CN219831291U - Silicon core detection device of polycrystalline silicon reduction furnace and polycrystalline silicon reduction furnace - Google Patents
Silicon core detection device of polycrystalline silicon reduction furnace and polycrystalline silicon reduction furnace Download PDFInfo
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- CN219831291U CN219831291U CN202321232182.6U CN202321232182U CN219831291U CN 219831291 U CN219831291 U CN 219831291U CN 202321232182 U CN202321232182 U CN 202321232182U CN 219831291 U CN219831291 U CN 219831291U
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 158
- 238000001514 detection method Methods 0.000 title claims abstract description 50
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 28
- 238000006722 reduction reaction Methods 0.000 claims abstract description 40
- 229920005591 polysilicon Polymers 0.000 claims abstract description 22
- 238000009413 insulation Methods 0.000 claims abstract description 17
- 230000003993 interaction Effects 0.000 claims abstract description 17
- 230000002452 interceptive effect Effects 0.000 claims description 10
- 238000004891 communication Methods 0.000 claims description 5
- 239000013307 optical fiber Substances 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims 7
- 238000000034 method Methods 0.000 description 18
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000010276 construction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The utility model provides a silicon core detection device of a polysilicon reduction furnace and the polysilicon reduction furnace, wherein the polysilicon reduction furnace comprises a silicon core and a power supply, the power supply is electrically connected with the silicon core through a first circuit and is used for providing electric energy required for starting reduction reaction for the silicon core, and the silicon core detection device comprises: the circuit breaker is arranged on the first circuit and is used for switching on the first circuit or switching off the first circuit according to the received on signal or the received off signal; the detector is used for detecting and obtaining silicon core state information of the silicon core, and the silicon core state information comprises at least one of the following: a silicon core insulation value, a silicon core ground current value, and a silicon core resistance value; the controller is electrically connected with the detector and is used for receiving the silicon core state information sent by the detector and forwarding the silicon core state information to the interaction end; the detector is electrically connected with the circuit breaker, and the controller is also used for sending an opening signal or a closing signal to the circuit breaker. The utility model can improve the silicon core detection efficiency.
Description
Technical Field
The embodiment of the utility model relates to the technical field of polysilicon production, in particular to a silicon core detection device of a polysilicon reduction furnace and the polysilicon reduction furnace.
Background
Currently, manual detection methods are mostly adopted for detecting silicon cores in a polysilicon reduction furnace, for example: the insulating rocking meter is used by field personnel to perform insulation test on the silicon core.
The detection efficiency of manual detection is low, and the production efficiency of the polysilicon reduction furnace is reduced.
Disclosure of Invention
The embodiment of the utility model provides a silicon core detection device of a polysilicon reduction furnace and the polysilicon reduction furnace, which are used for solving the problems that the existing silicon core detection efficiency is low and the production efficiency of the polysilicon reduction furnace is reduced.
In order to solve the technical problems, the utility model is realized as follows:
in a first aspect, an embodiment of the present utility model provides a silicon core detection apparatus of a polysilicon reduction furnace, where the polysilicon reduction furnace includes a silicon core and a power supply, where the power supply is electrically connected to the silicon core through a first circuit, and is configured to provide electric energy required for starting a reduction reaction for the silicon core;
comprising the following steps:
the circuit breaker is arranged on the first circuit and is used for switching on the first circuit or switching off the first circuit according to the received on signal or the received off signal;
the detector is used for detecting and obtaining silicon core state information of the silicon core, and the silicon core state information comprises at least one of the following items: a silicon core insulation value, a silicon core ground current value, and a silicon core resistance value;
the controller is electrically connected with the detector and is used for receiving the silicon core state information sent by the detector and forwarding the silicon core state information to the interaction end; the detector is electrically connected with the circuit breaker, and the controller is also used for sending an opening signal or a closing signal to the circuit breaker.
Alternatively, the process may be carried out in a single-stage,
the detector includes:
silicon core insulation detection sensor, silicon core ground current detection sensor and silicon core resistance detection sensor.
Alternatively, the process may be carried out in a single-stage,
the controller is a programmable logic PLC controller.
Optionally, the method further comprises:
the distributed control DCS system is electrically connected with the controller, and the interactive end is an interactive end connected with the distributed control DCS system.
Alternatively, the process may be carried out in a single-stage,
the controller is also used for receiving an opening signal or a closing signal sent by the interaction end and forwarding the opening signal or the closing signal to the circuit breaker.
Alternatively, the process may be carried out in a single-stage,
the controller is electrically connected with the detector through an optical fiber.
Alternatively, the process may be carried out in a single-stage,
the controller is electrically connected with the detector in a wireless communication mode.
Alternatively, the process may be carried out in a single-stage,
the silicon core is provided with a plurality of groups;
the circuit breaker has a plurality of groups, and each group of circuit breaker controls at least 4 groups of the silicon cores to be electrified or powered off.
Alternatively, the process may be carried out in a single-stage,
the circuit breaker is also configured to electrically interlock with the detector.
In a second aspect, an embodiment of the present utility model provides a polycrystalline silicon reduction furnace, including: the silicon core and power, the power pass through first circuit with silicon core electric connection for the silicon core provides the required electric energy of start-up reduction reaction, still include: a silicon core detection device as defined in any one of the first aspects.
According to the embodiment of the utility model, the silicon core detection device can detect and obtain the silicon core state information by arranging the circuit breaker, the detector and the controller, and forwards the silicon core state information to the interaction end through the controller, so that a user associated with the interaction end can obtain the silicon core state information, an information support is provided for the user to start or stop the reduction furnace, and the detection efficiency of the silicon core state information is improved. By adopting the silicon core detection device, the silicon core detection efficiency can be improved, and the production efficiency of the polysilicon reduction furnace can be further improved.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the utility model. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:
FIG. 1 is a schematic block diagram of a silicon core detection device of a polysilicon reduction furnace according to an embodiment of the present utility model;
wherein, the liquid crystal display device comprises a liquid crystal display device,
1. a first circuit; 2. a silicon core; 3. a circuit breaker;
4. a detector; 41. the silicon core insulation detection sensor, 42, the silicon core grounding current detection sensor, 43 and the silicon core resistance detection sensor;
5. a controller;
6. and an interaction end.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1, fig. 1 is a schematic block diagram of a silicon core detection device of an embodiment of the present utility model, where the polysilicon reduction furnace includes a silicon core 2 and a power supply (not shown in the figure), and the power supply (not shown in the figure) is electrically connected to the silicon core 2 through a first circuit 1 and is used for providing electric energy required for starting a reduction reaction for the silicon core 2;
the silicon core detection device comprises:
a circuit breaker 3, provided on the first circuit 1, for switching on the first circuit 1 or switching off the first circuit 1 according to the received on signal or off signal;
a detector 4, configured to detect and obtain silicon core state information of the silicon core 2, where the silicon core state information includes at least one of the following: a silicon core insulation value, a silicon core ground current value, and a silicon core resistance value;
the controller 5 is electrically connected with the detector 4 and is used for receiving the silicon core state information sent by the detector 4 and forwarding the silicon core state information to the interaction end 6; the detector 4 is electrically connected to the circuit breaker 3, and the controller 5 is further configured to send an on signal or an off signal to the circuit breaker 3.
When the silicon core detection device provided by the embodiment of the utility model needs to be adopted to detect whether the silicon core 2 reaches the preset furnace starting standard, the detector 4 detects the silicon core state information and forwards the silicon core state information to the interactive end 6 through the controller 5, so that a user can judge whether the silicon core state information accords with the furnace starting standard through the interactive end 6. If the furnace starting standard is met, a user can send an opening signal to the circuit breaker 3 through the controller 5, and the circuit breaker 3 is connected with the first circuit 1, so that a power supply (not shown in the figure) supplies electric energy required for starting the reduction reaction to the silicon core 2, and the reduction reaction is started. The manner in which the user sends the opening signal to the circuit breaker 3 through the controller 5 may specifically be that the user triggers the opening signal at the interaction end 6, the interaction end 6 sends the opening signal to the controller 5, and the controller 5 is configured to forward the opening signal to the circuit breaker 3 after receiving the signal.
In practical application, a user detects whether the furnace starting standard is reached before starting the furnace, so that the waste of electric energy in the process of stopping the furnace again due to unqualified silicon cores after the power-on and the pressing is avoided. And detecting whether the silicon core reaches the furnace starting standard before starting the furnace, so that the waste of production time and materials caused by furnace stopping again after starting due to the fact that the silicon core is installed incorrectly and the silicon core quality is unqualified is avoided.
In some embodiments of the present utility model, optionally, the silicon core state information includes: a silicon core insulation value, a silicon core grounding current value and a silicon core resistance value. Specifically, when the silicon core detection device provided by the embodiment of the utility model needs to be adopted to detect whether the silicon core 2 reaches the preset furnace starting standard, the detector 4 detects and obtains the silicon core insulation value, the silicon core grounding current value and the silicon core resistance value, the silicon core insulation value, the silicon core grounding current value and the silicon core resistance value are forwarded to the interaction end 6 through the controller 5, and a user judges whether the silicon core insulation value, the silicon core grounding current value and the silicon core resistance value meet the furnace starting standard through the interaction end 6. If the furnace starting standard is met, a user can send an opening signal to the circuit breaker 3 through the controller 5, and the circuit breaker 3 is connected with the first circuit 1, so that a power supply (not shown in the figure) supplies electric energy required for starting the reduction reaction to the silicon core 2, and the reduction reaction is started.
In the embodiment of the utility model, the silicon core detection device can detect and obtain the silicon core state information by arranging the circuit breaker 3, the detector 4 and the controller 5, and transmit the silicon core state information to the interaction end 6 through the controller 5, so that a user associated with the interaction end 6 obtains the silicon core state information, an information support is provided for the user to start or stop the reduction furnace, and the detection efficiency of the silicon core state information is improved. By adopting the silicon core detection device, the silicon core detection efficiency can be improved, and the production efficiency of the polysilicon reduction furnace can be further improved.
In some embodiments of the utility model, the method, optionally,
the detector 4 includes:
a silicon core insulation detection sensor 41, a silicon core ground current detection sensor 42, and a silicon core resistance detection sensor 43.
The silicon core insulation detection sensor is used for detecting whether the silicon core insulation accords with the furnace starting standard. In practical application, the silicon core insulation value is obtained by measuring the silicon core under 5000V voltage by the silicon core insulation detection sensor.
The silicon core grounding current detection sensor is used for detecting the magnitude of the grounding current of the silicon core to the ground, and the normal current value conforming to the furnace starting standard is smaller than 100mA.
In some embodiments of the utility model, the method, optionally,
the controller 5 is a programmable logic PLC controller.
In some embodiments of the present utility model, optionally, further comprising:
the distributed control DCS system is electrically connected with the controller 5, and the interactive end 6 is an interactive end 6 connected with the distributed control DCS system. The silicon core detection device is operated by adopting the distributed control DCS system main control, so that the detection efficiency is improved, the test time is saved, the furnace starting speed is accelerated, and the process production efficiency is improved.
In some embodiments of the utility model, the method, optionally,
the controller 5 is further configured to receive an on signal or an off signal sent by the interaction terminal 6, and forward the on signal or the off signal to the circuit breaker 3.
When the silicon core detection device provided by the embodiment of the utility model needs to be adopted to detect whether the silicon core 2 reaches the preset furnace starting standard, the detector 4 detects the silicon core state information and forwards the silicon core state information to the interactive end 6 through the controller 5, so that a user can judge whether the silicon core state information accords with the furnace starting standard through the interactive end 6. If the furnace starting standard is met, the user sends a starting signal to the controller 5 through the interaction end 6. The controller 5 receives the opening signal and forwards the opening signal to the circuit breaker 3. The circuit breaker 3 turns on the first circuit 1, and causes a power source (not shown in the figure) to supply electric power required for starting the reduction reaction to the silicon core 2, starting the reduction reaction.
In some embodiments of the utility model, the method, optionally,
the controller 5 is electrically connected to the detector 4 via an optical fiber. The optical fiber can isolate electromagnetic interference of other electrical equipment in the arrangement environment of the polysilicon reduction furnace or the arrangement environment of the silicon core detection device to electric signal transmission, and the operation stability of the silicon core detection device is improved.
In some embodiments of the utility model, the method, optionally,
the controller 5 is electrically connected to the detector 4 by wireless communication.
The wireless communication mode can avoid complicated procedures of wiring operation in the arrangement environment of the polysilicon reduction furnace and the arrangement environment of the silicon core detection device, improves the communication construction efficiency, and reduces the application cost of the silicon core detection device.
In some embodiments of the utility model, the method, optionally,
the silicon core 2 has a plurality of groups;
the circuit breakers 3 have a plurality of groups, each group of circuit breakers 3 controlling at least the energizing or de-energizing of 4 groups of silicon cores 2. In practical application, the breaker 3 corresponds to 4-12 groups of silicon cores.
In some embodiments of the utility model, the method, optionally,
the circuit breaker 3 is also adapted to form an electrical interlock with the detector 4. In the embodiment of the utility model, the circuit breaker 3 and the detector 4 are constructed to be electrically interlocked through circuit construction. The electrical interlock, i.e. the first circuit 1 and the detector 4 can only be energized at the same time, is beneficial to ensuring safe and reliable operation of the electrical equipment in the polysilicon reduction furnace.
The embodiment of the utility model provides a polysilicon reduction furnace, which comprises: the silicon core 2 and a power supply (not shown in the figure), the power supply (not shown in the figure) is electrically connected with the silicon core 2 through the first circuit 1, and is used for providing the electrical energy required for starting the reduction reaction for the silicon core 2, and the silicon core further comprises: the silicon core detection device according to any one of the embodiments of the present utility model.
The embodiments of the present utility model have been described above with reference to the accompanying drawings, but the present utility model is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those having ordinary skill in the art without departing from the spirit of the present utility model and the scope of the claims, which are to be protected by the present utility model.
Claims (10)
1. The silicon core detection device of the polysilicon reduction furnace comprises a silicon core and a power supply, wherein the power supply is electrically connected with the silicon core through a first circuit and is used for providing electric energy required for starting a reduction reaction for the silicon core;
characterized by comprising the following steps:
the circuit breaker is arranged on the first circuit and is used for switching on the first circuit or switching off the first circuit according to the received on signal or the received off signal;
the detector is used for detecting and obtaining silicon core state information of the silicon core, and the silicon core state information comprises at least one of the following items: a silicon core insulation value, a silicon core ground current value, and a silicon core resistance value;
the controller is electrically connected with the detector and is used for receiving the silicon core state information sent by the detector and forwarding the silicon core state information to the interaction end; the detector is electrically connected with the circuit breaker, and the controller is also used for sending an opening signal or a closing signal to the circuit breaker.
2. The silicon core inspection device of claim 1, wherein:
the detector includes:
silicon core insulation detection sensor, silicon core ground current detection sensor and silicon core resistance detection sensor.
3. The silicon core inspection device of claim 1, wherein:
the controller is a programmable logic PLC controller.
4. The silicon core inspection device of claim 1, further comprising:
the distributed control DCS system is electrically connected with the controller, and the interactive end is an interactive end connected with the distributed control DCS system.
5. The silicon core testing apparatus of claim 1 or 4, wherein:
the controller is also used for receiving an opening signal or a closing signal sent by the interaction end and forwarding the opening signal or the closing signal to the circuit breaker.
6. The silicon core inspection device of claim 1, wherein:
the controller is electrically connected with the detector through an optical fiber.
7. The silicon core inspection device of claim 1, wherein:
the controller is electrically connected with the detector in a wireless communication mode.
8. The silicon core inspection device of claim 1, wherein:
the silicon core is provided with a plurality of groups;
the circuit breaker has a plurality of groups, and each group of circuit breaker controls at least 4 groups of the silicon cores to be electrified or powered off.
9. The silicon core inspection device of claim 1, wherein:
the circuit breaker is also configured to electrically interlock with the detector.
10. A polycrystalline silicon reduction furnace, comprising: the silicon core and power, the power through first circuit with silicon core electric connection is used for providing the silicon core the required electric energy of start-up reduction reaction, its characterized in that still includes: a silicon core testing apparatus as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321232182.6U CN219831291U (en) | 2023-05-22 | 2023-05-22 | Silicon core detection device of polycrystalline silicon reduction furnace and polycrystalline silicon reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321232182.6U CN219831291U (en) | 2023-05-22 | 2023-05-22 | Silicon core detection device of polycrystalline silicon reduction furnace and polycrystalline silicon reduction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219831291U true CN219831291U (en) | 2023-10-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321232182.6U Active CN219831291U (en) | 2023-05-22 | 2023-05-22 | Silicon core detection device of polycrystalline silicon reduction furnace and polycrystalline silicon reduction furnace |
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| Country | Link |
|---|---|
| CN (1) | CN219831291U (en) |
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2023
- 2023-05-22 CN CN202321232182.6U patent/CN219831291U/en active Active
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