CN219958920U - Lower electrode corner protection module of liquid crystal panel dry etching machine - Google Patents
Lower electrode corner protection module of liquid crystal panel dry etching machine Download PDFInfo
- Publication number
- CN219958920U CN219958920U CN202321591989.9U CN202321591989U CN219958920U CN 219958920 U CN219958920 U CN 219958920U CN 202321591989 U CN202321591989 U CN 202321591989U CN 219958920 U CN219958920 U CN 219958920U
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- lower electrode
- corner
- protection module
- shaped
- corner protection
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- 238000001312 dry etching Methods 0.000 title claims abstract description 18
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 13
- 239000004809 Teflon Substances 0.000 claims abstract description 12
- 229920006362 Teflon® Polymers 0.000 claims abstract description 12
- 230000001012 protector Effects 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 3
- 239000011324 bead Substances 0.000 claims 1
- 238000009434 installation Methods 0.000 abstract description 3
- 230000006872 improvement Effects 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000002159 abnormal effect Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000003487 electrochemical reaction Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Abstract
A lower electrode corner protector module of a liquid crystal panel dry etching machine, the lower electrode corner protector module being of a two-piece type, comprising: the lower electrode corner protection module body and an L-shaped corner piece matched with the lower electrode corner protection module body; the middle corner of the lower electrode corner protection module body is provided with an L-shaped corner groove, and an L-shaped corner piece is inserted into the L-shaped corner groove and is connected with the L-shaped corner groove in a matching way. The lower electrode corner protection module body is provided with a plurality of through holes, and a plurality of screws penetrate into the through holes to be abutted against the L-shaped corner pieces, so that the L-shaped corner pieces are in close contact with the lower electrode. The lower electrode corner protection module is made of teflon materials. The utility model is designed into two parts by the improvement of the integrated teflon corner protection module, and increases the screw structure in the assembly, improves the adjusting capability of the teflon corner protection module and the gap between the lower electrode, can frequently replace L-shaped corner pieces, effectively reduces downtime frequency, reduces the risk of machine and products, improves the flexibility of assembly installation and adjustment and reduces assembly cost.
Description
Technical Field
The utility model belongs to the technical field of liquid crystal panel dry etchers, and particularly relates to a lower electrode corner protection module of a liquid crystal panel dry etcher.
Background
The manufacture of liquid crystal display panels (LCDs) requires the use of an etching process. The etching process may be classified into a dry etching process and a wet etching process according to the physical state of the etchant. Wherein the wet etching process etches the substrate with an etching liquid. The dry etching process is to use a dry etching machine to make etching gas generate plasma under the action of an RF radio frequency electrode, and remove the film layer which is not covered or protected by the photoresist on the substrate in a chemical reaction and physical reaction mode, wherein the film layer covered or protected by the photoresist is remained because the film layer is not etched by the plasma.
As shown in fig. 1 to 3, a conventional dry etching machine includes: a reaction chamber 1 for performing a dry etching reaction on the substrate 2 by an etching gas; an upper electrode 3 provided in an upper space inside the reaction chamber; and a lower electrode 4 disposed in a lower space inside the reaction chamber 1 and opposite to the upper electrode 3, and having an upper surface for carrying the substrate 2 etched by the etching gas. The liquid crystal panel dry etching machine mainly utilizes positive ion physical bombardment and electrochemical reaction in plasma to remove a film layer on the surface of a glass substrate, which is not shielded by a photoresist, so that a required pattern film layer is transferred onto the glass substrate, and the purpose of dry etching is achieved. The lower electrode 4 provides a high frequency signal output and an electromagnetic attraction voltage during production. The high frequency signal is output to generate a bias voltage magnetic field to induce positive ions in the plasma to bombard the substrate 2. The electromagnetic adsorption voltage generates an electromagnetic adsorption force on the surface of the lower electrode 4 to adsorb and fix the substrate 2, so as to prevent the substrate 2 from being biased by back pressure helium.
Because of the functional requirements, the lower electrode 4 has a multi-layer structure, the surface layer is an insulating alumina ceramic layer, and the base is a metal layer (a multi-layer metal structure such as a tungsten layer). To avoid abnormal discharge of the metal layer and plasma, an insulating teflon corner protection module 100' is installed around the metal layer for isolation. However, for long term use, the plasma will erode the teflon corner protection module 100' from the four corners, resulting in abnormal discharge and abnormal downtime of the back pressure.
Disclosure of Invention
The utility model aims to solve the technical problem of providing a lower electrode corner protection module of a liquid crystal panel dry etching machine, which improves the contact and adjustment modes of the corner protection module and a lower electrode so as to avoid abnormal discharge and abnormal downtime of back pressure.
The utility model is realized in the following way:
a lower electrode corner protector module of a liquid crystal panel dry etching machine, the lower electrode corner protector module being of a two-piece type, comprising: the lower electrode corner protection module body and an L-shaped corner piece matched with the lower electrode corner protection module body; the middle corner of the lower electrode corner protection module body is provided with an L-shaped corner groove, and an L-shaped corner piece is inserted into the L-shaped corner groove and is connected with the L-shaped corner groove in a matching way.
Further, the lower electrode corner protection module body is provided with a plurality of through holes, and a plurality of screws penetrate into the through holes to be abutted against the L-shaped corner pieces, so that the L-shaped corner pieces are in close contact with the lower electrode.
Further, the lower electrode corner protection module is made of teflon materials.
The utility model has the advantages that: the integrated teflon corner protector module is improved and designed into two parts, the screw structure inside the assembly is increased, the adjusting capability of the teflon corner protector module and the gap between the lower electrode is improved, the L-shaped corner pieces can be replaced frequently, downtime frequency is reduced effectively, the risk of a machine table and products is reduced, the flexibility of assembly installation and adjustment is improved, and assembly cost is reduced.
Drawings
The utility model will be further described with reference to the accompanying drawings, in conjunction with examples.
Fig. 1 is a schematic diagram of a dry etching machine.
Fig. 2 is a schematic diagram of the structure of the lower electrode, lower electrode corner protection module and ceramic protection sheet in the dry etching machine.
Fig. 3 is a schematic diagram of a prior art bottom electrode corner protector module.
Fig. 4 is a split schematic view of the bottom electrode corner protector module of the present utility model.
Fig. 5 is a schematic view of the overall structure of the lower electrode corner protection module of the present utility model.
Reference numerals: 1-reaction cavity, 2-substrate, 3, upper electrode, 4, lower electrode, 5-ceramic protection sheet, 100' -lower electrode corner protection module (prior art), 100-lower electrode corner protection module (utility model), 101-lower electrode corner protection module body, 1011- "L" shape corner groove, 1012-through hole, 102- "L" shape corner sheet.
Detailed Description
As shown in fig. 4 and 5, a lower electrode corner protection module 100 of a liquid crystal panel dry etching machine, the lower electrode corner protection module 100 is split, and includes: a lower electrode corner protection module body 101 and an L-shaped corner piece 102 matched with the lower electrode corner protection module body; an L-shaped corner groove 1011 is arranged at the corner of the middle part of the lower electrode corner protection module body 101, and an L-shaped corner piece 102 is inserted into the L-shaped corner groove 1011 and is connected with the L-shaped corner groove in a matching way.
In this embodiment, the lower electrode corner protection module body 101 is provided with a plurality of through holes 1012, and a plurality of screws penetrate into the through holes 1012 to be abutted against the L-shaped corner pieces 102, so that the L-shaped corner pieces 102 are in close contact with the lower electrode 4.
The lower electrode corner protection module 100 is made of teflon.
The utility model is designed into two parts by the improvement of the integrated teflon corner protection module, and increases the screw structure in the assembly, improves the adjusting capability of the teflon corner protection module and the gap between the lower electrode, can frequently replace L-shaped corner pieces, effectively reduces downtime frequency, reduces the risk of machine and products, improves the flexibility of assembly installation and adjustment and reduces assembly cost.
The above examples and drawings are not intended to limit the form or form of the present utility model, and any suitable variations or modifications thereof by those skilled in the art should be construed as not departing from the scope of the present utility model.
Claims (3)
1. The utility model provides a lower electrode angle bead module of liquid crystal display panel dry etching machine which characterized in that: the lower electrode corner protection module is of a split type and comprises: the lower electrode corner protection module body and an L-shaped corner piece matched with the lower electrode corner protection module body; the middle corner of the lower electrode corner protection module body is provided with an L-shaped corner groove, and an L-shaped corner piece is inserted into the L-shaped corner groove and is connected with the L-shaped corner groove in a matching way.
2. The lower electrode corner protector module of a liquid crystal panel dry etching machine as set forth in claim 1, wherein: the lower electrode corner protection module body is provided with a plurality of through holes, and a plurality of screws penetrate into the through holes to be abutted against the L-shaped corner pieces, so that the L-shaped corner pieces are in close contact with the lower electrode.
3. The lower electrode corner protector module of a liquid crystal panel dry etching machine as set forth in claim 1, wherein: the lower electrode corner protection module is made of teflon materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321591989.9U CN219958920U (en) | 2023-06-21 | 2023-06-21 | Lower electrode corner protection module of liquid crystal panel dry etching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321591989.9U CN219958920U (en) | 2023-06-21 | 2023-06-21 | Lower electrode corner protection module of liquid crystal panel dry etching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219958920U true CN219958920U (en) | 2023-11-03 |
Family
ID=88545962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321591989.9U Active CN219958920U (en) | 2023-06-21 | 2023-06-21 | Lower electrode corner protection module of liquid crystal panel dry etching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219958920U (en) |
-
2023
- 2023-06-21 CN CN202321591989.9U patent/CN219958920U/en active Active
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