CN219943106U - Grinding device for producing gallium oxide substrate with low surface roughness - Google Patents
Grinding device for producing gallium oxide substrate with low surface roughness Download PDFInfo
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- CN219943106U CN219943106U CN202321670354.8U CN202321670354U CN219943106U CN 219943106 U CN219943106 U CN 219943106U CN 202321670354 U CN202321670354 U CN 202321670354U CN 219943106 U CN219943106 U CN 219943106U
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- surface roughness
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- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 title claims abstract description 68
- 229910001195 gallium oxide Inorganic materials 0.000 title claims abstract description 68
- 239000000758 substrate Substances 0.000 title claims abstract description 37
- 230000003746 surface roughness Effects 0.000 title claims description 19
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 claims abstract description 15
- 230000005540 biological transmission Effects 0.000 claims description 56
- 230000001360 synchronised effect Effects 0.000 claims description 41
- 238000007599 discharging Methods 0.000 claims description 24
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000002994 raw material Substances 0.000 abstract description 43
- 230000002035 prolonged effect Effects 0.000 abstract description 2
- 238000005498 polishing Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012216 screening Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model relates to the technical field of gallium oxide substrate production and discloses a grinding device for low-surface-roughness gallium oxide substrate production. According to the utility model, the primary grinding mechanism is utilized to quantitatively feed and primarily spiral grind and convey the gallium oxide raw material, so that the primary grinding mechanism is utilized to perform autonomous grinding, crushing and spiral propelling work on the gallium oxide raw material, and the secondary grinding mechanism is utilized to perform secondary spiral grinding and conveying on the gallium oxide raw material, so that the secondary autonomous grinding, crushing and spiral propelling work on the gallium oxide raw material can be performed again, the grinding time is prolonged, and the comprehensiveness, uniformity and high quality of grinding and crushing are ensured.
Description
Technical Field
The utility model relates to the technical field of gallium oxide substrate production, in particular to a grinding device for low-surface-roughness gallium oxide substrate production.
Background
The oxide home substrate is a common semiconductor material and has a plurality of unique characteristics, firstly, the oxide home substrate has high crystal quality, so that the oxide home substrate has better performance and higher reliability when manufacturing a semiconductor device; meanwhile, the gallium oxide substrate has excellent optical performance, high transparency and low refractive index, so that the gallium oxide substrate is very useful in manufacturing optoelectronic devices; in addition, the oxidized home substrate has excellent photoelectric conversion efficiency and photoelectric response speed, so that it is widely used in manufacturing high-performance semiconductor devices such as LEDs, lasers, solar cells, photodetectors, and the like.
The lower the surface roughness of the gallium oxide substrate in the production and processing process, the higher the wafer quality, and the factors for determining the low surface roughness of the gallium oxide substrate include the grinding degree and polishing quality of the raw materials, wherein the grinding and grinding of the raw materials are used as the first process of the gallium oxide substrate, and are one of the important factors for determining the low surface roughness of the gallium oxide substrate, so that in the production process of the gallium oxide substrate, the grinding and grinding work is required to be performed on the raw materials, for example, as shown in the prior patent technology: through searching, china patent net discloses grinding equipment (publication No. CN 212632867U) for producing high-purity gallium oxide, and the device utilizes a driving mechanism to drive two groups of grinding wheels to rotate, and combines the two groups of grinding plates to carry out graded grinding and crushing work on gallium oxide raw materials.
However, there are also some disadvantages to the grinding devices adopted in the above-mentioned publications and the existing market: the current combination that adopts grinding miller and lapping plate grinds the crushing mode of then filtering screening step by step to gallium oxide, and the gallium oxide raw materials is in grinding crushing screening process, very easily under the grinding pressure effect, blocks up the export of unloading, leads to grinding crushing efficiency slower, and consuming time longer. To this end, a person skilled in the art provides a grinding device for the production of low surface roughness gallium oxide substrates to solve the problems set forth in the background art above.
Disclosure of Invention
The utility model mainly aims to provide a grinding device for producing a gallium oxide substrate with low surface roughness, which can effectively solve the problems of lower grinding and crushing efficiency and longer time consumption of the existing grinding device for producing the gallium oxide substrate with low surface roughness in the background technology.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows: a grinding device for producing a gallium oxide substrate with low surface roughness comprises a primary grinding mechanism and a secondary grinding mechanism;
the first-stage grinding mechanism comprises a first grinding cylinder and a quantitative discharging cylinder arranged at a feeding port of the first grinding cylinder, wherein a first transmission shaft A is rotationally connected in a cylinder channel of the quantitative discharging cylinder, a discharging turning plate is sleeved at a shaft lever end of the first transmission shaft A, a feed bin is arranged at the feeding port of the quantitative discharging cylinder, a first transmission shaft B is rotationally connected in a cylinder channel of the first grinding cylinder, a first grinding roller is sleeved at a shaft lever end of the first transmission shaft B, and a first grinding wall staggered with the first grinding roller is arranged on a cylinder wall of the first grinding cylinder;
the secondary grinding mechanism comprises an assembly bracket sleeved on the discharge port of the first grinding cylinder, two groups of second grinding cylinders communicated with the discharge port of the first grinding cylinder are symmetrically arranged in the bracket of the assembly bracket in a penetrating mode, the two groups of second grinding cylinders are rotatably connected with a second transmission shaft in a cylinder channel of each second grinding cylinder, a second grinding roller is sleeved at the end of a shaft rod of each second transmission shaft, and the cylinder wall of each second grinding cylinder is provided with a second grinding wall staggered with the corresponding second grinding roller.
As still further aspects of the utility model: the one end output of first transmission shaft B is provided with the first driving motor of installing on first grinding vessel, and first transmission shaft B's the other end output is provided with first synchronous pulley B, first transmission shaft A's one end output is provided with first synchronous pulley A, and is connected through first synchronous belt between first synchronous pulley A and the first synchronous pulley B.
As still further aspects of the utility model: the number of the discharging turning plates is multiple, and the discharging turning plates are annularly and symmetrically arranged relative to the axis of the first transmission shaft A.
As still further aspects of the utility model: the first grinding roller and the first grinding wall are both in spiral structures.
As still further aspects of the utility model: one group of shaft lever ends of the two groups of second transmission shafts are provided with a second transmission motor which is arranged on the assembly bracket, the top output ends of the two groups of second transmission shafts are provided with second synchronous pulleys, and the two groups of second synchronous pulleys are connected through a second synchronous belt.
As still further aspects of the utility model: the second grinding roller and the second grinding wall are both in spiral structures.
Compared with the prior art, the utility model has the following beneficial effects:
according to the utility model, the primary grinding mechanism is utilized to quantitatively feed and primarily spiral grind and convey the gallium oxide raw material, so that the automatic grinding, crushing and spiral pushing work can be carried out on the gallium oxide raw material, and the secondary grinding mechanism is utilized to secondarily spiral grind and convey the gallium oxide raw material, so that the automatic grinding, crushing and pushing work can be carried out on the gallium oxide raw material again, on one hand, the double grinding and crushing work can be carried out on the gallium oxide raw material, the grinding time is prolonged, the comprehensiveness, uniformity and high quality of grinding and crushing are ensured, on the other hand, the automatic spiral pushing and feeding work can be carried out on the gallium oxide raw material, and the situation of raw material blockage can be effectively avoided.
Drawings
FIG. 1 is a schematic diagram of a polishing apparatus for producing a low surface roughness gallium oxide substrate according to the present utility model;
FIG. 2 is a schematic diagram of a first stage polishing mechanism in a polishing apparatus for producing a low surface roughness gallium oxide substrate according to the utility model;
fig. 3 is a schematic structural view of a secondary polishing mechanism in a polishing apparatus for producing a low surface roughness gallium oxide substrate according to the utility model.
In the figure: 1. a first grinding cylinder; 2. a first synchronization belt; 3. a quantitative discharging cylinder; 4. a storage bin; 5. a first drive motor; 6. assembling a bracket; 7. a second grinding cylinder; 8. a discharge pipe orifice; 9. a second drive motor; 10. a first transmission shaft A; 11. a discharging turning plate; 12. a first transmission shaft B; 13. a first grinding roller; 14. a first abrasive wall; 15. a first synchronous pulley A; 16. a first synchronous pulley B; 17. a second drive shaft; 18. a second grinding roller; 19. a second grinding wall; 20. a second synchronous pulley; 21. and a second synchronous belt.
Detailed Description
The utility model is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific direction, be configured and operated in the specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "provided," "connected," and the like are to be construed broadly, and may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Referring to fig. 1-3, a grinding device for producing a low surface roughness gallium oxide substrate includes a primary grinding mechanism and a secondary grinding mechanism, the primary grinding mechanism includes a first grinding drum 1 and a quantitative discharging drum 3 installed at a feed port of the first grinding drum 1, a first transmission shaft a10 is rotatably connected in a drum of the quantitative discharging drum 3, a first transmission shaft B12 is rotatably connected in a drum of the first grinding drum 1, a first transmission motor 5 installed on the first grinding drum 1 is provided at an output end of one end of the first transmission shaft B12, a first synchronous pulley B16 is provided at an output end of the other end of the first transmission shaft B12, a first synchronous pulley a15 is provided at an output end of one end of the first transmission shaft a10, and the first synchronous pulley a15 is connected with the first synchronous pulley B16 through a first synchronous belt 2, when a high precision grinding operation is performed on a gallium oxide substrate raw material by using the grinding device, the first transmission motor 5 starts to operate, the first transmission shaft B12 is driven to rotate, the first synchronous pulley B16 is driven to rotate, the first synchronous pulley B12 is driven to rotate, and the first synchronous pulley B12 is driven to rotate along with the first synchronous pulley B12, and the first synchronous pulley B11 is driven to rotate along with the first synchronous pulley B13 to grind the first transmission shaft, and the first gallium oxide raw material is crushed by the first transmission shaft B.
The shaft lever end cover of the first transmission shaft A10 is provided with a discharging turning plate 11, the feed port of the quantitative discharging cylinder 3 is provided with a feed bin 4, the shaft lever end cover of the first transmission shaft B12 is provided with a first grinding roller 13, the wall of the first grinding cylinder 1 is provided with first grinding walls 14 staggered with the first grinding roller 13, the number of the discharging turning plates 11 is multiple groups, the discharging turning plates 11 are annularly and symmetrically arranged relative to the axis of the first transmission shaft A10, the first grinding rollers 13 and the first grinding walls 14 are of spiral structures, in the process of carrying out high-precision grinding on gallium oxide substrate raw materials by utilizing a grinding device, the gallium oxide substrate raw materials are poured into the feed bin 4, the gallium oxide raw materials falling into the quantitative discharging cylinder 3 are quantitatively turned into the first grinding cylinder 1 by utilizing the rotation of the discharging turning plate 11, when the gallium oxide raw materials are circularly and quantitatively fed, the gallium oxide raw materials are spirally pushed by utilizing the rotation of the first grinding roller 13 of the spiral structures, on one hand, on the other hand, the primary gallium oxide raw materials in spiral pushing are subjected to grinding and crushing work, and the primary gallium oxide raw materials in the spiral pushing are grinded and are sent into the second grinding cylinder 7 again.
The secondary grinding mechanism comprises an assembly bracket 6 sleeved at a discharge port of the first grinding cylinder 1, two groups of second grinding cylinders 7 communicated with the discharge port of the first grinding cylinder 1 are symmetrically arranged in the bracket of the assembly bracket 6 in a penetrating mode, second transmission shafts 17 are rotatably connected in the cylinder channels of the two groups of second grinding cylinders 7, a second transmission motor 9 mounted on the assembly bracket 6 is arranged at one shaft rod end of the two groups of second transmission shafts 17, second synchronous pulleys 20 are arranged at the top output ends of the two groups of second transmission shafts 17, the two groups of second synchronous pulleys 20 are connected through a second synchronous belt 21, and when the gallium oxide raw materials subjected to primary grinding and smashing are continuously conveyed into the second grinding cylinders 7, the second transmission motors 9 synchronously work, and the second synchronous pulleys 20 and the second synchronous belts 21 are combined to drive the two groups of second transmission shafts 17 to rotate so as to control the second grinding rollers 18 to rotate so as to grind the gallium oxide raw materials again.
The shaft lever end of the second transmission shaft 17 is sleeved with a second grinding roller 18, the wall of the second grinding drum 7 is provided with a second grinding wall 19 staggered with the second grinding roller 18, both the second grinding roller 18 and the second grinding wall 19 are of a spiral structure, in the process of carrying out high-precision grinding on gallium oxide substrate raw materials by utilizing a grinding device, gallium oxide raw materials are spirally propelled by utilizing the rotation of the second grinding roller 18 of the spiral structure, on the one hand, the gallium oxide raw materials in spiral propulsion are subjected to secondary grinding and crushing work by utilizing the combination of the second grinding roller 19, and then the gallium oxide raw materials subjected to double grinding are circularly discharged through a discharge pipe orifice 8.
The working principle of the utility model is as follows: when the high-precision grinding work is carried out on the gallium oxide substrate raw material by utilizing the grinding device, the first transmission motor 5 starts to work, drives the first transmission shaft B12 to rotate, synchronously drives the first synchronous belt wheel B16 to rotate, drives the first synchronous belt wheel A15 to rotate through the transfer transmission of the first synchronous belt 2, enables the first transmission shaft A10 to synchronously rotate along with the first transmission shaft B12, drives the corresponding discharging turning plate 11 and the first grinding roller 13 to rotate, simultaneously, the gallium oxide substrate raw material is poured into the storage bin 4, the gallium oxide raw material falling into the quantitative discharging cylinder 3 is quantitatively turned and fed into the first grinding cylinder 1 by utilizing the rotation of the discharging turning plate 11, when the gallium oxide raw material is circularly and quantitatively fed, the gallium oxide raw material is spirally pushed on one hand by utilizing the rotation of the first grinding roller 13 with a spiral structure, and on the other hand, the gallium oxide raw material is quantitatively fed by utilizing the combination with the first grinding wall 14, the primary grinding and crushing work is carried out on the gallium oxide raw material in the spiral propulsion, the gallium oxide raw material after primary grinding is spirally pushed into the second grinding drum 7, when the gallium oxide raw material after primary grinding and crushing is continuously conveyed into the second grinding drum 7, the second transmission motor 9 synchronously works, the combination of the second synchronous pulley 20 and the second synchronous belt 21 is utilized to drive the two groups of second transmission shafts 17 to rotate, the second grinding roller 18 is controlled to rotate, the rotation of the second grinding roller 18 with a spiral structure is utilized, on one hand, the spiral propulsion is carried out on the gallium oxide raw material, on the other hand, the combination with the second grinding wall 19 is utilized to carry out the secondary grinding and crushing work on the gallium oxide raw material in the spiral propulsion, and then the gallium oxide raw material after double grinding is circularly discharged through the discharging pipe orifice 8, so that the fine grinding and crushing work is finished.
The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (6)
1. The grinding device for producing the gallium oxide substrate with low surface roughness is characterized by comprising a primary grinding mechanism and a secondary grinding mechanism;
the first-stage grinding mechanism comprises a first grinding cylinder (1) and a quantitative discharging cylinder (3) arranged at a feeding port of the first grinding cylinder (1), a first transmission shaft A (10) is rotatably connected in a cylinder channel of the quantitative discharging cylinder (3), a discharging turning plate (11) is sleeved at a shaft rod end of the first transmission shaft A (10), a storage bin (4) is arranged at the feeding port of the quantitative discharging cylinder (3), a first transmission shaft B (12) is rotatably connected in the cylinder channel of the first grinding cylinder (1), a first grinding roller (13) is sleeved at a shaft rod end of the first transmission shaft B (12), and a first grinding wall (14) staggered with the first grinding roller (13) is arranged on a cylinder wall of the first grinding cylinder (1);
the secondary grinding mechanism comprises an assembly bracket (6) sleeved on a discharge port of a first grinding cylinder (1), two groups of second grinding cylinders (7) communicated with the discharge port of the first grinding cylinder (1) are symmetrically arranged in the bracket of the assembly bracket (6) in a penetrating mode, two groups of second grinding cylinders (7) are rotatably connected with a second transmission shaft (17) in a cylinder channel, a second grinding roller (18) is sleeved on a shaft rod end of the second transmission shaft (17), and second grinding walls (19) staggered with the second grinding roller (18) are arranged on the cylinder wall of the second grinding cylinder (7).
2. Grinding device for low surface roughness gallium oxide substrate production according to claim 1, wherein one end output end of the first transmission shaft B (12) is provided with a first transmission motor (5) mounted on the first grinding drum (1), the other end output end of the first transmission shaft B (12) is provided with a first synchronous belt wheel B (16), one end output end of the first transmission shaft a (10) is provided with a first synchronous belt wheel a (15), and the first synchronous belt wheel a (15) and the first synchronous belt wheel B (16) are connected through a first synchronous belt (2).
3. Grinding device for the production of low surface roughness gallium oxide substrates according to claim 1, characterized in that the number of the discharge turning plates (11) is multiple, and the discharge turning plates (11) of multiple groups are arranged in annular symmetry with respect to the axis of the first transmission shaft a (10).
4. Grinding device for the production of low surface roughness gallium oxide substrates according to claim 1, characterized in that the first grinding roller (13) and the first grinding wall (14) are both of helical structure.
5. Grinding device for low surface roughness gallium oxide substrate production according to claim 1, wherein one set of shaft lever ends of the two sets of second transmission shafts (17) is provided with a second transmission motor (9) mounted on the assembly bracket (6), and the top output ends of the two sets of second transmission shafts (17) are both provided with a second synchronous pulley (20), and the two sets of second synchronous pulleys (20) are connected by a second synchronous belt (21).
6. Grinding device for the production of low surface roughness gallium oxide substrates according to claim 1, characterized in that the second grinding roller (18) and the second grinding wall (19) are both of helical structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321670354.8U CN219943106U (en) | 2023-06-29 | 2023-06-29 | Grinding device for producing gallium oxide substrate with low surface roughness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321670354.8U CN219943106U (en) | 2023-06-29 | 2023-06-29 | Grinding device for producing gallium oxide substrate with low surface roughness |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219943106U true CN219943106U (en) | 2023-11-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321670354.8U Active CN219943106U (en) | 2023-06-29 | 2023-06-29 | Grinding device for producing gallium oxide substrate with low surface roughness |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219943106U (en) |
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2023
- 2023-06-29 CN CN202321670354.8U patent/CN219943106U/en active Active
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