CN219833301U - Protective device for ultraviolet laser - Google Patents

Abstract

The utility model provides a protective device for an ultraviolet laser, and relates to the field of laser structures. The protection device for the ultraviolet laser comprises: the protection component is arranged on the first outer wall of the ultraviolet laser; the protection component comprises a protection piece, wherein the protection piece is provided with a window mirror communicated with the ultraviolet laser and a light-passing hole in an external space, the end part of the protection piece facing the ultraviolet laser is provided with a plurality of air passages, the air passages are symmetrically distributed relative to the light-passing hole, and each air passage is communicated with the light-passing hole; and a gas supply assembly provided with a filter in communication with each of the gas passages to enable each of the gas passages to be provided with gas flowing in a direction away from the ultraviolet laser.

Description

Protective device for ultraviolet laser

Technical Field

The utility model relates to the field of laser structures, in particular to a protective device for an ultraviolet laser.

Background

Ultraviolet lasers are capable of producing ultraviolet light beams for use in various fields of optical data storage, micromachining, atmospheric detection, and microelectronics. In the long-term use process of the existing ultraviolet laser, dust can be accumulated gradually in the intersection area of the laser beam path and the window mirror (namely the light passing point area of the window mirror), so that the quality of the light beam is reduced, and the application effect and the service life of the laser are seriously affected.

Disclosure of Invention

In view of the above, the present utility model is directed to a protection device for an ultraviolet laser, so as to solve the problem of degradation of beam quality caused by gradual dust accumulation in the passing spot area of a window mirror during long-term use of the existing ultraviolet laser.

According to the above object, the present utility model provides a protection device for an ultraviolet laser, connected to the ultraviolet laser, wherein the protection device for an ultraviolet laser includes:

the protection component is arranged on the first outer wall of the ultraviolet laser; the protection component comprises a protection piece, wherein the protection piece is provided with a window mirror communicated with the ultraviolet laser and a light-passing hole in an external space, the end part of the protection piece facing the ultraviolet laser is provided with a plurality of air passages, the air passages are symmetrically distributed relative to the light-passing hole, and each air passage is communicated with the light-passing hole; and

and the air supply assembly is provided with a filtering piece communicated with each air passage so as to be capable of providing air flowing in a direction away from the ultraviolet laser for each air passage.

Preferably, a first end of the protective piece facing the ultraviolet laser is provided with a concave part matched with the window mirror, and the light transmission hole penetrates through the concave part and a second end of the protective piece along a direction away from the ultraviolet laser; the light passing hole is positioned at the end part of the concave part and is matched with the lens of the window mirror.

Preferably, the number of the air passages is two, the two air passages are respectively arranged at two sides of the concave part, and the axes of the two air passages and the axis of the light passing hole are on the same horizontal plane.

Preferably, the method comprises the steps of. Each air passage is formed with a parallel section and an inclined section which are communicated with each other, the extending direction of the parallel section is the same as that of the light passing hole, and the first end of the extending direction of the parallel section penetrates through the first end of the protective piece; the second end of the extending direction of the inclined section is communicated with the light through hole.

Preferably, a first sealing member is arranged at the connection part of the concave part and the window mirror.

Preferably, the shield assembly further comprises a sealing cap detachably connected to the second end of the shield; the end part of the sealing cover, which faces the protecting piece, is provided with a convex part matched with the light-passing hole, and when the sealing cover is connected with the protecting piece, the convex part can be correspondingly inserted into the light-passing hole.

Preferably, the outer periphery of the end of the convex part far away from the protective piece is sleeved with a second sealing piece.

Preferably, a groove for placing the air supply assembly is formed in the second outer wall of the ultraviolet laser, a corresponding cover plate is detachably connected to the opening of the groove, and a plurality of air inlets capable of communicating the groove with the external space are formed in the cover plate.

Preferably, the air supply assembly includes an electric pump in communication with the filter element to enable air to be drawn into the filter element.

Preferably, the output end of the filter element is connected with a diverter valve, and the output end of the diverter valve is provided with a plurality of gas delivery pipes correspondingly communicated with the air passage; and an air outlet hole corresponding to the air conveying pipe is formed on the first outer wall of the ultraviolet laser.

According to the protective device for the ultraviolet laser, the protective component is arranged on the outer side wall of the ultraviolet laser, so that when the ultraviolet laser is started, the window mirror of the ultraviolet laser is communicated with the external space through the light through hole of the protective piece, and the ultraviolet laser can normally operate. In addition, the filter element in the air supply assembly can filter air, then the clean air is led into the air passage of the protective element, and the air passage is communicated with the light passing hole, so that external dust can be effectively prevented from entering the light passing hole, and the situation that the quality of a light beam is reduced due to deposition of the dust in a light passing spot area of the window mirror in the use process of the ultraviolet laser is avoided.

In order to make the above objects, features and advantages of the present utility model more comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic illustration of the connection of a guard to an ultraviolet laser according to an embodiment of the present utility model;

FIG. 2 is an exploded view of a shield and an ultraviolet laser according to an embodiment of the present utility model;

FIG. 3 is a schematic view of a guard according to an embodiment of the utility model;

FIG. 4 is a cross-sectional view of a guard according to an embodiment of the utility model;

FIG. 5 is an exploded view of a seal cap and shield according to an embodiment of the present utility model;

fig. 6 is a schematic diagram of the connection of a gas supply assembly to an ultraviolet laser according to an embodiment of the utility model.

Icon: 1-a laser; 10-a first outer wall; 101-an air outlet hole; 11-a window mirror; 12-a second outer wall; 120-grooves; 121-cover plate; 20-guard; 200-concave part; 201-a light-passing hole; 202-airway; 2021-parallel section; 2022-inclined section; 203-a first connection hole; 204-a second connection hole; 205-a first seal; 21-sealing cover; 210-a protrusion; 211-a second seal; 30-a filter element; 31-an electric pump; 32-a diverter valve; 33-gas pipe.

Detailed Description

The following detailed description is provided to assist the reader in obtaining a thorough understanding of the methods, apparatus, and/or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatuses, and/or systems described herein will be apparent after an understanding of the present disclosure. For example, the order of operations described herein is merely an example, and is not limited to the order set forth herein, but rather, obvious variations may be made upon an understanding of the present disclosure, other than operations that must occur in a specific order. In addition, descriptions of features known in the art may be omitted for the sake of clarity and conciseness.

The features described herein may be embodied in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein have been provided solely to illustrate some of the many possible ways of implementing the methods, devices, and/or systems described herein that will be apparent after understanding the present disclosure.

In the entire specification, when an element (such as a layer, region or substrate) is described as being "on", "connected to", "bonded to", "over" or "covering" another element, it may be directly "on", "connected to", "bonded to", "over" or "covering" another element or there may be one or more other elements interposed therebetween. In contrast, when an element is referred to as being "directly on," directly connected to, "or" directly coupled to, "another element, directly on," or "directly covering" the other element, there may be no other element intervening therebetween.

As used herein, the term "and/or" includes any one of the listed items of interest and any combination of any two or more.

Although terms such as "first," "second," and "third" may be used herein to describe various elements, components, regions, layers or sections, these elements, components, regions, layers or sections should not be limited by these terms. Rather, these terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first member, component, region, layer or section discussed in examples described herein could also be termed a second member, component, region, layer or section without departing from the teachings of the examples.

For ease of description, spatially relative terms such as "above … …," "upper," "below … …," and "lower" may be used herein to describe one element's relationship to another element as illustrated in the figures. Such spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "upper" relative to another element would then be oriented "below" or "lower" relative to the other element. Thus, the term "above … …" includes both orientations "above … …" and "below … …" depending on the spatial orientation of the device. The device may also be otherwise positioned (e.g., rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing various examples only and is not intended to be limiting of the disclosure. Singular forms also are intended to include plural forms unless the context clearly indicates otherwise. The terms "comprises," "comprising," and "having" are intended to specify the presence of stated features, integers, operations, elements, and/or groups thereof, but do not preclude the presence or addition of one or more other features, integers, operations, elements, and/or groups thereof.

Variations from the shapes of the illustrations as a result, of manufacturing techniques and/or tolerances, are to be expected. Accordingly, the examples described herein are not limited to the particular shapes shown in the drawings, but include changes in shapes that occur during manufacture.

The features of the examples described herein may be combined in various ways that will be apparent upon an understanding of the present disclosure. Further, while the examples described herein have a variety of configurations, other configurations are possible as will be apparent after an understanding of the present disclosure.

As shown in fig. 1 to 6, the protection device for an ultraviolet laser in the present embodiment includes a protection component and a gas supply component, both of which are connected to the ultraviolet laser (hereinafter referred to as laser 1), the gas supply component is used for blowing clean gas to the protection component to prevent external dust from depositing in the light passing spot area of the window mirror 11, thereby improving the beam quality of the laser 1, and further improving the service life and application effect of the laser 1. Hereinafter, a specific structure of the above-described member of the protection device for an ultraviolet laser according to the present utility model will be described in detail.

In the present embodiment, as shown in fig. 1 to 2, a protection assembly is provided on a first outer wall 10 of the laser 1 (the first outer wall 10 is provided with a window mirror 11), the protection assembly includes a protection member 20 formed in a rectangular parallelepiped structure, and the protection member 20 may be directly connected to the laser 1 or may be connected to the laser 1 through a protection base. Specifically, the protection piece 20 in the present embodiment is directly connected with the outer side wall of the laser 1 through the first connecting hole 203, that is, the protection piece 20 and the first outer wall 10 of the laser 1 are respectively formed with a plurality of corresponding first connecting holes 203, and then the detachable connection of the protection piece 20 can be realized through corresponding connecting pieces. Note that, the number, position, form, etc. of the first connecting holes 203 are not fixed, for example, in this embodiment, threaded holes are provided only at four corners of the guard 20, and correspondingly, the connecting members are formed as bolts or screws; alternatively, the first connection hole 203 may be formed as a pin hole, and the connection piece is correspondingly formed as a pin. The size, shape, etc. of the protector 20 are not fixed, as long as the protection function described below can be achieved.

Further, as shown in fig. 3, a first end of the guard 20 facing the laser 1 is formed with a recess 200 adapted to the window mirror 11, and when the guard 20 is connected to the laser 1, the window mirror 11 can be inserted into the recess 200 of the guard 20, so that an end face of the first end of the guard 20 is attached to the first outer wall 10 of the laser 1, thereby ensuring tightness when the two are connected; in addition, a first sealing member 205 (which may be an annular sealing strip) is further disposed at the connection position between the recess 200 and the window mirror 11, so as to avoid dust from invading from the connection position between the recess and the window mirror 11 to cause pollution.

Further, as shown in fig. 2 to 4, a light-passing hole 201 for communicating the window mirror 11 with the external space is formed at the center of the recess 200 to ensure that the ultraviolet laser 1 can be operated normally, i.e., to ensure that the laser 1 can be used normally. Specifically, the light-passing hole 201 penetrates the first end and the second end of the guard 20 in a direction away from the laser 1, and the first end of the light-passing hole 201 located in the recess 200 is adapted to the lens of the window mirror 11, i.e. the aperture of the light-passing hole 201 is the same as the lens diameter of the window mirror 11.

In addition, the end face of the shielding member 20 facing the first end of the laser 1 in the present embodiment is also formed with two air passages 202 for communication with an air supply assembly described below. Specifically, as shown in fig. 4, two air passages 202 are respectively disposed on two sides of the recess 200, and the axes of the two air passages 202 are on the same horizontal plane as the axis of the light-passing hole 201. More specifically, each air passage 202 is formed with a parallel section 2021 and an inclined section 2022 that communicate with each other, the extending direction of the parallel section 2021 is the same as that of the light passing hole 201, and a first end of the extending direction of the parallel section 2021 penetrates a first end of the protector 20 so as to communicate with an air supply assembly described below; the first end and the second end of the inclined section 2022 in the extending direction communicate with the parallel section 2021 and the light-passing hole 201, respectively. Thus, a passage from the air supply assembly to the light passing hole 201 can be formed, so that clean air generated by the air supply assembly can be blown to the second end of the light passing hole 201 through the air passage 202, and external dust can be prevented from entering from the second end of the light passing hole 201 and depositing in the light passing spot area of the window mirror 11.

It should be noted that, in the embodiment, the diameters, lengths, and the like of the two air passages 202 are completely the same, that is, the two air passages 202 are symmetrically distributed about the light-passing hole 201, so that the air flow inside the air passages can be ensured to have better symmetry, and further, the laser beam can be prevented from shaking, that is, the stable pointing direction of the laser beam can be ensured. However, the specific size of the air passage 202 and the connection position with the light passing hole 201 are not particularly limited, as long as the above technical effects can be achieved. In addition, based on the bending structure of the air duct 202, the axis of the air duct 202 refers to the axis of the parallel section 2021 and the axis of the inclined section 2022, that is, the axis of the parallel section 2021 and the axis of the inclined section 2022 are on the same horizontal plane with the axis of the light-passing hole 201.

It should be further noted that, the number and the setting positions of the air passages 202 are not fixed, for example, four air passages 202 may be further provided, and the four air passages are respectively provided at the top, the bottom, the left side and the right side of the light passing hole 201, that is, as long as the air passages 202 can be symmetrically distributed about the light passing hole 201 and each air passage 202 is communicated with the light passing hole 201, so as to ensure the stable pointing direction of the laser beam.

In addition, the protection assembly further includes a sealing cap 21 detachably coupled to the second end of the protection member 20, as shown in fig. 5, a body of the sealing cap 21 is formed in a disk-shaped structure, and an end of the body facing the protection member 20 is formed with a protrusion 210 adapted to the light passing hole 201, so that the protrusion 210 can be correspondingly inserted into the light passing hole 201 when the sealing cap 21 is coupled to the protection member 20. In addition, in order to secure sealability when the sealing cap 21 is connected to the shielding member 20 to prevent external dust from entering the inside of the light passing hole 201, the outer circumference of the end portion of the protrusion 210 remote from the shielding member 20 (and the position where it is connected to the main body of the sealing cap 21) is further covered with a second sealing member 211, and the second sealing member 211 may be formed as a sealing rubber strip.

Further, the main body of the sealing cover 21 and the second end of the protecting member 20 are respectively provided with a plurality of corresponding second connecting holes 204 to realize the detachable connection of the two. Similarly to the above-described first connection holes 203, the number, positions, forms, and the like of the second connection holes 204 are also not particularly limited. Thus, when the laser 1 is not in use, the light-passing hole 201 can be sealed by the sealing cover 21 to avoid the entry of external impurities such as dust, water vapor, and the like; when the laser 1 needs to be used, air is blown to the light through hole 201 through the air supply assembly described below, and after the sealing cover 21 bears the air pressure, the sealing cover 21 is disassembled and the laser 1 is started.

In the present embodiment, as shown in fig. 6, the second outer wall 12 of the laser 1 is formed with a groove 120 for placing a gas supply assembly. The opening of the recess 120 is detachably connected with a corresponding cover plate 121, and the cover plate 121 is formed with a plurality of air inlet holes capable of communicating the recess 120 with an external space, so that the air supply assembly can suck air. Specifically, the air supply assembly includes an electric pump 31 and a filter member 30 (formed as a filter in the present embodiment) in communication with each other, the electric pump 31 being configured to draw air into the filter so that the filter member 30 filters the air into clean gas. In addition, the output end of the filter 30 is provided with a diverter valve 32, and the output end of the diverter valve 32 is provided with a plurality of gas pipes 33 respectively communicated with the gas passages 202, so as to blow clean gas into the gas passages 202; further, the first outer wall 10 of the laser 1 is formed with an air outlet hole 101 capable of communicating the air delivery pipe 33 with the air passage 202.

It should be noted that, in the present embodiment, the first outer wall 10 of the laser 1 is the side on which the window mirror 11 is disposed, and the second outer wall 12 is the side adjacent to the first outer wall 10, in consideration of the rationality of the overall structure layout.

According to the protection device for the ultraviolet laser 1, the protection component is arranged on the outer side wall of the laser 1, so that when the laser 1 needs to be started, clean gas is blown out towards the light through hole 201 through the gas supply component, when the sealing cover 21 receives gas pressure, the sealing cover 21 is detached from the second end of the protection piece 20, and then the laser 1 is started to operate through the light through hole 201; when the laser 1 needs to be turned off, the sealing cover 21 is correspondingly connected with the protecting piece 20, and then the air supply assembly and the laser 1 are turned off. In this way, foreign matters such as external dust can be effectively prevented from entering the light-passing hole 201, so that the situation that the quality of the light beam is reduced due to dust deposition in the light-passing spot area of the window mirror 11 in the use process of the ultraviolet laser 1 is avoided.

Finally, it should be noted that: the above examples are only specific embodiments of the present utility model, and are not intended to limit the scope of the present utility model, but it should be understood by those skilled in the art that the present utility model is not limited thereto, and that the present utility model is described in detail with reference to the foregoing examples: any person skilled in the art may modify or easily conceive of the technical solution described in the foregoing embodiments, or perform equivalent substitution of some of the technical features, while remaining within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model, and are intended to be included in the scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims (10)

1. A protection device for an ultraviolet laser, connected to an ultraviolet laser (1), characterized in that it comprises:

the protection component is arranged on the first outer wall (10) of the ultraviolet laser (1); the protection assembly comprises a protection piece (20), wherein the protection piece (20) is provided with a window mirror (11) communicated with the ultraviolet laser (1) and a light-passing hole (201) in an external space, the end part of the protection piece (20) facing the ultraviolet laser (1) is provided with a plurality of air passages (202), the air passages (202) are symmetrically distributed about the light-passing hole (201), and each air passage (202) is communicated with the light-passing hole (201); and

and a gas supply assembly provided with a filter (30) in communication with each of the gas passages (202) to enable gas to be supplied to each of the gas passages (202) flowing in a direction away from the ultraviolet laser (1).

2. The shielding device for an ultraviolet laser according to claim 1, characterized in that a first end of the shielding member (20) facing the ultraviolet laser (1) is formed with a recess (200) adapted to the window mirror (11), the light passing hole (201) penetrating the recess (200) and a second end of the shielding member (20) in a direction away from the ultraviolet laser (1); the light-passing hole (201) is positioned at the end of the concave part (200) and is matched with the lens of the window mirror (11).

3. The protection device for an ultraviolet laser according to claim 2, wherein the number of the air passages (202) is two, the two air passages (202) are respectively arranged at two sides of the concave portion (200), and the axes of the two air passages (202) are on the same horizontal plane with the axis of the light transmission hole (201).

4. A shielding device for an ultraviolet laser according to claim 3, characterized in that each of the air passages (202) is formed with a parallel section (2021) and an inclined section (2022) communicating with each other, the extending direction of the parallel section (2021) is the same as the extending direction of the light passing hole (201), and a first end of the extending direction of the parallel section (2021) penetrates a first end of the shielding member (20); the second end of the extending direction of the inclined section (2022) is communicated with the light-transmitting hole (201).

5. The protection device for an ultraviolet laser according to claim 2, characterized in that the junction of the recess (200) and the window mirror (11) is provided with a first seal (205).

6. The shielding apparatus for an ultraviolet laser according to claim 2, wherein the shielding assembly further comprises a sealing cap (21) detachably connected to the second end of the shielding member (20); the end of the sealing cover (21) facing the protection piece (20) is provided with a convex part (210) matched with the light-transmitting hole (201), and when the sealing cover (21) is connected with the protection piece (20), the convex part (210) can be correspondingly inserted into the light-transmitting hole (201).

7. The shielding device for an ultraviolet laser according to claim 6, characterized in that the end periphery of the protrusion (210) remote from the shielding member (20) is provided with a second sealing member (211).

8. The protection device for the ultraviolet laser according to claim 1, wherein the second outer wall (12) of the ultraviolet laser (1) is formed with a groove (120) for placing the air supply assembly, a corresponding cover plate (121) is detachably connected to an opening of the groove (120), and the cover plate (121) is formed with a plurality of air inlet holes capable of communicating the groove (120) with the external space.

9. The protection device for an ultraviolet laser according to claim 8, characterized in that the air supply assembly comprises an electric pump (31) in communication with the filter (30) to be able to suck air into the filter (30).

10. The protection device for the ultraviolet laser according to claim 8, characterized in that the output end of the filter (30) is connected with a diverter valve (32), and the output end of the diverter valve (32) is provided with a plurality of gas delivery pipes (33) correspondingly communicated with the gas passage (202); the first outer wall (10) of the ultraviolet laser (1) is provided with an air outlet hole (101) corresponding to the air delivery pipe (33).