CN219934459U - Drying groove device with automatic swing fan blade blowing structure - Google Patents

Abstract

The utility model discloses a drying groove device with an automatic swinging fan blade blowing structure, which comprises a drying groove body, wherein an air supply cavity and an air exhaust cavity are arranged on the drying groove body, the air supply cavity is sequentially connected with a filter, a heater and a fan in series through corresponding pipelines, a plurality of rotating shafts are arranged in the air supply cavity, fan blades are arranged on the rotating shafts, first gears are sleeved at the same ends of the rotating shafts, the first gears are in meshed connection, one group of the first gears are in meshed connection with a second gear, a connecting shaft is arranged in the second gear in a penetrating manner, the connecting shaft is connected with an output shaft of a driving motor through a coupler after extending to the outer side from the drying groove body, and the driving motor is fixed on the drying groove body through a supporting seat. The utility model realizes dead angle-free blowing of the flower basket, ensures full coverage of the flower basket latch and the flower basket bottom rod, shortens the drying time, improves the drying efficiency and the yield, reduces the temperature of the drying groove, reduces the running risk of equipment and reduces the manufacturing cost of the equipment.

Description

Drying groove device with automatic swing fan blade blowing structure

Technical Field

The utility model belongs to the technical field of silicon wafer drying, and particularly relates to a drying groove device with an automatic swing fan blade blowing structure.

Background

After the silicon wafer is subjected to texturing and water washing, the surface of the silicon wafer is provided with liquid drops, and the next process cannot be directly performed, so that the silicon wafer with the flower basket is required to be dried after the washing is finished, and the silicon wafer and the flower basket are ensured to be carried without the liquid drops.

In the drying process, the drying groove is used for drying the silicon wafer, so that the silicon wafer becomes a bottleneck for limiting the productivity of the cleaning equipment. At present, as shown in fig. 1, in a silicon wafer drying device, air is supplied into a drying groove body by arranging an air supply hole A, so that the silicon wafer in the groove body is dried; the drying mode is characterized in that the wind direction of the air supply is fixed, the drying time is often more than 600 seconds, the drying temperature is more than 95 ℃, the energy consumption is high, dead areas such as flower basket bottom rods or flower basket clamping teeth still exist, namely, residual part of liquid drops in places which cannot be blown by the drying groove, the silicon wafer enters the subsequent process, the silicon wafer is polluted, and even the subsequent process equipment is polluted.

Disclosure of Invention

In order to solve the problems in the prior art, the utility model aims to provide a drying groove device with an automatic swing fan blade blowing structure, which can sweep air up and down so as to realize full coverage of flower latches and flower basket bottom rods, solve the problem of residual water drops, shorten drying time and improve drying efficiency and product yield.

In order to achieve the technical purposes and effects, the utility model is realized by the following technical scheme:

the utility model provides a take stoving groove device of automatic swing flabellum structure of blowing, includes the stoving cell body, one of them one side of the left and right sides of stoving cell body is provided with to the air supply chamber and the opposite side of the internal air supply of stoving cell body are provided with the outside chamber of airing exhaust of stoving cell body, the air supply chamber is established ties with filter, heater and fan in proper order through corresponding pipeline, the intracavity from the top down interval is provided with a plurality of rotation axes, all be provided with a flabellum on the rotation axis, just the same end of rotation axis all overlaps and is equipped with a first gear, meshing connection between the first gear, a set of first gear meshing is connected with a second gear, wear to be equipped with a connecting axle in the second gear, the connecting axle is followed the internal extension of stoving cell to the outside after pass through a shaft coupling and a driving motor's output shaft, driving motor passes through the supporting seat to be fixed on the stoving cell body.

Further, the device also comprises a U-shaped inductor and a baffle matched with the U-shaped inductor.

Further, the driving motor adopts a stepping motor.

Further, the exhaust cavity is separated from the drying groove body through an air baffle plate, and the air baffle plate is provided with a vent hole.

Further, the vent holes are oblong holes.

Further, the exhaust cavity is connected with the fan through a corresponding pipeline.

Further, the fan adopts a high-pressure fan.

The beneficial effects of the utility model are as follows: according to the utility model, by arranging the fan blade mechanism, the wind direction in the drying groove body is changed from the fixed wind direction to the wind sweeping capable of swinging up and down in a certain angle, so that no dead angle blowing is realized on the flower basket, the full coverage of the flower basket latch and the flower basket bottom rod is ensured, the problem of residual water on the flower basket is solved, the drying time is shortened, the drying efficiency and the yield are improved, the temperature of the drying groove is reduced, the running risk of equipment is reduced, the drying groove body can be replaced by a low-cost nonmetallic material, and the manufacturing cost of the equipment is reduced.

The foregoing description is only an overview of the present utility model, and is intended to provide a better understanding of the present utility model, as it is embodied in the following description, with reference to the preferred embodiments of the present utility model and the accompanying drawings. Specific embodiments of the present utility model are given in detail by the following examples and the accompanying drawings.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model and do not constitute a limitation on the utility model. In the drawings:

FIG. 1 is a schematic diagram of a prior art structure of the present utility model;

FIG. 2 is a schematic diagram of the overall structure of the device of the present utility model;

FIG. 3 is a schematic diagram of a drying tank body structure according to the present utility model;

FIG. 4 is a top view of a drying trough body according to the present utility model;

FIG. 5 is a cross-sectional view taken at B-B of FIG. 4 in accordance with the present utility model;

FIG. 6 is a schematic diagram of the utility model at D in FIG. 5;

FIG. 7 is a cross-sectional view taken at C-C of FIG. 4 in accordance with the present utility model.

The reference numerals in the figures illustrate: 1. drying the tank body; 2. an air supply cavity; 3. an exhaust cavity; 4. a filter; 5. a heater; 6. a blower; 7. a rotation shaft; 8. a fan blade; 9. a first gear; 10. a second gear; 11. a connecting shaft; 12. a coupling; 13. a driving motor; 14. a U-shaped inductor; 15. a baffle; 16. a wind baffle; 161. and (3) a vent hole.

Detailed Description

The utility model will be described in detail below with reference to the drawings in combination with embodiments.

It should be noted that all directional indicators (such as up, down, left, right, front, back, upper, lower, top, bottom … …) in the embodiments of the present utility model are merely used to explain the relative positional relationship, movement, etc. between the components in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicators are correspondingly changed.

Referring to fig. 2-7, a drying groove device with an automatic swinging fan blade blowing structure comprises a drying groove body 1, wherein one of the left side and the right side of the drying groove body 1 is provided with a blowing cavity 2 for blowing air into the drying groove body 1 and the other side is provided with an exhaust cavity 3 for exhausting air outwards from the drying groove body 1, the blowing cavity 2 is sequentially connected with a filter 4, a heater 5 and a fan 6 in series through corresponding pipelines, a plurality of rotating shafts 7 are arranged in the blowing cavity 2 at intervals from top to bottom, fan blades 8 are arranged on the rotating shafts 7, a first gear 9 is sleeved at the same end of each rotating shaft 7, the first gears 9 are in meshed connection, a group of first gears 9 are in meshed connection with a second gear 10, a connecting shaft 11 is arranged in the second gear 10 in a penetrating manner, the connecting shaft 11 extends from the inside of the drying groove body 1 to the outside and then is connected with an output shaft of a driving motor 13 through a shaft coupling 12, and the driving motor 13 is fixed on the drying groove body 1 through a supporting seat 17; during drying, the driving motor 13 drives the rotating shaft 7 to rotate through sequential transmission of the connecting shaft 11, the second gear 10 and the first gear 9, so as to drive the fan blades 8 arranged on the rotating shaft 7 to rotate in a following manner; after the drying is completed, the driving motor 13 drives the fan blades 8 to rotate to the bottom state of the parallel groove body, and the driving is stopped; it should be noted that, instead of driving the fan blade 8 to rotate in the above manner, a corner piece similar to a central air conditioner may be used to link the fan blade 8; in the present embodiment, 11 sets of the fan blades 8 are provided.

Further, the motor driving device further comprises a U-shaped inductor 14 and a baffle 15 matched with the U-shaped inductor 14, wherein the U-shaped inductor 14 is fixed on the supporting seat 17, the baffle 15 is fixed on an output shaft of the driving motor 13, and the position of stopping the output shaft of the driving motor 13 is controlled through the matching of the U-shaped inductor 14 and the baffle 15.

Further, the driving motor 13 is a stepping motor, but not limited to a stepping motor, and may be any other type motor as long as the driving requirement can be achieved.

Further, the exhaust chamber 3 is separated from the drying tank body 1 by an air baffle 16, the air baffle 16 is provided with air vents 161, the air vents 161 are uniformly distributed on the air baffle 16, in this embodiment, the air vents 161 are oblong holes, but not limited to oblong holes, and other shapes can be adopted, for example: round holes, elliptical holes and the like, as long as good wind passing can be realized.

Further, the exhaust cavity 3 is connected with the fan 6 through a corresponding pipeline, when the drying is performed, air in the drying groove body 1 passes through the exhaust cavity 3 and then sequentially passes through the fan 6, the heater 5 and the filter 4 to enter the air supply cavity 2, and is blown to the flower basket of the silicon wafer in the drying groove body 1, so that a closed loop is formed, the air internal circulation in the drying groove device is realized, the drying time is effectively shortened, and the drying efficiency is improved.

Further, the fan 6 is a high-pressure fan.

The working principle of the utility model is as follows:

during drying, firstly, moving a flower basket filled with silicon wafers into a drying groove body 1; and restarting the equipment, wherein under the action of the fan 6, at the moment, air in the drying groove body 1 passes through the air baffle 21 and enters the exhaust cavity 3, and then sequentially passes through the fan 6, the heater 5 and the filter 4 through corresponding pipelines and enters the air supply cavity 2 to be blown to the flower basket.

Wherein, after the air gets into in the air supply chamber 2, driving motor 13 passes through connecting axle 11, second gear 10 and first gear 9 transmission in proper order after, and control flabellum 8 uses parallel cell body bottom as the benchmark, makes a round trip to rotate upwards an angle and a round trip to a next angle, makes wind direction follow flabellum 8 up-and-down swing, realizes not having the dead angle to the basket and blossoming, ensures to basket latch and basket sill bar full coverage, promotes the stoving effect.

When the flower basket is dried, after the flower basket moves out of the drying groove body 1, the driving motor 13 is controlled to drive the fan blade 8 to be parallel to the bottom of the groove body through the cooperation of the baffle 15 and the U-shaped inductor 14, and then the flower basket stops working.

The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims (7)

1. The utility model provides a take stoving groove device of structure of blowing of automatic swing flabellum, includes stoving cell body (1), one of them one side of the left and right sides of stoving cell body (1) is provided with to supply air in stoving cell body (1) supply air chamber (2) and opposite side are provided with the outside chamber of airing exhaust (3) of airing exhaust of stoving cell body (1), supply air chamber (2) are established ties with filter (4), heater (5) and fan (6) in proper order through the pipeline that corresponds, its characterized in that: the novel drying device is characterized in that a plurality of rotating shafts (7) are arranged in the air supply cavity (2) from top to bottom at intervals, fan blades (8) are arranged on the rotating shafts (7), first gears (9) are sleeved at the same ends of the rotating shafts (7), the first gears (9) are connected in a meshed mode, a group of first gears (9) are connected with a second gear (10) in a meshed mode, a connecting shaft (11) is arranged in the second gear (10) in a penetrating mode, the connecting shaft (11) extends to the outside in the drying groove body (1) and then is connected with an output shaft of a driving motor (13) through a coupler (12), and the driving motor (13) is fixed to the drying groove body (1) through a supporting seat (17).

2. The drying trough device with an automatic swing fan blade blowing structure according to claim 1, wherein: the device also comprises a U-shaped inductor (14) and a baffle (15) matched with the U-shaped inductor (14).

3. The drying trough device with an automatic swing fan blade blowing structure according to claim 1, wherein: the driving motor (13) adopts a stepping motor.

4. The drying trough device with an automatic swing fan blade blowing structure according to claim 1, wherein: the exhaust cavity (3) is separated from the drying groove body (1) through an air baffle (16), and the air baffle (16) is provided with a vent hole (161).

5. The drying trough device with automatic swing fan blade blowing structure according to claim 4, wherein: the vent hole (161) is a slotted hole.

6. The drying trough device with automatic swing fan blade blowing structure according to claim 4, wherein: the exhaust cavity (3) is connected with the fan (6) through a corresponding pipeline.

7. The drying trough device with automatic swing fan blade blowing structure according to claim 6, wherein: the fan (6) adopts a high-pressure fan.