CN219886178U - Deposition workpiece fixing device for hot filament chemical vapor deposition chamber - Google Patents
Deposition workpiece fixing device for hot filament chemical vapor deposition chamber Download PDFInfo
- Publication number
- CN219886178U CN219886178U CN202321365628.2U CN202321365628U CN219886178U CN 219886178 U CN219886178 U CN 219886178U CN 202321365628 U CN202321365628 U CN 202321365628U CN 219886178 U CN219886178 U CN 219886178U
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- Prior art keywords
- deposition chamber
- deposition
- side wall
- hole
- chamber
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- 238000000151 deposition Methods 0.000 title claims abstract description 112
- 230000008021 deposition Effects 0.000 title claims abstract description 108
- 238000004050 hot filament vapor deposition Methods 0.000 title claims abstract description 19
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 238000001816 cooling Methods 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
The utility model relates to the technical field of hot wire chemical vapor deposition, in particular to a deposition workpiece fixing device for a hot wire chemical vapor deposition chamber, which comprises a cylindrical deposition chamber, wherein a deposition workpiece is fixed in the middle of the inner cavity of the deposition chamber, a chamber door through hole is formed in the side wall of the deposition chamber, the chamber door through hole is divided into an upper chamber door through hole and a lower chamber door through hole, a chamber door for covering the chamber door through hole is hinged on the side wall of the deposition chamber, blind holes are formed in the side wall of the inner cavity of the deposition chamber, support screws are screwed in the blind holes, clamping blocks are integrally fixed at the end parts of the support screws, which are far away from the blind holes, and support nuts are screwed on the support screws; the side wall of the arc belt of the horizontal deposition chamber is provided with a through hole, a fastening screw rod penetrates through the through hole, a fastening block is integrally fixed at the end part of the fastening screw rod far away from the through hole, and a fastening nut is screwed on the fastening screw rod; three abutting grooves are formed in the side wall of the deposition workpiece; solves the problems of low heat energy utilization rate and high cost existing in the prior HFCVD device when a deposited workpiece is fixed.
Description
Technical Field
The utility model relates to the technical field of hot wire chemical vapor deposition, in particular to a deposition workpiece fixing device for a hot wire chemical vapor deposition chamber.
Background
When the HFCVD device is used for depositing the boron-doped diamond film, firstly, an annular clamp fixed on a table base is used for clamping a deposition workpiece on the table base, then the table base passes through a hot wire group positioned at the lower side from the bottom of a deposition chamber, so that the deposition workpiece is positioned between an upper hot wire group and a lower hot wire group, then double-sided deposition of the boron-doped diamond film is carried out, boron doping is carried out during deposition, and meanwhile, a circulating cooling water system is also required to be used for cooling the table base during the deposition process.
However, practice has shown that existing HFCVD apparatus have the following problems when securing deposited workpieces: the heat energy loss in the deposition chamber is large in the process of cooling the table base, and the heat energy utilization rate is low; and the circulating cooling water system has a complex structure and high cost.
Therefore, it is necessary to provide a deposition workpiece fixing device for hot filament chemical vapor deposition chamber to solve the above problems.
Disclosure of Invention
The utility model provides a deposition workpiece fixing device for a hot wire chemical vapor deposition chamber, which aims to solve the problems of low heat energy utilization rate and high cost existing in the prior HFCVD device when fixing deposition workpieces.
The utility model is realized by adopting the following technical scheme:
the utility model provides a hot filament chemical vapor deposition room is with depositing work piece fixing device, includes the deposition chamber of cylinder type, and the inner chamber middle part of deposition chamber is fixed with the deposition work piece, and the lateral wall of deposition chamber has seted up the chamber door through-hole, and the chamber door through-hole is divided into upper chamber door through-hole and lower chamber door through-hole through the horizontal deposition chamber arc area that sets up with the deposition chamber an organic whole, articulates on the lateral wall of deposition chamber has the chamber door that covers chamber door through-hole, and the inside wall of chamber door flushes with the inside wall of deposition chamber;
two blind holes which are positioned at the same elevation and provided with internal threads are formed in the side wall of the inner cavity of the deposition chamber, a supporting screw rod is screwed in each blind hole, a conical clamping block is integrally fixed at the end part of each supporting screw rod far away from the blind hole, and a supporting nut which is tightly clung to the side wall of the deposition chamber is screwed on each supporting screw rod; the side wall of the arc belt of the horizontal deposition chamber is provided with a through hole which is matched with the position of the blind hole and is provided with an internal thread, a fastening screw rod penetrates through the through hole, the end part of the fastening screw rod, which is far away from the through hole, is integrally fixed with a conical fastening block which is positioned in the inner cavity of the deposition chamber, a fastening nut which is tightly attached to the inner side wall of the deposition chamber is screwed on the fastening screw rod, and a straight slot is formed in the surface of the fastening screw rod, which is far away from the outer side wall of the deposition chamber; three conical abutting grooves matched with the clamping blocks and the fastening blocks are formed in the side wall of the deposition workpiece.
Further, the distance between the two support screws is equal to the distance between the support screw and the fastening screw.
Further, three mounting seats distributed up and down are fixed on the left part of the outer side wall of the deposition chamber, mounting holes penetrating up and down are formed in each mounting seat, three mounting lug plates matched with the three mounting seats are fixed at the left end of the chamber door, and pin shafts are jointly arranged on each mounting lug plate and the matched mounting holes in a penetrating mode; the right part of the outer side wall of the deposition chamber is fixedly provided with three horizontal locking seats which are distributed up and down, the end part of each horizontal locking seat, which is far away from the deposition chamber, is integrally provided with two locking forks which are distributed up and down, the right end of the chamber door is hinged with a longitudinal screw rod which is matched with the horizontal locking seats in position, the rear end of each longitudinal screw rod is positioned between the two locking forks, and the rear end of each longitudinal screw rod is screwed with a locking nut which is tightly clung to the rear surface of the locking fork.
Further, gaskets are arranged between each support nut and the inner side wall of the deposition chamber and between the fastening nuts and the inner side wall of the deposition chamber.
The utility model has reasonable and reliable structural design, realizes the purpose of fixing a deposited workpiece through two simple supporting screws and one fastening screw, and has simple operation; meanwhile, the prior mode of conveying the deposited workpiece between the upper hot wire group and the lower hot wire group by using the table base is abandoned, a circulating water cooling system is omitted, the heat loss in the deposition chamber is reduced, and the heat energy utilization rate in the deposition chamber is improved; further, the equipment cost is saved.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
FIG. 2 is a schematic view of the structure of an arc belt of a horizontal deposition chamber in the present utility model.
FIG. 3 is a schematic side view of an arc belt of a horizontal deposition chamber in accordance with the present utility model.
FIG. 4 is a schematic view of the positions of blind holes and through holes in the present utility model.
Fig. 5 is a schematic view of the structure of the door in the present utility model.
Fig. 6 is a schematic view of the structure of the supporting screw in the present utility model.
Fig. 7 is a schematic view of the structure of the fastening screw in the present utility model.
Fig. 8 is a schematic view of the structure of a deposition work piece according to the present utility model.
In the figure: the device comprises a 1-deposition chamber, a 2-deposition workpiece, a 3-horizontal deposition chamber arc belt, a 4-upper chamber door through hole, a 5-lower chamber door through hole, a 6-chamber door, a 7-blind hole, an 8-supporting screw, a 9-clamping block, a 10-supporting nut, an 11-through hole, a 12-fastening screw, a 13-fastening block, a 14-fastening nut, a 15-straight groove, a 16-abutting groove, a 17-mounting seat, an 18-mounting lug plate, a 19-pin shaft, a 20-locking fork, a 21-longitudinal screw, a 22-locking nut and a 23-gasket.
Detailed Description
The deposition workpiece fixing device for the hot wire chemical vapor deposition chamber is shown in the accompanying drawings 1-8, and comprises a cylindrical deposition chamber 1, wherein a deposition workpiece 2 is fixed in the middle of an inner cavity of the deposition chamber 1, a chamber door through hole is formed in the side wall of the deposition chamber 1, the chamber door through hole is divided into an upper chamber door through hole 4 and a lower chamber door through hole 5 through a horizontal deposition chamber arc belt 3 which is integrally arranged with the deposition chamber 1, a chamber door 6 covering the chamber door through hole is hinged on the side wall of the deposition chamber 1, and the inner side wall of the chamber door 6 is flush with the inner side wall of the deposition chamber 1;
two blind holes 7 which are positioned at the same elevation and provided with internal threads are formed in the side wall of the inner cavity of the deposition chamber 1, a supporting screw rod 8 is screwed in each blind hole 7, a conical clamping block 9 is integrally fixed at the end part of each supporting screw rod 8 far away from the blind hole 7, and a supporting nut 10 which is tightly clung to the inner side wall of the deposition chamber 1 is screwed on each supporting screw rod 8; the side wall of the arc belt 3 of the horizontal deposition chamber is provided with a through hole 11 which is matched with the position of the blind hole 7 and provided with internal threads, a fastening screw rod 12 penetrates through the through hole 11, a fastening block 13 which is positioned in the inner cavity of the deposition chamber 1 and is conical is integrally fixed at the end part of the fastening screw rod 12, which is far away from the through hole 11, a fastening nut 14 which is tightly attached to the inner side wall of the deposition chamber 1 is screwed on the fastening screw rod 12, and a linear groove 15 is formed in the surface of the fastening screw rod 12, which is far away from the outer side wall of the deposition chamber 1; three conical abutting grooves 16 matched with the clamping blocks 9 and the fastening blocks 13 are formed in the side wall of the deposition workpiece 2.
The utility model adopts a mode of fixing the deposition workpiece 2 with the inner side wall of the deposition chamber 1, abandons the existing mode of conveying the deposition workpiece between an upper hot wire group and a lower hot wire group by using a table base, omits a circulating water cooling system, reduces heat loss in the deposition chamber 1, improves the heat energy utilization rate in the deposition chamber 1, and reduces equipment cost; the structural design of the chamber door 6 is convenient for the installation and the disassembly of the upper hot wire set 4, the lower hot wire set 5 and the deposition workpiece 2, and the inner side wall of the chamber door 6 is flush with the inner side wall of the deposition chamber 1, so that the uniformity and consistency of the gas concentration and the gas flow rate in the deposition chamber 1 can not be influenced.
When the deposition workpiece 2 is fixed, firstly, the two support screws 8 are respectively screwed in the two blind holes 7, the fastening screw 12 is screwed in the through hole 11, and the two support nuts 10 are respectively screwed on the support screws 8, so that the stability of the support screws 8 is enhanced; simultaneously screwing the fastening nut 14 on the fastening screw rod 12 but not screwing, then putting the deposition workpiece 2 into the deposition chamber 1 by an operator, respectively butting three butting grooves 16 with two clamping blocks 9 and one fastening block 13, screwing the fastening screw rod 12 by utilizing the straight groove 15 to ensure that the fastening blocks 13 are butted in the butting grooves 16, and finally screwing the fastening nut 14, thereby completing the fixed connection of the deposition workpiece 2 and the deposition chamber 1; the problems of low heat energy utilization rate and high cost existing in the conventional HFCVD device when a deposited workpiece is fixed are solved.
As shown in fig. 1, the distance between the two support screws 8 is equal to the distance between the support screws 8 and the fastening screw 12.
This structural design increases the stability of the deposited workpiece 2 according to the principle that triangles have stability.
As shown in fig. 1-5, three mounting seats 17 distributed up and down are fixed at the left part of the outer side wall of the deposition chamber 1, mounting holes penetrating up and down are formed in each mounting seat 17, three mounting ear plates 18 matched with the three mounting seats 17 are fixed at the left end of the chamber door 6, and a pin shaft 19 is jointly arranged on each mounting ear plate 18 and the matched mounting hole in a penetrating manner; the right part of the outer side wall of the deposition chamber 1 is fixedly provided with three horizontal locking seats which are distributed up and down, the end part of each horizontal locking seat far away from the deposition chamber 1 is integrally provided with two locking forks 20 which are distributed up and down, the right end of the chamber door 6 is hinged with a longitudinal screw rod 21 matched with the horizontal locking seats, the rear end of each longitudinal screw rod 21 is positioned between the two locking forks 20, and the rear end of each longitudinal screw rod 21 is screwed with a locking nut 22 which is tightly attached to the rear surface of the locking fork 20.
The structural design of the mounting seat 17, the mounting lug plate 18 and the pin shaft 19 realizes the hinging of the left end of the chamber door 6 and the deposition chamber 1, and the structural design of the horizontal locking seat, the locking fork 20, the longitudinal screw 21 and the locking nut 22 realizes the fixed connection of the right end of the chamber door 6 and the deposition chamber 1;
when the door 6 is closed, the longitudinal screw 21 is first turned so that the longitudinal screw 21 is located between the two locking forks 20, and then the locking nut 22 is tightened so that the longitudinal screw 21 is fixedly connected with the locking forks 20; when opening the door 6, the lock nut 22 is unscrewed, so that the friction between the lock nut 22 and the lock fork 20 is suddenly reduced, and then the longitudinal screw 21 is rotated, and the longitudinal screw 21 pulls the door 6 open.
As shown in fig. 1, a spacer 23 is interposed between each of the support nuts 10 and the inner sidewall of the deposition chamber 1, and between the fastening nut 14 and the inner sidewall of the deposition chamber 1.
In the implementation process, the supporting screw 8 and the fastening screw 12 with different specifications can be selected according to the size of the deposition workpiece 2.
In the description of the present utility model, it should be understood that the orientation or positional relationship indicated is based on the orientation or positional relationship shown in the drawings, and is merely for convenience in describing the present utility model and simplifying the description, and does not indicate or imply that the apparatus or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. A deposition workpiece fixing device for a hot wire chemical vapor deposition chamber is characterized in that: the device comprises a cylindrical deposition chamber (1), wherein a deposition workpiece (2) is fixed in the middle of an inner cavity of the deposition chamber (1), a chamber door through hole is formed in the side wall of the deposition chamber (1), the chamber door through hole is divided into an upper chamber door through hole (4) and a lower chamber door through hole (5) through a horizontal deposition chamber arc belt (3) which is integrally arranged with the deposition chamber (1), a chamber door (6) covering the chamber door through hole is hinged to the side wall of the deposition chamber (1), and the inner side wall of the chamber door (6) is flush with the inner side wall of the deposition chamber (1);
two blind holes (7) which are positioned at the same elevation and provided with internal threads are formed in the side wall of the inner cavity of the deposition chamber (1), a supporting screw rod (8) is screwed in each blind hole (7), a conical clamping block (9) is integrally fixed at the end part of each supporting screw rod (8) far away from the blind hole (7), and a supporting nut (10) which is tightly clung to the inner side wall of the deposition chamber (1) is screwed on each supporting screw rod (8); the side wall of the horizontal deposition chamber arc belt (3) is provided with a through hole (11) which is matched with the position of the blind hole (7) and is provided with an internal thread, a fastening screw (12) penetrates through the through hole (11), the end part of the fastening screw (12) far away from the through hole (11) is integrally fixed with a fastening block (13) which is positioned in the inner cavity of the deposition chamber (1) and is conical, a fastening nut (14) which is tightly attached to the inner side wall of the deposition chamber (1) is screwed on the fastening screw (12), and a straight slot (15) is formed in the surface of the fastening screw (12) far away from the outer side wall of the deposition chamber (1); three conical abutting grooves (16) matched with the clamping blocks (9) and the fastening blocks (13) are formed in the side wall of the deposition workpiece (2).
2. The deposition workpiece fixing device for hot filament chemical vapor deposition chamber according to claim 1, wherein: the distance between the two supporting screws (8) is equal to the distance between the supporting screws (8) and the fastening screw (12).
3. The deposition workpiece fixing device for hot filament chemical vapor deposition chamber according to claim 1, wherein: three mounting seats (17) distributed up and down are fixed at the left part of the outer side wall of the deposition chamber (1), mounting holes penetrating up and down are formed in each mounting seat (17), three mounting lug plates (18) matched with the three mounting seats (17) are fixed at the left end of the chamber door (6), and pin shafts (19) are jointly penetrated on each mounting lug plate (18) and the matched mounting holes; the right part of the outer side wall of the deposition chamber (1) is fixedly provided with three horizontal locking seats which are distributed up and down, the end part of each horizontal locking seat, which is far away from the deposition chamber (1), is integrally provided with two locking forks (20) which are distributed up and down, the right end of the chamber door (6) is hinged with a longitudinal screw rod (21) which is matched with the position of the horizontal locking seats, the rear end of each longitudinal screw rod (21) is positioned between the two locking forks (20), and the rear end of each longitudinal screw rod (21) is screwed with a locking nut (22) which is tightly attached to the rear surface of the locking fork (20).
4. The deposition workpiece fixing device for hot filament chemical vapor deposition chamber according to claim 1, wherein: gaskets (23) are respectively arranged between each support nut (10) and the inner side wall of the deposition chamber (1) and between the fastening nut (14) and the inner side wall of the deposition chamber (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321365628.2U CN219886178U (en) | 2023-05-31 | 2023-05-31 | Deposition workpiece fixing device for hot filament chemical vapor deposition chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321365628.2U CN219886178U (en) | 2023-05-31 | 2023-05-31 | Deposition workpiece fixing device for hot filament chemical vapor deposition chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219886178U true CN219886178U (en) | 2023-10-24 |
Family
ID=88406078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321365628.2U Active CN219886178U (en) | 2023-05-31 | 2023-05-31 | Deposition workpiece fixing device for hot filament chemical vapor deposition chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219886178U (en) |
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2023
- 2023-05-31 CN CN202321365628.2U patent/CN219886178U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |