CN219901689U - Special grinding machine for semiconductor processing - Google Patents

Abstract

The utility model discloses a special grinder for semiconductor processing, which relates to the technical field of semiconductors and comprises a grinding table, wherein a motor cavity is formed in the lower side of the inner wall of the grinding table, a grinding motor is fixedly connected to the inner wall of the motor cavity, a grinding disc is fixedly connected to the output end of the grinding motor, a grinding device is fixedly connected to the rear side of the top surface of the grinding table, a special-shaped cavity is formed in the lower side of the inner wall of the grinding table, a plurality of water outlets are formed in the lower side of the inner wall of the grinding table, a water tap is arranged on the left side of the top surface of the grinding table, and a filtering mechanism is arranged on the inner wall of the special-shaped cavity. The device has the function of purifying the grinding water in the use process, the grinding water can be recycled after being purified, the pollution generated by the grinding water is reduced, and the safety of the device in use is improved.

Description

Special grinding machine for semiconductor processing

Technical Field

The utility model relates to the technical field of semiconductors, in particular to a special grinding machine for semiconductor processing.

Background

Semiconductors refer to materials with conductivity between conductors and insulators at normal temperature, and are used in the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power conversion and the like, for example, diodes are devices made of semiconductors, and special grinding machines are needed for the semiconductors during processing.

The applicant finds that the Chinese patent discloses a special grinder for processing new semiconductor materials, the disclosure (bulletin) number of which is CN216991392U, wherein the special grinder mainly comprises a frame and a grinding hopper arranged on the frame, the grinding hopper is rotatably provided with a grinding turntable, and the special grinder also comprises a driving component for driving the grinding turntable to rotate; the top of the grinding hopper is fixedly connected with a protection plate, a cooling water pipe is fixedly connected to the protection plate, and one end, facing the grinding turntable, of the cooling water pipe is connected with a spray head; the grinder also comprises a water tank with an open top, wherein the water tank is internally fixedly connected with a filter screen plate, the water tank is divided into a precipitation cavity and a water discharge cavity by the filter screen plate, the water tank is fixedly connected with a water inlet pipe and a water outlet pipe, the water inlet pipe is communicated with the precipitation cavity, the water outlet pipe is communicated with the water discharge cavity, the purpose that the semiconductor workpiece can be cooled by sprayed cold water during grinding is achieved, the semiconductor workpiece is prevented from cracking due to overhigh temperature during grinding, the traditional grinder special for semiconductor processing does not have the function of purifying grinding water during the use process, the concentration of suspended matters in the grinding water generated by the semiconductor is high, the quality is light, the precipitation is extremely difficult, the appearance is turbid, the biochemistry is poor, weak alkalinity is generally presented, the grinding water is directly discharged out of equipment, a certain pollution is generated, and the safety of the equipment is reduced.

Disclosure of Invention

The utility model aims to provide a special grinding machine for semiconductor processing, which solves the problems that the traditional special grinding machine for semiconductor processing, which is proposed in the prior art, does not have the function of purifying grinding water in the use process, the concentration of suspended matters of the grinding water generated by a semiconductor is high, the quality is light, the grinding water is extremely difficult to precipitate, the appearance is turbid, the biochemistry is poor, the grinding water generally presents weak alkalinity, the grinding water is directly discharged out of equipment, a certain pollution is generated, and the safety of the equipment is reduced.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a special grinding machine of semiconductor processing, includes the grinding table, the motor chamber has been seted up to the downside of grinding table inner wall, the inner wall fixedly connected with grinding motor in motor chamber, the output of grinding motor runs through the upside of motor chamber inner wall and extends to the inner wall of grinding table, the output fixedly connected with grinding disc of grinding motor, the rear side fixedly connected with grinder of grinding table top surface, special-shaped chamber has been seted up to the downside of grinding table inner wall, a plurality of delivery ports have been seted up to the downside of grinding table inner wall, the left side of grinding table top surface is equipped with tap, the inner wall in special-shaped chamber is equipped with filtering mechanism.

Preferably, the filtering mechanism comprises a liquid medicine cavity arranged on the right side of the inner wall of the special-shaped cavity, a liquid inlet is formed in the right side of the inner wall of the liquid medicine cavity, a first water pump cavity is formed in the top surface of the liquid medicine cavity, a first water pump is fixedly connected to the lower side of the inner wall of the first water pump cavity, the input end of the first water pump penetrates through the lower side of the inner wall of the first water pump cavity and extends to the inner wall of the liquid medicine cavity, the output end of the first water pump penetrates through the left side of the inner wall of the first water pump and extends to the inner wall of the special-shaped cavity, a second water pump cavity is formed in the left side of the inner wall of the special-shaped cavity, a second water pump is fixedly connected to the lower side of the inner wall of the second water pump, a water tank is arranged on the left surface of the grinding table, the output end of the second water pump penetrates through the inner wall of the second water pump cavity and extends to the inner wall of the water tank, a flocculation discharging port is formed in the bottom surface of the special-shaped cavity, and a circulating purification device is arranged at the input end of the second water pump.

Preferably, the circulation purification device comprises a filter shell fixedly connected with the input end of the second water pump, the inner wall of the filter shell is sequentially and fixedly connected with a filter screen plate and a non-woven fabric block from bottom to top, the top surface of the filter screen plate is fixedly connected with the bottom surface of the non-woven fabric block, the inner wall of the water tank is sequentially and fixedly connected with a medical stone layer, an activated carbon layer and a nanofiltration membrane layer from top to bottom, the right surface of the water tank is fixedly connected with a third water pump, the output end of the third water pump is fixedly connected with the surface of a faucet, and the input of the third water pump penetrates through the right surface of the water tank and extends to the bottom surface of the nanofiltration membrane layer.

Preferably, the inner wall of the faucet is clamped with an extension bent pipe, so that water sprayed by the faucet can be guided into the grinding table, and normal use of equipment is ensured.

Preferably, the right side of the inner wall of the liquid inlet is clamped with a first cover plate.

Preferably, the lower side of the inner wall of the flocculation discharging opening is clamped with a second cover plate.

Preferably, the gear groove has been seted up to the upside of dysmorphism intracavity wall, the inner wall in gear groove rotates and is connected with the internal gear, the holding tank has been seted up to one side of gear groove inner wall, the upside fixedly connected with agitator motor of holding tank inner wall, agitator motor's output fixedly connected with gear, the surface and the inner wall meshing of internal gear are connected, the bottom surface fixedly connected with puddler of internal gear makes equipment when adding the liquid medicine, can make liquid medicine and lapping water flash mixed to improve the result of use of equipment, accelerate the efficiency of standing of lapping water.

The utility model has the technical effects and advantages that:

1. through setting up grinding table, motor cavity, grinding motor, grinding disc, grinder, dysmorphism chamber, delivery port, tap, liquid medicine chamber, inlet, first water pump chamber, first water pump, second water pump chamber, second water pump, water tank, row's batting mouth, filtration shell, filter screen board, non-woven fabrics piece, medical stone layer, activated carbon layer, nanofiltration membrane layer, third water pump, this equipment possesses the function that purifies the lapping water at the in-process of using, and the lapping water can cyclic utilization after purifying, reduces the pollution that lapping water produced, the security when having improved equipment use.

2. Through setting up tap, extension return bend, inlet, first apron, row's batting mouth, second apron, dysmorphism chamber, gear groove, internal gear, holding tank, agitator motor, gear, puddler, make tap spouted water can be imported in the grinding table, guarantee the normal use of equipment for equipment has the leakproofness, makes equipment when adding the liquid medicine, can make liquid medicine and lapping water flash mixed, thereby improves the result of use of equipment, quickens the efficiency of standing of lapping water.

Drawings

Fig. 1 is a schematic diagram of the overall front cross-sectional structure of the present utility model.

Fig. 2 is an enlarged schematic view of the portion a of fig. 1 according to the present utility model.

Fig. 3 is a schematic front sectional structure of the filter housing of the present utility model.

Fig. 4 is a schematic perspective view of a water tank according to the present utility model.

In the figure: 1. a grinding table; 2. a motor cavity; 3. a grinding motor; 4. a grinding disc; 5. a grinding device; 6. a special-shaped cavity; 7. a water outlet; 8. a water tap; 9. a liquid medicine cavity; 10. a liquid inlet; 11. a first water pump chamber; 12. a first water pump; 13. a second water pump chamber; 14. a second water pump; 15. a water tank; 16. a flocculation discharging port; 17. a filter housing; 18. a filter screen plate; 19. a nonwoven fabric block; 20. a medical stone layer; 21. an activated carbon layer; 22. a nanofiltration membrane layer; 23. a third water pump; 24. extending the bent pipe; 25. a first cover plate; 26. a second cover plate; 27. a gear groove; 28. an internal gear; 29. a receiving groove; 30. a stirring motor; 31. a gear; 32. stirring rod.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

The utility model provides a special grinder for semiconductor processing, as shown in figures 1-4, which comprises a grinding table 1, wherein a motor cavity 2 is formed in the lower side of the inner wall of the grinding table 1, a grinding motor 3 is fixedly connected to the inner wall of the motor cavity 2, the output end of the grinding motor 3 extends to the inner wall of the grinding table 1 through the upper side of the inner wall of the motor cavity 2, a grinding disc 4 is fixedly connected to the output end of the grinding motor 3, a grinding device 5 is fixedly connected to the rear side of the top surface of the grinding table 1, a special-shaped cavity 6 is formed in the lower side of the inner wall of the grinding table 1, the special-shaped cavity 6 is of a special-shaped cavity structure, sediment is more conveniently discharged, grinding water is more conveniently introduced, a plurality of water outlets 7 are formed in the lower side of the inner wall of the grinding table 1, a faucet 8 is arranged on the left side of the top surface of the grinding table 1, and a filtering mechanism is arranged on the inner wall of the special-shaped cavity 6, so that the device has the function of grinding semiconductors, and normal use of the device is ensured.

As shown in fig. 1, 2 and 3, the filtering mechanism comprises a liquid medicine cavity 9 arranged on the right side of the inner wall of the special-shaped cavity 6, water containing mineral powder flocculating agent NF-188 is arranged in the liquid medicine cavity 9, porous substances with large specific area contained in the mineral powder flocculating agent NF-188 have strong surface activity and strong adsorption capacity, and can treat colored, odorous and high suspended matter wastewater, meanwhile, the filtering mechanism has certain dephosphorization and COD removal functions, the sludge property is good, the right side of the inner wall of the liquid medicine cavity 9 is provided with a liquid inlet 10, the top surface of the liquid medicine cavity 9 is provided with a first water pump cavity 11, the lower side of the inner wall of the first water pump cavity 11 is fixedly connected with a first water pump 12, the input end of the first water pump 12 penetrates through the lower side of the inner wall of the first water pump cavity 11 to the inner wall of the liquid medicine cavity 9, the output end of the first water pump 12 penetrates through the left side of the inner wall of the first water pump cavity 11 to the inner wall of the special-shaped cavity 6, the left side of special-shaped cavity 6 inner wall has seted up second water pump chamber 13, the downside fixedly connected with second water pump 14 of second water pump chamber 13 inner wall, the input of second water pump 14 runs through the right side of second water pump chamber 13 inner wall and extends to the inner wall of special-shaped cavity 6, the left side of grinding table 1 is equipped with water tank 15, the output of second water pump 14 runs through the inner wall of second water pump chamber 13 and extends to the inner wall of water tank 15, the flocculation outlet 16 has been seted up to the bottom surface of special-shaped cavity 6, the input of second water pump 14 is equipped with circulation purifier, circulation purifier includes the filtration shell 17 with the input fixed connection of second water pump 14, the inner wall of filtration shell 17 is from bottom to top fixedly connected with filter screen 18 in proper order, non-woven fabrics piece 19, the top surface of filter screen 18 and the bottom surface fixed connection of non-woven fabrics piece 19, the inner wall of water tank 15 is fixedly connected with medical stone layer 20 in proper order from top to bottom, the active carbon layer 21, nanofiltration membrane layer 22, the right fixedly connected with third water pump 23 of water tank 15, the output of third water pump 23 and tap 8's fixed surface are connected, the input of third water pump 23 passes through the right of water tank 15 and extends to nanofiltration membrane layer 22's bottom surface this equipment in the in-process of using, possess the function to grind water purification, grind water can cyclic utilization after purifying, reduce the pollution that grinds water produced, the security when having improved equipment use.

As shown in fig. 1, the inner wall joint of tap 8 has extension return bend 24, the right side joint of inlet 10 inner wall has first apron 25, the downside joint of row's of cotton-wool mouth 16 inner wall has second apron 26, gear groove 27 has been seted up to the upside of special-shaped chamber 6 inner wall, the inner wall rotation of gear groove 27 is connected with internal gear 28, holding tank 29 has been seted up to one side of gear groove 27 inner wall, the upside fixedly connected with agitator motor 30 of holding tank 29 inner wall, agitator motor 30's output fixedly connected with gear 31, gear 31's surface and internal gear 28's inner wall meshing are connected, a plurality of puddler 32 of bottom surface fixedly connected with of internal gear 28, make the hydroenergy that tap 8 spouted guide into grinding table 1 in, guarantee the normal use of equipment, make the equipment have the leakproofness, when adding the liquid medicine, can make liquid medicine and grinding water quick mixing, thereby improve the result of use of equipment, accelerate grinding water's efficiency of standing.

The working principle of the utility model is as follows: when the device is used, a semiconductor is adsorbed on a placing disc of a grinding device 5, the grinding device 5 is started, a grinding motor 3 is started, the semiconductor is ground on a grinding disc 4, a third water pump 23 is started, the third water pump 23 discharges water in a water tank 15 onto the grinding disc 4 through a water tap 8 and an extension bent pipe 24, powder ground by the semiconductor is washed away, and the powder is discharged into a special-shaped cavity 6 through a water outlet 7;

after the grinding of the semiconductor is finished, the first water pump 12 is started to discharge the mineral powder flocculating agent NF-188 in the liquid medicine cavity 9 into the special-shaped cavity 6, the stirring motor 30 is started, the stirring motor 30 enables the inner gear 28 and the stirring rod 32 to rotate through the gear 31, the stirring rod 32 enables grinding water and the liquid medicine to be fully mixed, thereby improving the use effect, after the mixed grinding water is stood for a period of time, sediment is generated, at the moment, the second water pump 14 is started, the upper grinding water after standing is pumped into the upper layer of the water tank 15, the sediment is difficult to enter the input end of the second water pump 14 under the action of the filter screen 18 and the non-woven fabric block 19, the water after standing and pumped into the water tank 15 is purified and filtered again through the medical stone layer 20, the activated carbon layer 21 and the nanofiltration membrane layer 22, and the filtered water is pumped out through the third water pump 23 when the equipment is used next time, thereby realizing the recycling of the water, the sediment is discharged through the flocculation discharging port 16, only the innovative structure is highlighted, other unexplained structures are all the prior art, and redundant description is not made herein.

Finally, it should be noted that: the foregoing description is only illustrative of the preferred embodiments of the present utility model, and although the present utility model has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present utility model.

Claims (7)

1. The utility model provides a special grinding machine of semiconductor processing, includes grinding table (1), its characterized in that: the utility model discloses a grinding table, including grinding table (1), motor chamber (2) have been seted up to the downside of grinding table (1) inner wall, the inner wall fixedly connected with grinding motor (3) of motor chamber (2), the output of grinding motor (3) runs through the upside of motor chamber (2) inner wall and extends to the inner wall of grinding table (1), the output fixedly connected with grinding disc (4) of grinding motor (3), the rear side fixedly connected with grinder (5) of grinding table (1) top surface, dysmorphism chamber (6) have been seted up to the downside of grinding table (1) inner wall, a plurality of delivery ports (7) have been seted up to the downside of grinding table (1) inner wall, the left side of grinding table (1) top surface is equipped with tap (8), the inner wall of dysmorphism chamber (6) is equipped with filtering mechanism.

2. A special purpose grinder for semiconductor processing according to claim 1, wherein: the utility model provides a filter mechanism is including seting up liquid medicine chamber (9) on special-shaped chamber (6) inner wall right side, liquid inlet (10) have been seted up on the right side of liquid medicine chamber (9) inner wall, first water pump chamber (11) have been seted up to the top surface of liquid medicine chamber (9), the downside fixedly connected with first water pump (12) of first water pump chamber (11) inner wall, the input of first water pump (12) runs through the downside of first water pump chamber (11) inner wall and extends to the inner wall of liquid medicine chamber (9), the output of first water pump (12) runs through the left side of first water pump chamber (11) inner wall and extends to the inner wall of special-shaped chamber (6), second water pump chamber (13) have been seted up in the left side of special-shaped chamber (6) inner wall, the downside fixedly connected with second water pump (14) of second water pump chamber (13) inner wall, the input of second water pump chamber (14) runs through the right side of second water pump chamber (13) inner wall and extends to the inner wall of special-shaped chamber (6), the left side of grinding table (1) is equipped with the bottom surface of second water pump chamber (14), the bottom surface of second water tank (14) is equipped with water tank (16), the bottom surface of second water tank (14) is opened to the water tank (16).

3. A special purpose grinder for semiconductor processing according to claim 2, wherein: the circulating purification device comprises a filter shell (17) fixedly connected with the input end of a second water pump (14), a filter screen plate (18) and a non-woven fabric block (19) are sequentially and fixedly connected to the inner wall of the filter shell (17) from bottom to top, the top surface of the filter screen plate (18) is fixedly connected with the bottom surface of the non-woven fabric block (19), a medical stone layer (20), an activated carbon layer (21) and a nanofiltration membrane layer (22) are sequentially and fixedly connected to the inner wall of a water tank (15) from top to bottom, a third water pump (23) is fixedly connected to the right of the water tank (15), the output end of the third water pump (23) is fixedly connected with the surface of a faucet (8), and an input transmission of the third water pump (23) penetrates through the right of the water tank (15) and extends to the bottom surface of the nanofiltration membrane layer (22).

4. A special purpose grinder for semiconductor processing according to claim 1, wherein: the inner wall of the tap (8) is clamped with an extension elbow pipe (24).

5. A special purpose grinder for semiconductor processing according to claim 2, wherein: the right side of the inner wall of the liquid inlet (10) is clamped with a first cover plate (25).

6. A special purpose grinder for semiconductor processing according to claim 2, wherein: the lower side of the inner wall of the flocculation discharging opening (16) is clamped with a second cover plate (26).

7. A special purpose grinder for semiconductor processing according to claim 1, wherein: the utility model discloses a special-shaped cavity (6) of a motor vehicle, including gear groove (27) has been seted up to the upside of dysmorphism chamber (6) inner wall, the inner wall rotation of gear groove (27) is connected with internal gear (28), holding tank (29) have been seted up to one side of gear groove (27) inner wall, the upside fixedly connected with agitator motor (30) of holding tank (29) inner wall, the output fixedly connected with gear (31) of agitator motor (30), the surface of gear (31) is connected with the inner wall meshing of internal gear (28), the bottom surface fixedly connected with puddler (32) of internal gear (28).