CN219898851U - Slit coating module with modularized structure - Google Patents
Slit coating module with modularized structure Download PDFInfo
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- CN219898851U CN219898851U CN202321126028.0U CN202321126028U CN219898851U CN 219898851 U CN219898851 U CN 219898851U CN 202321126028 U CN202321126028 U CN 202321126028U CN 219898851 U CN219898851 U CN 219898851U
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- 239000011248 coating agent Substances 0.000 title claims abstract description 89
- 238000000576 coating method Methods 0.000 title claims abstract description 89
- 239000007788 liquid Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 abstract description 18
- 238000013461 design Methods 0.000 abstract description 3
- 230000009466 transformation Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000007605 air drying Methods 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model discloses a slit coating module with a modularized structure, which comprises a slit coating die head and an air knife module, wherein the air knife module comprises an air inlet module, a middle module and a plurality of flow guide modules, the air inlet module is internally provided with an air inlet channel, the middle module is internally provided with a first air flow channel, the flow guide modules are sequentially attached and arranged between the middle module and the air inlet module, the second air flow channels are internally provided with second air flow channels, and the second air flow channels are mutually communicated and are communicated with the air inlet channel and the first air flow channel; an air outlet module with an air outlet channel is arranged below the flow guide module, and the air outlet channel is communicated with the first airflow channel; the middle unit middle module in the air knife module is attached to the slit coating die head. The air knife module adopts a multi-module design, can cope with different air pressure and air flow and process requirements, can increase more transformation possibility in various combination modes, and can improve fault tolerance.
Description
Technical Field
The utility model belongs to the technical field of coating devices, and particularly relates to a slit coating module with a modularized structure.
Background
Along with the deepening of the industrialization of perovskite solar cells and the addition of numerous researchers, the structure and the production process of large-area perovskite solar cell modules are rapidly updated, and the existing main technical routes comprise evaporation, sputtering, ALD, coating and the like, so that the coating is certainly the most advantageous process route in consideration of efficiency, stability, cost performance and production tact. The material solution is uniformly coated on the substrate through coating, and then blown dry through methods of blowing, vacuumizing, heating and the like, so that the corresponding film layer is formed.
For a part of the material solution, a method of air drying after coating is adopted. One method is to attach an air knife above the coater gantry, and one is to install it on the rear section of the transmission line. The first method has a certain invalid area between the coating die head and the air knife, and the coating machine can be improved by lengthening and expanding; the second method is affected by the transfer time and the environment, resulting in a liquid film that affects uniformity.
The improvement scheme of the method is that the coating die head and the air knife are combined together, the ineffective area between the coating die head and the air knife is greatly reduced, and the air outlet uniformity is optimized through the flow channel design, so that the uniformity of the film layer is improved. However, the process variation is large due to the influence of different process materials, solvents, gases, environment and the like, the fixed standard air knife module is difficult to adapt to different conditions, if different air outlet units are manufactured according to different processes, the cost is seriously increased, the air knife module which does not conform to the process cannot be used continuously and can only be discarded, and huge waste is caused.
Disclosure of Invention
The utility model mainly aims to provide a slit coating module with a modularized structure, which overcomes the defects in the prior art.
In order to achieve the above purpose, the technical scheme adopted by the utility model comprises the following steps:
the utility model provides a slot coating module with a modularized structure, which comprises a slot coating die head and an air knife module, wherein the air knife module comprises
The air inlet module is internally provided with an air inlet channel;
the middle module is internally provided with a first airflow channel;
the plurality of flow guide modules are sequentially and adjacently arranged between the middle module and the air inlet module, and a second airflow channel is formed in each flow guide module; the second airflow channels are communicated with each other, the second airflow channels close to the inside of the flow guiding module of the air inlet module are also communicated with the air inlet channel, and the second airflow channels close to the flow guiding module of the middle module are also communicated with the first airflow channels;
the air outlet module is arranged below the flow guiding module and is provided with an air outlet channel, and the air outlet channel is communicated with the first airflow channel;
and a middle unit middle module in the air knife module is attached to the slit coating die head.
Further, a slit coating liquid groove is formed in the slit coating die head or between the slit coating die head and the middle module, a slit coating knife lip is respectively arranged at the bottom ends of the slit coating die head and the middle module, a slit coating liquid outlet is formed between the two slit coating knife lips, and the slit coating liquid outlet is communicated with the slit coating liquid groove.
Further, 1 to 8 air inlets with the aperture of phi 8 to phi 20 are arranged above the air inlet channel, and the air inlets are at least used for accessing compressed air or N 2 。
Further, the widths of the first airflow channel and the second airflow channel are 0-50 mm.
Further, a first air outlet inclined opening and a second air outlet inclined opening are formed between the air outlet channel and the air outlet module, the angle of the first air outlet inclined opening is 45-165 degrees, and the angle of the second air outlet inclined opening is 15-135 degrees.
Further, the width of the air inlet channel is 0-50 mm.
Further, the height of the air outlet module is smaller than that of the slit coating knife lip, the length of the air outlet module is the same as that of the slit coating die head, and the width of the air outlet module plus the width of the knife lip of the middle module is larger than or equal to that of the middle module.
Further, the height of the air outlet module is smaller than the height of the slit coating knife lip by 0.1-10 mm.
Further, the width of the air outlet channel is 0.1-10 mm, and the distance between the air outlet channel and the slit coating liquid outlet is 10-50 mm.
Further, the lengths of the first and second airflow channels are greater than the length of the slot coating liquid outlet, less than the length of the slot coating die, and the heights of the first and second airflow channels are less than the height of the slot coating die.
Compared with the prior art, the utility model has the following beneficial effects:
the slit coating module with the modularized structure provided by the utility model adopts a multi-module design, meets different air pressure air quantity and process requirements, can be used in various combination modes, increases more reconstruction possibilities, can improve the fault tolerance, and can be used in various modules in a replaced and combined mode, thereby saving the cost and not causing waste.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present utility model, and other drawings may be obtained according to the drawings without inventive effort to those skilled in the art.
Fig. 1 is a side cross-sectional view of a slot coating module having a modular structure in one embodiment of the utility model.
Reference numerals illustrate: 1. the device comprises a slot coating die head, 11, a slot coating liquid tank, 12, a slot coating knife lip, 2, an air inlet module, 21, an air inlet, 3, an intermediate module, 31, a first air flow channel, 4, a flow guiding module, 41, a second air flow channel, 5, an air outlet channel, 6, a slot coating liquid outlet, 7 and an air outlet module.
Detailed Description
The utility model will be more fully understood from the following detailed description, which should be read in conjunction with the accompanying drawings. Detailed embodiments of the present utility model are disclosed herein; however, it is to be understood that the disclosed embodiments are merely exemplary of the utility model, which may be embodied in various forms. Therefore, specific functional details disclosed herein are not to be interpreted as limiting, but merely as a basis for the claims and as a representative basis for teaching one skilled in the art to variously employ the present utility model in virtually any appropriately detailed embodiment.
Examples
The slot coating module with a modularized structure provided in this embodiment, as shown in fig. 1, includes a slot coating die head 1 and an air knife module, the air knife module includes
An air inlet module attached to the slit coating die head 12, an air inlet channel is arranged in the air inlet module 2, 1-8 air inlets 21 with the aperture phi 8-phi 20 are arranged above the air inlet channel, and the air inlets 21 are at least used for accessing compressed air or N 2 Or other gases;
a middle module 3, wherein a first airflow channel 31 with the width of 0-50 mm is arranged in the middle module 3;
the plurality of flow guiding modules 4 are sequentially attached between the middle module 3 and the air inlet module 2, and second airflow channels 41 with the width of 0-50 mm are formed in the flow guiding modules; the second airflow channels 41 are communicated with each other, the second airflow channels 41 close to the inside of the flow guiding module 4 of the air inlet module 2 are also communicated with the air inlet channel, and the second airflow channels 41 close to the flow guiding module 4 of the middle module 3 are also communicated with the first airflow channels 31;
an air-out module 7, the air-out module 7 sets up in the below of water conservancy diversion module 4, and air-out module 7 has air-out passageway 5, and air-out passageway 5 and first air current runner 31 intercommunication setting.
In the implementation process of this embodiment, a slot coating liquid tank 11 is formed in the slot coating die head 1 or between the slot coating die head 1 and the middle module 3, a slot coating knife lip 12 is respectively disposed at the bottom ends of the slot coating die head 1 and the middle module 3, a slot coating liquid outlet 6 is formed between the two slot coating knife lips 12, and the slot coating liquid outlet 6 is communicated with the slot coating liquid tank 11.
In the specific implementation process, the height of the air outlet module 7 is smaller than the height of the slit coating knife lip 12, the length of the air outlet module 7 is the same as that of the slit coating die head 1, the width of the air outlet module 7 plus the width of the knife lip of the middle module 3 is larger than or equal to that of the middle module 3, and in particular, the height of the air outlet module 7 is smaller than the height of the slit coating knife lip 12 by 0.1-10 mm; the width of the air outlet channel 5 is 0.1-10 mm, the distance between the air outlet channel 5 and the slit coating liquid outlet 6 is 10-50 mm, the lengths of the first air flow channel 31 and the second air flow channel 41 are larger than the length of the slit coating liquid outlet 6 and smaller than the length of the slit coating die head 1, and the heights of the first air flow channel 31 and the second air flow channel 41 are smaller than the height of the slit coating die head 1.
In the embodiment, the interior of the air outlet channel 5 is even and smooth without fluctuation, a first air outlet inclined opening and a second air outlet inclined opening are formed between the air outlet channel 5 and the air outlet module 7, and the angle of the first air outlet inclined opening is recorded as theta 1, and the range value of the angle is 45-165 degrees; the angle of the second air outlet inclined opening is recorded as theta 2, the range value of the second air outlet inclined opening is 15-135 degrees, the relation between the second air outlet inclined opening and the second air outlet inclined opening is not fixed, and the second air outlet inclined opening are in a fixed proportion according to process variation; each unit module in the air knife module is fixed by a screw, and is required to be fixed by a torque spanner with a certain torque.
According to the embodiment, the air knife module under the condition that the coating die head is combined with the air knife is improved, the combination mode of the multi-unit module is designed, different diversion modules 4 are designed according to the process requirements and the simulation calculation, and the combination or the increase and the decrease are carried out corresponding to different conditions. For example, when the air pressure is high, a plurality of flow guide modules 4 can be assembled in a multi-mode, so that the flow channels are lengthened to improve the dispersion effect and the air outlet uniformity; the air outlet modules with different air outlet inclined ports theta 1 and theta 2 can be replaced, and meanwhile, independent disassembly, assembly, maintenance and maintenance are convenient, so that the equipment can be simply and effectively modified, various process requirements can be met, the fault tolerance rate is high, and the cost is saved.
It should be understood that the above embodiments are merely for illustrating the technical concept and features of the present utility model, and are intended to enable those skilled in the art to understand the present utility model and implement the same according to the present utility model without limiting the scope of the present utility model. All equivalent changes or modifications made in accordance with the spirit of the present utility model should be construed to be included in the scope of the present utility model.
Claims (10)
1. A slot coating module with modular structure, includes slot coating die head and air knife module, its characterized in that: the air knife module comprises
The air inlet module is internally provided with an air inlet channel;
the middle module is internally provided with a first airflow channel;
the plurality of flow guide modules are sequentially and adjacently arranged between the middle module and the air inlet module, and a second airflow channel is formed in each flow guide module; the second airflow channels are communicated with each other, the second airflow channels close to the inside of the flow guiding module of the air inlet module are also communicated with the air inlet channel, and the second airflow channels close to the flow guiding module of the middle module are also communicated with the first airflow channels;
the air outlet module is arranged below the flow guiding module and is provided with an air outlet channel, and the air outlet channel is communicated with the first airflow channel;
and a middle unit middle module in the air knife module is attached to the slit coating die head.
2. The slot coating module having a modular structure of claim 1, wherein: a slit coating liquid groove is formed in the slit coating die head or between the slit coating die head and the middle module, a slit coating knife lip is respectively arranged at the bottom ends of the slit coating die head and the middle module, a slit coating liquid outlet is formed between the two slit coating knife lips, and the slit coating liquid outlet is communicated with the slit coating liquid groove.
3. The slot coating module having a modular structure according to claim 1 or 2, wherein: the upper part of the air inlet channel is provided with 1 to 8 air inlets with the aperture of phi 8 to phi 20, and the air inlets are at least used for accessing compressed air or N 2 。
4. The slot coating module having a modular structure according to claim 1 or 2, wherein: the width of the first airflow channel and the second airflow channel is 0-50 mm.
5. The slot coating module having a modular structure according to claim 1 or 2, wherein: a first air outlet inclined opening and a second air outlet inclined opening are formed between the air outlet channel and the air outlet module, the angle of the first air outlet inclined opening is 45-165 degrees, and the angle of the second air outlet inclined opening is 15-135 degrees.
6. The slot coating module having a modular structure according to claim 1 or 2, wherein: the width of the air inlet channel is 0-50 mm.
7. The slot coating module having a modular structure according to claim 1 or 2, wherein: the height of the air outlet module is smaller than that of the slit coating knife lip, the length of the air outlet module is the same as that of the slit coating die head, and the width of the air outlet module plus the width of the knife lip of the middle module is larger than or equal to that of the middle module.
8. The slot coating module having a modular structure of claim 7, wherein: the height of the air outlet module is smaller than the height of the slit coating knife lip by 0.1-10 mm.
9. The slot coating module having a modular structure of claim 2, wherein: the width of the air outlet channel is 0.1-10 mm, and the distance between the air outlet channel and the slit coating liquid outlet is 10-50 mm.
10. The slot coating module having a modular structure of claim 2, wherein: the lengths of the first airflow channel and the second airflow channel are larger than the length of the slit coating liquid outlet and smaller than the length of the slit coating die head, and the heights of the first airflow channel and the second airflow channel are smaller than the height of the slit coating die head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321126028.0U CN219898851U (en) | 2023-05-11 | 2023-05-11 | Slit coating module with modularized structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321126028.0U CN219898851U (en) | 2023-05-11 | 2023-05-11 | Slit coating module with modularized structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219898851U true CN219898851U (en) | 2023-10-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321126028.0U Active CN219898851U (en) | 2023-05-11 | 2023-05-11 | Slit coating module with modularized structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219898851U (en) |
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2023
- 2023-05-11 CN CN202321126028.0U patent/CN219898851U/en active Active
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