CN219907010U - Hydrogen heater assembly for polysilicon cold hydrogenation reaction - Google Patents
Hydrogen heater assembly for polysilicon cold hydrogenation reaction Download PDFInfo
- Publication number
- CN219907010U CN219907010U CN202321581283.4U CN202321581283U CN219907010U CN 219907010 U CN219907010 U CN 219907010U CN 202321581283 U CN202321581283 U CN 202321581283U CN 219907010 U CN219907010 U CN 219907010U
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- China
- Prior art keywords
- hydrogen
- sealing cover
- heating
- tank body
- heating tank
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- 239000001257 hydrogen Substances 0.000 title claims abstract description 43
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 43
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 38
- 238000005984 hydrogenation reaction Methods 0.000 title claims abstract description 15
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 15
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 14
- 238000010438 heat treatment Methods 0.000 claims abstract description 79
- 238000007789 sealing Methods 0.000 claims abstract description 31
- 230000005540 biological transmission Effects 0.000 claims description 3
- 150000002431 hydrogen Chemical class 0.000 abstract description 7
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000009434 installation Methods 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The utility model discloses a hydrogen heater component for polysilicon cold hydrogenation reaction, which comprises a heating tank body, wherein a sealing cover is arranged at a pipe orifice of the heating tank body, and a spiral pipeline for hydrogen circulation is arranged in the heating tank body; the sealing cover is characterized in that a screw is rotatably arranged at the bottom end surface of the sealing cover, the screw is arranged at the center of a spiral pipeline, a lifting assembly is arranged on the outer wall of the screw, and a plurality of groups of heating wires are arranged on the lifting assembly, so that the sealing cover has the beneficial effects that: when carrying out heat treatment to hydrogen, guide into hydrogen in the helical pipe for hydrogen flows in the helical pipe, and then the screw rod drives lifting assembly and goes up and down along the axle center of screw rod, makes the multiunit heater strip go on reciprocal lift, thereby carries out heat treatment to helical pipe's different positions, thereby makes helical pipe be heated evenly, when heating hydrogen, can be convenient for helical pipe carry out quick preheating, thereby is convenient for hydrogen carry out quick heat treatment.
Description
Technical Field
The utility model relates to a hydrogen heater component for polysilicon cold hydrogenation reaction.
Background
The hydrogen must be heated to 600 c to react with the silicon powder and hydrochloric acid. In the prior art, the furnace shell is directly heated by a heating body to reach high temperature.
In the prior art, for example, CN206919665U proposes a vertical cylindrical hydrogen heating furnace, which includes supporting legs and a high-temperature heating furnace chamber installed at the top ends of the supporting legs, wherein an electric heating device is installed at the bottom end inside the high-temperature heating furnace chamber, and a sliding door is installed on the side wall of the high-temperature heating furnace chamber; a thermometer is arranged on the sliding door; a shielding section is arranged at the upper end of the inside of the high-temperature heating furnace chamber; the top end of the high-temperature heating furnace chamber is connected with a convection tube, and a fin tube is arranged in the convection tube; a hydrogen inlet is formed in the fin tube; the top end of the high-temperature heating furnace chamber is connected with a hydrogen outlet, and an elbow is arranged between the hydrogen outlet and the top end of the high-temperature heating furnace chamber in a sealing way; a conical spiral tube is arranged in the high-temperature heating furnace chamber, and the bottom end of the conical spiral tube is communicated with the hydrogen inlet in a sealing way; the top end of the conical spiral tube is communicated with the hydrogen outlet in a sealing way.
However, in the above-mentioned scheme, the spiral tube is inconvenient to perform rapid preheating treatment in the use process, and the efficiency of heating hydrogen is affected when the heating treatment of hydrogen is just started.
Disclosure of Invention
The utility model aims to provide a hydrogen heater component for polysilicon cold hydrogenation reaction, which solves the problems in the prior art.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the polycrystalline silicon cold hydrogenation reaction hydrogen heater assembly comprises a heating tank body, wherein a sealing cover is arranged at a pipe orifice of the heating tank body, and a spiral pipeline for hydrogen to circulate is arranged in the heating tank body;
the screw is arranged at the central position of the spiral pipeline in a rotating mode, lifting components are arranged on the outer wall of the screw, multiple groups of heating wires are arranged on the lifting components, and the screw rotates to drive the lifting components to lift along the axis of the screw, so that the multiple groups of heating wires preheat different positions of the spiral pipeline.
As an improvement of the technical scheme, the sealing cover is provided with an air inlet pipeline and an air outlet pipeline, the air inlet pipeline is connected to the bottom pipe orifice of the spiral pipeline, and the air outlet pipeline is connected to the top pipe orifice of the spiral pipeline.
As the improvement of above-mentioned technical scheme, lifting unit includes the screw sleeve, screw sleeve thread cover is established on the outer wall of screw rod, be provided with the connecting plate on the screw sleeve, be provided with the slip cap on the connecting plate, the slip cap is established on the outer wall of air intake pipe.
As an improvement of the technical scheme, the threaded sleeve is provided with the annular plates, and a plurality of groups of heating wires are arranged on the annular plates in an annular array.
As an improvement of the technical scheme, a plurality of groups of first mounting holes are formed in the heating tank body in an annular array, and a plurality of groups of second mounting holes are formed in the sealing cover in an annular array;
the first mounting holes and the second mounting holes are matched in position and connected through bolts.
As an improvement of the technical scheme, the sealing cover is provided with the groove, the groove is internally provided with the mounting circular plate, the tank opening of the heating tank body is provided with the mounting circular ring, and the sealing cover is connected with the heating tank body, so that the mounting circular plate is arranged in the mounting circular ring.
As an improvement of the technical scheme, a heating device is arranged on the bottom end face of the heating tank body, and the heating device is arranged below the spiral pipeline.
As an improvement of the technical scheme, the sealing cover is provided with a servo motor, and the servo motor is in transmission connection with the screw.
Compared with the prior art, the utility model has the beneficial effects that:
when carrying out heat treatment to hydrogen, with hydrogen leading-in to helical piping, make hydrogen flow in helical piping, afterwards the screw rod drives lifting unit and goes up and down along the axle center of screw rod, make multiunit heater strip go on reciprocal lift, thereby carry out heat treatment to helical piping's different positions, thereby make helical piping be heated evenly, when heating hydrogen, can be convenient for helical piping carry out quick preheating, thereby be convenient for hydrogen carry out quick heat treatment, and because lifting unit constantly carries out reciprocal lift, can carry out the disturbance in the heating jar body, prevent that the temperature layering from appearing influences the efficiency and the quality of heating, holistic practicality has been improved greatly.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic diagram of the connection of the air inlet pipeline and the spiral pipeline;
FIG. 3 is a schematic view of the structure of the heating tank of the present utility model;
FIG. 4 is a front view of the can of the present utility model;
FIG. 5 is a cross-sectional view of A-A of FIG. 4 in accordance with the present utility model;
FIG. 6 is a schematic face view of the seal cap, screw of the present utility model;
FIG. 7 is a cross-sectional view of B-B of FIG. 6 in accordance with the present utility model;
fig. 8 is a schematic structural view of the lifting assembly of the present utility model.
In the figure: 10. heating the tank body; 11. a helical pipe; 12. a first mounting hole; 13. a heating device; 14. installing a circular ring; 20. sealing cover; 21. a screw; 22. an air outlet pipe; 23. an air intake duct; 24. a groove; 25. mounting a circular plate; 26. a second mounting hole; 30. a lifting assembly; 31. sliding the sleeve; 32. a connecting plate; 33. an annular plate; 34. a threaded sleeve; 40. a heating wire; 50. a servo motor.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Examples:
as shown in fig. 1-8, this embodiment provides a hydrogen heater assembly for polysilicon cold hydrogenation reaction, which comprises a heating tank body 10, wherein a sealing cover 20 is arranged at a pipe orifice of the heating tank body 10, and a spiral pipeline 11 for hydrogen circulation is arranged in the heating tank body 10;
the bottom end face of sealed lid 20 rotates and is provided with screw rod 21, screw rod 21 sets up the central point put at helical pipeline 11, the outer wall of screw rod 21 is provided with lifting unit 30, be provided with multiunit heater strip 40 on the lifting unit 30, screw rod 21 rotation drives lifting unit 30 and goes up and down along screw rod 21 axle center for multiunit heater strip 40 carries out the preheating treatment to helical pipeline 11 different positions.
In this embodiment, when heating the hydrogen, the hydrogen is led into the spiral pipe 11, so that the hydrogen flows in the spiral pipe 11, and then the screw 21 drives the lifting component 30 to lift along the axis of the screw 21, so that the groups of heating wires 40 lift reciprocally, and thus the different positions of the spiral pipe 11 are heated uniformly, and when heating the hydrogen, the spiral pipe 11 can be heated conveniently, and thus the rapid preheating of the hydrogen is facilitated, and furthermore, as the lifting component 30 continuously lifts reciprocally, the disturbance can be performed in the heating tank 10, the heating efficiency and quality are prevented from being affected by temperature stratification, and the overall practicability is greatly improved.
Specifically, the sealing cover 20 is provided with an air inlet pipe 23 and an air outlet pipe 22, the air inlet pipe 23 is connected to the bottom pipe orifice of the spiral pipe 11, and the air outlet pipe 22 is connected to the top pipe orifice of the spiral pipe 11.
In this embodiment, the openings of the air inlet pipe 23 and the air outlet pipe 22 are provided with flanges, so as to connect with external pipes, and facilitate the introduction of hydrogen into the spiral pipe 11.
Specifically, the lifting assembly 30 includes a threaded sleeve 34, the threaded sleeve 34 is screwed on the outer wall of the screw 21, a connection plate 32 is provided on the threaded sleeve 34, a sliding sleeve 31 is provided on the connection plate 32, and the sliding sleeve 31 is screwed on the outer wall of the air inlet pipe 23.
In this embodiment, the threaded sleeve 34 is engaged with the screw 21, and the threaded sleeve 34 is lifted and lowered when the screw 21 is rotated by the sliding engagement of the sliding sleeve 31 with the air intake duct 23.
Specifically, the threaded sleeve 34 is provided with an annular plate 33, and a plurality of groups of heating wires 40 are arranged on the annular plate 33 in an annular array.
In this embodiment, when the threaded sleeve 34 is lifted, the threaded sleeve 34 drives the annular plate 33 to lift, so as to drive the plurality of groups of heating wires 40 to lift.
Specifically, a plurality of groups of first mounting holes 12 are formed in an annular array on the heating tank body 10, and a plurality of groups of second mounting holes 26 are formed in an annular array on the sealing cover 20;
the first mounting holes 12 and the second mounting holes 26 are matched in position, and the first mounting holes 12 and the second mounting holes 26 are connected through bolts.
In this embodiment, the sealing cover 20 can be conveniently detached from the heating tank 10 through the cooperation between the first mounting holes 12 and the second mounting holes 26, so that the maintenance processing of the parts in the inner cavity of the heating tank 10 is facilitated.
Specifically, a groove 24 is formed in the sealing cover 20, a mounting circular plate 25 is arranged in the groove 24, a mounting circular ring 14 is arranged at the tank opening of the heating tank body 10, and the sealing cover 20 is connected with the heating tank body 10, so that the mounting circular plate 25 is arranged in the mounting circular ring 14.
In this embodiment, through the installation circular plate 25 and the installation circular ring 14, the sealing cover 20 can be conveniently and rapidly coaxially arranged with the heating tank body 10, so that the first installation hole 12 and the second installation hole 26 can be conveniently and rapidly aligned, and meanwhile, the sealing and heat insulation performance can be improved, and heat loss from the joint of the sealing cover 20 and the heating tank body 10 is prevented.
Specifically, the bottom end surface of the heating tank 10 is provided with a heating device 13, and the heating device 13 is disposed below the spiral pipe 11.
In this case, the heating device 13 is specifically referred to as a heating device proposed in patent publication No. CN206919665U, and is not described in detail herein.
In the present embodiment, the heating performance can be improved by the heating device 13 provided.
Specifically, a servo motor 50 is disposed on the sealing cover 20, and the servo motor 50 is in transmission connection with the screw 21.
In this embodiment, the outer wall of the servo motor 50 is provided with a heat shield.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. A hydrogen heater assembly for cold hydrogenation of polysilicon, characterized by: the hydrogen gas heating device comprises a heating tank body (10), wherein a sealing cover (20) is arranged at a pipe orifice of the heating tank body (10), and a spiral pipeline (11) for hydrogen gas circulation is arranged in the heating tank body (10);
the screw rod (21) is rotatably arranged on the bottom end surface of the sealing cover (20), the screw rod (21) is arranged at the central position of the spiral pipeline (11), the lifting assembly (30) is arranged on the outer wall of the screw rod (21), multiple groups of heating wires (40) are arranged on the lifting assembly (30), and the screw rod (21) rotates to drive the lifting assembly (30) to lift along the axis of the screw rod (21), so that the multiple groups of heating wires (40) preheat different positions of the spiral pipeline (11).
2. A polysilicon cold hydrogenation hydrogen heater assembly according to claim 1, wherein: the sealing cover (20) is provided with an air inlet pipeline (23) and an air outlet pipeline (22), the air inlet pipeline (23) is connected to the bottom end pipe orifice of the spiral pipeline (11), and the air outlet pipeline (22) is connected to the top end pipe orifice of the spiral pipeline (11).
3. A polysilicon cold hydrogenation hydrogen heater assembly according to claim 2, wherein: the lifting assembly (30) comprises a threaded sleeve (34), the threaded sleeve (34) is sleeved on the outer wall of the screw (21) in a threaded mode, a connecting plate (32) is arranged on the threaded sleeve (34), a sliding sleeve (31) is arranged on the connecting plate (32), and the sliding sleeve (31) is sleeved on the outer wall of the air inlet pipeline (23) in a sliding mode.
4. A polysilicon cold hydrogenation hydrogen heater assembly according to claim 3, wherein: the screw sleeve (34) is provided with an annular plate (33), and a plurality of groups of heating wires (40) are arranged on the annular plate (33) in an annular array.
5. A polysilicon cold hydrogenation hydrogen heater assembly according to claim 1, wherein: a plurality of groups of first mounting holes (12) are formed in the heating tank body (10) in an annular array, and a plurality of groups of second mounting holes (26) are formed in the sealing cover (20) in an annular array;
the first mounting holes (12) and the second mounting holes (26) are matched in position, and the first mounting holes (12) and the second mounting holes (26) are connected through bolts.
6. A polysilicon cold hydrogenation hydrogen heater assembly according to claim 1, wherein: the sealing cover (20) is provided with a groove (24), a mounting circular plate (25) is arranged in the groove (24), a mounting circular ring (14) is arranged at the tank opening of the heating tank body (10), and the sealing cover (20) is connected with the heating tank body (10) so that the mounting circular plate (25) is arranged in the mounting circular ring (14).
7. A polysilicon cold hydrogenation hydrogen heater assembly according to claim 1, wherein: the bottom end surface of the heating tank body (10) is provided with a heating device (13), and the heating device (13) is arranged below the spiral pipeline (11).
8. A polysilicon cold hydrogenation hydrogen heater assembly according to claim 1, wherein: a servo motor (50) is arranged on the sealing cover (20), and the servo motor (50) is in transmission connection with the screw rod (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321581283.4U CN219907010U (en) | 2023-06-20 | 2023-06-20 | Hydrogen heater assembly for polysilicon cold hydrogenation reaction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321581283.4U CN219907010U (en) | 2023-06-20 | 2023-06-20 | Hydrogen heater assembly for polysilicon cold hydrogenation reaction |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219907010U true CN219907010U (en) | 2023-10-27 |
Family
ID=88425312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321581283.4U Active CN219907010U (en) | 2023-06-20 | 2023-06-20 | Hydrogen heater assembly for polysilicon cold hydrogenation reaction |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219907010U (en) |
-
2023
- 2023-06-20 CN CN202321581283.4U patent/CN219907010U/en active Active
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