CN219854018U - Liquid spray pipe and finishing machine trimmer - Google Patents
Liquid spray pipe and finishing machine trimmer Download PDFInfo
- Publication number
- CN219854018U CN219854018U CN202321320585.6U CN202321320585U CN219854018U CN 219854018 U CN219854018 U CN 219854018U CN 202321320585 U CN202321320585 U CN 202321320585U CN 219854018 U CN219854018 U CN 219854018U
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- side wall
- groove
- liquid
- spray
- spray hole
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- 239000007921 spray Substances 0.000 title claims abstract description 66
- 239000007788 liquid Substances 0.000 title claims abstract description 56
- 238000005452 bending Methods 0.000 claims description 5
- 239000002245 particle Substances 0.000 abstract description 17
- 238000009825 accumulation Methods 0.000 abstract description 10
- 239000013618 particulate matter Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 230000014759 maintenance of location Effects 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000003020 moisturizing effect Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
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- Nozzles (AREA)
Abstract
The utility model provides a liquid spray pipe and a finishing machine trimmer. The liquid jet pipe comprises: the pipe body is provided with a first side wall and a second side wall which are oppositely arranged, and the first side wall extends outwards to form a first extension part; the spray holes are arranged along the axial direction of the pipe body and are positioned at the junction of the first extension part and the second side wall; at least one first groove is formed on the first extension part, and the opening of the first groove faces the pipe body. According to the technical scheme, the pipe body with the first groove is designed, so that particles in the liquid can fall down and stay at the first groove, accumulation of the particles at the spray hole is reduced, and the spray hole is prevented from being blocked.
Description
Technical Field
The utility model relates to the field of semiconductors, in particular to a liquid spray pipe and a grinder table trimmer.
Background
There are many pore designs in semiconductor polishing equipment, such as moisture retention of the polishing platen conditioner arm, slurry output of the polishing slurry arm, and the like. Referring to fig. 1 to 2, fig. 1 is a schematic structural diagram of a finishing machine of a grinding machine, and fig. 2 is a sectional view taken along line AA' in fig. 1. As shown in fig. 1, the grinder trimmer includes a trimmer mechanical arm 11 and a nozzle 12. The spray pipe 12 is located above the trimmer manipulator 11, and is used for spraying moisturizing liquid to moisturize the trimmer manipulator 11. The surface of the spray pipe 12 is provided with a plurality of spray holes 13, and the moisturizing liquid is sprayed out through the spray holes 13. As shown in fig. 2, the cross section of the nozzle 12 is circular, and the nozzle hole 13 is located at the bottom of the circular shape. When particulate matter 14 is present in the moisturizing liquid, the particulate matter 14 may be deposited to the bottom of the spout 12. Since the nozzle 13 is very fine, the nozzle 13 is often blocked, resulting in unsmooth spraying.
Therefore, how to improve the nozzle structure and the nozzle blocking phenomenon is a problem to be solved at present.
Disclosure of Invention
The utility model aims to solve the technical problems of improving the spray pipe structure and the spray hole blocking phenomenon, and provides a liquid spray pipe and a finishing machine of a grinding machine.
In order to solve the above problems, the present utility model provides a liquid spray pipe comprising: the pipe body is provided with a first side wall and a second side wall which are oppositely arranged, and the first side wall extends outwards to form a first extension part; the spray holes are arranged along the axial direction of the pipe body and are positioned at the junction of the first extension part and the second side wall; at least one first groove is formed on the first extension part, and the opening of the first groove faces the pipe body.
In some embodiments, the second side wall is bent towards a direction close to the first side wall to form a bent portion, and the nozzle is located at a junction between the first extension portion and the bent portion.
In some embodiments, the side wall of the first groove near the nozzle forms a first angle with the opening direction of the nozzle, the bending portion forms a second angle with the opening direction of the nozzle, and the first angle is equal to the second angle
And an included angle is smaller than or equal to the second included angle, wherein the opening direction of the spray hole is perpendicular to the axial direction of the pipe body.
In some embodiments, the side wall of the first groove, which is close to the spray hole, forms an included angle with the opening direction of the spray hole; the side wall of the first groove far away from the spray hole is parallel to the opening direction of the spray hole.
In some embodiments, the bottom dimension of the first groove is less than the top dimension of the first groove.
In some embodiments, the second sidewall extends outwardly to form a second extension having a second recess that opens toward the tube.
In some embodiments, the first groove and the second groove are symmetrically disposed; the spray hole is positioned at the junction of the first groove and the second groove.
In some embodiments, a removable plug is also included on a side along the axial direction of the tube.
In some embodiments, the surface of the plug and the inner wall of the side portion of the pipe body are threaded, and the plug and the pipe body are fixed through threaded connection.
In order to solve the above problems, the present utility model provides a grinder trimmer, comprising a trimmer mechanical arm and a liquid spray pipe above the trimmer mechanical arm; the liquid spray pipe adopts the liquid spray pipe.
According to the technical scheme, the pipe body with the first groove is designed, so that particles in the liquid can fall down and stay at the first groove, accumulation of the particles at the spray hole is reduced, and the spray hole is prevented from being blocked.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the utility model as claimed. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but should be considered part of the specification where appropriate.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the drawings that are required to be used in the description of the embodiments will be briefly described. It is apparent that the drawings in the following description are only some specific embodiments of the present utility model, and that other drawings may be obtained from these drawings without inventive effort for a person of ordinary skill in the art.
Fig. 1 is a schematic view of a finishing machine.
Fig. 2 is a cross-sectional view taken along line AA' of fig. 1.
FIG. 3 is a schematic view of an embodiment of a liquid jet nozzle according to the present utility model.
Fig. 4 is a cross-sectional view taken along line BB' in fig. 3.
FIG. 5 is a schematic view of another embodiment of a liquid jet nozzle according to the present utility model.
Fig. 6 is a sectional view taken along line CC' in fig. 5.
Fig. 7 is a schematic structural view of a finishing machine according to an embodiment of the present utility model.
Detailed Description
The technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings. It will be apparent that the described embodiments are only some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to fall within the scope of the utility model.
Referring to fig. 3 to 4, fig. 3 is a schematic structural diagram of an embodiment of the liquid spray pipe according to the present utility model, and fig. 4 is a cross-sectional view along the line BB' in fig. 3. As shown in fig. 3 to 4, the liquid jet pipe includes: tube 30, orifice 31, first recess 32. The pipe body 30 has a first side wall 301 and a second side wall 302 disposed opposite to each other, and the first side wall 301 extends outwards to form a first extension portion 303. The plurality of injection holes 31 are arranged along the axial direction X of the tube 30 and are located at the junction of the first extension 303 and the second sidewall 302. The first groove 32 is formed on the first extension 303, and an opening 320 of the first groove 32 faces the pipe body 30.
According to the technical scheme, the pipe body 30 with the first groove 32 is designed, so that the particles 39 in the liquid can fall down and stay at the first groove 32, accumulation of the particles 39 at the spray hole 31 is reduced, and the spray hole 31 is prevented from being blocked.
As shown in fig. 4, in the present embodiment, the first extension 303 includes a side wall 321 of the first recess 32 adjacent to the nozzle hole 31, a side wall 322 of the first recess 32 distant from the nozzle hole 31, and a bottom 323 of the first recess 32. In some embodiments, the side wall 321 of the first recess 32 adjacent to the nozzle hole 31 forms an included angle with the opening direction Y of the nozzle hole 31; the side wall 322 of the first recess 32 away from the nozzle hole 31 is parallel to the opening direction Y of the nozzle hole. The opening direction of the spray hole is used for controlling the direction of the sprayed liquid. In this embodiment, the opening direction of the nozzle hole is a vertical direction. The side wall 321 of the first groove 32 near the spray hole 31 forms an included angle with the opening direction Y of the spray hole 31, so that the side wall 321 of the first groove 32 near the spray hole 31 has a slope, when the particulate matter 39 in the liquid passes through the spray hole 31, due to the existence of gravity, the particulate matter 39 slides to the bottom of the first groove 32 through the slope of the side wall 321 of the first groove 32 near the spray hole 31, thereby reducing the accumulation of the particulate matter 39 at the spray hole 31.
In some embodiments, the second side wall 302 is bent in a direction approaching the first side wall 301 to form a bent portion 304, and the nozzle hole 31 is located at an intersection between the first extension portion 303 and the bent portion 304.
In some embodiments, the sidewall 321 of the first recess 32 adjacent to the nozzle hole 31 forms a first angle θ with the direction in which the nozzle hole 31 ejects the liquid Y 1 The bending is performedThe portion 304 forms a second angle θ with the opening direction Y of the nozzle hole 31 2 And the first included angle theta 1 Less than or equal to the second included angle theta 2 Wherein, the opening direction Y of the spray hole 31 is perpendicular to the axial direction X of the tube body. A side wall 321 of the first groove 32 near the spray hole 31 forms a first included angle θ with the direction in which the spray hole 31 sprays the liquid Y 1 The sidewall 321 of the first recess 32 adjacent to the nozzle hole 31 has a slope, when the particulate matter 39 in the liquid passes through the nozzle hole 31, due to the gravity, the particulate matter 39 slides to the bottom of the first recess 32 through the slope of the sidewall 321 of the first recess 32 adjacent to the nozzle hole 31, so as to reduce the accumulation of the particulate matter 39 at the nozzle hole 31. Further, the bending portion 304 is disposed to form a second angle θ with the opening direction Y of the nozzle 31 2 And the first included angle theta 1 Less than or equal to the second included angle theta 2 The second side wall 302 has an inward bending slope, and the inclination of the second side wall 302 is smaller than that of the side wall 321 of the first groove 32 near the nozzle hole 31, that is, the second side wall 302 and the side wall 321 of the first groove 32 near the nozzle hole 31 form an included angle larger than 180 ° inside the liquid nozzle, so that the particles 39 can more smoothly enter the first groove 32 when passing through the second side wall 302, and meanwhile, the space in the liquid nozzle is not excessively compressed, thereby affecting the liquid flow.
In some embodiments, the bottom dimension S1 of the first recess 32 is less than the top dimension S2 of the first recess 32. The bottom dimension S1 of the first groove 32 is smaller than the top dimension S2 of the first groove 32, so that the particles 39 can enter the first groove more smoothly, and the retention of the particles 39 in the pipe body 30 is reduced.
With continued reference to FIG. 3, in some embodiments, a removable plug 38 is included on a side 309 along the axial direction X of the tubular body 30. Specifically, the side 309 of the tube body 30 along the axial direction X is substantially circular, and the plug 38 is adapted to the shape of the side 309 so as to seal the side 309. In the operating state of the liquid jet pipe, the plug 38 is used for closing the side 309 of the pipe body 30 in the axial direction X; in the non-operating state of the liquid jet pipe, the plug 38 may be removed, and the interior of the liquid jet pipe may be cleaned to clean out the particulate matter 39 deposited in the first recess 32.
In some embodiments, the surface of the plug 38 and the inner wall of the side 309 of the pipe body 30 have threads 37, and the plug 38 is fixed to the pipe body 30 by the threads 37.
Referring to fig. 5 to 6, fig. 5 is a schematic structural diagram of another embodiment of the liquid spray tube according to the present utility model, and fig. 6 is a cross-sectional view taken along line BB' in fig. 3. Unlike the embodiment shown in fig. 3 to 4, in this embodiment, the second sidewall 502 extends outward to form a second extension portion 504, and the second extension portion 504 has a second groove 53, and an opening 530 of the second groove 53 faces the pipe body 50.
As shown in fig. 5 to 6, the liquid jet pipe includes: tube 50, spray hole 51, first recess 52, second recess 53. The tube 50 has a first side wall 501 and a second side wall 502 disposed opposite to each other, the first side wall 501 extends outwardly to form a first extension 503, and the second side wall 502 extends outwardly to form a second extension 504. The plurality of injection holes 51 are arranged along the axial direction X of the tube 50 and are located at the junction of the first extension 503 and the second extension 504. The first groove 52 is formed on the first extension 503, and an opening 520 of the first groove 52 faces the pipe body 50. Specifically, the first groove 52 and the second groove 53 are symmetrically arranged; the injection hole 51 is located at the junction of the first groove 52 and the second groove 53.
According to the technical scheme, through the design of the pipe body 50 with the two grooves, the particles 59 in the liquid can fall down and stay at any groove, so that accumulation of the particles 59 at the spray hole 51 is reduced, and the spray hole 51 is prevented from being blocked.
As shown in fig. 6, in the present embodiment, the first extension 503 includes a side wall 521 of the first recess 52 adjacent to the nozzle hole 51, and a side wall 521 of the first recess 52 remote from the nozzle hole51 and a bottom 523 of said first recess 52; in this embodiment, the second extension 504 includes a sidewall 531 of the second recess 53 adjacent to the nozzle hole 51, a sidewall 532 of the second recess 53 away from the nozzle hole 51, and a bottom 533 of the second recess 53. In some embodiments, the sidewall 521 of the first recess 52 adjacent to the nozzle hole 51 forms a third angle θ with the opening direction Y of the nozzle hole 3 The method comprises the steps of carrying out a first treatment on the surface of the The side wall 522 of the first recess 52 away from the nozzle hole 51 is parallel to the opening direction Y of the nozzle hole 51. A third included angle θ is formed between the side wall 521 of the first groove 52 near the nozzle 51 and the direction in which the nozzle 51 ejects the liquid Y 3 The side wall 521 of the recess 52 adjacent to the nozzle hole 51 has a slope, and when the particulate matter 59 in the liquid passes through the nozzle hole 51, the particulate matter 59 slides to the bottom of the first recess 52 through the slope of the side wall 521 of the first recess 52 adjacent to the nozzle hole 51 due to the existence of gravity, so as to reduce the accumulation of the particulate matter 59 at the nozzle hole 51.
The side wall 531 of the second groove 53 near the nozzle 51 forms a fourth included angle θ with the opening direction Y of the nozzle 51 4 The method comprises the steps of carrying out a first treatment on the surface of the The side wall 532 of the second recess 53, which is remote from the nozzle hole 51, is parallel to the opening direction Y of the nozzle hole 51. A side wall 531 of the second groove 53 near the spray hole 51 forms a fourth included angle θ with the direction in which the spray hole 51 sprays the liquid Y 4 The second groove 53 has a slope near the side wall 531 of the nozzle hole 51, when the particulate matter 59 in the liquid passes through the nozzle hole 51, the particulate matter 59 will slide to the bottom of the second groove 53 through the slope of the second groove 53 near the side wall 531 of the nozzle hole 51 due to the existence of gravity, so as to reduce the accumulation of the particulate matter 59 at the nozzle hole 51.
In some embodiments, the bottom dimension S3 of the first groove 52 is less than the top dimension S4 of the first groove 52. The bottom dimension S3 of the first groove 52 is smaller than the top dimension S4 of the first groove 52, so that the particles 59 can enter the first groove 52 more smoothly, and the retention of the particles 59 in the pipe 50 is reduced. Likewise, the bottom dimension S5 of the second recess 53 is smaller than the top dimension S6 of the second recess 53. The bottom dimension S5 of the second groove 53 is smaller than the top dimension S6 of the second groove 53, so that the particles 59 can enter the second groove 53 more smoothly, and the retention of the particles 59 in the pipe 50 is reduced. That is, the particulate matter 59 can fall down and stay at any one of the grooves, reducing accumulation of the particulate matter 59 at the nozzle hole 51, and avoiding clogging of the nozzle hole 51.
With continued reference to fig. 5, in some embodiments, a removable plug 58 is included on a side 509 along the axial direction X of the tube 50. Specifically, the side 509 of the tube body 50 along the axial direction X is substantially circular, and the plug 58 is adapted to the shape of the side 509 so as to seal the side 509. In the operating state of the liquid jet pipe, the plug 58 is used for closing the side 509 of the pipe body 50 in the axial direction X; in the non-operating state of the liquid jet pipe, the plug 58 may be removed, and the interior of the liquid jet pipe may be cleaned to clean out the particulates 59 deposited in the first recess 52 and the second recess 53.
In some embodiments, the surface of the plug 58 and the inner wall of the side 509 of the pipe body 50 have threads 57, and the plug 58 is connected and fixed to the pipe body 50 by the threads 57.
Based on the same thought, the utility model also provides a trimmer of the grinding machine.
Fig. 7 is a schematic structural diagram of a finishing machine according to an embodiment of the utility model. As shown in fig. 7, the grinder trimmer comprises a trimmer mechanical arm 71 and a liquid spray pipe 72 positioned above the trimmer mechanical arm 71; the liquid jet 72 may be used in accordance with the present utility model as described in fig. 3-6. Details are provided in the foregoing description and are not repeated here.
According to the technical scheme, through the design of the pipe body with the groove, particles in the liquid can fall down and stay at the groove, accumulation of the particles at the spray hole is reduced, and the spray hole is prevented from being blocked.
It should be noted that references in the specification to "one embodiment," "an example embodiment," "some embodiments," etc., indicate that the embodiment described may include a particular feature, structure, or characteristic, but every embodiment may not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same embodiment. Furthermore, when a particular feature, structure, or characteristic is described in connection with an embodiment, it is submitted that it is within the knowledge of one skilled in the relevant art to effect such feature, structure, or characteristic in connection with other embodiments whether or not explicitly described.
Generally, the terms may be understood, at least in part, from the usage in the context. For example, the term "one or more" as used herein, depending at least in part on the context, may be used to describe any feature, structure, or characteristic in a singular sense, or may be used to describe a feature, structure, or combination of features in a plural sense. Similarly, terms such as "a," "an," or "the" may also be construed to express singular usage or plural usage depending at least in part on the context. In addition, the term "based on" may be understood as not necessarily intended to express a set of exclusive factors, but may instead, depending at least in part on the context, allow for other factors that are not necessarily explicitly described. It should also be noted in this specification that "connected/coupled" means not only that one component is directly coupled to another component, but also that one component is indirectly coupled to another component through intervening components.
It should be noted that the terms "comprising" and "having" and their variants are referred to in the document of the present utility model and are intended to cover non-exclusive inclusion. The terms "first," "second," and the like are used to distinguish similar objects and not necessarily to describe a particular order or sequence unless otherwise indicated by context, it should be understood that the data so used may be interchanged where appropriate. In addition, the embodiments of the present utility model and the features in the embodiments may be combined with each other without collision. In addition, in the above description, descriptions of well-known components and techniques are omitted so as to not unnecessarily obscure the present utility model. In the foregoing embodiments, each embodiment is mainly described for differences from other embodiments, and the same/similar parts between the embodiments are referred to each other.
The foregoing is merely a preferred embodiment of the present utility model and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present utility model, which are intended to be comprehended within the scope of the present utility model.
Claims (10)
1. A liquid spout, comprising:
the pipe body is provided with a first side wall and a second side wall which are oppositely arranged, and the first side wall extends outwards to form a first extension part;
the spray holes are arranged along the axial direction of the pipe body and are positioned at the junction of the first extension part and the second side wall;
at least one first groove is formed on the first extension part, and the opening of the first groove faces the pipe body.
2. The liquid spray pipe according to claim 1, wherein the side wall of the first groove, which is close to the spray hole, forms an included angle with the opening direction of the spray hole; the first groove is far away from the side wall of the spray hole and is parallel to the opening direction of the spray hole.
3. The liquid spray pipe according to claim 2, wherein the second side wall is bent towards a direction approaching the first side wall to form a bent portion, and the spray hole is located at a junction of the first extension portion and the bent portion.
4. The liquid spray pipe according to claim 3, wherein a first included angle is formed between a side wall of the first groove, which is close to the spray hole, and an opening direction of the spray hole, a second included angle is formed between the bending portion and the opening direction of the spray hole, and the first included angle is smaller than or equal to the second included angle, wherein the opening direction of the spray hole is perpendicular to an axial direction of the pipe body.
5. The liquid spout of claim 1 wherein the bottom dimension of the first recess is less than the top dimension of the first recess.
6. The liquid spout of claim 1 wherein the second sidewall extends outwardly to form a second extension, the second extension having a second recess, the second recess opening toward the tube.
7. The liquid spout of claim 6 wherein the first recess is symmetrically disposed with the second recess; the spray hole is positioned at the junction of the first groove and the second groove.
8. The liquid spout of claim 1 further comprising a removable plug positioned on a side of the tube body in an axial direction.
9. The liquid spout of claim 8 wherein the surface of the plug and the inner wall of the side portion of the tube are threaded and the plug is secured to the tube by a threaded connection.
10. A trimmer of a grinder bench comprises a trimmer mechanical arm and a liquid spray pipe positioned above the trimmer mechanical arm; the liquid jet pipe is characterized in that the liquid jet pipe is adopted according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321320585.6U CN219854018U (en) | 2023-05-29 | 2023-05-29 | Liquid spray pipe and finishing machine trimmer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321320585.6U CN219854018U (en) | 2023-05-29 | 2023-05-29 | Liquid spray pipe and finishing machine trimmer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219854018U true CN219854018U (en) | 2023-10-20 |
Family
ID=88337463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321320585.6U Active CN219854018U (en) | 2023-05-29 | 2023-05-29 | Liquid spray pipe and finishing machine trimmer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219854018U (en) |
-
2023
- 2023-05-29 CN CN202321320585.6U patent/CN219854018U/en active Active
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