CN219946813U - Cutting machine workbench mounting device and semiconductor process equipment - Google Patents
Cutting machine workbench mounting device and semiconductor process equipment Download PDFInfo
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- CN219946813U CN219946813U CN202321209000.3U CN202321209000U CN219946813U CN 219946813 U CN219946813 U CN 219946813U CN 202321209000 U CN202321209000 U CN 202321209000U CN 219946813 U CN219946813 U CN 219946813U
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title abstract description 8
- 238000012545 processing Methods 0.000 claims description 7
- 238000009434 installation Methods 0.000 claims description 4
- 230000002411 adverse Effects 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 4
- 239000012634 fragment Substances 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 210000000078 claw Anatomy 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
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Abstract
The utility model provides a cutting machine workbench mounting device and semiconductor process equipment, which relate to the technical field of semiconductors, wherein the cutting machine workbench is used for being mounted on a base, a first positioning part at the lower side of the cutting machine workbench is in plug-in fit with a second positioning part at the upper side of the base, and the device comprises: the device comprises a marking component, a first connecting part and a second connecting part, wherein one end of the marking component is provided with a first connecting part, and at least one first marking line is arranged on the upper surface of the marking component; when the identification component is connected to the base through the first connection part and the cutting machine workbench is coaxial with the base, each first identification line is an arc corresponding to the virtual circle of the periphery of one cutting machine workbench; the problem of among the prior art when changing the C/T platform because can' T directly see the location structure between it and the Base, can only go back and forth left and right movement C/T platform according to approximate position after the two contact to make location structure insert the position, easily produce foreign matter piece because of friction, bring adverse effect to the levelness of high accuracy C/T platform is solved.
Description
Technical Field
The utility model belongs to the technical field of semiconductors, and particularly relates to a workbench mounting device of a cutting machine and semiconductor process equipment.
Background
The wafer dicing saw is a semiconductor device and comprises a cutting machine workbench (C/T table) detachably arranged on a Base (Base), wherein a plug-in type positioning structure is arranged between the cutting machine workbench and the Base for ensuring the coaxial installation of the cutting machine workbench and the Base. In practical application, for the processing technology suitable for 8 inch and 12 inch diameter wafers, the cutting machine workbench is divided into two specifications of 8 inch and 12 inch, the Base is a vacuum fixing Base, the C/T table and the Base are fixed by vacuum adsorption, and when wafers with different diameters are cut, the C/T table is required to be replaced according to different size specifications. When the C/T table is replaced, the positioning structure between the C/T table and the Base cannot be directly seen, and the C/T table can only be moved back and forth and left and right according to the approximate position after the C/T table and the Base are contacted, so that the positioning structure is inserted into the insertion position, foreign matter fragments are easily generated due to friction, and the levelness of the high-precision C/T table is adversely affected.
Disclosure of Invention
The utility model aims to overcome the defects in the prior art, provides a mounting device for a workbench of a cutting machine and semiconductor process equipment, and solves the problems that in the prior art, a positioning structure between a C/T table and a Base cannot be directly seen when the C/T table is replaced, and the C/T table can only be moved back and forth and left and right according to the approximate position after the C/T table is contacted, so that the positioning structure is inserted into an insertion position, foreign matter fragments are easily generated due to friction, and the levelness of the high-precision C/T table is adversely affected.
In order to achieve the above object, the present utility model provides a mounting device for a cutting machine table, the cutting machine table is configured to be mounted on a base, a first positioning portion on a lower side of the cutting machine table is in plug-in fit with a second positioning portion on an upper side of the base, the mounting device comprises:
the device comprises an identification component, wherein one end of the identification component is provided with a first connecting part, and the upper surface of the identification component is provided with at least one first identification line;
when the identification component is connected to the base through the first connecting part and the cutting machine workbench is coaxial with the base, each first identification line is an arc corresponding to a virtual circle on the periphery of the cutting machine workbench.
Optionally, one of the first positioning portion and the second positioning portion is an annular protrusion, the other one of the first positioning portion and the second positioning portion is an annular groove, and the first positioning portion and the second positioning portion are respectively concentric with the base and the cutting machine workbench.
Optionally, the cutting machine workbench and the base are further provided with a third positioning part and a fourth positioning part respectively, the third positioning part is in plug-in fit with the fourth positioning part, and the third positioning part and the fourth positioning part are respectively arranged on one side of the first positioning part and one side of the second positioning part.
Optionally, a second identification line is further provided on the upper surface of the identification component, and the second identification line is collinear with a first radius on the base passing through the center of the fourth positioning portion; the outer wall of the cutting machine workbench is provided with a third identification line, and the third identification line and a second radius passing through the center of the third positioning part on the cutting machine workbench are positioned in the same vertical plane.
Optionally, one of the third positioning portion and the fourth positioning portion is a positioning column, and the other one of the third positioning portion and the fourth positioning portion is a positioning hole.
Optionally, the identification member is plate-shaped.
Optionally, the first connecting portion is a plate-like protrusion provided at the one end of the identification member.
Optionally, a second connection part is arranged at the other end of the identification component, and the second connection part is a through hole.
The utility model also provides a semiconductor process device comprising:
a base;
the cutting machine workbench is detachably arranged on the upper side of the base and is positioned through the plug-in cooperation of the first positioning part and the second positioning part;
according to the cutting machine workbench mounting device, the identification component of the cutting machine workbench mounting device is connected to the outer wall of the cutting machine workbench through the first connecting component.
Optionally, a vacuum tube support frame is arranged on the outer wall of one side of the workbench of the cutting machine, and the other end of the identification component is connected to the vacuum tube support frame.
The utility model provides a cutting machine workbench mounting device and semiconductor process equipment, which have the beneficial effects that: the cutting machine workbench mounting device is connected with the base through a first connecting part on the identification part, at least one first identification line is arranged on the identification part, each first identification line is an arc, when the cutting machine workbench is mounted on the base, the periphery of the cutting machine workbench and one first identification line with the corresponding size can be observed when the cutting machine workbench is in quick contact with the base, when the cutting machine workbench is moved to the position that the periphery of the cutting machine workbench is overlapped with the first identification line, the cutting machine workbench and the base are in a coaxial state, and at the moment, the cutting machine workbench can be directly put down so that the first positioning part and the second positioning part are spliced; therefore, the mounting device of the workbench of the cutting machine ensures that the position adjustment and the positioning of the workbench of the cutting machine are more visual and accurate during the mounting, the operation is simple and convenient, the situation that the levelness of the workbench of the cutting machine is influenced due to the fact that friction is generated between the workbench of the cutting machine and a base when the workbench of the cutting machine is mounted like the prior art is avoided.
Additional features and advantages of the utility model will be set forth in the detailed description which follows.
Drawings
The foregoing and other objects, features and advantages of the utility model will be apparent from the following more particular descriptions of exemplary embodiments of the utility model as illustrated in the accompanying drawings wherein like reference numbers generally represent like parts throughout the exemplary embodiments of the utility model.
Fig. 1 shows a schematic top view of a table mounting device for a cutting machine according to an embodiment of the present utility model.
Fig. 2 shows a schematic structural view of a semiconductor processing apparatus according to an embodiment of the present utility model.
Fig. 3 illustrates a schematic bottom view of a cutter table of a semiconductor processing apparatus according to one embodiment of the present utility model.
Fig. 4 shows a schematic side view of a dicing machine table of a semiconductor processing apparatus according to an embodiment of the utility model.
Reference numerals illustrate:
1. an identification component; 2. a first connection portion; 3. a first identification line; 4. a second positioning portion; 5. a third positioning portion; 6. a fourth positioning portion; 7. a first radius; 8. a second radius; 9. a second identification line; 10. a third identification line; 11. a through hole; 12. a base; 13. a cutting machine workbench; 14. a vacuum tube support; 15. holding claws; 16. a waterproof base; 17. a first positioning portion.
Detailed Description
Preferred embodiments of the present utility model will be described in more detail below. While the preferred embodiments of the present utility model are described below, it should be understood that the present utility model may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the utility model to those skilled in the art.
As shown in fig. 1, the present utility model provides a mounting device for a cutting machine table, wherein the cutting machine table is used for being mounted on a base, a first positioning portion on the lower side of the cutting machine table is in plug-in fit with a second positioning portion on the upper side of the base, and the mounting device comprises:
the identification component 1, one end of the identification component 1 is provided with a first connecting part 2, and the upper surface of the identification component 1 is provided with at least one first identification line 3;
when the identification member 1 is connected to the base 12 via the first connection portion 2 and the cutter table 13 is coaxial with the base 12, each first identification line 3 is an arc corresponding to an imaginary circle of the outer periphery of one cutter table 13.
Specifically, in order to solve the problem that in the prior art, because the positioning structure between the C/T table and the Base cannot be directly seen when the C/T table is replaced, the C/T table can only be moved back and forth and left and right according to the approximate position after the C/T table and the Base are contacted, so that the positioning structure is inserted into an access position, foreign matter fragments are easily generated due to friction, and adverse effects are brought to the levelness of the high-precision C/T table; the cutting machine workbench mounting device provided by the utility model is connected with the base 12 through the first connecting part 2 on the identification component 1, at least one first identification line 3 is arranged on the identification component 1, each first identification line 3 is an arc, when the cutting machine workbench 13 is mounted on the base 12, the periphery of the cutting machine workbench 13 and one first identification line 3 with the corresponding size can be observed when the cutting machine workbench 13 is in quick contact with the base 12, when the cutting machine workbench 13 is moved to the periphery which is overlapped with the first identification line 3, the cutting machine workbench 13 and the base 12 are shown to be in a coaxial state, and then the cutting machine workbench 13 can be directly put down, so that the first positioning part 17 and the second positioning part 4 are spliced; like this cutting machine workstation installation device makes the position adjustment and the location of cutting machine workstation 13 when the installation more directly perceived, accurate, easy operation is convenient, can avoid producing the friction between cutting machine workstation 13 and the base 12 when installing cutting machine workstation 13 like among the prior art, produces the foreign matter piece easily and influences the condition emergence of the levelness of cutting machine workstation 13.
In this embodiment, the cutting machine table 13 and the base 12 are both circular, the first identification lines 3 on the identification member 1 are formed by printing or providing protrusions or recesses, each first identification line 3 is an arc, each arc corresponds to one outer diameter size of the cutting machine table 13, when the identification member 1 is connected to the base 12 by the first connection portion 2 and the cutting machine table 13 is coaxial with the base 12, each first identification line 3 corresponds to one outer diameter size of the outer circumference virtual circle of the cutting machine table 13, and the outer circumference virtual circle is a virtual circle overlapping with the outer circumference of the cutting machine table 13, and the mentioned correspondence is that the arc can overlap with a part of the virtual circle at least after vertical translation.
Further, in this embodiment, two first identification lines 3 are provided, one corresponding to the 8-inch-size cutting machine table 13, and the other corresponding to the 10-inch-size cutting machine table 13.
Alternatively, one of the first positioning portion 17 and the second positioning portion 4 is an annular protrusion, and the other of the first positioning portion 17 and the second positioning portion 4 is an annular groove, and the first positioning portion 17 and the second positioning portion 4 are respectively arranged concentrically with the base 12 and the cutter table 13.
Specifically, the first positioning portion 17 and the second positioning portion 4 are provided at the centers of the cutter table 13 and the base 12, respectively.
In this embodiment, the first positioning portion 17 is a protrusion, and the second positioning portion 4 is a groove.
Optionally, the cutting machine workbench 13 and the base 12 are further provided with a third positioning part 5 and a fourth positioning part 6 respectively, the third positioning part 5 is in plug-in fit with the fourth positioning part 6, and the third positioning part 5 and the fourth positioning part 6 are arranged on one side of the first positioning part 17 and one side of the second positioning part 4 respectively.
Specifically, the third positioning portion 5 and the fourth positioning portion 6 are disposed on one side of the first positioning portion 17 and the second positioning portion 4, respectively, and are not located at the centers of the cutting machine table 13 and the base 12, that is, are eccentrically disposed, so that the insertion and connection of the third positioning portion 5 and the fourth positioning portion 6 can position the cutting machine table 13 in the circumferential direction, and rotation of the cutting machine table 13 is avoided.
Optionally, a second identification line 9 is further provided on the upper surface of the identification component 1, the second identification line 9 being collinear with the first radius 7 on the base 12 passing through the centre of the fourth positioning portion 6; a third identification line 10 is arranged on the outer wall of the cutting machine workbench 13, and the third identification line 10 and a second radius 8 passing through the center of the third positioning part 5 on the cutting machine workbench 13 are positioned in the same vertical plane.
Specifically, the second marking line 9 and the third marking line 10 are straight lines, when the cutting machine workbench 13 is moved to the position that the outer periphery is overlapped with the first marking line 3, the cutting machine workbench 13 is in a coaxial state with the base 12, and meanwhile, when the third marking line 10 is aligned with the second marking line 9 so that the second marking line 9 and the second radius 8 are in the same vertical plane, namely, the second marking line 9 is collinear with the first radius 7 and the second radius 8, at the moment, the third positioning part 5 is aligned with the fourth positioning part 6, the cutting machine workbench 13 can be directly put down, and thus, the first positioning part 17 is spliced with the second positioning part 4, and the third positioning part 5 is spliced with the fourth positioning part 6, so that better positioning of the cutting machine workbench 13 is realized.
Optionally, one of the third positioning portion 5 and the fourth positioning portion 6 is a positioning column, and the other of the third positioning portion 5 and the fourth positioning portion 6 is a positioning hole.
In this embodiment, the third positioning portion 5 is a positioning post, and the fourth positioning portion 6 is a positioning hole.
Alternatively, the identification member 1 is plate-shaped.
Specifically, the second identification line 9, like the first identification line 3, may be formed in a printing manner or in a protruding or recessed manner, and similarly the third identification line 10 may be printed or in a protruding or recessed manner on the outer wall of the cutter table 13; it should be noted that, when the contact height measurement (CS height measurement) condition exists, in order to avoid affecting the CS height measurement, the third identification line 10 does not extend to the side edge of the cutting machine table 13, and therefore, a person skilled in the art may set the third identification line according to the actual situation, which is not described herein again.
Alternatively, the first connecting portion 2 is a plate-like projection provided at one end of the identification member 1.
Specifically, a plugging slot is formed in a side wall of the base 12, and the first connection portion 2 can be inserted into the plugging slot to be connected with the base 12.
Optionally, the other end of the identification member 1 is provided with a second connection portion, which is a through hole 11.
In particular, the second connection portion is configured to connect with other structures on the base 12, such as the vacuum tube support 14, to further secure the identification component 1.
In the present embodiment, the through holes 11 can realize a bolt or screw connection.
In other examples, the second connection portion may also be a threaded hole, a nut, or the like, so as to facilitate connection.
As shown in fig. 2 to 4, the present utility model further provides a semiconductor process apparatus, comprising:
a base 12;
the cutting machine workbench 13 is detachably arranged on the upper side of the base 12 and is positioned by the plug-in cooperation of the first positioning part 17 and the second positioning part 4;
in the above-described cutter table mounting apparatus, the identification member 1 of the cutter table mounting apparatus is attached to the outer wall of the cutter table 13 via the first attachment portion 2.
Specifically, when the cutting machine table 13 is mounted on the base 12, the periphery of the cutting machine table 13 and one first identification line 3 with a corresponding size can be observed when the cutting machine table 13 is in quick contact with the base 12, when the cutting machine table 13 is moved to the position that the periphery of the cutting machine table 13 is overlapped with the first identification line 3, the cutting machine table 13 and the base 12 are in a coaxial state, and at the moment, the cutting machine table 13 can be directly put down, so that the first positioning part 17 and the second positioning part 4 are spliced; the mounting device of the cutting machine workbench enables the position adjustment and the positioning of the cutting machine workbench 13 during mounting to be more visual and accurate, and the operation is simple and convenient.
Optionally, a vacuum tube support 14 is provided on an outer wall of one side of the cutter table 13, and the other end of the identification member 1 is connected to the vacuum tube support 14.
Specifically, the vacuum tube support frame 14 is used for supporting the vacuum tube, and may be provided with mounting holes thereon for connection fastening by means of the through holes 11 on the identification member 1 by means of fastening members such as bolts or screws, nuts, etc.
In this embodiment, the semiconductor processing apparatus is a wafer dicing saw, which further includes a holding claw 15 structure, a waterproof base 16 on the lower side of the base 12, and the like.
The foregoing description of embodiments of the utility model has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described.
Claims (10)
1. The utility model provides a cutting machine workstation installation device, the cutting machine workstation is used for installing on the base, the first location portion of the downside of cutting machine workstation with the cooperation of pegging graft of the second location portion of the upside of base, its characterized in that includes:
the device comprises an identification component, wherein one end of the identification component is provided with a first connecting part, and the upper surface of the identification component is provided with at least one first identification line;
when the identification component is connected to the base through the first connecting part and the cutting machine workbench is coaxial with the base, each first identification line is an arc corresponding to a virtual circle on the periphery of the cutting machine workbench.
2. The cutting table mounting apparatus of claim 1, wherein one of the first positioning portion and the second positioning portion is an annular protrusion, the other of the first positioning portion and the second positioning portion is an annular groove, and the first positioning portion and the second positioning portion are disposed concentrically with the base and the cutting table, respectively.
3. The cutting machine workbench mounting device according to claim 1, wherein a third positioning portion and a fourth positioning portion are further arranged on the cutting machine workbench and the base respectively, the third positioning portion is in plug-in fit with the fourth positioning portion, and the third positioning portion and the fourth positioning portion are arranged on one side of the first positioning portion and one side of the second positioning portion respectively.
4. A cutting machine table mounting device as claimed in claim 3, wherein a second identification line is further provided on the upper surface of the identification member, the second identification line being collinear with a first radius on the base passing through the center of the fourth positioning portion; the outer wall of the cutting machine workbench is provided with a third identification line, and the third identification line and a second radius passing through the center of the third positioning part on the cutting machine workbench are positioned in the same vertical plane.
5. A cutting machine table mounting device as claimed in claim 3, wherein one of the third positioning portion and the fourth positioning portion is a positioning post, and the other of the third positioning portion and the fourth positioning portion is a positioning hole.
6. The cutting table mounting apparatus of claim 1, wherein the identification member is plate-shaped.
7. The cutting machine table mounting device according to claim 6, wherein the first connecting portion is a plate-like projection provided at the one end of the identification member.
8. The cutting machine table mounting device according to claim 6, wherein the other end of the identification member is provided with a second connection portion, the second connection portion being a through hole.
9. A semiconductor processing apparatus, comprising:
a base;
the cutting machine workbench is detachably arranged on the upper side of the base and is positioned through the plug-in cooperation of the first positioning part and the second positioning part;
a cutter table mounting apparatus according to any one of claims 1 to 8, wherein the identification member of the cutter table mounting apparatus is attached to the outer wall of the cutter table by the first attachment member.
10. The semiconductor processing apparatus of claim 9, wherein a vacuum tube support is provided on an outer wall of one side of the dicing machine table, and the other end of the marking member is connected to the vacuum tube support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321209000.3U CN219946813U (en) | 2023-05-18 | 2023-05-18 | Cutting machine workbench mounting device and semiconductor process equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321209000.3U CN219946813U (en) | 2023-05-18 | 2023-05-18 | Cutting machine workbench mounting device and semiconductor process equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219946813U true CN219946813U (en) | 2023-11-03 |
Family
ID=88536394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321209000.3U Active CN219946813U (en) | 2023-05-18 | 2023-05-18 | Cutting machine workbench mounting device and semiconductor process equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219946813U (en) |
-
2023
- 2023-05-18 CN CN202321209000.3U patent/CN219946813U/en active Active
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