through a reversing valve, the first air outlet and the second air outlet are commonly connected with a main air outlet pipe, a fan and an air collecting assembly are arranged on the filter vat, and the fan introduces air to enable the tail gas to enter the main air inlet pipe and then to be discharged from the main air outlet pipe after passing through the first filter cavity or the second filter cavity. The first filter cavity and the second filter cavity are arranged in the single filter vat and are reserved for each other, so that the reliability of equipment is guaranteed, meanwhile, the installation space of the equipment is greatly saved relative to the additional standby vat, and the pipeline is relatively simplified.
Description
Technical Field
The utility model belongs to the technical field of tail gas treatment, and particularly relates to tail gas treatment equipment.
Background
The tail gas of semiconductor industry contains a large amount of pollutant gas and solid particles, and the tail gas can meet the emission requirement after being treated by different steps.
The utility model patent in China with the application number of CN202021515685.0 discloses a semiconductor tail gas double-cooling-barrel treatment adsorption device, which comprises a box body, wherein a first cooling barrel and a second cooling barrel are arranged in the box body, a gas collecting barrel is arranged above the first cooling barrel, the gas collecting barrel is communicated with the first cooling barrel through a main gas inlet pipe, a plurality of gas collecting pipes are detachably connected above the gas collecting barrel, the upper parts of the gas collecting pipes penetrate through the box body and are fixed with the box body through a flange plate, gas guide ports are arranged at the lower parts of the first cooling barrel and the second cooling barrel, the two gas guide ports are oppositely arranged, the two gas guide ports are connected through a communicating pipe, a fan is arranged above the second cooling barrel, the fan is connected with the second cooling barrel through a fan gas inlet pipe, and the fan is driven through a motor arranged above the fan.
In the tail gas treatment equipment, a standby barrel is arranged for ensuring the reliability of the equipment, and the standby barrel can be switched to work when the first cold barrel fails. The provision of the spare tub increases the volume of the whole apparatus and the complexity of the piping.
Disclosure of Invention
The utility model aims to solve the technical problems, and provides an exhaust gas treatment device capable of reducing the volume of the device while ensuring the reliability.
The purpose of the utility model is realized in the following way: the utility model provides a tail gas treatment facility, including the filter vat that is used for purifying tail gas, filter vat inner space is divided into first filter chamber and second filter chamber, be provided with first air inlet and the first gas outlet of intercommunication first filter chamber and the second air inlet and the second gas outlet of intercommunication second filter chamber on the filter vat, first air inlet is connected with total intake pipe jointly through the switching-over valve with the second air inlet, first gas outlet is connected with total outlet duct jointly with the second gas outlet, be provided with fan and air collecting assembly on the filter vat, the fan induced air makes tail gas get into total intake pipe, discharge from total outlet duct after first filter chamber or second filter chamber.
In the utility model, two filter barrels are arranged, namely a first filter barrel and a second filter barrel, and the total air outlet pipe of the first filter barrel is communicated with the total air inlet pipe of the second filter barrel.
In the utility model, the gas collecting component is connected with the main gas inlet pipe of the first filter barrel, and the fan is connected with the main gas outlet pipe of the second filter barrel.
In the utility model, the reversing valve on the first filter barrel is a first reversing valve, the reversing valve on the second filter barrel is a second reversing valve, the first reversing valve controls the tail gas from the gas collecting assembly to enter the first filter cavity or the second filter cavity of the first filter barrel, and the second reversing valve controls the flying of the tail gas from the first filter barrel to enter the first filter cavity or the second filter cavity of the second filter barrel.
In the utility model, a fan bracket for supporting a fan is arranged on the main air outlet pipe of the second filter barrel.
In the utility model, the gas collecting assembly comprises a plurality of gas collecting pipes and a gas collecting barrel connected with the gas collecting pipes, and the gas collecting barrel is connected with the first reversing valve.
In the utility model, the filter vat comprises a baffle plate which is vertically arranged and divides the inner space of the filter vat into a first filter cavity and a second filter cavity.
In the utility model, a detachable cylindrical supporting frame is arranged in the first filter cavity and the second filter cavity, two porous nets respectively arranged at the upper part and the lower part are arranged on the supporting frame, and an adsorbent is arranged between the two porous nets.
In the utility model, two openings corresponding to the first filter cavity and the second filter cavity are arranged on the filter barrel, and a cover plate for covering the openings is arranged on the openings.
In the utility model, an annular groove with the same shape as the opening is arranged on the opening, a limiting disc which is abutted against the opening is arranged on the cylindrical supporting frame, a limiting ring embedded in the annular groove is arranged on the limiting disc, and the cover plate is abutted against the limiting disc when covering the opening.
The beneficial effects of the utility model are as follows: the first filter cavity and the second filter cavity are arranged in the single filter vat and are mutually standby, so that the reliability of equipment is guaranteed, meanwhile, the installation space of the equipment is saved relative to the additional standby vat, and the pipeline is relatively simple.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a top view of the present utility model;
FIG. 3 is a schematic view of the structure of the first filter vat;
FIG. 4 is a schematic view of the structure of a second filter cartridge;
FIG. 5 is a schematic view of the structure of the inside of the filter vat;
FIG. 6 is a schematic view of the structure at A in FIG. 5;
wherein the reference numerals are as follows: a filter tub 100; a first filter chamber 101; a second filter chamber 102; a partition plate 103; a cylindrical support frame 104; an opening 105; a porous web 106; a limit plate 107; a stop collar 108; a first filter tub 110; a second filter tub 120; an air inlet 130; a first air inlet 131; a second air inlet 132; a main intake pipe 133; an air outlet 140; a first air outlet 141; a second air outlet 142; a main air outlet pipe 143; a cover plate 150; an annular groove 160; a gas collecting barrel 200; a gas collecting tube 210; a blower 300; a motor 310; a fan bracket 320; a first reversing valve 400; and a second reversing valve 500.
Detailed Description
The technical solutions of the embodiments of the present utility model will be clearly described below with reference to the drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, which are obtained by a person skilled in the art based on the embodiments of the present utility model, fall within the scope of protection of the present utility model.
Referring to fig. 1 to 6, an exhaust gas treatment apparatus includes a filter tub 100 for purifying exhaust gas, the filter tub 100 including a first filter tub 110 and a second filter tub 120. The space inside the single filter cartridge 100 is partitioned into a first filter chamber 101 and a second filter chamber 102 by a partition 103.
The filter vat 100 is provided with an air inlet 130 and an air outlet 140, the air inlet 130 is divided into a first air inlet 131 for allowing the tail gas to flow into the first filter cavity 101 and a second air inlet 132 for allowing the tail gas to flow into the second filter cavity 102, the first air inlet 131 and the second air inlet 132 are connected with a total air inlet pipe 133 through a reversing valve, and the reversing valve controls the tail gas to pass through the first air inlet 131 or the second air inlet 132 so that the tail gas enters the first filter cavity 101 or the second filter cavity 102 for adsorption. The air outlet 140 is divided into a first air outlet 141 through which the exhaust gas flows out of the first filter chamber 101 and a second air outlet 142 through which the exhaust gas flows out of the second filter chamber 102, and the first air outlet 141 and the second air outlet 142 are connected with a total air outlet pipe 143.
The total air outlet pipe 143 of the first filter vat 110 is communicated with the total air inlet pipe 133 of the second filter vat 120, so that the first filter vat 110 is communicated with the second filter vat 120, and tail gas is adsorbed by the first filter vat 110 and then enters the second filter vat 120 for adsorption, thereby enhancing the purifying effect.
The main air inlet pipe 133 of the first filter vat 110 is connected with an air collecting assembly, the air collecting assembly is composed of an air collecting vat 200 connected with the main air inlet pipe 133 of the first filter vat 110 and a plurality of air collecting pipes 210 arranged on the air collecting vat 200 in an equidistant manner, and tail gas enters the first filter vat 110 from the air collecting assembly. The fan bracket 320 is connected to the total air outlet pipe 143 of the second filter vat 120, the fan 300 connected to the total air outlet pipe 143 of the second filter vat 120 is mounted on the fan bracket 320, the fan 300 is driven by the motor 310, the fan 300 makes the tail gas flow through the suction force generated by rotation, the tail gas enters the second filter vat 120 from the air inlet assembly after entering the first filter vat 110, and finally flows to the total air outlet pipe 143 of the second filter vat 120.
The reversing valve on the first filter vat 110 is a first reversing valve 400, the second reversing valve 500 of the reversing valve on the second filter vat 120, the first reversing valve 400 controls the tail gas from the gas collecting assembly to enter the first filter cavity 101 or the second filter cavity 102 of the first filter vat 110, and the second reversing valve 500 controls the flying-up from the first filter vat 110 to enter the first filter cavity 101 or the second filter cavity 102 of the second filter vat 120. When in use, one of the first filter vat 110 and the second filter vat 120 can be selected to enable the tail gas to flow into the first filter cavity 101 or the second filter vat 102 for adsorption, and after a period of time, the other filter vat is selected to enable the waste to flow into the second filter vat for adsorption, so that the first filter vat 101 and the second filter vat 102 are used in an exchanging way, and the faults of the unused filter vats can be found in time. The other of the first filter chamber 101 and the second filter chamber 102 also serves as a spare when the other is damaged, improving the reliability of the apparatus.
The first filter chamber 101 and the second filter chamber 102 are provided with two openings 105 corresponding to the first filter chamber 101 and the second filter chamber 102, respectively, and the openings 105 are provided with a cover plate 150 covering the openings 105. The opening cover plate 150 is inserted into the first filter cavity 101 and the second filter cavity 102, the opening 105 is provided with an annular groove 160 which is consistent with the shape of the opening 105, the cylindrical support 104 is provided with a limiting disc 107 which is abutted with the opening 105, the limiting disc 107 is provided with a limiting ring 108 which is embedded into the annular groove 160, and the cylindrical support 104 can be mounted and dismounted on the opening 105. The cover plate 150 abuts against the limiting plate 107 when covering the opening 105. Two porous nets 106 are arranged on the cylindrical supporting frame 104 and respectively arranged on the upper part and the lower part, and an adsorbent is arranged between the two porous nets 106. The cylindrical support frame 104 can be mounted and dismounted to facilitate maintenance and repair of the filter cartridge 100.
The embodiments of the present utility model have been described above with reference to the accompanying drawings, in which the embodiments of the present utility model and features of the embodiments may be combined with each other without conflict, the present utility model is not limited to the above-described embodiments, which are merely illustrative, not restrictive, of the present utility model, and many forms may be made by those of ordinary skill in the art without departing from the spirit of the present utility model and the scope of the claims, which are protected by the present utility model.
Claims (10)
1. The utility model provides a tail gas treatment facility, its characterized in that, including being used for purifying tail gas filter vat (100), the inner space of filter vat (100) is divided into first filter chamber (101) and second filter chamber (102), is provided with first air inlet (131) and first gas outlet (141) of intercommunication first filter chamber (101) and second air inlet (132) and second gas outlet (142) of intercommunication second filter chamber (102) on filter vat (100), first air inlet (131) are connected with total intake pipe (133) jointly with second air inlet (132) through the switching-over valve, first gas outlet (141) are connected with total outlet duct (143) jointly with second gas outlet (142), be provided with fan (300) and gas collecting assembly on filter vat (100), fan (300) induced air makes tail gas get into total intake pipe (133), flows to total outlet duct (143) after first filter chamber (101) or second filter chamber (102).
2. An exhaust gas treatment device according to claim 1, characterized in that the filter vat (100) is provided with two and a first filter vat (110) and a second filter vat (120), respectively, the total outlet pipe (143) of the first filter vat (110) being in communication with the total inlet pipe (133) of the vat of the second filter vat (120).
3. An exhaust gas treatment device according to claim 2, characterized in that the gas collecting assembly is connected to the main inlet pipe (133) of the first filter vat (110), and the fan (300) is connected to the main outlet pipe (143) of the second filter vat (120).
4. A tail gas treatment plant according to claim 3, characterized in that the reversing valve on the first filter vat (110) is a first reversing valve (400), the reversing valve on the second filter vat (120) is a second reversing valve (500), the first reversing valve (400) controls the tail gas from the gas collection assembly to enter the first filter chamber (101) or the second filter chamber (102) of the first filter vat (110), and the second reversing valve (500) controls the tail gas from the first filter vat (110) to enter the first filter chamber (101) or the second filter chamber (102) of the second filter vat (120).
5. A tail gas treatment device according to claim 3, characterized in that a fan holder (320) for holding the fan (300) is arranged on the main outlet pipe (143) of the second filter vat (120).
6. A tail gas treatment device according to claim 3, characterized in that the gas collection assembly comprises a plurality of gas collection tubes (210) and a gas collection barrel (200) connected to the plurality of gas collection tubes (210), the gas collection barrel (200) being connected to the main gas inlet tube (133) of the first filter vat (110).
7. An exhaust gas treatment device according to claim 1, characterized in that a partition plate (103) is provided in the filter vat (100), the partition plate (103) dividing the space inside the filter vat (100) into the first filter chamber (101) and the second filter chamber (102).
8. The exhaust gas treatment device according to claim 7, wherein a detachable tubular supporting frame (104) is arranged in the first filter chamber (101) and the second filter chamber (102), two porous nets (106) respectively arranged at the upper part and the lower part are arranged on the tubular supporting frame (104), and an adsorbent is arranged between the two porous nets (106).
9. The exhaust gas treatment device according to claim 8, characterized in that the filter vat (100) is provided with two openings (105) corresponding to the first filter chamber (101) and the second filter chamber (102), respectively, and the openings (105) are provided with a cover plate (150) covering the openings (105).
10. The exhaust gas treatment device according to claim 9, wherein the opening (105) is provided with an annular groove (160) which is consistent with the shape of the opening (105), the tubular support (104) is provided with a limiting disc (107) which is abutted against the opening (105), the limiting disc (107) is provided with a limiting ring (108) which is embedded into the annular groove (160), and the cover plate (150) is abutted against the limiting disc (107) when covering the opening (105).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321684284.1U CN219964303U (en) | 2023-06-29 | 2023-06-29 | Tail gas treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321684284.1U CN219964303U (en) | 2023-06-29 | 2023-06-29 | Tail gas treatment equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219964303U true CN219964303U (en) | 2023-11-07 |
Family
ID=88577085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321684284.1U Active CN219964303U (en) | 2023-06-29 | 2023-06-29 | Tail gas treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219964303U (en) |
-
2023
- 2023-06-29 CN CN202321684284.1U patent/CN219964303U/en active Active
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